The International Technology Roadmap for Semiconductors (ESH ...
The International Technology Roadmap for Semiconductors (ESH ...
The International Technology Roadmap for Semiconductors (ESH ...
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Factory Int.<br />
<strong>ESH</strong> Crosscut<br />
Text &Table<br />
Front End<br />
Processes<br />
<strong>ESH</strong> Crosscut<br />
Text & Table<br />
Lithography<br />
<strong>ESH</strong> Crosscut<br />
Text & Table<br />
Interconnect<br />
<strong>ESH</strong> Crosscut<br />
Text & Table<br />
Assmbly &<br />
Pkg<br />
<strong>ESH</strong> Crosscut<br />
Text & Table<br />
<strong>ESH</strong> <strong>Roadmap</strong> Format<br />
Scope & Diff. Challenges<br />
Tech Reqmts<br />
Interconnect<br />
Lithography<br />
Potential Sols<br />
Front-End Processing<br />
Assembly & Packaging<br />
Factory Integration<br />
Links<br />
For additional<br />
in<strong>for</strong>mation to<br />
further explain<br />
data<br />
<strong>ESH</strong> <strong>Technology</strong> Requirements<br />
<strong>ESH</strong> Potential Solutions<br />
Difficult<br />
Challenges<br />
Chem, Mtls & Eq Mgmt<br />
Interconnect<br />
Years/Nodes<br />
Chem, Mtls & Eq Mgmt<br />
Interconnect<br />
Years/Nodes<br />
FEP<br />
FEP<br />
Arlington, VA; April 2000
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