The International Technology Roadmap for Semiconductors (ESH ...

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Presumes That Driving ESH

Solution During Technology

Development Is The Right

Thing To Do.

Arlington, VA; April 2000

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Brian Sherin - Semiconductor Safety Association

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1999 ITRS Provides: • Targets for equipment/material and software suppliers • Targets for researchers • A common reference for the semiconductor industry Arlington, VA; April 2000

Presumes That Driving ESH Solution During Technology Development Is The Right Thing To Do. Arlington, VA; April 2000

Page 1 and 2: The International Technology Roadma
Page 3 and 4: From NTRS to ITRS • The SIA NTRS
Page 5: More Aggressive Goal vs. Most Achie
Page 9 and 10: Technology Driven ESH Objectives vs
Page 11 and 12: Five Global Challenges • Chemical
Page 13 and 14: Factory Int. ESH Crosscut Text &Tab
Page 15 and 16: Backup Material Arlington, VA; Apri
Page 17 and 18: New Chemicals and Materials Technic
Page 19 and 20: Technology Flow Technology Needs Po

The International Technology Roadmap for Semiconductors (ESH ...

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