IV. Processes: Top-down and Bottom-up

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IV. Processes: Top-down and Bottom-up

IV. Processes: Top-down and Bottom-up

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Source:<br />

Source: Plasma<br />

Etching, Manos,<br />

Flamm, 1999.

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Source: Plasma Etching, Manos, Flamm, 1999.

Source: Source: Plasma Etching, Manos, Flamm, 1999.

Page 1 and 2: IV. Processes: Top-down and Bottom-
Page 3 and 4: • Top-down techniques take a bulk
Page 5 and 6: • Thermal evaporation - Old techn
Page 8 and 9: Plasma processes and basics
Page 10 and 11: • Discharges of gases are created
Page 12 and 13: • Thermodynamic nonequilibrium di
Page 17 and 18: * Classification is primarily based
Page 19 and 20: • Simple to construct • Ionizat
Page 22 and 23: • Versatile process for making ce
Page 24 and 25: • Check http://www.mit.edu/tdp/ww
Page 26 and 27: • Ability to pattern non-planar/f
Page 28 and 29: • Broad nomenclature for processe