Probe-tip Clean on Demand - Semiconductor Wafer Test Workshop
Probe-tip Clean on Demand - Semiconductor Wafer Test Workshop
Probe-tip Clean on Demand - Semiconductor Wafer Test Workshop
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Follow-On Work<br />
• Come up with “Plug and Play” recipe<br />
creati<strong>on</strong>.<br />
• Work out the detail when “clean-wafer are<br />
being used i.s.o. clean unit next to chuck.<br />
• Focus <strong>on</strong> soak time c<strong>on</strong>trol, d<strong>on</strong>’t soak<br />
l<strong>on</strong>ger then necessary.<br />
June 8 to 11, 2008<br />
IEEE SW <strong>Test</strong> <strong>Workshop</strong> 30
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