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Scanning Electron Microscopy

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<strong>Electron</strong> Gun<br />

• There are two main types of gun – Thermionic and Field Emission (FEG).<br />

• Thermionic gun :- Simplistically, a material (often a piece of twisted tungsten) is heated<br />

to a high temperature so that it will emit electrons.<br />

• Can also use LaB 6 crystal grown to a tip – gives a brighter beam than W for same kV.<br />

Analytical<br />

Workshop 2012<br />

Tungsten filament Tungsten filament assembly LaB 6 filament tip

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