Coating Thickness Software for Eagle µ-EDXRF Systems

Figure 13a. Default dialogue box for layer
definition - Step #2
Figure 13b. Example of completed Step #2
dialogue box for a single layer
If the appropriate scatter spectrum had not been identified in Step 1 of 3, this will be indicated by the traffic
lights at the bottom left of the Step 2 of 3 window being in the red-alert state
as in Figure 13.
When the system’s scatter spectrum has not been measured and
identified, the calibration will refer to a default spectrum supplied with the
software.
instead of
The check box alongside the layer element (Fig 13 with detail to the
left) allows a maximum measuring range to be set (i.e. limited). This
is intended to improve calibration accuracy particularly in the case of
multi-layer situations where the prior knowledge of individual
maximum thicknesses simplifies the correction algorithms. With
single layer systems it is generally useful to ensure that the measure
range includes the thickest standard to be used in any ReCalib
samples in order to ensure that its data is not ignored.
However, the program will compute what it considers to be the maximum range
when this box is left unchecked based on limits imposed by the counting statistics
and other considerations. Such limits are defined in the “Preselections” region at
bottom right of the Step 2 window. Counting statistics are based upon information
gained from the pure element intensity together with the measuring time (here
Au(La) 1264cps – to be introduced at Step 3 of 3 - and 30sec). The [%]
“preselection” value defines the maximum relative error to be tolerated in the
thickness determination per unit change in intensity (i.e. layer/bulk – I/I o - intensity ratio). Increasing the
value of allowable error increases the maximum thickness range. The default value is 5%.
The drop-down selection box to the right of the Base graphic is used to define
which Recalibration mode is to be used. The default is “standard”. This
function will be discussed within the section “Monolayer Recalibration”.
Clicking on the
button opens the panel for the third and final stage.
3.1 Procedures in FunMaster (ex. Au on Cu base) 22