Coating Thickness Software for Eagle µ-EDXRF Systems

Note in the calibration curve shown in in Figure 44, each calibration line gets cut off at a certain point. As
previously mentioned, this corresponds to the point at which the maximum error reaches the requested 5%,
as set by the user in FunMaster step2.
6.1.4 Components and Functions in Calibration Curve Window
1. The button will produce a spectrum (counts vs. keV) of the absorption of emmitted X-
rays due to the layers displayed in the color-coded areas. It can be shown in linear or log modes,
as shown below in Figure 45.
Figure 45. The spectra for absorption of emitted X-rays shown normal or in “log” mode, and has the
option to move the keV cursor. The channel, keV marker location, and the counts at that location are
also displayed.
When in normal viewing mode (not log), the following ROI functions activate:
The “Cursor” button and the icons will move the cursor position line and show
the respective keV and the counts at that position on the spectrum. By clicking “Fix,”
the user can create regions of interest (ROIs), with a starting value at 0 keV, and attain
a summated intensity value for that range. The end value is determined by clicking at
the desired position with the cursor. To turn off the feature, click “Fix” again.
2. The button implements a sum formula for multi-layer situations which shows the
practicable limits of the layer thicknesses with an inequality. The following box should appear:
Figure 46. This option allows for the possibility of a plausibility
control for the calibration in the given thickness range, or if an
analysis is possible for the given range and precision. The formula
will be calculated for the measuring conditions of the application.
The software can take these into consideration using
will be discussed.
, which
6.1 Procedures in FunMaster (ex. Au/Pd/Ni/Cu base) 48