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MicroPositioning, NanoPositioning, NanoAutomation ® 

Solutions for Cutting-Edge Technologies 

2004 Supplement 

Low Resolution PDF Version 

For better image quality, download the high- 

resolution PDF (8 MB) or request a printed copy. 

1

2 


Piezo Actuators 

Section 1 

Piezoelectric Ceramics 

Section 1 

Piezoelectric NanoPositioning Systems 

Active Optics (Piezo Steering Mirrors, etc.) 

Section 3 

Capacitive Position Sensors 

Motion Controllers for NanoPositioners 

(Piezo Controllers, Drivers, Power Amplifers) 

Section 6 

Section 2 

Section 5 

http://www.pi.ws 

info@pi.ws 

Request the 

hardbound 

PI catalog: 

Go to 


info@pi.ws 

Products 

Hexapod Parallel Kinematics 6D 

MicroPositioning Systems 

Piezo Motors/Ultrasonic Motor Driven Stages 

Photonics Alignment & Packing Systems 

Section 7 

Section 8 

Motion Controllers for MicroPositioners 

Tutorial—Piezoelectrics in Positioning 

Section 4 

Section 7 

Linear and Rotary MicroPositioners 

Section 7 

Section 9

Nanopositioning, 

Nanomechanics 

Leadership 

PI has been developing and 

manufacturing products in the 

field of nanomechanics and 

nanotechnology for more than 

30 years. During this time, we 

have achieved and continually 

consolidated our position as a 

global market leader. Prime 

examples of our core competencies 

and cutting-edge technology 

are to be found in the 

development of parallel kinematics—integrated 

6-axis positioners 

based on the Hexapod—and 

in the field of 

nanopositioning with piezoceramic 

actuators. 

PI employs more than 300 

staff worldwide and maintains 

sales, support and service 

offices in Germany, the USA, 

England, France, Italy, Japan 

and China with nanometrology 

capabilities on three continents. 

PI is represented in many 

countries around the world. 

PI Headquarters, Karlsruhe, Germany. 

PI employs the world’s most experienced 

design and manufacturing 

teams for nanopositioning and nanomechanics 

products. 

At the Heart of our 

Systems: 

the Piezo Effect 

One small step for Pierre 

Curie—one great leap for the 

world. The piezo effect— 

Pierre Curie’s discovery of 

about a hundred years ago— 

now forms the basis of the 

smallest mechanical, electronic 

or control-technology 

products. When voltage is applied 

to piezoelectric crystals 

or ceramics, they expand. We 

exploit this effect to create 

positioning systems with 

nanometer accuracy. 

PI Products— 

Innovation & 

Superior Quality 

PI has been ISO 9001 certified 

since 1994. Our products are 

characterized by their quality 

and innovation. Developed to 

give the highest degree of precision, 

we employ the mostmodern 

tools and software for 

product development like FEM 

calculations and simulations. 

To determine the performance 

level of our products, we had 

to design equipment capable of 

resolving to fractions of a 

nanometer, pushing measurement 

accuracies to the limit. 

Precision 

Advances 

Over the years we have seen 

many technological advances 

make the transition from the 

laboratory to daily life, advances 

requiring the utmost in 

positioning accuracy, advances 

inconceivable without PI. Finer 

and finer structures on semiconductor 

wafers for costeffective 

mass-production of 

high-performance electronics, 

or higher and higher density in 

telecommunications streams 

with millisecond switching 

from network to network, all in 

the minimum amount of 

space: this is where PI is at 

home. 

PI’s Customers 

PI customers come from all 

sectors of manufacturing, quality 

assurance, research and 

development. And they are 

spread across many branches 

of industry: 

� Astronomy 

� Semiconductors 

� Semiconductor Test 

Systems 

� Medical Engineering 

� Bio- / Nanotechnology 

� Telecommunications 

� Precision Engineering 

� Aerospace Engineering 

PI’s customers even include 

national standardization institutes. 

As our customer, you also profit 

from our more than 30 years’ 

experience in micro- and nanopositioning 

technology. You will 

join an ever-increasing number 

of renowned companies and 

institutes whose products are 

at the cutting edge of innovation, 

research and technology. 

PI moves the nanoworld. 

PI USA. The east coast office in Auburn, MA, also hosts a service department with 

nano metrology equipment.

4 

PI—History of Innovation 

The following examples emphasize PI’s four decades of innovation in micro- and nanopositioning technology 

70’s 

� First commercially 

available piezo translators 

� First PZT translators with 

integrated preload for 

industrial reliability 


80’s 

� First commercially 

available closed-loop 

piezo actuators 

� First flexure-guided piezodriven 

nanopositioning 

systems 

� First hybrid multiaxis fiber 

alignment systems 

� First preloaded actuators 

with monolithic lowvoltage 

PZTs 

� Nanopositioning systems 

with PC interface 

� First closed-loop, image 

stabilization platforms 

With over four decades experience, PI has evolved into the 

world-leading supplier of nanopositioning technology. 

In the 70's, when space exploration spurred new research in optics, 

PI introduced piezo actuators to help scientists control motion to 

sub-micron levels. 

In the 80's, when the introduction of microcomputers created the 

first semiconductor boom and the need for smaller and smaller 

feature sizes, PI nanopositioning systems were ready to take on 

the challenge. 

The fall of the Berlin wall in the 90's marked the end of the cold war 

and the beginning of a new age of borderless communications. 

It also meant the beginning of a new age for PI: the start of the 

piezoceramic division PI Ceramic. 

The new millennium saw worldwide efforts advancing fiber-optic 

technologies, nanotechnology and biotechnology, fields where 

“smaller” and “more precise” is the key to success. PI is there to 

lead the way with faster and higher-performance motion control 

systems. 


info@pi.ws 

90’s 

� First flexure-guided, highspeed 

nano-focus device 

� First two-plate capacitive 

sensors / controllers w/ 

integrated linearization for 

sub-nanometer precision 

� First parallel kinematics 

multiaxis piezo nanopositioning 

stage with integrated 

parallel metrology 

� First piezoelectrically driven 

high-speed tool servo 

� PI becomes the first 

nanopositioning systems 

supplier with piezoceramics-manufacturing 

capabilities 

� First sub-micron 6-DOF 

Hexapod 

� First fully automated fiber 

alignment system with 

high-resolution Piezo- 

Walk drive (10 nm) 

� First piezo stage with 6D 

active trajectory control 

� First fully automated 

6-DOF photonics 

alignment system with 

virtual pivot point 

� First piezo controller with 

InputShaping ® vibration 

elimination algorithms 

2000– 

� Patented high-force 

compact piezomotors 

� First 6-axis digital piezo 

controller 

� First piezo controller with 

dynamic linearization 

(improves dynamic 

linearity by up to 3 orders 

of magnitude) 

� First closed-loop piezodriven 

steering mirror 

with 50 mrad range 

� First PICMA ® monolithic 

piezo actuators w/ 

ceramic insulation for 

increased lifetime and 

zero outgassing 

� Fastest open-frame, 

closed-loop XY nanopositioning 

stage 

� Lowest out-of-plane 

motion nanopositioning 

stages (< 1 nm)

Parallel Kinematics Multi- 

Axis Micro- & Nanopositioning 

Systems 

reduced inertia, faster 

response, more compact, 

higher stiffness, no 

accumulation of errors, no 

moving cables (no friction), 

parallel metrology (higher 

multi-axis precision). 

InputShaping ® 

Eliminates self-generated 

ringing of components 

inside and outside the 

servo-loop. Allows settling 

within one period of the 

resonant frequency. 

Technologies that set PI apart: 

Parallel Metrology 

monitors all controlled 

degrees of freedom 

simultaneously; allows 

active trajectory control. 

Capacitive 

Sensors 

Non-contact, 

absolute measuring 

devices 

providing subnanometer 

resolution, 

very high linearity and 

high bandwidth. Excellent 

for parallel-metrology 

configurations. 

Active Trajectory Control 

allows active elimination 

of runout and off-axis errors 

to sub-nanometer and 

sub-microradian precision. 

PICMA ® 

Technology 

A new monolithic 

piezo actuator 

design with allceramic 

insulation, 

insensitive to humidity 

and providing significantly 

higher reliability, lifetime 

and operating temperature 

ranges than conventional 

piezo actuators. Ideal for 

vacuum applications. 

Dynamic Digital 

Linearization 

reduces phase lag and 

non-linearity in high-speed 

positioning, scanning 

and tracking applications. 

Improves effective 

bandwidth up to 3 orders 

of magnitude. 

PIline Piezo Motors 

are based on a novel 

solid-state ultrasonic piezoceramic 

drive. They are 

lightweight, low-profile and 

provide a number of advantages 

over conventional 

motors, such as negligible 

EMI, ultra-fast response, 

auto-locking, zero-backlash 

and excellent power-toweight 

ratio. 

5

P-882 to P-888 PICMA ® Piezo Actuators. 

P-620 to P-625 PIHera low-cost 

piezo nanopositioning stages. 

P-363 PicoCube nano-manipulators & 

scanners. 

E-710 digital piezo controller, with dynamic 

linearization. 

6 

Contents 

Piezo Actuators 

See the hardbound PI catalog . . . . . . . . . . . . . . . . . . . 1-1 to 1-43 

P-882 - P-888 PICMA ® High-Performance 

Monolithic Multilayer Piezo Actuators . . . . . . . . . . . . . . . . . . 1-44 

P-007 - P-056 PICA-Stack Piezoceramic Actuators 

Versatile Piezoelectric Power . . . . . . . . . . . . . . . . . . . . . . . .1-46 

Piezo NanoPositioners & Scanners 


P-721PIFOC ® High-Speed Piezo Nano-Focussing 

Device with Direct Metrology Feedback . . . . . . . . . . . . . . . . 2-46 

P-725 PIFOC ® Long Range Microscope Objective 

Positioners & Scanners with Capacitive Sensors . . . . . . . . . 2-48 

P-620.1CD, P-621.1CD, P-622.1CD, P-625.1CD PIHera 

Compact Long-Range Piezo Nano-Translation Stages . . . . . . 2-50 

P-620.2CD, P-621.2CD, P-622.2CD, P-625.2CD PIHera 

Compact XY Long-Range Piezo Nano-Translation Stages . . . 2-52 

P-620.ZCD, P-621.ZCD, P-622.ZCD PIHera 

Compact Vertical Piezo Nano-Elevation Stages . . . . . . . . . . . 2-54 

P-363 PicoCube Ultra-Fast, XY and XYZ NanoPositioning 

and Scanning Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .2-56 

P-733.2DD, P-733.3DD High Speed Direct Drive 

XY & XYZ Piezo Scanning/Positioning Stages . . . . . . . . . . . . 2-58 

P-733 Single-Module, XY Piezo Flexure NanoPositioner 

and Scanner . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-60 

P-560 PIMars Multi-Axis Piezo Scanning- and 

NanoPositioning Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-62 

P-615 NanoCube 350C XYZ Piezo NanoAlignment 

Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-64 

Piezo Active Optics / Steering Mirrors 


S-334 Ultra-Long-Range Piezo Tip/Tilt Platform, 

50 mrad (3°) with Mirror . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-18 

S-325 Ultra-Fast Piezo Tip/Tilt Platform and Z Positioner . . . 3-20 

Tutorial, Piezoelectrics in Positioning 


Capacitive Displacement Sensors 

See the hardbound PI catalog . . . . . . . . . . . . . . . . . . . . 5-1 to 5-8 

Piezo Control Electronics 


E-710 High-Speed Digital NanoAutomation ® 

Piezo Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-48 

Dynamic Digital Linearization . . . . . . . . . . . . . . . . . . . 6-49 

NanoCapture Software for E-710 Digital 

Piezo Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-50 

E-621 LVPZT Amplifier & Servo-Controller Module with 

High-Speed RS-232 Interface . . . . . . . . . . . . . . . . . . . . . . . . 6-52 


info@pi.ws 

P-721, P-725 PIFOC ® nano-focus devices 

with Quicklock. 

P-733.xDD, high-speed, 

direct-drive scanning stages. 

400% faster. 

S-334, long-travel piezo steering mirror 

(50 mrad!).

E-831, piezo power amplifier module. 

M-840 HexaLight Hexapod, 

M-850 Hexapod. 

M-110 to M-116 micro-translation 

and rotation stages. 

C-862 Mercury low cost, motion 

contoller. 

C-843 PCI motion controller card. 

E-665 LVPZT Amplifier & Position Servo-Controller with 

High-Speed RS-232 Interface . . . . . . . . . . . . . . . . . . . . . . . . 6-54 

E-831, E-841, E-842 OEM Piezo Amplifier and 

Power Supply Modules . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-56 

E-516 Computer Interface & Display Module . . . . . . . . . . . . 6-58 

WaveEditor-Function Generator . . . . . . . . . . . . . . . . . 6-59 

MicroPositioners / Hexapod Systems / Piezo Motors 


Advantages of PIline Linear Piezo Motor Drives . . . . . . . . 7-98 

Ultrasonic Piezo Drives—How do they work? . . . . . . 7-98 

M-661, M-662, M-663 PIline Miniature Translation 

Stages with Ultrasonic Piezo Linear Motors . . . . . . . . . . . . . 7-99 

M-665.2PM PIline Low-Profile Translation 

Stages with Piezo Linear Motor . . . . . . . . . . . . . . . . . . . . . 7-102 

P-661, P-665 PIline OEM Ultrasonic 

Piezo Linear Motors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-104 

M-840 HEXALIGHT 

Fast Six-Axis Parallel Kinematics Robot (Hexapod) . . . . . . . 7-106 

M-850 HEXAPOD 

Six-Axis Parallel-Kinematics MicroMotion Robot . . . . . . . . . 7-108 

M-235 Heavy-Duty High-Resolution Closed-Loop 

DC-Mike & Stepper Actuators . . . . . . . . . . . . . . . . . . . . . . . 7-110 

M-451 Vertical Micro Positioning Stage . . . . . . . . . . . . . . . 7-112 

M-110.1, M-111.1, M-112.1 High-Resolution 

Micro-Translation Stages . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-114 

M-110.2, M-111.2, M-112.2 High-Resolution 

Micro-Translation Stages with Ballscrew Drive . . . . . . . . . . 7-116 

M-116 Micro Rotation Stages with Worm Gear Drive . . . . 7-118 

M-060, M-061, M-062 Series Rotation Stages 

with Worm Gear Drive . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-120 

C-161.2i PIIntelliStep Stepper Motor with Integrated 

Controller/Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-123 

Photonics Alignment & Packaging Systems 


F-311 PIMotion&Vision—Integration of Vision System 

and Micro-/Nanopositioning . . . . . . . . . . . . . . . . . . . . . . . . . . 8-30 

F-361 High-Speed Integrating Sphere Optical Power 

Meter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-32 

Motor Controllers 


C-862 Mercury II DC-Motor Controller/Driver . . . . . . . . . . 9-20 

C-630 Apollo Motion Controller/Driver for Stepper Motors . . 9-22 

Network Capability . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-23 

C-843.20, C-843.40 Servo Motion Controller / 

Driver PCI Board . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-24 

C-848 Multi-Axis DC-Motor Controller . . . . . . . . . . . . . . . . . . 9-26 

C-809.40 4-Channel Servo-Amplifier Motion I/O Interface 

for NI Motion Controllers . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-28 

M-662 to M-665 piezo motor driven 

stages, P-662 & P-665 piezo motors. 

M-060 to M-062 rotation stages. 

F-311 PIMotion&Vision system. 

C-809 Motion interface for NI controllers. 

7

PICMA ® piezo actuators are currently available with cross-sections 

of 2x3, 3x3, 5x5 and 10x10 mm 2 . 

PICMA ® actuator with optional rounded 

top piece for decoupling lateral forces 

and optional wire leads. 

1-44 

P-882- 

P-888 

Application 

Examples 

� Precision Mechanics and 

Mechanical Engineering 

� NanoPositioning / High-Speed 

Switching 

� Active and Adaptive Optics 

� Vibration cancellation 

� Pneumatic & Hydraulic Valves 

� Metrology / Interferometry 

� Life Sciences, Medicine and Biology 

1-1 to 1-43 see the 

hardbound PI catalog 

PICMA ® High-Performance Monolithic 

Multilayer Piezo Actuators 

� Low Operating Voltage 

� Superior Lifetime Even 

Under Extreme 

Conditions 

� Very Large Operating- 

Temperature Range 

� High Humidity Resistance 

� Excellent Temperature 

Stability 

� High Stiffness 

� UHV Compatible 

to 10 -9 hPa 

� Sub-Millisecond 

Response & Sub- 

Nanometer Resolution 

Increased Lifetime and 

Higher Performance 

PICMA ® (PI Ceramic Monolithic 

Actuator) piezo actuators 

are characterized by their high 

performance and reliability, 

even in extremely harsh environments. 

They are superior to 

conventional multilayer actuators 

in industrial applications 

and high-endurance situations, 

where they show substantially 

longer lifetimes both in static 

and dynamic operation. 

New Production Process, 

Optimized PZT Ceramics 

PICMA ® piezo actuators are 

made from a ceramic material 


info@pi.ws 

in which the piezoceramic properties 

such as stiffness, capacitance, 

displacement, temperature 

stability, leakage current 

and lifetime are optimally 

combined. The actuators’ 

monolithic construction and 

special electrode structure 

was made possible by 

advances in production technology. 

This development is 

just one reflection of the more 

than 30 years experience of PI 

Ceramic with thousands of 

industrial PZT applications. 

Increased Lifetime through 

Humidity Resistance 

The monolithic, ceramic-insulated 

design makes polymerfilm 

insulation unnecessary. 

Diffusion of water molecules 

into the insulation layer, the 

major cause of dielectric 

breakdown, is greatly reduced 

by the use of cofired, outer 

ceramic insulation. 

High-Level Dynamic 

Performance—Very Wide 

Temperature Range 

The high Curie temperature of 

320 °C gives PICMA ® actuators 

a usable temperature 

range extending up to 150 °C. 

This means that they can be 

operated in hotter environments, 

or they can be driven 

harder in dynamic operation 

(with conventional multilayer 

actuators, heat generation — 

which is proportional to operating 

frequency — either limits 

the operating frequency or 

duty cycle in dynamic operation, 

or makes ungainly cooling 

provisions necessary). 

At the low end, operation 

down to a few kelvin is possible 

(with some reduction in 

performance specifications). 

Optimum UHV 

Compatibility—Minimal 

Outgassing 

The lack of polymer insulation 

and the high Curie temperature 

make for optimal ultrahigh-vacuum 

compatibility (no 

measurable outgassing / high 

bakeout temperatures, up to 

150 °C) 

Ideal for Closed-Loop 

Operation 

The ceramic surface of the 

actuators is extremely well 

suited for use with resistive or 

optical fiber strain gauge sensors. 

Such sensors can be easily 

applied to the actuator surface 

and exhibit significantly 

higher stability and linearity 

than with conventional polymer-insulated 

actuators. 

Amplifiers, Drivers & 

Controllers 

PI offers a wide range of control 

electronics for piezo 

actuators (see section 6 and 

www.pi.ws) from low-power 

drivers to multichannel, closed-loop, 

digital controllers. Of 

course, PI also designs custom 

amplifiers and controllers.

The displacement of PICMA ® actuators exhibits very low 

temperature dependence. This, in combination with their 

low heat generation, makes PICMA ® actuators optimal 

for dynamic operation. (Operating frequency f = 200 Hz) 

PICMA ® actuators are also available with 

100 mm leads (order number extension.x1). 

Shown here is the 15 µm P-885.51 (battery 

for size comparsion). 

PICMA ® dimensions, in mm 

PICMA ® piezo actuators (bottom curve) compared with conventional 

multilayer actuators with polymer insulation (top curve). 

PICMA ® Actuators are not affected by the high-humidity test 

conditions. Conventional piezo actuators exhibit increased 

leakage current after only a few hours. Leakage current is an 

indication of insulation quality and expected lifetime. 

Test conditions: U = 100 V DC ; T = 25 °C; Relative Humidity = 70%. 

Technical Data / Ordering Numbers 

PZT Actuators 

PZT Flexure NanoPositioners 

PZT Active Optics / Steering Mirrors 

Tutorial: Piezoelectrics... 


PZT Control Electronics 

MicroPositioners / Hexapod Systems 



Index 


info@pi.ws 

Ordering Dimensions Nominal Max. Blocking Stiffness Electrical Resonant 

Number* A x B x L Displacement Displacement Force [N/µm] Capacitance Frequency 

[mm] [µm @ 100 V] [µm @ 120 V] [N @ 120 V] [µF] [kHz] 

(±10%) (±10%) (±20%) 

P-882.10 2 x 3 x 9 7 9 215 26 0.13 135 

P-882.20 2 x 3 x11 8.5 11 215 21 0.18 110 

P-882.30 2 x 3 x 13.5 11 13 215 16 0.22 90 

P-882.50 2 x 3 x 18 15 18 215 12 0.31 70 

P-883.10 3 x 3 x 9 7 9 325 38 0.21 135 

P-883.20 3 x 3 x 11 8.5 11 325 32 0.27 110 

P-883.30 3 x 3 x 13.5 11 13 325 24 0.35 90 

P-883.50 3 x 3 x 18 15 18 325 18 0.48 70 

P-885.10 5 x 5 x 9 7 9 900 115 0.6 135 

P-885.20 5 x 5 x 11 8.5 11 900 88 0.8 110 

P-885.30 5 x 5 x 13.5 11 13 900 68 1.1 90 

P-885.50 5 x 5 x 18 15 18 900 50 1.5 70 

P-885.90 5 x 5 x 36 30 35 900 28 3,1 40 

P-887.20 7 x 7 x 11 ask about availability ! 

P-887.30 7 x 7 x 13.5 ask about availability ! 



P-888.20 10 x 10 x 11 8.5 11 3600 353 3.5 110 

P-888.30 10 x 10 x 13.5 11 13 3600 273 4.4 90 

P-888.50 10 x 10 x 18 15 18 3600 200 6.2 70 

P-888.90 10 x 10 x 36 30 35 3600 105 12,4 40 

* For optional PTFE insulated wires, pigtail length 100 mm, change order number extension to .x1 (e.g. P-882.11). 

Resonant frequency measured at 1 V , capacitance measured at 1 V , 1 kHz. 

pp pp 

Standard PZT ceramic type: PIC 252 (see page 40, PI Ceramic catalog) 

Max. operating voltage: -20 to +120 V 

Max. operating temperature: -40 to +150 °C 

Max. load 100 MPa 

Dielectric loss 0.02 

Standard Mechanical Interface: ceramic (top & bottom) 

Standard Electrical Interface: solderable termination 

Available Options: Strain Gauge Sensors, special mechanical interfaces, etc. 

Other specifications on request. 

Specifications subject to change without notice. 

1-45

Application 

Examples 

� NanoPositioning 

� High-load positioning 

� Precision mechanics 

� Semiconductor manufacturing 

and testing 

� Laser tuning 

� Switching 

� Smart structures (adaptronics) 

Notes 

PICA-Stack actuators are delivered 

with metal endcaps for improved 

robustness and reliability. 

Adherence to the mounting 

and handling guidelines will 

help you obtain maximum performance 

and lifetime from your 

piezo actuators. 

Please contact a PI Ceramic applications 

engineer for additional 

technical support. 

1-46 

P-007- 

P-056 

Variety of standard and custom PICA-Stack piezo actuators. 

PICA-Stack Piezoceramic Actuators 

Versatile Piezoelectric Power 

� High Load Capacity 

to 100 kN (40 MPa) 

� High Force Generation 

to 80 kN 

� Large Cross Sections 

(to 56 mm Diameter) 

� Variety of Shapes 

� Extreme Reliability 

>10 9 Cycles 

� Proven and Flexible 

Design 

� Sub-Nanometer- 

Resolution / Sub- 

Millisecond-Settling-Time 

� Vacuum-Compatible 

Versions 

PICA-Stack piezo ceramic actuators 

are offered in a large variety 

of standard shapes and 

sizes with additional custom 

designs to suit any application. 


info@pi.ws 

Ultra-High Reliability, High 

Displacement, Low Power 

Requirements 

PICA-Stack actuators are 

specifically designed for highduty-cycle 

applications. With 

our extensive applications 

knowledge, gained over several 

decades, we know how to 

build performance that does 

not come at the price of 

reliability. All materials used 

are specifically matched for 

robustness and lifetime. 

Endurance tests on PICA actuators 

prove consistent performance, 

even after billions 

(1,000,000,000) of cycles. The 

combination of high displacement 

and low electrical capacitance 

provides for excellent 

dynamic behavior with reduced 

driving power requirements. 

Flexibility: PI Ceramic’s 

Strength 

All manufacturing processes at 

PI Ceramic are setup for maximum 

flexibility. Should our 

standard actuators not fit your 

application, let us provide you 

with a custom design. Our 

engineers will work with you 

to find the optimum solution 

for your application at a very 

attractive price, even for small 

quantities. Some of our custom 

capabilities are listed 

below: 

� Custom Materials 

� Custom Voltage Ranges 

� Custom Geometries (Circular, 

Rectangular, Triangular, 

Layer Thickness ...) 

� Custom Displacement 

� Custom Load / Force 

Ranges 

� Custom Flat or Spherical 

Endplates (Alumina, Glass, 

Sapphire, ...) 

� Extra-Tight Length 

Tolerances 

� Custom-Molded Versions 

� Integrated Piezoelectric 

Sensor Discs 

� Special High / Low 

Temperature Versions 

� Vacuum Compatible 

Versions 

Short Leadtime, Standard & 

Custom Designs 

Because all piezoelectric materials 

used in PICA actuators are 

manufactured at PI Ceramic, 

leadtimes are short and quality 

is outstanding. All standard 

and custom PICA-Stack actuators 

are delivered with performance 

test sheets. 

Amplifiers, Drivers & 

Controllers 

PI offers a wide range of control 

electronics for piezo actuators 

(see section 6 and 

www.pi.ws) from low-power 

drivers to multi-channel, 

closed-loop, digital controllers. 

Of course, PI also designs custom 

amplifiers and controllers. 

Custom PICA-Stack actuator with 

350 µm displacement.

Technical Data / Ordering Numbers 

Ordering Number Displacement Diameter Length L Blocking Stiffness Capacitance Resonant 

[µm -10/+20%] D [mm ] [mm ±0.5] force [N] [N/µm] [nF ±20%] frequency [kHz] 

P-007.00 5 7 8 650 130 11 126 

P-007.10 15 7 17 850 59 33 59 

P-007.20 30 7 29 1000 35 64 36 

P-007.40 60 7 54 1150 19 130 20 

P-010.00 5 10 8 1400 270 21 125 

P-010.10 15 10 17 1800 120 64 59 

P-010.20 30 10 30 2100 71 130 35 

P-010.40 60 10 56 2200 38 260 20 

P-010.80 120 10 107 2400 20 510 10 

P-016,10 15 16 17 4600 320 180 59 

P-018,20 30 16 29 5500 190 340 36 

P-016.40 60 16 54 6000 100 680 20 

P-016.80 120 16 101 6500 54 1300 11 

P-016.90 180 16 150 6500 36 2000 7 

P-025.10 15 25 18 11000 740 400 56 

P-025.20 30 25 30 13000 440 820 35 

P-025.40 60 25 53 15000 250 1700 21 

P-025.80 120 25 101 16000 130 3400 11 

P-025.90 180 25 149 16000 89 5100 7 

P-025.150 250 25 204 16000 65 7100 5 

P-025.200 300 25 244 16000 54 8500 5 

P-035.10 15 35 20 20000 1300 830 51 

P-035.20 30 35 32 24000 810 1700 33 

P-035.40 60 35 57 28000 460 3400 19 

P-035.80 120 35 104 30000 250 6900 11 

P-035.90 180 35 153 31000 170 10000 7 

P-045.20 30 45 33 39000 1300 2800 32 

P-045.40 60 45 58 44000 740 5700 19 

P-045.80 120 45 105 49000 410 11000 10 

P-045.90 180 45 154 50000 280 17000 7 

P-050.20 30 50 33 48000 1600 3400 32 

P-050.40 60 50 58 55000 910 7000 19 

P-050.80 120 50 105 60000 500 14000 10 

P-050.90 180 50 154 61000 340 22000 7 

P-056.20 30 56 33 60000 2000 4300 32 

P-056.40 60 56 58 66000 1100 8900 19 

P-056.80 120 56 105 76000 630 18000 10 

P-056.90 180 56 154 78000 430 27000 7 

Resonant frequency measured at 1 V pp , capacitance measured at 1 V pp , 1 kHz. Blocking force measured at 1000 V. 

Standard PZT ceramic type: PIC 151 (see page 40, PI Ceramic catalog) 

Operating voltage range: 0 to 1000 V 

Operating temperature range: -20 to +85 °C 

Standard mechanical interface (top & bottom): steel plates, 0.5 - 2 mm thick (depends on model) 

Standard electrical interface: two PTFE insulated wires, pigtail length 100 mm 

Available options: integrated piezo force sensor or strain gauge sensors, non magnetic, vacuum compatible, etc. 

Other specifications on request. 

Specifications subject to change without notice. 

PZT Actuators 









Index 

Custom PICA-Stack actuators with 

rectangular cross-sections. 

Custom PICA-Stack actuator, each layer 

wired individually. 


info@pi.ws 

PICA-Stack dimensions, in mm, 

see technical data table for further information. 

1-47

Application 

Examples 

� Scanning interferometry 

� Surface structure analysis 

� Disk drive testing 

� Autofocus systems 

� Confocal microscopy 

� Biotechnology 

� Semiconductor test equipment 

Ordering 

Information 

P-721.CLQ 

PIFOC ® Objective Positioner & 

Scanner, 100 µm, Capacitive Sensor, 

LEMO Connectors, for Quick Lock 

Thread Adapters 

P-721.CDQ 



Sub-D connector, for Quick Lock 


P-721.LLQ 


Scanner, 100 µm, LVDT Sensor, 

LEMO Connectors, for Quick Lock 



for Volume Buyers 

2-46 

P-721 

P-721.CLQ with quick lock option P-721.12Q 

and objective (not included). 



PIFOC ® High-Speed Piezo Nano-Focussing 

Device with Direct Metrology Feedback 

� Scans and Positions 

Objectives with Sub-nm 

Resolution 

� High Linearity and 

Stability with Direct- 

Measuring Capacitive 

Sensors/LVDTs 

� Travel to 100 µm 

� Straightness of Travel 

� 13 µrad 

� Fast Settling Time 

� Compatible with 

Metamorph Imaging 

Software 

P-721 are high-end microscope 

objective nanofocussing devices 

for travel ranges to 100 µm 

with a resolution to less than 

a nanometer. The units are 

screwed between the turret 

and the objective, providing a 

positioning and scanning range 

of up to 100 µm with subnanometer 

resolution, while 

extending the optical path by 

only 12.5 mm (infinity-corrected 

microscope required; 

extension tubes are available 

to adjust path lengths of other 

objectives on the turret). 

Superior Accuracy Through 

Direct Motion Metrology / 

Capacitive Feedback 

P-721.CLQ and .CDQ are 

equipped with direct-measuring 

capacitve position sensors. 

Unlike conventional systems, 

they measure the position 

rather than strain in the actuator 

/ guiding system. This technique, 

combined with the 

inherent precision of the noncontact 

capacitive sensor and 

the temperature compensated 

design, results in higher linearity 

scans, and provides superior 

responsiveness, resolution, 

repeatability and stability at the 

nanometer level. 


info@pi.ws 

Model P-721.LLQ is a lower 

cost version, equipped with a 

direct measuring LVDT sensor 

providing 10 nm resolution. 

A variety of analog and digital 

controllers (OEM, bench-top 

and rackmount) are available to 

drive the units. Model 

P-721.CDQ can be operated 

with the new E-665 servo-controller 

through an anlalog or 

RS-232 interface or the E-750 

high-speed digital NanoAutomation 

® controller. This controller 

also features a number of 

options such as high-throughput 

PIO (parallel I/O port) or 

fiber link interfaces and Input- 

Shaping signal processing for 

the fastest possible settling. 

Working Principle 

PIFOC ® positioners are equiped 

with high-performance 

piezoelectric drives integrated 

into a sophisticated flexure 

guiding system. The force 

exerted by the piezo drive 

pushes a flexure parallelogram 

via an integrated motion amplifier. 

The wire-EDM-cut flexures 

are FEA modeled for zero 

stiction/friction, high resolution 

and exceptional guiding precision. 

Integrated, absolute measuring, 

direct metrology position 

sensors provide highest 

possible resolution, linearity 

and stability in closed-loop operation. 

Quick Lock 

The new quicklock thread adapter 

options allow 

� Easy attachment of the 

PIFOC ® to the microscope. 

� Flexible use of several 

thread adapter options with 

one PIFOC ® nanofocussing 

device. 

After the thread adapter is 

screwed into the microscope, 

the PIFOC ® is attached to the 

adapter with the quick lock 

system in the desired position. 

Mounting does not require 

rotation of the PIFOC ® unit, so 

there are no cable twisting 

issues. 

Please order thread adapters 

separately, the basic PIFOC ® 

units P-721.CDQ, P-721.CLQ 

and P-721.LLQ do not include 

any thread adapter. 

Other PIFOC ® s 

PIFOC ® s are also available with 

up to 400 µm travel (P-725, see 

p. 2-48) and for open loop operation 

only (P-720, see p. 2-10). 

Custom units for moving the 

whole turret are available on 

request. 

Quick lock thread adapter P-721.12Q 

exploded view with microscope 

objective and PIFOC ® P-721.CLQ. 

Mounting tools are included.

Dimensions of the P-721.CLQ, CDQ or LLQ in mm 

(dimensions including thread adapter). 

Notes 

Quick Lock Thread Adapters 

P-721.11Q 

Quick lock Thread Adapter M25 x 0.75 

P-721.12Q 

Quick lock Thread Adapter W0.8 x 1/36” 

P-721.02Q 


P-721.03Q 


P-721.04Q 


P-721.05Q 


Technical Data 

P-721.06Q 

Quick lock Thread Adapter M26 x 1/36” 

P-721.08Q 


Objective Extension Tubes 

P-721.90Q 

Objective extension tube, 12.5 mm, 

thread W0.8 x 1/36” 

P-721.91Q 


thread M25 x 0.75 

P-721.92Q 



PZT Actuators 









Index 


info@pi.ws 

Models P-721.CLQ P-721.LLQ units Notes 

see p. 2-44 

Max. objective diameter 39 39 mm 

Open-loop travel @ 0 to 100 V 90 90 µm ± 20% A2 

Closed-loop travel 100 100 µm A5 

Integrated feedback sensor Capacitive LVDT B 

Closed-loop ** resolution 0.7 10 nm C1 

Closed-loop linearity (typ.) 0.03 0.1 % 

Full-range repeatability (typ.) ± 5 ± 20 nm C3 

Stiffness 0.3 0.3 N/µm ± 20% D1 

Push/pull force capacity (in operating direction) 100 / 20 100 / 20 N D3 

Tilt (� ) (typ.) X 0.5 0.5 µrad E1 

Tilt (� ) (typ.) Y 13 13 µrad E1 

Lateral runout (Y) (typ.) 100 100 nm E2 

Electrical capacitance 3.6 3.6 µF ±20% F1 

* Dynamic operating current coefficient (DOCC) 5 5 µA/(Hz �µm) F2 

Unloaded resonant frequency 580 580 Hz ±20% G2 

Resonant frequency @ 120 g load 250 250 Hz ±20% G3 


Operating temperature range – 20 to 80 – 20 to 80 °C H2 

Voltage connection P-721.CLQ: VL; 

P-721.CDQ: D VL J1 

Sensor connection P-721.CLQ: 2 � C; 

P-721.CDQ: D L J2 

Weight (with cables) 240 230 g ±5% 

Body material 

Recommended driver/controller 

Al Al L 

(codes explained in the catalog p. 6-46p. 6-46) H, M, F H, E 

** Dynamic Operating Current Coefficient in µA per hertz and µm. 

Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.4 mA drive current. 

** Resolution of PZT NanoPositioners is not limited by friction or stiction. 

Noise equivalent motion with E-503 amplifier. 

P-721.93Q 



P-721.94Q 



P-721.95Q 



P-721.96Q 


thread M26 x 1/36” 

P-721.98Q 



2-47

Ordering 

Information 

P-725.1CL 



LEMO Connectors, for QuickLock 


P-725.1CD 

PIFOC ® Objective Positioner & Scanner, 

100 µm, Capacitive Sensor, Sub-D connector, 

for QuickLock 


P-725.2CL 


250 µm, Capacitive Sensor, LEMO 

Connectors, for QuickLock Thread 

Adapters 

P-725.2CD 


250 µm, Capacitive Sensor, Sub-D connector, 

for QuickLock 


P-725.4CL 


400 µm, Capacitive Sensor, 

LEMO Connectors, for QuickLock 


P-725.4CD 


400 µm, Capacitive Sensor, 

Sub-D connector, for QuickLock 




2-48 

P-725 

P-725.2CL with QuickLock option 

P-721.12Q for W0.8 x 1/36” threads 

and objective. 

PIFOC ® Long Range Microscope Objective 

Positioners & Scanners with Capacitive Sensors 

� Scans and Positions 

Objectives with Sub-nm 

Resolution 

� High Linearity and Stability 

with Direct-Measuring 

Capacitive Sensors 


� Most-Compact Unit with 

Direct Metrology 

� Enhanced Guiding 

Precision for Better Focus 

Stability 

� Fast Response & 

Settling Time 


Metamorph Imaging 

Software 

� QuickLock Adapter for 

Easy Attachment 

P-725s are long-range-travel 

additions to our PIFOC ® family 

of microscope objective nanofocussing 

devices. Despite the 

increased travel ranges (up to 

500 µm) the units are 20 % 

shorter than the P-721 series 

(page 2-46), while providing 

sub-nanometer resolution. The 

long travel range is achieved 

with a newly designed, friction-free 

and extremely stiff 

flexure system which also 

offers high guiding accuracy 

and rapid settling. 

P-725 PIFOCs ® are screwed 

between the turret and the objective, 

extending the optical 

path by only 12.5 mm (infinitycorrected 

microscope required; 

extension tubes are available 

to adjust path lengths of 

other objectives on the turret). 

Superior Accuracy 

Through Direct-Motion- 

Metrology Capacitive 

Feedback Sensors 

P-725s are equipped with 

direct-measuring capacitve po- 


info@pi.ws 

sition sensors. Unlike conventional 

indirect systems, they 

measure the position rather 

than strain in the actuator / 

guiding system. Capacitive 

sensors are absolute-measuring 

devices and show none of 

the periodic errors found in 

incremental linear encoders. 

This permits motion linearity of 

better than 0.03% and resolution 

in the sub-nanometer 

range. This technique, combined 

with the inherent precision 

of the non-contact, twoplate 

capacitive sensor and the 

temperature-compensated design, 

results in higher linearity 


responsiveness, resolution, 

repeatability and stability at the 

nanometer level. 

Fastest Step-and-Settle: 

25 Milliseconds for 

250 Microns 

The P-725.2CL can perform a 

250 µm step to 1% accuracy in 

only 25 ms (E-665.CR controller 

no load) and 50 ms with 

a load of 150 g. 

A variety of analog and digital 

controllers (OEM, bench-top 

and rackmount) are available to 

drive the units. The P-725.xCD 

model can be operated with 

the new E-665 servo-controller 

through an analog or RS-232 

interface 60901)or ernumer itsor 

•• ( the E-750 highspeed 

digital NanoAutomation 

® controller (see page 6-12). 

This controller also features a 

number of options such as 

high-throughput PIO (parallel 

I/O) or fiber link interfacing and 

InputShaping ® signal processing 

for even faster settling. 

se page 6- 

Application 

Examples 



� Disk drive testing 

� Autofocus systems 

� Confocal microscopy 



Increased Lifetime 

with New Piezoceramic 

The P-725 PIFOC ® units are 

driven with PI Ceramic’s 

PICMA ® high-performance, 

multilayer piezo ceramic actuators. 

These newly designed 

and highly optimized drives are 

more robust than conventional 

piezo actuators, and feature 

superior lifetime in dynamic 

and static applications. Because 

guidance and sensors are all 

frictionless and maintenancefree, 

PIFOC ® systems achieve 

exceptional levels of reliability. 


PIFOC ® positioners are equipped 

with high-performance 

piezoelectric drives integrated 

in a sophisticated flexure guiding 

system. The force exerted 

by the piezo drive pushes a 

flexure parallelogram via an 

integrated motion amplifier. 

The wire-EDM-cut flexures are 

FEA modeled for zero stiction/friction, 

high resolution 


An integrated, directmeasuring, 

non-contact, twoplate 

capacitive position sensor 

provides the highest possible 

resolution, linearity and stability 

in closed-loop operation. 

Other PIFOC ® s 

PIFOC ® s are also available in 

different form factors (P-721, 

see p. 2-46) and for open loop 

operation only (P-720, see p. 

2-10). Custom units for moving 

the whole turret are available 

on request.

P-721.12Q QuickLock thread adapter, 

exploded view with microscope objective 

and PIFOC ® . Mounting tools are 

included. 

QuickLock 

The new QuickLock thread 

adapter options allow 

� Easy attachment of the 

PIFOC ® to the microscope. 

� Flexible use of different thread 

adapter options with one 

PIFOC ® nanofocussing device. 

After the thread adapter is 

screwed into the microscope, 

the PIFOC ® is attached to the 

adapter with the QuickLock 

system in the desired position. 

Mounting does not require 

rotation of the PIFOC ® unit, so 

there are no cable twisting 

issues. Be sure to order the 

required thread adapters separately: 

the basic P-725 PIFOC ® 

units do not include any Quick- 

Lock thread adapters. 


25 ms for a 250 µm step-top dynamic performance 

of the P-725.2CL PIFOC ® . 

Dimensions of the P-725 in mm (dimensions in 

mm, thread adapter ordered separately, decimal 

places separated by commas in drawings). 

Models P-725.1CL, P-725.2CL, P-725.4CL, Units Notes see 

P-725.1CD P-725.2CD P-725.4CD page 2-44 

Max. objective diameter 39 39 39 mm 

Min. Open-loop travel @ -20 to 120 V 150 330 460 µm ±20% A2 

Closed-loop travel 100 250 400 µm A5 

Integrated feedback sensor Capacitive Capacitive Capacitive B 

Closed-loop ** resolution 0.65 0.75 1.25 nm C1 

Closed-loop linearity (typ.) 0.03 0.03 0.03 % 

Full-range repeatability (typ.) ±5 ±5 ±5 nm C3 

Stiffness 0.25 0.2 N/µm ±20% D1 

Push/pull force capacity (in operating direction) 100 / 20 100 / 20 100 / 20 N D3 

Tilt (� X) (typ.) 1 6 18 µrad E1 

Tilt (� Y) (typ.) 20 45 25 µrad E1 

Lateral runout (Y) (typ.) 40 40 40 nm E2 

Electrical capacitance 4.2 6.0 6.0 µF ±20% F1 

* Dynamic operating current coefficient (DOCC) 4.0 2.5 1.9 µA/(Hz � µm) F2 

Unloaded resonant frequency 530 330 200 Hz ±20% G2 

Resonant frequency @ 120 g load 205 180 115 Hz ±20% G3 


Operating temperature range - 20 to 80 -20 to 80 -20 to 80 °C H2 

Voltage connection P-725.xCL: VL; P-725.xCD: D J1 

Sensor connection P-725.xCL: 2 � C; P-725.xCD: D J2 

Weight (with cables) 215 (230) 230 (245) 230 (245) g ±5% 

Body material Al Al Al L 

Recommended driver/controller 

(codes explained p. 6-46) H, M, F H, M, F H, M, F 

* Dynamic Operating Current Coefficient in µA per hertz and µm. 

Example (P-725.2C): Sinusoidal scan of 30 µm at 10 Hz requires approximately 0.75 mA drive current. 

** Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier. 

PZT Actuators 









Index 


info@pi.ws 

Notes 

QuickLock Thread adapters 

P-721.11Q 

QuickLock Thread Adapter 

M25 x 0.75 

P-721.12Q 


W0.8 x 1/36” 

P-721.02Q 


M26 x 0.75 

P-721.03Q 


M27 x 0.75 

P-721.04Q 


M28 x 0.75 

P-721.05Q 


M32 x 0.75 

P-721.06Q 


M26 x 1/36” 

P-721.08Q 


M19 x 0.75 

Objective Extension Tubes 

P-721.90Q 

Objective extension tube, 

12.5 mm, thread W0.8 x 1/36” 

P-721.91Q 


12.5 mm, thread M25 x 0.75 

P-721.92Q 


12.5 mm, thread M26 x 0.75 

P-721.93Q 


12.5 mm, thread M27 x 0.75 

P-721.94Q 


12.5 mm, thread M28 x 0.75 

P-721.95Q 


12.5 mm, thread M32 x 0.75 

P-721.96Q 


12.5 mm, thread M26 x 1/36” 

P-721.98Q 


12.5 mm, thread M19 x 0.75 

2-49

Ordering 

Information 

P-620.1CD 

PIHera Nanopositioning System, 

50 µm, Capacitive Sensors, Sub-D 

Connector 

P-620.1CL 


50 µm, Capacitive Sensors, LEMO 

Connectors 

P-620.10L 


50 µm, Open-Loop, LEMO Connector 

P-621.1CD 

PIHera NanoPositioning System, 


Connector 

P-621.1CL 



Connectors 

P-621.10L 


100 µm, Open-Loop, LEMO 

Connector 

P-622.1CD 



Connector 

P-622.1CL 



Connectors 

P-622.10L 



Connector 

P-625.1CD 



Connector 

P-625.1CL 



Connectors 

P-625.10L 



Connector 

Vacuum versions available! 

XY & Z Versions: See separate 

Datasheets. 

Custom sizes & specifications 

available! 

2-50 

P-620.1CD 

P-621.1CD 

P-622.1CD 

P-625.1CD 

PIHera Compact Long-Range Piezo 

Nano-Translation Stages 

P-622.1CD, P-621.1CD, P-620.1CD and P-625.1CD PIHera TM piezo nano-translation 

stages, from left to right (credit card for size comparison). 


� Compact Design 

� Resolution < 1 nm 

� Low Cost 

� New Longlife Piezo Drive 

� Capacitive Feedback 

(Closed-Loop) 

� 0.01 % Position Accuracy 

� X, XY, Z, XYZ Versions 


Versions 

P-620.1CD - P-625.1CD PIHera 

systems are piezo nano-translation 

stages featuring travel 

ranges from 50 to 500 µm. 

Despite the increased travel 

ranges the units are extremely 

compact, while providing subnanometer 

resolution. The 






info@pi.ws 

offers excellent guiding accuracy 

(typically less than 5 µrad 

pitch/yaw over the full travel 

range) and rapid settling. 

Multi-Axis Versions, 

X, XY, Z, XYZ 

PIHera TM stages are also 

available in XY and Z versions. 

See p. 2-52 and 2-54. 

XZ and XYZ combinations 

can be assembled (no 

adapters required). 

Superior Accuracy 

Through Direct-Motion- 

Metrology Capacitive 

Feedback Sensors 

Applications such as optical 

path control in interferometry, 

or sample positioning in microscopy 

require long travel 

ranges with nanometer positioning 

accuracy. PIHera 

Rapid scanning motion of a P-621.1CD (commanded rise time 5 ms) with the 

E-710 controller and DDL option. Digital Dynamic Linearization virtually eliminates 

the tracking error (

Dimensions of the P-62x.1CD/.1CL/.10L in mm, 

decimal places separated by commas. 


PIHera XYZ combination 

Models P-620.1CD P-621.1CD P-622.1CD P-625.1CD P-62x.1CL P-62x.10L Units 

Active axes X X X X X X 

Closed-loop travel 50 100 250 500 same as µm 

CD version — 

Min. open-loop travel -20 to 120V 60 120 300 600 same as same as mm 

CD version CD version 

Integrated feedback sensor capacitive capacitive capacitive capacitive capacitive — 

Open-loop resolution* 0.1 0.2 0.4 0.5 same as same as nm 


Closed-loop resolution* 0.2 0.4 0.7 1.4 same as 

CD version 

— nm 

Closed-loop linearity (typ.) 0.01 0.01 0.01 0.01 0.01 — % 

Stiffness 0.42 0.35 0.15 0.1 same as same as N/µm 


Push/pull force capacity (in X) 10/5 10/8 10/8 10/8 same as same as N 


Max. Load 10 10 10 10 10 10 N 

Lateral force limit 10 10 10 10 10 10 N 

Tilt (�Y, �Z) (typ.) 3 3 3 6 same as same as µrad 


Electrical capacitance 0.75 1.5 3.0 6.0 same as same as µF ±20% 


Unloaded resonant frequency 1240 800 400 215 same as same as Hz ±20% 


Resonant frequency @ 20 g load 550 520 340 180 same as same as Hz ±20% 


Resonant frequency @ 120 g load 260 240 185 110 same as same as Hz ±20% 


Operating temperature range -40 to 120 -40 to 120 -40 to 120 -40 to 120 -40 to 120 -40 to 150 °C 

Voltage and sensor connection Sub-D special Sub-D special Sub-D special Sub-D special Voltage: LEMO Voltage: LEMO 

connector connector connector connector FFA.00.250 FFA.00.250, 

male; sensor: 

2xLEMO FFA. 

00.250 female 

no sensor 

Weight (with cables) 108 158 195 238 g ±5% 

Body material Al Al Al Al Al Al 

Recommended controller E-500 System, E-665, E-750 (digital), E-710 (digital) E-500 System, E-610 

*Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 controller. 

PZT Actuators 









Index 


info@pi.ws 

results in higher linearity scans, 

and provides superior responsiveness, 

resolution, repeatability 

and stability. 

Rapid Positioning 

over Long Ranges 

One of the advantages of 

PIHera stages over (linear) 

motor driven positioning stages 

is the rapid response to 

motion inputs and fast and precise 

settling behavior. The 

P-622.1CD, for example, can 

settle to an accuracy of 10 nm 

in only 30 msec after a 10 µm 

step (other PI stages provide 

even faster response)! 

Dynamic Digital Control for 

Best Scanning Linearity 

Use our new digital control electronics 

with the dynamic digital 

control option for the highest 

linearity in scanning applications. 

These systems virtually 

eliminate tracking errors and 

permit use of the entire travel 

range with high dynamic accuracy 

in the nanometer range. 

Increased Lifetime with New 

Piezoceramic Technology 

The PIHera stage drive units 

are based on our P-885 

PICMA ® low-voltage multilayer 

piezo ceramics. These newly 

designed and highly optimized 

drives are more robust than conventional 

piezo actuators, and 

feature superior lifetime in dynamic 

and static applications. 

Because guidance and sensors 

are all frictionless and maintenance-free, 

PIHera systems 

achieve exceptional levels of 

reliability. 

2-51

Ordering 

Information 

P-620.2CD 

PIHera XY Nanopositioning 

System, 50 µm, Capacitive Sensors, 

Sub-D Connector 

P-620.2CL 



LEMO Connectors 

P-620.20L 


System, 50 µm, Open-Loop, 

LEMO Connector 

P-621.2CD 


System, 100 µm, Capacitive 

Sensors, Sub-D Connector 

P-621.2CL 



Sensors, LEMO Connectors 

P-621.20L 




P-622.2CD 




P-622.2CL 




P-622.20L 




P-625.2CD 




P-625.2CL 




P-625.20L 





X & Z Versions: See separate 

Datasheets. 


available! 

2-52 


P-620.2CD 

P-621.2CD 

P-622.2CD 

P-625.2CD 

PIHera Compact XY Long-Range Piezo 

Nano-Translation Stages 

P-621.2CD, P-622.2CD and P-625.2CD PIHera XY piezo nano-translation stages, 

from left to right (CD for size comparsion). 

� XY-Travel to 500 µm 


� Resolution

Dimensions of the P-62x.2CD/.2CL/.20L in mm, decimal places separated by commas. 


Models P-620.2CD P-621.2CD P-622.2CD P-625.2CD P-62x.2CL P-62x.20L Units 

Active axes X, Y X, Y X, Y X, Y X, Y X, Y 

Closed-loop travel per axis 50 100 250 500 same as µm 


Min. open-loop travel 60 120 300 600 same as same as µm 

-20 to 120 V per axis CD version CD version 

Integrated feedback sensor capacitive capacitive capacitive capacitive capacitive — 

Open-loop resolution* 0.1 0.2 0.4 0.5 same as same as nm 


Closed-loop resolution* 0.2 0.4 0.7 1.4 same as nm 


Closed-loop linearity (typ.) 0.03 0.03 0.03 0.03 0.03 — % 

Stiffness 0.40 0.25 0.20 0.10 same as same as N/µm 


Push/pull force capacity (in X and Y) 10/5 10/8 10/8 10/8 same as same as N 


Max. Load 10 10 10 10 10 10 N 

Lateral force limit 10 10 10 10 10 10 N 

Tilt (� Y, � Z) (typ.) 3 3 3 same as same as µrad 


Electrical capacitance per axis 0.75 1.5 3 6 same as same as µF ±20% 


Unloaded resonant frequency 800/600 635/535 435/270 350/150 same as same as Hz ±20% 

(upper/lower axis) CD version CD version 

Resonant frequency @ 50 g load 395/270 380/365 300/220 280/125 same as same as Hz ±20% 

(upper/lower axis) CD version CD version 

Resonant frequency @ 100 g load same as same as Hz ±20% 

(upper/lower axis) 300/285 290/285 235/190 210/115 CD version CD version 

Operating temperature range -40 to 120 -40 to 120 -40 to 120 -40 to 120 -40 to 120 -40 to 150 °C 

Voltage and sensor connection Sub-D special Sub-D special Sub-D special Sub-D special Voltage: 2x Voltage: 2x 

connector connector connector connector LEMO FFA.00. LEMO FFA.00. 

250 male; 

sensor: 4x 

LEMO FFA.00. 

250 female 

250, no sensor 

Weight (with cables) 195 295 348 430 g ±5% 

Body material Al Al Al Al Al Al 

Recommended controller E-500 System, E-665, E-750 (digital), E-710 (digital) E-500 System, E-610 

*Resolution of PI PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 controller. 

PZT Actuators 









Index 


info@pi.ws 





with New Piezoceramic 

Technology 




piezo ceramics. These 

newly designed and highly 

optimized drives are more 

robust than conventional piezo 

actuators, and feature superior 

lifetime in dynamic and static 

applications. Because guidance 

and sensors are all frictionless 

and maintenancefree, 

PIHera systems achieve 


2-53

Application 

Examples 

� (Dynamic) interferometry 

� Microscopy 

� Nanopositioning 


� Quality assurance Semiconductor 

technology 

Ordering 

Information 

P-620.ZCD 

PIHera Vertical Nanopositioning 



P-620.ZCL 




P-620.Z0L 




P-621.ZCD 




P-621.ZCL 




P-621.Z0L 




P-622.ZCD 




P-622.ZCL 




P-622.Z0L 





X & XY Versions: See separate 

Datasheets. 


available! 

2-54 

P-620.ZCD 

P-621.ZCD 

P-622.ZCD 

PIHera Compact Vertical Piezo 

Nano-Elevation Stages 

P-620.ZCL, P-621.ZCL and P-622.ZCL (from left to right) 

PIHera piezo nano-elevation stages (CD for size comparison). 

� Z-Travel to 250 µm 

� Ultra-Compact Design 

� Resolution < 1 nm 

� Low Cost 

� New Longlife Piezo Drive 

� Capacitive Feedback 

(Closed-Loop) 

� 0.01 % Position Accuracy 

� X, XY, Z, XYZ Versions 


Versions 

P-620.ZCD - P-622.ZCD PIHera 

systems are novel piezo nanoelevation 

stages featuring travel 

ranges from 50 to 250 µm. 

Despite the increased travel 

ranges the units are extremely 

compact, while providing subnanometer 

resolution. The 





offers excellent guiding accuracy 

and rapid settling. 

Superior Accuracy Through 

Direct-Motion-Metrology 

Capacitive Feedback Sensors 

Applications such as optical 

path control in interferometry, 

or sample positioning in 

microscopy require long travel 


info@pi.ws 

ranges with nanometer positioning 

accuracy. PIHera offers 

Z-travel ranges to 250 µm 

(500 µm X and XY versions are 

also available). The closed-loop 

versions are equipped with 

Multi-Axis Versions, X, 

XY, Z, XYZ 

PIHera TM stages are also 

available in X and XY versions. 

See p. 2-50 and 2-52. 

XZ and XYZ combinations 

can be assembled (no 

adapters required). 

non contact, zero friction, 

direct-measuring two-plate 

capacitve position sensors. 

Unlike conventional indirect 

sensors (such as strain gauge / 

piezo resistive sensors), they 

measure the position directly 

rather than the strain in the 

actuator / guiding system. 

Capacitive sensors are absolute-measuring 

high-bandwidth 

devices and show none of the 

periodic errors found in incremental 

encoders. This permits 

motion linearity of better than 

0.01 % and effective resolution 

in the sub-nanometer range. 

This technique, combined with 

the inherent precision of the PI 

two-plate capacitive sensor and 

the temperature-compensated 

design, results in higher linearity 


responsiveness, resolution, repeatability 

and stability. 

The settling time of a P-621.1CD 

(10 µm steps) is 15 milliseconds. 

Repeatability of a P-621.ZCD. 

PIHera XYZ combination

Dimensions of the P-62x.ZCD/.ZCL/.Z0L in mm, decimal places separated by commas. 


Models P-620.ZCD P-621.ZCD P-622.ZCD P-62x.ZCL P-62x.Z0L Units 

preliminary data preliminary data 

Active axes Z Z Z Z Z 

Closed-loop travel 50 100 250 same as µm 


Min. open-loop travel -20 to 120 V 120 275 same as same as µm 


Integrated feedback sensor capacitive capacitive capacitive capacitive — 

Open-loop resolution* 0.2 same as same as nm 


Closed-lop resolution* 0.3 same as nm 


Closed-loop linearity (typ.) 0.01 0.01 0.01 0.01 — % 

Stiffness 0.8 0.8 0.3 same as same as N/µm 


Push/pull force capacity (in X) 10/5 10/8 10/8 same as same as N 


Max. Load 10 10 10 10 10 N 

Lateral force limit 10 10 10 10 10 N 

Tilt (� Y, � Z) (typ.) 30 same as same as µrad 


Electrical capacitance 1.5 3.0 6.0 same as same as µF ±20% 


Unloaded resonant frequency 880 same as same as Hz ±20% 


Resonant frequency @ 20 g load 600 same as same as Hz ±20% 






Operating temperature range -40 to 120 -40 to 120 -40 to 120 -40 to 120 -40 to 150 °C 

Voltage and sensor connection Sub-D special Sub-D special Sub-D special Voltage: LEMO Voltage: LEMO 

connector connector connector FFA.00.250 FFA.00.250, 

male; sensor: 

2 x LEMO 

FFA.00.250 female 

no sensor 

Weight (with cables) 170 g ±5% 

Body material Al Al Al Al Al 

Recommended controller E-500 System, E-665, E-750 (digital), E-500 System, E-610 

E-710 (digital) 

*Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 controller. 

PZT Actuators 









Index 


info@pi.ws 

Rapid Positioning over Long 

Ranges 

One of the advantages of 

PIHera stages over (linear) 

motor driven positioning stages 

is the rapid response to 

motion inputs and fast and 

precise settling behavior. The 

P-622.1CD, for example, can 

settle to an accuracy of 10 nm 

in only 30 msec after a 10 mm 

step (other PI stages provide 

even faster response)! 



Use our new digital control 

electronics with the dynamic 

digital control option for the 

highest linearity in scanning 

applications. These systems 

virtually eliminate tracking 

errors and permit use of the 

entire travel range with high 

dynamic accuracy in the nanometer 

range. 

Increased Lifetime with New 

Piezoceramic Technology 




piezo ceramics. These 

newly designed and highly 

optimized drives are more 




applications. Because guidance 


and maintenance-free, 

PIHera systems achieve 


2-55

Ordering 

Information 

Application 

Examples 

� Atomic Force Microscopy 

� Micromanipulation 


� Nanomanipulation 

� Nano-imprinting 

� Nanometrology 

� Nanolithography 

2-56 

P-363 

P-363.2CD and .3CD (background) 

PicoCube, high-performance piezo positioning- 

and scanning systems. 

Smart media card for size comparsion. 

P-363.3CD 

PicoCube XYZ Positioning- and 

Scanning System, 6x6x6 µm,Parallel- 

Motion Metrology, Capacitive Sensors, 

Sub-D Connectors 

P-363.2CD 

PicoCube XY Positioning- and 

Scanning System, 6 x 6 µm, Parallel- 


Sub-D Connectors 

P-363.3CL 

PicoCube XYZ Positioning- and 

Scanning System, 6x6x6 µm,Parallel- 


Lemo Connectors 

P-363.2CL 

PicoCube XY Positioning- and 

Scanning System, 6 x 6 µm, Parallel- 


Lemo Connectors 

Different travel ranges or 

dimensions on request. 

PicoCube Ultra-Fast, XY and 

XYZ NanoPositioning and Scanning Stages 

� Ultra-High-Performace 

Closed-Loop Scanner for 

AFM/SPM 

� Superior Manipulation 

Tool for Nanotechnology 

� Resonant Frequency 9.8 kHz 

� Ultra-High-Resolution 

Capacitive Feedback 

� Parallel-Motion Metrology 

for Highest Linearity and 

Stability 

� 50 Picometer Resolution 

� 6 x 6 x 6 µm Travel Range 

� Very Small Package 

� Rugged Design 

Ultra-High-Performance 

Scanner/Manipulator 

for Nanotechnology 

The P-363 PicoCube XY/XYZ 

is an ultra-high-performance 

closed-loop piezo scanning system. 

Designed for AFM, SPM 

and nanomanipulation applications, 

it combines an ultra-low 

inertia, high-speed XY/XYZ 

piezo scanner with non-contact, 

direct-measuring, parallelmetrology 

capacitive feedback 

capable of 50 picometers resolution. 

On top of being extremely 

precise, the PicoCube 

system is also very small and 

rugged. Measuring only 30 x 

30 x 40 mm (30 x30 x26 mm 

for XY version), it is easy to 

integrate in any scanning apparatus. 

AFM, STM, SPM, Nanolithography, 

Nano-Imprinting, 

Nanometrology 

The PicoCube was specifically 

developed to overcome 

the limitations of the piezoelectric 

scanners currently 

available for STM, AFM and 

SPM. In addition to these applications, 

the PicoCube is also 

the ideal scanning and manipu- 


info@pi.ws 

lation tool for nano-imprinting, 

nanolithography, ultra-high-resolution 

near-field scanning optical 

microscopy and nano-surface-metrology 

applications. 

Higher Precision Through 

Parallel-Motion Metrology 

The PicoCube is based on a 

proprietary, newly developed 

ultra-fast, frictionless XY/XYZ 

piezo scanner equipped with 

direct-measuring, multi-axis 

capacitve position sensors 

(parallel metrology). The capacitive 

sensors measure the 

position of the moving platform 

rather than strain in the 

actuator (as is common with 

lower-precision piezo resistive 

strain gauge sensors). Parallel 

metrology can “see” all controlled 


simultaneously and compensate 

for runout and crosstalk of 

orthogonal axes. 


the inherent linearity and precision 

of the PI non-contact twoplate 

capacitive sensor and the 

ultra-compact, temperaturecompensated 

design, results 

in higher linearity scans and 

provides superior responsiveness, 


and stability at the sub-nanometer 

level. PI capacitive sen- 

sors are equipped with the proprietary 

ILS (Integrated Linearization 

System) for enhanced 

linearity and are also much less 

sensitive to EMI than other 

high-resolution sensors. 

Nanometer Accuracy 

in 1 Millisecond with 

50-Picometer Resolution. 

PicoCube systems provide 

resolution of 50 picometers 

and below. The ultra-fast 

XY/XYZ piezo drives offer resonant 

frequencies of 9.8 kHz in 

Z and >3 kHz in X and Y! The 

high resonant frequency and 

high-bandwidth capacitive feedback 

allow step & settle to 1% 

accuracy in as little as one millisecond. 

Rugged Design 

In spite of its ability to move 

and position on an atomic 

scale, the PicoCube boasts a 

rugged design for real-world 

applications. For extra-high stability 

and reduced mass, the 

body is precision machined 

from heat-treated and stressrelieved 

titanium. The sophisticated 

frictionless design also 

ensures that the (moving) top 

plate protects the internal actuator/sensor 

unit from foreign 

objects. 

The P-363 settles 

to within 1 nm 

in 1 ms (100 nm 

step, X and Y 

motion; faster 

response in Z).

Dimensions of the P-363.3CD in mm. Removable top plate. 

Dimensions of the P-363.2CD in mm. Removable top plate. 

Control 

The PicoCube controller is 

based on the E-500, 19” rackmount 

chassis with one 

E-509.CA3 servo-controller and 

three E-507.36 power amplifier 

modules. This controller is 

equipped with high-speed analog 

interfaces (0 to 10 V). An 

optional E-516 20-bit interface 

module (see page 6-58) is also 

available. 


PZT Actuators 









Index 

Model P-363.3CL P-363.2CL Units 

Active axes X, Y, Z X, Y 

Closed-loop travel 6, 6, 6 6, 6 µm 

Min. open-loop travel -250 to +250V 7, 7, 6.5 7, 7 µm 

Integrated feedback sensor capacitive capacitive 

Closed- / Open-loop resolution* 0.1/0.05 0.1/0.05 nm 

Closed-loop linearity (X,Y, typ.) 1 1 nm 

Max. Load 10 10 N 

Tilt, off-axis (typ.) 0.5 0.5 µrad 

Electrical capacitance 60 (X, Y); 110 (Z) 60 nF ±20% 

Unloaded resonant frequency (X,Y) 3.1 4.2 kHz ±20% 

Unloaded resonant frequency (Z) 9.8 – kHz ±20% 

Resonant frequency @20g load (X,Y) 1.5 2.1 kHz ±20% 

Operating temperature range -40 to 120 – 40 to 120 °C 

Voltage and sensor connection Sub-D special Sub-D special 

connector with connector with 

Lemo adapter Lemo adapter 


Body material Titanium Titanium 

Recommended controller E-500 System with E-500 System with 

E-507.36 amplifier E-507.36 amplifier 

* Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. 

Noise equivalent motion with E-509.C3A controller and E-507.36 amplifier. 


info@pi.ws 

2-57

P-733.3DD (left side) and P-733.2DD, high-speed, direct drive XY(Z) scanning stages are 

the fastest scanning stages with large aperture currently available (2.2 kHz resonant 

frequency!). Both units feature a footprint of only 100 x 100 mm. Compact disc for 

size comparison. 

Application 

Examples 

� Imaging (resolution enhancement) 

� Scanning microscopy 



� Atomic force microscopy 


� Precision mask and wafer alignment 


� Nanomanipulation and other 

applications where high-precision, 

single-plane multi-axis motion is 

required 

Ordering 

Information 

P-733.2DD 

XY High-Speed Direct Drive Piezo 

Scanning Stage, 30 x 30 µm, 

Capacitive Sensors, Sub-D Connector 

P-733.3DD 

XYZ High-Speed Direct Drive Piezo 

Scanning Stage, 30 x 30 x 10 µm, 


P-733.2UD nonmagnetic XY nanopositioner 

for ultra-high vacuum up to 10 -9 hPa. 

2-58 

P-733.2DD 

P-733.3DD 

High Speed Direct Drive XY & XYZ 

Piezo Scanning/Positioning Stages 

� 4 x Faster, 

Through Direct Drive 

� To 2.2 kHz Resonant 

Frequency in X and Y 

� 100PicometersResolution 

� Parallel-Metrology with 

Capacitive Sensors for 

Highest Multi-Axis 

Precision 

� Parallel-Kinematics 

Design for Enhanced 

Responsiveness 

� Active Runout 

Compensation 

� 30x30or30x30x10µm 

Travel Range 

� 50 x 50 mm Clear 

Aperture 

Fastest Multi-Axis Systems 

w/Large Aperture 

P-733.2DD and .3DD directdrive 

stages are the fastest and 

most accurate multi-axis piezo 

scanning systems with a large 

aperture currently available. 

They provide a positioning and 

scanning range of 30 x 30 (x10) 

µm and are equipped with parallel-metrology 

capacitive position 

feedback for superior 

multi-axis linearity and repeatability. 

The novel, high-stiffness direct 

drive system leads to a resonant 

frequency of more than 

2 kHz, (4 x more than similar 

systems) enabling millisecond 

scanning rates and >500 Hz 

scanning frequency with subnanometer 

resolution. 


info@pi.ws 

Low-Profile and 

Clear Aperture–Ideal for 

Microscopy 

Only 20mm high, the 

P-733.2DD provides one of the 

lowest profiles available for parallel-metrologyNanoPositioning 

systems. The 50 x 50 mm 

clear aperture is ideal for transmitted-light 

applications such 

as near-field scanning microscopy, 

confocal microscopy and 

mask alignment. P-733 stages 

are designed for applications 

with loads up to 2 kg. 

Higher Precision through 

Parallel Kinematics/ 

Metrology 

P-733 piezo scanning stages 

feature a parallel-kinematics 

design with direct-measuring, 

multi-axis non-contact capacitve 

position sensors (parallel 

metrology). The capacitive sensors 

measure the position of 

the moving platform (rather 

than strain in the actuator, as 

common with lower-precision 

strain gauge sensors). Parallel 

metrology can “see” all controlled 


simultaneously and compensate 

for runout and crosstalk of 

orthogonal axes (active trajectory 

control). 

A major advantage of the single-module, 

parallel-kinematics 

design is the identical dynamic 

performance of the X and Y 

axes, important for high scanning 

rates. In addition, there are 

no moving cables and no cable 

management issues to be 

resolved when integrating the 

unit. This design increases reliability, 

enhances responsiveness 

and also increases 

repeatability and accuracy at 

the nanometer level, because 

the force and friction exerted 

by a moving cable are eliminated 

(see the “Tutorial” section 

for further details). 




electronics with the DDL 

(Dynamic Digital Linearization) 








Working Principle/Reliability 

P-733 NanoPositioners units 

are equipped with ultra-highperformance 

PICMA ® monolithic 

multilayer piezo actuators 

integrated into a sophisticated 

single-module, parallel-kinematics 

flexure guiding system. 

The newly designed and highly 

optimized piezo drives (first 

with 100% ceramic insulation) 

are more robust than conventional 


superior lifetime in dynamic 

and static applications. The 

wire-EDM-cut flexures are FEA 

modeled for zero-stiction/zerofriction, 

ultra-high resolution 


Integrated capacitive position 

feedback sensors in a parallel-metrology 

configuration 

provide sub-nanometer resolution 

and stability in closed-loop 

operation (with PI electronics). 

Because guidance, actuators 


and maintenance-free, P-733 

systems achieve exceptional 

levels of reliability. 

Non-Magnetic 

Vaccum Versions 

For applications in ultrahigh 

vacuum, the P-733.2UD (see 

page 2-60) is available. It is both 

nonmagnetic and non-magnetizable, 

important for SEM applications. 

To guarantee minimal 

outgassing rates and optimal 

UHV suitability, P-733.2UD 

units contain vacuum qualified 

components only.

Dimensions of P-733.2DD and .3DD in mm. 

0 to 100 % travel in 1.36 msec, without 

overshoot. The P-733.2DD is the fastest, 

highest precision closed-loop XY scanning 

stage with large aperture currently 

available. 


The P-733.2DD provides more than 2.2 kHz 

resonant frequency for highest scanning dynamics. 

PZT Actuators 









Index 


info@pi.ws 

Models P-733.2DD P-733.3DD Units Notes 

see page 2-44 

Active axes X,Y X,Y,Z 

Min. open-loop travel @ -20 to 120 V 33 x 33 33 x 33 x 14 µm ±20% A2 

Closed-loop travel 30 x 30 30 x 30 x 10 µm A5 

Integrated feedback sensor capacitive capacitive B 

Closed-loop / open-loop ** resolution 0.1 / 0.1 0.1 / 0.1 nm C1 


Full-range repeatability (typ.) ±1.0 ±1.0 nm C3 

Stiffness (X,Y,Z) 20, 20, - 4, 4, 10 N/µm ±20% D1 

Push/pull force capacity (in operating direction) 300 / 100 300 / 100 N D3 

Max. (±) normal load 2 2 kg D4 

Tilt (�X/�Y) (typ.) 3 3 µrad E1 

Electrical capacitance (X,Y,Z) 6.0, 6.0, - 6.0, 6.0, 4.4 µF ±20% F1 

*Dynamic operating current µA/ 

coefficient (DOCC) (X,Y,Z) 25, 25,- 25, 25, 50 (Hz x µm) F2 

Unloaded resonant frequency (X,Y,Z) 2230, 2230, - 1200, 1200, 1200 Hz ±20% G2 

Resonant frequency @ 50 g load (X, Y, Z) 1800, 1800, - Hz ±20% G3 

Resonant frequency @ 200 g load (X, Y, Z) 530, 530, 635 Hz ±20% G3 

Operating temperature range - 20 to 80 - 20 to 80 °C H2 

Voltage connection sub-D, special sub-D, special J1 

Sensor connection sub-D, special sub-D, special J2 


Body material Al Al L 

Recommended Amplifier/ Controller H, F, L H, F, L 

(codes explained see page 6-46) 

* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 10 µm at 100 Hz requires 

approximately 25 mA drive current. 

** Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier. 

2-59

P-733 Flexure NanoPositioner is ideal for 

single molecule microscopy. 

Application 

Examples 



� Precision mask and wafer alignment 


� Imaging (resolution enhancement) 



� Micromanipulation and other 

applications where single-plane 

high-precision XY motion is 

required 

Notes 

See the “PZT Control Electronics” 

section for our comprehensive line of 

low-noise modular and OEM control 

electronics for computer and manual 

control. 

2-60 

P-733 

Single-Module, XY Piezo Flexure 

NanoPositioner and Scanner 

� Precision Trajectory 

Control 

� Single-Module, Parallel- 

Kinematics Design 

Features Enhanced 

Responsiveness and 

Automatic Runout 

Compensation 

� For XY Scanning & 

Positioning 

� 100 � 100 µm Travel 

Range 

� Integrated Capacitive 

Sensors for Resolution 

< 0.3 nm 

� 50 � 50 mm Clear 

Aperture 

� Ultrahigh Vacuum Version 

Available 

� Ultra-Fast XY and XYZ 

Versions Available 


info@pi.ws 

P-733 NanoPositioning Stages 

are fast and highly accurate, 

low-profile, XY scanning and 

positioning systems. They provide 

a positioning and scanning 

range of 100 � 100 µm and are 

equipped with capacitive feedback 

sensors for highest accuracy 

and repeatability, in the 

nanometer and sub-nanometer 

range. 

Clear Aperture 

The 50 � 50 mm, clear aperture 

is ideal for transmittedlight 

applications such as nearfield 

scanning microscopy, 

confocal microscopy and mask 

alignment. P-733 stages are 

designed for applications with 

loads up to 2 kg. 



Metrology 

P-733 piezo scanning stages 

are equipped with direct-measuring, 

multi-axis capacitve position 

sensors (parallel metrology). 

The capacitive sensors 

measure the position of the 

moving platform rather than 

strain in the actuator (as common 

with lower-precision strain 

gauge sensors). Parallel metrology 

can “see” all controlled 

degrees of freedom simultaneously 

and compensate for 

runout and crosstalk of orthogonal 

axes. 

A major advantage of the single-module 

parallel-kinematics 

design is that there are no 

moving cables and no cable 

management issues to be 

resolved when integrating the 

unit. This design increases reliability, 

enhances responsiveness 

and also increases repeatability 

and accuracy at the 

nanometer level, because the 

friction and force exerted by a 

moving cable are eliminated 

(see the “Tutorial” section, 

page 4-1 ff. for further details). 


P-733 NanoPositioners are 

equipped with low-voltage 

piezoelectric drives (0 to 100 V) 

integrated into a sophisticated 

flexure guiding system. The 

force exerted by the piezo 

drive pushes a multi-flexure 

parallelogram via an integrated 

motion amplifier. The wire- 

EDM-cut flexures are FEA 

modeled for zero stiction/friction, 

ultra-high resolution and 

exceptional guiding precision. 

Integrated capacitive position 

feedback sensors provide subnanometer 

resolution and stability 

in closed-loop operation 

(with PI electronics). 

Operation in UHV 


vacuum down to 10 -9 hPa PI 

offers a special version of the 

P-733.2UD. 

It is nonmagnetic (as well as 

non magnetizable) and contains 

vacuum qualified components 

only. These guarantee 

mimimal outgassing rates and 

an optimal UHV suitability. 

Ultra-Fast Scanning 

in XY and XYZ 

With the same footprint as the 

P-733, the P-733.2DD and 

P-733.3DD Versions offer a 

resonant frequency of up to 

2 kHz in X and Y. This enables 

millisecond scanning rates 

with sub-nanometer resolution 

over a range of 30 µm x 30 µm 

( x 10 µm).


Models P-733.2CL P-733.2CD Units Notes see 

p. 2-44 

Active axes X,Y X,Y 

Open-loop travel @ 0 to 100 V 100 � 100 100 � 100 µm ±20% A2 

Closed-loop travel � 100 � 100 100 � 100 µm A5 

Integrated feedback sensor 

Closed-loop / open-loop ** 

2 x capacitive 2 x capacitive B 

resolution � 0.3 / 0.2 0.3 / 0.2 nm C1 


Full-range repeatability (typ.) ±2.5 ±2.5 nm C3 

Stiffness 

Push/pull force capacity 

2 2 N/µm 

±20% 

D1 

(in operating direction) 300 / 100 300 / 100 N D3 

Max. (±) normal load 2 2 kg D4 

Tilt (� /� ) (typ.) X Y 1/3 1/3 µrad E1 

Electrical capacitance 7.2 / axis 7.2 / axis µF ±20% F1 

* Dynamic operating current µA/ 

coefficient (DOCC) 9 / axis 9 / axis (Hz x µm) F2 

Unloaded resonant frequency 

Resonant frequency @ 

500 500 Hz ±20% G2 

200 g load 

Resonant frequency @ 

340 340 Hz ±20% G3 

500 g load 230 230 Hz ±20% G3 

Operating temperature range - 20 to 80 - 20 to 80 °C H2 

Voltage connection 2 x VL sub-D, special J1 

Sensor connection 4 x C sub-D, special J2 


Body material 

Recommended Amplifier/ 

Al Al L 

Controller 

(codes explained p. 6-46) 

H, F, L H, F, L 

* Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal 

scan of 30 µm at 10 Hz requires approximately 2.7 mA drive current. 

** Resolution of PZT NanoPositioners is not limited by friction or stiction. 

Noise equivalent motion with E-503 amplifier. 

P-733.2UD nonmagnetic XY nanopositioner for ultrahigh vacuum up to 10 -9 hPa. 

Ordering 

Information 

P-733.2CL 

XY PZT Flexure Stage, 

100 � 100 µm, Capacitive 

Sensors, Lemo Connectors 

P-733.2CD 

XY PZT Flexure Stage, 

100 � 100 µm, Capacitive 


P-733.2UD 

Ultrahigh Vacuum – XY PZT 

Flexure Stage, 100 � 100 µm, 

Capacitive Sensors, 

Non-Magnetic, Sub-D Connector 



P-733 dimensions (in mm) 

PZT Actuators 









Index 


info@pi.ws 

2-61

Ordering 

Information 

P-561.3CD 

PIMars XYZ NanoPositioner, 

100x100x100 µm 3 , 


P-562.3CD 


200x200x200 µm 3 , 


P-563.3CD 


300x300x250 µm 3 , 


P-561.2DD 

PIMars XY NanoPositioner, 45x45 µm 2 , 

Capacitive Sensors, 

High-Speed, Direct-Drive 

P-561.3DD 


45x45x10 µm 3 , Capacitive Sensors, 

High-Speed, Direct-Drive 

Vacuum Versions: 

P-561.3VD 


100x100x100 µm 3 , 

Capacitive Sensors, 10 -6 hPa 

P-562.3VD 


200x200x200 µm 3 , 


P-563.3VD 


300x300x250 µm 3 , 


P-561.3UD 


100x100x100 µm 3 , 


P-562.3UD 


200x200x200 µm 3 , 


P-563.3UD 


300x300x250 µm 3 , 


Further Vacuum Versions 

Available Invar, Super-Invar & 

Titanium Versions Available 

6-DoF Versions Available 

2-62 

P-560 

PIMars Multi-Axis Piezo Scanningand 

NanoPositioning Stages 

P-562.3CD PIMars NanoPositioning stage: 200 µm x 200 µm x 200 µm travel. 

� Single-Module, Parallel- 

Kinematics Design 

� Parallel Metrology / 

Capacitive Feedback for 

Nanometer Resolution 

� Low Out-of-Plane Motion 

� To 300 x 300 x 250 µm 

Travel Range 

� 66 x 66 mm Clear 

Aperture 

� Versions to 6-DoF 

� Ultra-fast XY and XYZ 

Versions Available 

� Ultrahigh Vacuum 

Versions up to 10 -9 hPa 

Available 

� Invar, Super-Invar and 

Titanium Versions 

Available 

Large Variety of Models 

and Options 

PIMars piezo stages are fast 

and highly accurate multi-axis 

scanning and nanopositioning 

systems that are offered in a 

large variety of travel ranges. 

Derived from the XYZ standard 

versions (including high-speed 

and vacuum versions) custom 

designs to 6 degrees of freedom 

are available on request. 

PIMars piezo stages are equipped 

with capacitive feedback 

sensors for highest linearity, 

accuracy and repeatability, in 


info@pi.ws 

the nanometer and sub-nanometer 

range, and provide a 

positioning and scanning range 

of up to 300 x 300 x 250 µm. 



Metrology 

P-560 PIMars piezo scanning 

stages are equipped with 




sensors measure the 

position of the moving platform 

rather than strain in the 

actuator (as is common with 

lower-precision strain gauge 

sensors). Parallel metrology 

can “see” all controlled 

degrees of freedom simultaneously 

and compensate for 

runout and crosstalk of orthogonal 

axes. A major advantage 

of the single-module parallelkinematics 

design is that there 

are no moving cables and no 

cable management issues to 

be resolved when integrating 

the unit. This design increases 

reliability, enhances responsiveness 

and also increases 

repeatability and accuracy at 

the nanometer level, because 

the friction and force exerted 

by a moving cable are eliminated 

(see the “Tutorial” section, 

page 4-1 ff. for further details). 

PIMars—Up to 6 Degrees of 

Freedom 

The new PIMars family of 

nanopositioning stages offers 

up to 6 degrees of freedom in 

the footprint 150 x 150 mm 2 

with travel ranges from 

100 µm to 300 µm per axis 

(and rotation up to 6 mrad). 

Direct Drive—Ultra-Fast 

Scanning and Positioning 

With the same footprint as 

standard PIMars stages, the 

P-561.2DD and P-561.3DD 

Versions provide a resonant 

frequency of up to 1 kHz in X 

and Y. This enables millisecond 

scanning rates with sub-nanometer 

resolution over a range 

of 45 µm x 45 µm ( x 10 µm). 




electronics with the DDL 

(Dynamic Digital Linearization) 








Working Principle/ 

Reliability 

PIMars NanoPositioning stages 

are equipped with ultrahigh-performance 

PICMA ® 

monolithic multilayer piezo 

actuators integrated into a 

Application 

Examples 


� Mask & wafer alignment 


� Surface metrology 


� Micromanipulation

sophisticated single-module, 

parallel-kinematics flexure guiding 

system. The newly designed 

and highly optimized 

piezo drives (first with 100% 

ceramic insulation) are more 




applications. The wire- 

EDM-cut flexures are FEA 

modeled for zero-stiction/zerofriction, 

ultra-high resolution 


Integrated capacitive 

position feedback sensors in a 

parallel-metrology configuration 

provide sub-nanometer 

resolution and stability in closed-loop 

operation (with PI 

electronics). 

Because guidance, sensors 

and actuators are all friction- 

P-562.3CD (unloaded) step and settle 

is faster than 15 ms in X, Y and Z. 

P-562.3CD with 330 g load settles 

within 40 milliseconds. 

less and maintenance-free, 

PIMars systems achieve 


Ultra-High Vacuum Option 


vacuum (to 10 -9 hPa) PI offers 

a special version of the 

P-562.3UD. It is non-magnetic 

(as well as non magnetizable) 

and contains vacuum qualified 

components only. These guarantee 

minimal outgassing 

rates and an optimal UHV 

suitability. 

P-561.3DD: same footprint, different direct-drive technology for 

highest resonant frequencies and ultra-fast scanning dynamics. 


PZT Actuators 









Index 

P-562.3CD dimensions in mm. 


info@pi.ws 

Model P-561.3CD P-562.3CD P-563.3CD P-561.3DD Units 

Active axes XYZ XYZ XYZ XYZ 

Closed-loop travel 100x100x100 200x200x200 300x300x250 45x45x10 µm 

Min. open-loop travel -20 to 120V 150x150x150 220x220x220 55x55x15 µm 

Integrated feedback sensor capacitive capacitive capacitive capacitive 

Open-loop resolution* 0.2 0.4 0.7 0.1 nm 

Closed-loop resolution* 0.8 1 1 0.2 nm 

Closed-loop linearity (typ.) 0.03 0.03 0.03 0.03 % 

Push force capacity (in X, Y, Z) 200, 200, 50 200, 200, 50 200, 200, 50 200, 200, 50 N 

Pull force capacity (in X, Y, Z) 30, 30, 30 30, 30, 30 30, 30, 30 30, 30, 30 N 

Maximal load 50 50 50 50 N 

Resonant frequency unloaded (X, Y, Z) 190, 190, 380 170, 170, 315 920, 920, 1050 Hz ±20% 

Resonant frequency with 66 g load (X, Y, Z) 810, 810, 880 Hz ±20% 

Resonant frequency with 330 g load (X, Y, Z) 140, 140, 300 140, 140, 195 Hz ±20% 

Operating temperature -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C 

Voltage & sensor connection Sub-D special Sub-D special Sub-D special Sub-D special 

Body material Al Al Al Al 

Recommended controller E-710, E-710, E-710, E-710, 

E-500 System E-500 System E-500 System E-500 System 

* Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 digital piezo controller. 

2-63

P-615 NanoCube 350C NanoPositioning 

System, 350 x 350 x 250 µm travel range. 

Application 

Examples 

� Micromachining 


� Life sciences 

� Semiconductor test systems 

� Photonics packaging 

P-615 with optional fiber holder F-603.22. 

2-64 

P-615 

Ordering 

Information 

P-615.3CD 

NanoCube XYZ Piezo NanoPositioning 

Stage, 350 � 350 � 250 µm, 

Capacitive Sensors, Sub-D-Connector 

P-615.3CL 


Stage, 350 � 350 � 250 µm, 

Capacitive Sensors, Lemo Connectors 

P-615.30L 


Stage, 350 � 350 � 250 µm, 

Open-Loop, Lemo Connector 

NanoCube 350C XYZ 

Piezo NanoAlignment Systems 

� 350 � 350 � 250 µm 

Closed-Loop Travel Range 

� Parallel-Kinematics 

Design & Direct Capacitive 

Metrology for 

Highest Multi-Axis 

Accuracy 

� Compact Design: 

80 � 80 � 42 mm 

(Closed-Loop Version!) 

� 10 mm Clear Aperture 

� New PICMA ® PZT Drive 

with Extended Lifetime 

� 1 nm Resolution 

� Ideal for Alignment and 

Photonics Packaging 

Applications 

� Closed- and Open-Loop 

Versions 

� Vacuum Compatible to 

10 -6 hpa 

The P-615 NanoCube 350C 

is a novel, closed-loop, multiaxis 

Piezo NanoPositioning and 

alignment system. Its 350 � 

350 � 250 µm, XYZ positioning 

and scanning range comes 

in an extremely compact package. 

Equipped with a zero-stiction, 

zero-friction guiding system, 

this NanoCube provides 

motion with ultra-high 

resolution and settling times of 

only a few milliseconds. Openand 

closed-loop versions are 

offered to suit your application. 

Higher Precision Through 

Parallel-Motion Metrology 

& Parallel-Kinematics 

P-615s are based on a newly 

developed frictionless XYZ 

piezo scanner, equipped with 




sensors directly measure 

the position of the moving platform 

(rather than strain in the 


info@pi.ws 

drive system,as is common with 

lower-precision strain gauge 

sensors). Parallel metrology 

can “see” all controlled degrees 

of freedom simultaneously and 

compensate for runout and 

crosstalk of orthogonal axes. 


the inherent precision of the 

non-contact capacitive sensor 

an the parallel-kinematics design 

results in higher linearity, 

and provides superior responsiveness, 


and stability at the nanometer 

level. 

Double Stiffness 

As do the single-axis Nano- 

Positioners of the P-620 

PIHera Series, the P-615 

NanoCube 350C provides 

high stiffness combined with 

very large travel ranges. The 

unique flexure design provides 

for twice the stiffness in 

the vertical axis, (compared to 

X or Y), allowing for faster 

response and higher operating 

frequencies under load. For 

example, the settling-time 

(with 100 g load!) to reach a 

commanded position with 1% 

accuracy is only 15 ms in 

the Z-axis (approximately 35 % 

faster without load). 

Photonics Alignment 

The NanoCube 350C is 

equipped with a fiber adapter 

interface similar to the 

P-611.3SF NanoCube (page 

8-16) and accommodates all 

F-603-series fiber holders and 

accessories (page 8-26). 

Working Principle with 


P-615 NanoPositioners are 

equipped with the unique 

P-885 PICMA ® monolithic 

multilayer piezo actuators integrated 

into a sophisticated 

flexure guiding system. The 

wire-EDM-cut flexures are FEA 

(finite element analysis) modeled 

for zero stiction and zero 

friction, highest possible resolution 

and exceptional guiding 

precision. The newly designed 

and highly optimized drives are 

more robust than conventional 


superior lifetime in dynamic and 

static applications. Because 

guidance and sensors are all 

frictionless and maintenancefree, 

NanoCube systems 

achieve exceptional levels of 

reliability. Integrated capacitive 

position feedback sensors provide 

nanometer-scale resolution 

and stability in closed-loop 

operation (with PI control electronics). 

Notes 

See the “PZT Control Electronics” 

section for our comprehensive line 

of low-noise modular and OEM 

control electronics for computer 

and manual control.

P-615 dimensions in mm. The clear aperture has a diameter of 10 mm. 

P-615, X-axis with 100 g load performing 100 nm steps in rapid 

sequence without overshoot. Settling time for the Z-axis to reach 

a commanded position with 1 % accuracy is only 15 ms. 


PZT Actuators 









Index 


info@pi.ws 

Models P-615.3CD P-615.30L Units Notes see 

p. 2-44 

Active axes X,Y,Z X,Y,Z 

Min. open-loop travel 400 in X,Y; 400 in X,Y; 

-20 to 120 V 300 in Z 300 in Z µm A2 

Closed-loop travel 350 in X, Y; 

250 in Z - µm A5 

Integrated feedback sensor capacitive - B 

Closed / open-loop* resolution 1.0/0.5 - /0.5 nm C1 

Closed loop linearity (typ.) 0.02 - % 

Pitch and yaw

S-334.2SL 

Application 

Examples 

� Laser beam steering and scanning 

� Image stabilization 

� Laser beam stabilization 

� Beam switching 

� Adaptive optics systems 

� Imaging systems 

Ordering 

Information 

S-334.2SL 

Piezo Tip/Tilt Platform, 50 mrad, 

Closed-Loop 

Notes 

The S-334 is equipped with a factory 

installed mirror 10 mm in diameter and 

2 mm thick (flatness �/5, reflectivity 

> 98% from 500 nm to 2 µm). 

Custom coatings and mirrors up to 

12.5 mm diameter are available on 

request. Please contact your PI sales 

engineer. 

3-18 



S-334 

Ultra-Long-Range Piezo Tip/Tilt Platform, 

50 mrad (3°) with Mirror 

� Tilt Range up to 50 mrad 

(3°) in 2 Fixed Orthogonal 

Axes 

� 1.0 kHz Resonant 

Frequency with Mirror 

� Closed-Loop Version 

� For Mirrors up to 

12.5 mm (0.5”) Diameter 

� Common Pivot Point 

� Sensor Configuration for 

Excellent Temperature 

Stability 

S-334 dimensions in mm 


info@pi.ws 

S-334 tip/tilt platforms are fast 

and compact units, providing 

precise angular movements of 

a mirror around two orthogonal 

axes. The tip/tilt range is 

50 mrad with sub-µrad resolution. 

In closed-loop operation, 

highest stability and accuracy 

is available. 

Huge Tip/Tilt Ranges 

with Excellent Motion 

Characteristics 

The novel lever design combines 

the exceptional large 

tip/tilt range of 3° (mechanical 

tilt, which is equivalent to 

100 mrad optical beam deflection) 

with the high resonant 

frequency of 1.0 kHz (including 

the mirror). These parameters 

make the system unique in the 

market of high-speed, longrange 

scanners. 

Sub-Microradian Resolution 

and Stable Positioning 

The S-334 provides sub-microradian 

resolution. When operated 

in closed-loop mode, it 

offers absolute position control 

and high linearity of typically 

under ±0.25% over the entire 

travel range. This is achieved 

by high-resolution, full-bridge 

strain gauge sensors (SGS), 

calibrated specifically for each 

unit with the control electronics. 

Recommended control electronics: 

the E-500 system, configured 

for tip/tilt mirrors with 

E-501.00 chassis, E-503.00S 

amplifier and E-509.S3S servocontroller. 


The S-334 is equipped with 

two pairs of low-voltage piezoelectric 

linear drives (0 – 100 V) 

operating as a unit in push/pull 

mode. The linear drive actuators 

are driven differentially 

in diagonal pairs. The casing 

is equipped with integrated, 

FEA-modeled flexures featuring 

zero stiction, zero friction 

and exceptional guiding precision.


Models S-334.2SL 

Active Axes � X , � Y 

* Open-loop tilt angle @ 0 to 100 V 50 mrad (±25 mrad) ±20% 

* Closed-loop tilt angle 50 mrad (±25 mrad) 

Integrated feedback sensor full-bridge strain gauge sensors 

Closed-loop / open-loop angular resolution < 5 / 0.5 µrad 

Closed-loop linearity (typ.) ±0.25% 

Electrical capacitance 3.6 µF/axis ±20% 

Resonant frequency with 10 mm diam. 1.0 kHz ±20% 

x 2 mm glass mirror 

Resonant frequency with 12.5 mm diam. 0.8 kHz ±20% 

x 2.5 mm glass mirror 

Distance of pivot point to platform surface 2 ±0.5 mm 

(lower mirror surface) 

Operating temperature range -20 to 80 °C 

Voltage connection 3 x LEMO FFA.00.250 male, 2 m 

Sensor connection 2 x LEMO FFA.0S.304 female, 2 m 

Weight (without cables) 65 g ±5% 

Standard mirror diameter: 10 mm, 

thickness: 2 mm, 

BK7, �/5, R > 98% 

(�=500 nm to 2 µm) 

Material casing Titanium 

* Mechanical tilt, optical beam deflection is 100 mrad. 

S-334.2SL cable configuration 

PZT Actuators 









Index 


info@pi.ws 

3-19

S-325.20L 

Ordering 

Information 

3-20 

S-325 

S-325.2SL 

Piezo Tip/Tilt Platform and Z-Positioner, 

5 mrad, 30 µm, Closed-Loop 

S-325.20L 

Piezo Tip/Tilt Platform and Z-Positioner, 

5 mrad, 30 µm, Open-Loop 

Application 

Examples 

� Image stabilisation 

� Laser beam stabilization 

� Beam switching 

� Adaptive optics systems 

� Laser beam steering and scanning 

� Laser cavity tuning 

S-325 cable configuration (upper picture S-325.20L, 

lower picture S-325.2SL) 

High-Speed Piezo Tip/Tilt 

Platform and Z Positioner 

� Tip/Tilt Range 

up to 5 mrad 

� Piston Movement 

up to 30 µm 


� Closed-Loop Versions 

� For mirrors up to 25 mm 

(1”) Diameter 

The S-325 multi-axis tip/tilt 

platforms and Z-positioners are 

fast and compact units based 

on the triple-piezo-drive supported 

platform design (see 

page 3-7 in the PI NanoPositioning 

catalog for details). 


info@pi.ws 

High Resolution, 

Rapid Motion and 

Stable Positioning 

The S-325 offers piston movement 

up to 30 µm (ideal for 

path length adjustment) and 

tilt movement up to 5 mrad 

(mechanical tilt, which is equivalent 

to 10 mrad optical beam 

deflection) with sub-msec 

response and settling. The 

zero-friction PZT drives allow 

sub-nm linear resolution and 

sub-µrad angular resolution. 

The S-325 systems are designed 

for mirrors and optics 

up to 25 mm diameter and can 

be mounted in any orientation. 

OEM Proven 

Developed for industrial applications, 

S-325s have performed 

109 motion cycles 

without failure for OEM applications. 


The S-325 tip/tilt platforms are 

equipped with three low-voltage 

piezoelectric (0 to 100 V) 

linear drives. The closed-loop 

model features additional position 

feedback. 

S-325.20L Open-Loop Z, 

Tip/Tilt Positioner 

The S-325.20L open-loop model 

is ideal for applications where 

the position is controlled by an 

external loop based on data 

provided by a sensor (e. g. PSD 

quad cell, CCD chip,...). All three 

piezo linear actuators can be 

driven individually (or in parallel) 

by a three-channel amplifier. 

Vertical (piston movement) 

positioning and tip/tilt positioning 

is possible. 


E-663.00, the E-500 

system, configured for 3 channels 

(low or high-power amplifiers) 

or 3 x E-610.00 or 3 x 

E-621.00. 

S-325.2SL Closed-Loop Z, 

Tip/Tilt Positioner 

The S-325.2SL closed-loop version 

allows absolute position 

control, high linearity and repeatability 

based on the internal 

position sensors. All three 

piezo linear actuators are 

equipped with high-resolution 

strain gauge sensors and can 

be driven individually (or in 

parallel). Vertical positioning 

(piston movement) and tip/tilt 

positioning is possible. The 

integrated position feedback 

sensors provide sub-µrad (subnanometer 

for piston mode) 

resolution (with PI control electronics). 


The E-500 system, 

configured for 3 channels 

(low or high-power amplifiers) 

and E-509 controller, or 3 x 

E-610.SR or 3 x E-621.SR.

S-325.20L dimensions in mm 

S-325.2SL dimensions in mm 

PZT Actuators 









Index 



info@pi.ws 

Models S-325.20L S-325.2SL Units 

Active Axes � X , � Y , Z � X , � Y , Z 

* Open-loop tilt mrad 

angle @ 0 to 100 V ** 5 (± 2.5) ** 5 (± 2.5) ± 20% 

* Closed-loop 

tilt angle - ** 4 (± 2) mrad 

* Open-loop linear µm 

travel @ 0 to 100 V 30 30 ± 20% 

* Closed-loop linear 

travel @ 0 to 100 V - 30 µm 

Integrated feedback strain 

sensor - gauge 

sensor 

Closed-loop/open-loop 

angular resolution 

Closed-loop/open-loop 

-/±0.05 0.1/±0.05 µad 

linear resolution -/1.0 0.5/1.0 nm 

Electrical capacitance 3 x 3.6 3 x 3.6 µF 

±20% 

Unloaded resonant kHz 

frequency 

Resonant frequency 

2 2 ±20% 

with 25 x 8 mm glass kHz 

mirror 

Distance of pivot point 

1 1 ±20% 

to platform surface 

Platform moment of 

6 ±0.5 6 ±0.5 mm 

inertia 515 515 gmm2 Operating temperature 

range -20 to 80 -20 to 80 °C 

Voltage connection 3 x VL, 3 x VL, 

2.0 m 2.0 m 

Sensor connection - 3 x L, 

2.0 m 

Weight (without cables) 65 65 g ±5% 

Material casing Al Al 

* For maximum tilt range, all three piezo actuators 

must be biased at 50 V. 

Linear travel and and tilt angle are interdependent. 

The values quoted here refer to pure linear / pure 

angular motion. 

** Mechanical tilt, optial beam deflection is twice as 

large. 

3-21

Ordering 

Information 

6-48 

E-710 

E-710.3CD 

Digital Piezo Controller, 3 Axes, 

Sub-D-Special Connector, RS-232 & 

IEEE-488 Interface 

E-710.4CL 

Digital Piezo Controller, 4 Axes, Lemo 

Connectors, RS-232 & IEEE 488 Interface 

E-710.4CD 

Digital Piezo Controller, 4 Axes, Sub-D 

Connector, RS-232 & IEEE 488 Interface 

E-710.P3D 

Digital Piezo Controller, 3 + 1 Axes, 

Sub-D-Connectors, RS-232, IEEE-488 

& High-Speed PIO Interface 

E-710.P4L 


LEMO Connectors, RS-232, IEEE 488 


E-710.P4D 


Sub-D Connectors, RS-232, IEEE 488 


E-710.6CD 


Sub-D-Special Connectors RS-232 

& IEEE 488 Interface 

Options 

E-710.SCN 

Dynamic Digital Linearization 

Upgrade 

E-710.3x3 

Extension Cable Piezo NanoPositioning 

Stage / E-710.3CD Controller, 3 m 

E-710.3x5 

Extension Cable Piezo NanoPositioning 

Stage / E-710.3CD Controller, 5 m 

E-710.1x3 

Extension Cable 3m, E-750 / E-710 

to Piezo Flexure Stage, 1 Channel Sub-D 

High-Speed Digital NanoAutomation ® 

Piezo Controllers 

E-710.6CD 6-axis digital piezo controller 

shown with custom Super Invar 6-DOF 

piezo flexure NanoPositioning stage. 

� For Piezo NanoPositioners 

with Capacitive Feedback 

Sensors 

� 3-, 4- & 6-Channel Versions 

� 32-Bit Digital Filters 

� Polynomial Linearization 

� Coordinate Transformation 

for Parallel Kinematics / 

Parallel Metrology Systems 

� Optional Dynamic Digital 

Linearization (Firmware 

Option) Improves 

Scanning Linearity 

� AutoCalibrate Function 

for Easy Controller / 

Stage Interchangeability 

� Fast RS-232 and IEEE 488 

Interfaces 

� Optional High-Speed 

Parallel Port Interface 

� Extensive Software 

Support 

E-710 digital piezo controllers/ 

drivers are the most advanced 

and flexible controllers for 

piezo nanopositioning and 

scanning stages on the market. 

Based on powerful 32-bit 

DSPs (digital signal processor) 

they control up to six-degrees 

of freedom with integrated 

power amplifiers for multilayer 

PZT drives (-20 to 110 V) and 


info@pi.ws 

signal conditioning electronics 

for two-plate capacitive position 

sensors. E-710 controllers 

represent a major advance 

over conventional multi-axis 

controllers because the sensor 

and output channels of two or 

more axes can participate in an 

internal coordinate transformation 

for multi-axis parallel-kinematics 

positioning systems with 

parallel-motion metrology, e.g. 

the P-500 series on page 2-32. 

Parallel Motion Metrology 

“Sees” all Controlled 

Degrees of Freedom 

Simultaneously 

Parallel-kinematics nanopositioning 

systems with parallelmetrology 

position feedback 

are superior to stacked or nested 

multi-axis positioning systems. 

They allow active trajectory 

control, automatic crosstalk 

and runout compensation 

and provide direct, non-contacting 

position information, 

measuring motion exactly 

where it matters (rather than 

measuring the strain in the 

drive system, a technique 

common in lower-precision 

positioning systems relying on 

the feedback of piezo resistive 

sensors). 

Integrated Linearization 

Systems 

E-710-controlled nanopositioning 

systems boast outstanding 

linearity, achieved by PI’s proprietary 

ILS (Integrated Linearization 

System) and additional 

digital polynomial linearization. 

The ILS, part of the E-710’s 

capacitive position sensor signal 

conditioning circuitry, compensates 

for influences caused 

by non-parallelism of the sensor 

plates. The digital polynomial 

linearization is calibrated 

for each individual nanopositioning 

system and can 

improve linearity to 0.001% 

over the full travel range. 


for Volume Buyers E-710 data acquisition and analysis functions (Bode plots, etc.) help optimize 

performance of NanoPositioning systems. 

Section 4, 5 and pages 6-1 to 6-46 

see the hardbound PI catalog

System Analysis—Advanced 

Software Tools 

The E-710 comes with the 

NanoCapture software featuring 

advanced functions for 

measuring-system response, 

step-and-settle and Bode plots. 

All positioning commands use 

standard units such as micrometers 

or microradians, for easy 

programming. In addition, all 

control parameters are nonvolatile, 

user-accessible and 

can be easily modified and 

optimized. Fully programmable 

low-pass & notch filters round 

out the E-710. 

Integrated Wave 

Generator & Look-up Table 

The implementation of a wave 

generator for all E-710 models 

allows the synchronous driving 

of several axes with a mathematical 

function or with a userdefined 

random signal stored 

in a lookup table containing 

65,535 points. Programmable 

trigger inputs and outputs facilitate 

synchronization with 

external events. 

Communication / Interfaces 

E-710 controllers are equipped 

with fast RS-232 and IEEE 488 

interfaces. The optional parallel 

port I/O (PIO) interface allows 

the fastest possible position 

setting/reading (20,000 positions 

per second bypassing the 

command parser). 


Improves Scanning 

Linearity up to 3 Orders of 

Magnitude 

Control theory predicts that 

conventional PID (proportional 

Extensive 

Software Support 

The E-710 controller comes with a 

variety of software tools as well as 

LabView TM drivers and DLL’s for easy 

setup, system analysis and integration. 


integral derivative) servo motion 

controllers exhibit phase 

lag and tracking errors in 

dynamic operation (due to the 

fact that a PID controller needs 

to see an error first before a 

reaction occurs, and also due 

to the nonlinear nature of PZT 

material). Depending on the 

controller settings and specs 

of the nanopositioning system 

driven, tracking errors (the difference 

between the commanded 

position and actual 

position) can reach double-digit 

percentage values even at 

Triangular scanning signal at 312 Hz. There is a significant 

difference (2.6 µm max.) between target and real position with 

the conventional PID motion controller. 

Elliptical scan in a laser micro-drilling application with XY 

piezo scanning stage, conventional controller, 60 msec/rev. 

The outer curve ellipse describes the target position, the inner 

ellipse shows the actual motion at the stage. 

moderate scanning rates. 

Consequently, scanning stages 

often cannot be driven at the 

desired rates, or the acquired 

data has poor linearity. 

The new E-710.SCN Dynamic 

Digital Linearization upgrade 

(standard for the E-710.6CD 

6-axis controller, optional for 

the 3- and 4-channel versions) 

solves this problem. This PIexclusive 

technology is a 

breakthrough for scanning 

applications, reducing phase 

lag and nonlinearity to indiscernible 

levels, even with high- 

PZT Actuators 









Index 


info@pi.ws 

frequency dynamic actuation 

under load. The effect is an 

improvement in linearity (and 

usable bandwidth) of up to 

three orders of magnitude, 

resulting in significantly increased 

throughput. Dynamic 

Digital Linearization works 

both in single-axis and multiaxis 

applications (see graphs). 

Triangular scanning signal at 312 Hz, with the E-710 with dynamic 

digital linearization. The difference between the target positon 

and the actual motion is indiscernible. The maximum error is 

only 7 nanometers. 

Same scan as before, with dynamic digital linearization. 

Target and actual data can hardly be discerned. 

6-49

6-50 

NanoCapture TM Software for E-710 Digital Piezo Controllers 

� Allows Optimization 

of all Servo Parameters 

� Measures System Response, 

Step and Settle, 

Resonant Frequency, 

Bode Plots 

� Increases Throughput 

� Wave Generator: Defines 

and Simulates Waveforms 

and Reports Wave 

Generation Results 

The NanoCapture software 

provided with the E-710 digital 

piezo controller is a versatile tool 

for system response analysis 

and optimization and for the 

definition and generation of 

waveforms. 

Advanced Analysis Tools 

In addition to standard functions 

for the operation of piezo 

NanoPositioning systems, 

NanoCaptureTM features advanced 

measuring and analysis 

functions for resonant frequency, 

overshoot, step-andsettle, 

Bode plots, etc. These 

features are specifically useful 

when the mechanical properties 

of a factory-calibrated system 

are changed at the operating 

site by parameters such as 

an increased or reduced payload, 

a different orientation or 

different damping conditions. 

In this case, parameters such 

as servo-gain, notch-filter frequency, 

or the position sensor’s 

zero point, etc. need to 

be adjusted to maintain optimum 

system response and 

stability. NanoCaptureTM supports 

the operator in determining 

system resonant frequency, 

rise time, and settling 

time by analyzing the dynamic 

position feedback data from 

the NanoPositioning system’s 

integrated capacitance sensors 

(no other metrology or measur- 

ing instruments are required!). 

Based on this data, servo 

parameters are easily adjusted 

for optimized settling under 

any load condition. 

Wave Generator Handling 

In addition to its system analysis 

and optimization functionalities, 

the NanoCaptureTM software 

allows convenient handling 

of the wave generator 

feature of the E-710 controller: 

� Rapidly perform simple 

waveforms as well as 

circular trajectories with 

two axes 

� Design complex waveforms 

� Save defined wave segments 

to the controller 

The NanoCapture TM software 

also permits the user to see 

the effects of the E-710.SCN 


upgrade on the position accuracy 

of repetitive functions 

such as scans. 


info@pi.ws 

Step response of a (poorly damped), open-loop NanoPositioning system. Data acquisition 

with E-710 and NanoCapture TM software. 

Closed-loop response of a NanoPositioning system with optimized servo settings. 

Data acquisition with E-710 and NanoCapture TM software. 

E-710 internal wave generator. Data acquisition with E-710 and NanoCapture TM software.


Model E-710.3CD E-710.4CD/E-710.4CL/E-710.P3D/ E-710.6CD 

E-710.P4D/E-710.P4L 

Function Digital NanoAutomation ® Digital NanoAutomation ® Digital NanoAutomation ® 

PZT controller and PZT controller and PZT controller and 

power amplifier power amplifier power amplifier 

Axes 3 4 6 

Sensor Capacitive sensors Capacitive sensors Capacitive sensors 

Processor DSP 32-bit floating point, 33 MHz DSP 32-bit floating point, 33 MHz 2 x DSP 32-bit floating point, 33 MHz 

Sampling interval 50 µs (sensor), 50 µs (sensor), 40 µs (sensor), 

200 µs (servo-loop, 4 axes) 200 µs (servo loop, 4 axes) 200 µs (servo-loop, 6 axes) 

Effective Resolution DAC 20-bit 20-bit 20-bit 

Maximum output power 25 W / channel 25 W / channel 25 W / channel 

Average output power 6 W / channel 6 W / channel 6 W / channel 

Peak output current < 20 ms 200 mA / channel 200 mA / channel 200 mA / channel 

Average output current > 20 ms 60 mA / channel 60 mA / channel 60 mA / channel 

Current limitation Short-circuit proof Short-circuit proof Short-circuit proof 

Output voltage -20 to +110 V -20 to +110 V -20 to +110 V 

PZT voltage output sockets 3-channel sub-D special 3-ch. + 1ch. sub-D, special LEMO ERN.00.250.CTL 

(models E-710.P3D only), 4x 1-ch. (E-710.xxL only) 

Sub-D, special (models E-710.4CD 

and E-710.P4D only) 

2x 3-channel sub-D special 

Sensor sockets 3-channel sub-D, special 3-ch. + 1 ch. sub-D, special 

(models E-710.P3D only), 4x 1-ch. 

Sub-D, special (models E-710.4CD 

and E-710.P4D only) 

LEMO PSA.00.250.CTAC22 

(models E-710.xxL only) 

2x 3-channel sub-D, special 

Interfaces RS-232 and IEEE 488 RS-232 and IEEE 488, RS-232 and IEEE 488, all models 

all models (for ASCII 

command structure) 

PIO (models E-710.Pxx only) 

(for ASCII command structure) 

Software PZT Control, NanoCapture, PZT Control, NanoCapture, PZT Control, NanoCapture, 

LabViewTM Drivers, DLLs LabViewTM Drivers, DLLs LabViewTM Drivers, DLLs 

Dimensions 450 x 105 x 390 mm 450 x 105 x 390 mm 450 x 105 x 390 mm 

Weight 7 kg 7 kg 7 kg 

Power consumption (max) 60 W 60 W 60 W 

Operating voltage 90-120 or 220-264 VAC, 50-60 Hz 90-120 or 220-264 VAC,50-60 Hz 90-120 or 220-264 VAC, 50-60 Hz 

Connectors of E-710.4CD and E-710.P4D. PIO interface and status LEDs present on 

the E-710.P4D version only. 

PZT Actuators 









Index 


info@pi.ws 

Connectors of E-710.4CL and E-710.P4L. PIO interface and status LEDs present on 

the E-710.P4L version only. 

Connectors of E-710.3CD and E-710.P3D. PIO interface, status LEDs and 4th-channel 

connector present on the E-710.P3D version only. 

6-51

Ordering 

Information 

6-52 

E-621 

E-621.SR 

LVPZT Amplifier & Servo-Controller 

Module, Strain Gauge Sensor, 

RS-232 Interface 

E-621.LR 


Module, LVDT Sensor, RS-232 Interface 

E-500.621 

Basic Chassis, 19”, for up to 

12 Modules, Including Power Supply 

E-501.621 

Basic Chassis, 9.5”, for up to 

4 Modules, Including Power Suppy 



Module with High-Speed RS-232 Interface 

� Integrated 20-Bit High- 

Speed RS-232 Interface 

� Network Capability 

with up to 12 Channels 

� For LVDT and Strain 

Gauge Position Sensors 

The E-621 is a newly developed 

improvement on the 

E-610-series modular controller/amplifier 

for low-voltage 

PZTs and offers the full functionality 

of that line. In addition, 

the E-621 is equipped with an 

RS-232 interface and command 

interpreter, the submodule. 

New and Fast 

Communications Interface 

The RS-232 interface handles 

the communications with the 

outside world. It performs up 

to 300 read or write operations 

per second and incorporates 

Models E-621.SR, E-621.LR 

Function Power amplifier & position servo-control of LVPZTs 

Channels 

Amplifier 

1 

Maximum output power 14 W 

Average output power 6 W 

Peak output current < 5 ms 140 mA 

Average output current 60 mA 

Current limitation Short-circuit proof 

Voltage gain 10 +/- 0.1 

Polarity Positive 

DC-offset setting 0 to +100 V 

Input Impedance 100 k� 

Dimensions 7T wide, 3H high 

Operating voltage 13 to 30 VDC, stabilized 

Operating current 


2 A 

D/A converter 20-bit resolution 

A/D converter (sensor) 20-bit resolution 

Baudrate 9.6 kBaud – 115.2 kBaud (default 115.2) 

Wave table 

Position Servo-Control 

64 values, 100 Hz, externally triggered (in preparation) 

Sensor types Strain gauge (E-621.SR), LVDT (E-621.LR) 

Servo characteristics 

Connectors 

P-I analog, notch filter 

PZT connector LEMO ERA.00.250.CTL 

Sensor connector LEMO EPL.0S.304.HLN 

Analog input SMB 

Monitor output SMB 

RS-232 9-pin sub-D (male) 


info@pi.ws 

E-621 Module 

precision 20-bit D/A and A/D 

converters for exceptional 

positional stability and resolution. 

The sub-module assumes 

all communications tasks with 

the host PC and/or with other 

networked modules in the 

system. 

Multi-Axis Network 

Communications between 

several E-621s with any combination 

of SGS and LVDT sensors, 

is also handled by the 

interface sub-module. Up to 

12 modules can be networked 

and controlled over a single 

RS-232 interface. The different 

modules are connected in parallel 

(not daisy-chained) over 

the link. A special chassis 

(E-500.621) is available for up to 

12 E-612 modules. It automatically 

provides the power and 

network connections to the 

individual E-621 modules, so 

no additional wiring is required. 

Only an additional 10 ms internal 

bus communications time 

is required to reach any of the 

units behind the one actually 

connected to the host PC. 

PI General Command Set 

The E-621 is to a large extent 

freely programmable and its 

command structure conforms 

to the PI General Command 

Set. This command set is common 

to the E-516 Piezo 

Interface and Display Module 

(see p. 6-58) and an increasing 

number of PI controllers. All 

new controllers for motors and 

actuators will understand these 

commands, either directly or 

via command libraries. This will 

greatly reduce the effort required 

to produce custom programs, 

especially in environments 

which include a number 

of different controllers. Included 

with the E-621 is userinterface 

software as well 

LabView and other driver 

sets.

E-621 open-loop frequency response with various PZT loads. Values shown are capacitance in µF, measured in actual PZT. 

4 x E-621 in an E-501.621 chassis 

PZT Actuators 









Index 


info@pi.ws 

6-53

E-665.SR 

Ordering 

Information 

E-665.SR 

LVPZT Amplifier & Position Controller, 

Strain Gauge Sensors, RS-232 Interface 

E-665.LR 


LVDT Sensors, RS-232 Interface 

E-665.CR 


Capacitive Sensors, RS-232 Interface 

Custom Designs for Volume Buyers 

6-54 

E-665 

LVPZT Amplifier & Position Servo-Controller 

with High-Speed RS-232 Interface 

� Integrated 20-Bit High- 

Speed RS-232 Interface 

� Network Capability with 

up to 12 Channels 

� 36 W Peak Power 

� Position Servo-Control 

� For Strain Gauge, LVDT 

and Capacitive Sensors 

The E-665 is a bench-top, lowvoltage 

PZT amplifier and position 

servo-controller with integrated 

high-speed RS-232 

computer interface and a 20bit 

D/A converter. The E-665 

supports all position sensors 

offered with PI piezo translators 

and NanoPositioning stages: 

strain gauge sensors, LVDT 

sensors and capacitive sensors. 

It is ideal for use with single-axis 

translators such as 

� P-841 stack actuators with 

strain gauge sensors 

� P-721 PIFOC ® microscope 

objective positioners with 

LVDT or capacitive sensors 

� P-620 PIHera series singleaxis 

stages with travel up to 

500µmandcapacitive sensors 

� P-753 LISA/P-752 series 

NanoAutomation ® stages 

with capacitive sensors 


info@pi.ws 

New and Fast 

Communications Interface 

The RS-232 interface handles 

communications with the outside 

world. It performs up to 

300 bidirectional read or write 

operations per second and 

incorporates precision 20-bit 

D/A and A/D converters for 

exceptional positional stability 

and resolution. 

Multi-Axis Network 

Up to 12 E-665s can be networked 

and controlled over a 

single RS-232 interface. 


The E-665 is to a large extent 





to the E-516 Computer 

Control and Display Module 

and an increasing number of PI 

controllers, and is designed for 

multi-axis operation. It is PI’s 

goal to make all of its controllers 

“understand” these 

commands, either directly or 

via command libraries. This will 

greatly reduce the effort 

required to produce custom 

programs, especially in environments 

which include a 

number of different controllers. 

Included with the E-665 is 

user-interface software as well 


sets. 

Screenshot of PZT-Control software for E-665. The commands listed in the editor are 

part of the PI General Command Set.

E-665, open-loop frequency with various PZT loads. Capacitance values are in µF, 

measured in actual PZT. 


PZT Actuators 









Models E-665.SR E-665.LR E-665.CR 

Index 


Function Power amplifier & sensor/ Power amplifier & sensor/ Power amplifier & sensor/ 

position servo-control of LVPZTs position servo-control of LVPZTs position servo-control of LVPZTs 

Channels 1 1 1 

Amplifier 

Maximum output power 36 W 36 W 36 W 

Average output power 12 W 12 W 12 W 

Peak output current < 5 ms 360 mA 360 mA 360 mA 

Average output current > 5 ms 120 mA 120 mA 120 mA 

Current limitation short-circuit proof short-circuit proof short-circuit proof 

Voltage gain 10 ± 0.1 10 ± 0.1 10 ± 0.1 

Polarity Positive Positive Positive 

Control input voltage -2 to +12 V -2 to +12 V -2 to +12 V 

Output voltage -20 to 120 V -20 to 120 V -20 to 120 V 

DC offset setting 0 to 100 V with 10-turn pot. 0 to 100 V with 10-turn pot. 0 to 100 V with 10-turn pot. 

Input impedance 100 k� 100 k� 100 k� 

Display 2 x 4 1/2-digit, LED 2 x 4 1/2-digit, LED 2 x 4 1/2-digit, LED 

Control input socket: BNC BNC BNC 

PZT voltage output socket LEMO ERA.00.250.CTL LEMO ERA.00.250.CTL Combo sub-D; size DB 

Dimensions 235 x 103 x 288 mm 235 x 103 x 288 mm 235 x 103 x 288 mm 

Weight 2.5 kg 2.5 kg 2.5 kg 

Operating voltage 90 –120 / 220–240 VAC, 90–120 / 220–240 VAC, 90 –120 / 220–240 VAC, 

50 –60 Hz (linear P/S) 50–60 Hz (linear P/S) 50–60 Hz (linear P/S) 


D/A Converter 20-bit resolution 20-bit resolution 20-bit resolution 

Baudrate 9.6 kBaud –115.2 kBaud 9.6 kBaud –115.2 kBaud 9.6 kBaud – 115.2 kBaud 

(default 115.2 kBaud) (default 115.2 kBaud) (default 115.2 kBaud) 

Wave Table 64 data points, 100 Hz, 64 data points, 100 Hz, 64 data points, 100 Hz, 

externally triggered externally triggered externally triggered 

Position Servo-Control 

Sensor Type SGS LVDT capacitive 

Servo Characteristics P-I (analog) + notch filter P-I (analog) + notch filter P-I (analog) + notch filter 

Sensor socket LEMO ERA.0S.304.CLL LEMO ERA.0S.304.CLL Combo sub-D; size DB 

Sensor monitor output socket BNC BNC BNC 

info@pi.ws 

6-55

E-831.02 amplifier module. 

Ordering 

Information 

E-831.02 

Single-Channel Amplifier Module 

for LVPZTs 

E-841.05 

Power Supply Module for E-831, 

Input 10 to 30 V 

E-842.05 

Power Supply Module for E-831, 

Input 30 to 72 V 

E-841.05 power supply module 

6-56 

E-831 

E-841 

E-842 

OEM Piezo Amplifier and 

Power Supply Modules 

� Cost Effective 

� Small Size 

� Low Noise, High Stability 

� Easy-to-Use 

� Full Overcurrent, Short- 

Circuit and Temperature 

Protection 

� Power-up/down Without 

Voltage Spikes 

The E-831.02 OEM piezo 

amplifier module is a very 

compact, cost-effective, single-channel 

power amplifier for 

low-voltage piezoelectric actuators 

(LVPZTs). 

It provides a peak output 

power of 12 W and average 

power of 2 W (expandable to 

5 W with external heat sink). 

The E-831.02 is a high-precision 

amplifier with a fixed gain 

of 10.0 and outputs voltages in 

the range of -20 to 120 V for 

control input signals ranging 

from of -2 to 12 V. The output 

is fully compensated for the 

capacitive loads of up to 10 µF 

typical of PI’s low-voltage PZTs 

such as PICMA ® piezo actuators. 

For monitoring purposes, 

the output voltage is internally 

divided by 100 and provided at 

a special monitor pin. 

Because piezo actuators require 

virtually no power in ste- 


info@pi.ws 

adystate operation and the 

power consumption depends 

on the operating frequency, 

high-powered amplifiers are 

not required for many applications. 

With a peak output current 

of 100 mA (sink/source) 

the E-831 is well-suited for 

switching applications and fast 

transitions where the capacitive 

load (the piezo actuator) 

needs to be charged as quickly 

as possible. The small-signal 

bandwidth is about 3kHz. 

Power Supplies for E-831.02 

The E-841.05 (input voltage 

range 10 to 30V) and E-842.05 

(input voltage range 30 V to 

72 V) switched power supply 

modules provide all the operating 

voltages (+/-15 V, -26 V 

and +127 V DC) required by 

the E-831.02 amplifier module. 

Both models supply enough 

power for up to three E-831.02 

amplifiers with a total output 

power of 5 W. 

A sync. input on the power 

supply allows synchronization 

of the internal switching frequency 

with an external clock 

(185 to 220 kHz) for elimination 

of interference in ACdriven 

position sensors or 

DACs. 

Easy Implementation 

E-831 and E-841/E-842 modules 

are enclosed in metal 

cases with solderable pins for 

PCB mounting. They are designed 

to work together without 

additional components. 

Triple Safety 

The E-831 amplifier is shortcircuit 

proof with both a lowspeed 

current limiter of 50 mA 

and a high-speed (8 msec) current 

limiter of 100 mA. When 

the case temperature rises 

above 70°C (can be reached 

after a few minutes with maximum 

current) an internal temperature 

sensor shuts down 

the output stage until the temperature 

drops below 60°C. 

This operation mode is indicated 

by the active-high 

TEMP-OFL TTL status line. 

Scheme for a three-channel amplifier consisting of an E-841 power supply 

and three E-831 amplifiers.

Tiny: E-841.05/E-842.05 dimensions in mm. 

Tiny: E-831.02 dimensions in mm, decimal places 

separated by commas in drawings. 

Technical Data E-831.02 

Model: E-831.02 

PZT Actuators 









Index 

Function: Single-channel piezo amplifier module 

Operating voltages: +15 V / 20 mA (14 to16 V) 

(all currents without dynamic load) -15 V / 20 mA (-14 th -16 V) 

+127 V / 1.8 mA (+125 to 135 V) 

-26 V / 1.8 mA (-24 to -30 V) 

Output voltage range: from U+ - 6 V (121 V for U+ = 127 V) 

to U- + 8 V (-20 V for U- = 28 V) 

Gain 10 +/-0.1 

Max. output current: 100 mA for 8 ms (sink/source) 

Max. average current: 50 mA for 3 min without heatsink 


Output protection: short-circuit protected, the module is overload 

protected to 70°C case temperature 

Max. output power: 2 W without ext. heatsink 

5 W with ext. heatsink or forced airflow 

Control input range: -2 to +12 V 

Input impedance: 100 kohm 

Dynamic current requirements: depend on load, amplitude and slew rate 

Cut off frequency: 3.5 kHz, no load 

Operating temperature range: +5° to +50° Celsius 

Case Metal shielded case, size: 50x30x14 mm 

Soldering pins 1 mm diameter, 4 mm length 

Technical Data E-84x.05 

Models: E-841.05, E-842.05 

Function: Power Supply Module for E-831 

info@pi.ws 

Output voltages: +127 V, 30 mA 

-26 V, 30 mA 

+15 V, 50 mA 

-15 V, 50 mA 

Max. output Power: 8 W 

Max. average Power 8 W with forced air flow (5W without) 

Output protection: short-circuit protected (1 min.) 

Input voltage: 10 - 30 V (E-841.05) 

30 - 72 V (E-842.05) 

Quiescent current: 70 mA @15 V 

35 mA @30 V 

15 mA @72 V 

Max. input current: 1000 mA (E-841.05 @ 10V) 

200 mA (E-842.05 @ 72V) 

Power-on, peak current: 1500 mA 

Switching frequency 100 kHz typical 

External clock frequency: 200 kHz (185 - 220 kHz possible) 

Synchronization signal: preferred TTL-level with duty cycle 50%; operating 

from 1.8 Vpp and offsets within ±7 V 

Output ripple: < 100 mVpp 

Operating temperature range: 5° to +50° Celsius (with power derating above 40 °C) 

Case Metal shielded case, size: 50x44x14 mm 

Soldering pins 1 mm diameter, 4 mm length 

6-57

Ordering 

Information 

E-516.i3 

20-bit DAC Interface/Display Module, 

IEEE 488/RS-232, 3 Channels 

E-516.i1 

20-bit DAC Interface/Display Module, 

IEEE 488/RS-232, 1 Channel 



6-58 

E-516 

Computer Interface & Display Module 

� 6-digit LCD Display for 

Voltage & Displacement 

Data 

� Low-Noise, 20-Bit D/A 

Converters 

� IEEE 488 & RS-232 

Computer Interface 

� 1 or 3 Output Channels 

The E-516 is a microprocessorcontrolled 

interface and display 

module with integrated 20-bit 

D/A converters and IEEE 488 & 

RS-232-ports. 

The E-516 can be computercontrolled 

with more than 20 

ASCII commands that are 

interpreted and executed by 

the internal DSP. Each of the 

output channels can be addressed 

individually. The E-516 

provides an effective output 

resolution of 20-bits. Additional 

20-bit A/D converters read the 

PZT voltage and position. 

Communication/ 

Command Set 

For computer communication, 

both RS-232 and IEEE 488 

interfaces are installed. The 

E-516 support the PI General 

Command Set. To reduce your 

programming effort in the face 

of complex multi-axis positioning 

tasks, PI has introduced 

the PI General Command Set. 

All new controllers for motors 

and actuators will understand 

the commands of this set, either 

directly or through the use 

of command libraries which 

translate the standardized commands 

to low-level instructions 

to save communications 

time and/or bandwidth. The PI 

General Command Set is valid 

for different devices, and multiple 

devices can be controlled 

from one host PC with one or 

more interfaces. 


info@pi.ws 

E-516.i3 

Operation 

The E-516 can be used for both 

static and dynamic operation. 

Any desired functions can be 

uploaded to the internal data 

tables and executed per software 

command. Windows 

operating software, DLLs and 

LabView drivers are included. 


Notes 

The E-516 is not a stand-alone 

device. It is designed to work 

in the E-500/E-501 chassis, 

the E-471 or E-480 amplifier 

with integrated power supply. 

Models E-516.i3 E-516.i1 

Function 20-bit D/A converter interface/display module, IEEE 488/RS-232 

Channels 3 1 

Output voltage range -1 to +11 V -1 to +11 V 

Resolution 20-bit 20-bit 

Stability Better than 0.2 mV Better than 0.2 mV 

Linearity 0.01% 0.01% 

Computer interfaces RS-232, IEEE 488 RS-232, IEEE 488 

D/Aconverters 20-bit, ±12 V 20-bit, ±12 V 

A/D converters 20-bit, -1 to +11 V 20-bit, -1 to +11 V 

LCD Display 4x20 characters 4x20 characters 

Dimensions One 21T slot wide, 3H high One 21T slot wide, 3H high 

Weight 0.3 kg 0.3 kg 

Operating voltage Requires E-530/E-531 power supply (E-500/E-501 system, etc.)

WaveEditor-Function Generator 

WaveEditor 

with sample wave. 

The E-516 has a built-in wave 

generator which can store up 

to 8192 data points for each 

channel. These values can 

then be output output at a rate 

of 20 kHz. Alternatively, the 

output can also be controlled 

by an external signal and programmed 

for point-by-point, 

line-by-line or full-scan triggering. 

The wave point values can be 

calculated with the included 

function generator. With the 

WaveEditor's graphic interface 

software, you need only 

PZT Actuators 









Index 


info@pi.ws 

choose the desired function 

and set the parameters to the 

values you need. Your wave is 

displayed on the screen as you 

edit it, before being output. 

The WaveEditor is also availble 

as a DLL and can be called up 

from all the E-516 driver sets 

(LabView TM ), COM server, DLL) 

and from the PZTControl user 

interface software. Selected 

and edited parameters may be 

saved for later use. 

6-59 6-59

PIline Linear Piezo Motors are based on a novel solid-state ultrasonic 

piezoceramic drive. They are lightweight, low-profile and 

provide a number of features and advantages not available with 

conventional magnetic motors, such as negligible EMI, ultra-fast 

response, auto-locking, backlash-free motion and excellent powerto-weight 

ratio. 

7-98 

Advantages of PIline Linear Piezo Motor Drives 

� Compact Size: The direct-drive principle allows the design of 

ultra-compact translation stages, with travel/ size ratios close to 1. 

The M-661.4P0, for example, provides 20 mm travel in a 

25 x25 x8 mm 3 package. 

� Low Inertia: High Acceleration, Speed and Resolution: 

PIline drives achieve Velocities to 800 mm/s and accelerations 

to 20 g. They are also very stiff, a prerequisite for 

their fast step-and-settle times—on the order 

of a few milliseconds—and provide resolution 

to 0.1 µm. The lack of a 

leadscrew means no lubricant 

flow and material relaxation to 

cause submicron creep. There is 

also no rotational inertia to limit 

acceleration and deceleration. 

� Excellent Power-to-Weight Ratio: 

PIline drives are optimized for high 

performance in a minimum package. No 

comparable drive can offer the same combination 

of acceleration, speed and precision. 

� Safe: PIline drives do not require limit switches. Even if 

driven into the hard stop, the motor and stage will not be damaged. 

The minimum inertia of the moving platform together 

with the “slip clutch” effect of the friction drive, give excellent 

protection against damage. 

PI linear ultrasonic drives consist of a piezoelectric oscillator made 

from a rectangular piezoelectric plate upon which are mounted 

one, two or more frictional elements. Due to electrical excitation 

of the actuator, each friction tip installed on it moves along an 

elliptical trajectory, transmitting pushing forces to a friction bar on 

the moving portion of the translation stage. The pushing force 

exerted by the actuator comes basically from the energy of the 

longitudinal wave, i.e. in the actuator shown, the longitudinal 

wave is the pushing wave. The transversal oscillation energy in the 

actuator is used basically for switching the longitudinal motion at 

regular intervals by pressing the frictional elements against the 

frictional trunk. The transversal oscillation force regulates the 

maximal available frictional force between friction tip or tips and the 

frictional trunk on the moved element, i.e. the transversal oscillation 

has an engage/disengage function. 

Precision fixtures and devices are much safer than with leadscrew-driven 

stages. PIline drives are also “finger-safe”: 

Despite the high speeds and accelerations, there is no risk of 

pinching or worse. This means users do not need interlocks, 

light curtains or other measures to keep them safe. 

� AutoLock Feature: PIline drives create a braking force when 

not energized without causing the position shift common with 

conventional mechanical brakes. Other benefits of the 

AutoLock feature are the elimination of servo dither and steadystate 

heat dissipation. 

� Vacuum Compatible: PIline drives are 100% ceramic and can 

be used in a vaccum without performance loss. 

� Negligible EMI: PIline drives do not create magnetic 

fields nor are they influenced by them, a decisive 

advantage in many applications. 

� Custom Solutions / Flexibility for OEMs: 

PIline drives are available in open-loop and 

closed-loop trans-lation stages and as OEM 

components. PI develops and manufactures 

all piezo ceramic components inhouse. 

This gives us the flexibility to provide 

custom motors (size, force, environmental 

conditions) for OEM and research applications. 

� Quality, Lifetime, Experience: Based on 

PI’s 30+ years of experience with piezo 

nanopositioning technology, PIline drives 

offer exceptional precision and reliability 

with an MTBF of > 20,000 hours. Components 

such as gears, shafts and moving 

cables that are prone to failure in conventional motion systems, are 

simply not part on the Piline design. 

P-661 OEM drive with 

electronics and differentfriction 

bars (compact 

disc for size comparison). 

Ultrasonic Piezo Drives—How do they work? 




info@pi.ws 

Principle design 

of a PI piezo 

linear motor 

driven translation 

stage.

M-661 

M-662 

M-663 

PIline ultra-compact 20 mm-translation stages 

from left to right: M-663.4PM closed-loop, 

M-662.4P0 open-loop, XY mountable, M-661.4P0. 

Ordering 

Information 

M-663.4PM 

PIline Ultra-Compact Translation 

Stage, 20 mm, Piezo Linear Motor, 

Closed-Loop, 0.1 µm Linear Encoder, 

w/Driver & Power Supply 

M-663.4PR 





M-661.4P0 



Open-Loop, w/Driver & Power Supply 

M-662.4P0 



Open-Loop, XY Mountable, 




Application 

Examples 

� BioTechnology 



� Quallity control 


� Metrology 

� Disk drive test assemblies 

� R&D 


PIline Miniature Translation Stages 

with Ultrasonic Piezo Linear Motors 

� Smallest Linear Motor- 

Driven Translation Stages 

on the Market 

� Velocity to 800 mm/s 

� Acceleration to 20 g 

� Resolution to 0.1 µm 

� Open-Loop and Closed- 

Loop Models 

� Direct-Motion Metrology 

Linear Encoders Available 

� 20 mm Travel 

� AutoLock Feature 

Eliminates Servo Dither 

� XY Combinations 

Available 

� 20,000 h MTBF 

PIline – Ultimate motion 

in the smallest package 

Piline M-661, M-662 and 

M-663 are the smallest piezomotor-driven 

translation stages 

currently available on the market, 

combining the advantages 

of piezo-motor drives with 

PI precision micro mechanics. 

They are available in open-loop 

and closed-loop configuration 

featuring an integrated, noncontact 

linear encoder. Both 

versions are driven by a novel, 

ultra-small, high-speed ultrasonic 

piezo-motor drive, developed 

and manufactured by PI 

and PI Ceramic. The ultrasonic 

piezo motor operating principle 

is based on the simultaneous 

longitudinal and transversal oscillation 

of a special piezoelectric 

ceramic plate, creating an el- 

liptical motion at the ceramic 

tip. Each cycle produces a 

minute step, as small as a few 

nanometers, allowing continuous 

smooth motion with virtually 

unlimited travel when installed 

in an appropriate-length 

translation (or rotation) stage. 

The lightweight, low-profile 

drive combines extremely high 

acceleration (up to 20 g) and 

velocity up to 800 mm/s with 

excellent position resolution 

and high holding forces. Since 

the ceramic tip of the motor is 

preloaded against the moving 

part of the stage, it creates a 

braking force while at rest. The 

benefits are the elimination of 

servo dither and heat dissipation 

in steady-state mode 

(note that there will not be a 

position shift in holding mode, 

as is common with mechanical 

motor brakes). There are no 

gears, leadscrews or other 

mechanical components to 

contribute play or backlash. 

PZT Actuators 









Index 


info@pi.ws 

Closed-Loop Operation with 

Direct-Motion Metrology—M-663 

These translation stages are 

equipped with integrated highprecision 

optical linear encoders 

(direct motion metrology) for 

closed-loop operation with 

standard servo-motor controllers, 

such as the PI C-843 card, 

C-862 Mercury stand-alone 

unit, or other off-the-shelf DCmotor 

servo-controllers. Combining 

the advantages of both 

the linear drive and non-contact 

linear encoder, M-663.4PM 

and M-663.4PR stages provide 

high-speed and high-precision 

positioning at the same time. 

PIline M-663.4PM with 

0.1 µm Linear Encoder: 

Small, High-Resolution, 

Fast Step & Settle. 

The M-663.4PM is equipped 

with a 0.1 µm linear encoder. 

For optimum closed-loop performance, 

we recommend it 

be operated with a motion 

controller that allows setting of 

M-663.4PM driven with 1 µm steps. Piezo linear motors are auto locking. Once a 

stable position has been reached, there is no servo dither as is common with other 

linear motors. 

7-99

7-100 

M-663.4PM driven with 10 mm steps, 

commanded velocity 2 mm/s. Note the 

excellent velocity constancy. 

the full range of parameters 

tailored to piezo motor operation, 

such as the PI C-843, the 

GALIL DMC-1810, DMC-2020 

or the NI 7344*. With such a 

controller, the M-663.4PM 

achieves a repeatability of 

0.3 µm and step-and-settle 

times of less than 1 millisecond 

for 1 µm steps. 

PIline M-663.4PR with 

1 µm Linear Encoder: 

Small, Fast, Cost Effective 

The M-663.4PR comes with a 

1 µm resolution linear encoder 

and is ideally suited for operation 

with the compact, standalone 

C-862.00 Mercury controller 

(and other servo-controllers 

as well). It achieves 

closed-loop velocities of up to 

The typical settling time of an M-663.4PM is less than 10 ms. 

330 mm/s, an astonishing 

speed for such a small, closedloop 

translation stage. 

PIline M-661 and M-662 

Open-Loop Stages 

M-661.4P0 and M-662.4P0 are 

the open-loop models. They 

achieve velocities to 800 mm/s 

and, due to the lack of the 

position encoder, are smaller 

than the closed-loop models. 

The M-662.4P0 has a square 

footprint and can be mounted 

in an XY configuration. The 

M-661.4P0 is intended for single-axis 

use only and is even 

smaller. Both stages are driven 

by a small external driver 

(included) that converts the 

control into ultrasonic oscillations 

for the piezo motor. 

XY combination of two M-662.4P0, open-loop piezo motor translation stages. 

Dip switch for size comparison. 

M-661.4P0, open-loop translation stage, shown with OEM driver board. This is the 

smallest linear-motor-driven stage PI currently offers. Dip switch for size comparison. 


info@pi.ws 

Control is either external or 

through a manual pad (included) 

providing two operating 

modes: stepping mode and 

continuous motion. 

External control is achieved 

through a PWM drive signal of 

12 V. The distance traveled by 

the stage corresponds to the 

width of the pulse. The smallest 

step is on the order of 

0.1 µm and corresponds to a 

10 µs input pulse (shorter 

pulses are not recognized). By 

varying the length of the inputactive 

period, the step length 

and thus the velocity can be 

controlled. 

Complete Package with 

Driver, Power Supply 

and Cables 

All M-661, M-662 and M-663 

PIline translation stages 

come complete with driver, 

power supply and cables, facilitating 

setup and operation. 

OEM drivers and motors are 

available as well. 

PIline M-665.2PM Closed- 

Loop 50 mm Stage 

A larger footprint (114x114 mm) 

closed-loop translation stage 

with 50 mm travel is also available. 

Request our separate 

datasheet. 

* For using NI controllers, please request 

further info on the C-809 motion 

interfaces (see p. 9-28). For using GALIL 

cotrollers, the M-663K005 option 

is required. 

The linear stage M-661.4P0 (right side in the front) uses the ultra-compact piezo 

motor P-661.4P0, which is available as an separate OEM product. The standard driver 

electronics C-862.PMD (right side in the back) can also be used with these OEM P-661 

instead of the OEM electronics (left side in the back).


Did you know that PI also 

makes the world’s smallest 

rotary piezo motors? 

C-171 rotary piezo motor, match for size 

comparison. The C-171 is currently the world’s 

smallest commercially available rotary piezo 

motor. It measures only 3 mm in diameter and 

provides velocity to 1000 rev/min and torque 

of 0.4 mNm. Request our datasheet! 

M-662.4P0 dimensions (in mm). 

Models M-663.4PM M-663.4PR M-661.4P0 M-662.4P0 Units Notes 

Travel range 20 20 20 20 mm 

Design resolution 0.1 1.0 — — µm A3 

Min. incremental motion 0.2 2.0 0.1)* 0.1)* µm A4 

Bidirectional repeatability ± 0.3 ± 3.0 — — µm 

Max. velocity 400)** 330 800 800 mm/sec 

Max. normal load capacity 0.5 0.5 0.5 0.5 kg B1 

Max. push/pull force 3 3 3 3 N B2 

Max. holding force 5 5 5 5 N 

Operating voltage (driver) 12 12 12 12 V 

Operating voltage (piezo) 60 60 60 60 V 

Operating current 20,000 L 

Recommended controller C-843 

GALIL, NI*** 

C-843 — — 

* Open-loop system 

** 130 mm/s with C-843 controller. 400 mm/s with GALIL controllers, M-663K005 option required! 

***For using NI controllers, please request further info on the C-809 motion interfaces 

(see p. 9-28). For using GALIL controllers, the M-663K005 option is required. 

PZT Actuators 









Index 

M-663.4PM, M-663.4PR dimensions (in mm). 


info@pi.ws 

M-661.4P0 dimensions (in mm), 

decimal places separated by 

commas in drawing. 

7-101

7-102 

M-665.2PM 

M-665.2PM piezo linear motor stage with integrated linear encoder (direct motion 

metrology) and ActivePiezoDrive. 

Application 

Examples 

� Bio Technology 





� Metrology 


� R&D 

� Photonics Packaging 

Ordering 

Information 

M-665.2PM 

PIline Low-Profile Translation Stage, 

50 mm, Piezo Linear Motor, 


ActivePiezoDrive Integrated Driver, 

Power Supply 

PIline Low-Profile Translation 

Stages with Piezo Linear Motor 

� Piezo-Motor-Driven 

Translation Stage 

� Low-Profile, only 26.5 mm 


� Integrated ActivePiezo- 

Drive Piezo Power 

Amplifier 


� 0.1 µm Linear Encoder 

(Direct-Motion Metrology) 

� 50 mm Travel 


Eliminates Servo Dither 

� XY Combinations 

Available 

� 20,000 h MTBF 

� Vacuum Versions to 

10 -8 hPa Available 

PIline—Ultimate motion 

in the smallest package 

The PIline M-665.2PM is a 

low profile, closed-loop translation 

stage combining the advantages 

of linear piezo-motor 

drives with PI precision micro 

mechanics. 

Its novel linear motor is based 

on a ultra-small, high-speed 

ultra-sonic piezo-drive, developed 




info@pi.ws 



longitudinal and bending oscillation 


ceramic plate, creating an elliptical 

motion at the ceramic tip. 

Each cycle produces a tiny 

step, as small as a few nanometers, 

allowing continuous 



in an appropriate-length translation 

(or rotation) stage. 


drive combines extremely high 

acceleration (up to 20 g) and 

velocity up to 130 mm/s with 

excellent position resolution 

and high holding forces. Since 

the ceramic tip of the motor is 

preloaded against the moving 

part of the stage, it creates a 

braking force while at rest. The 

benefits are the elimination of 

heat dissipation and servo 

dither (if used with a closedloop 

system) in steady-state 

mode. Note that there will not 

be a position shift in holding 

mode, as is common with 

mechanical motor brakes! 

There are no gears, leadscrews 

or other mechanical 

components to contribute play 

or backlash. 

High-Speed Closed-Loop 

Operation with Direct- 

Motion Metrology 

M-665 translation stages are 

equipped with integrated highprecision 

optical linear encoders 

(non-contact, direct motion 

metrology) for closed-loop 

operation with standard DC 

servo-motor controllers, such 

as the PI C-843 card. Special 

controllers such as the NI 

7344, the GALIL DMC-1810 or 

DMC-2020* allow the setting 

of additional piezo motor relevant 

parameters and provide 

even higher performance. 

Complete Package 

with Driver, Power Supply 

and Cables 

Unlike conventional piezo 

motor stages, the M-665 

comes as a complete package, 

ready for operation. M-665 

stages are equipped with the 

ActivePiezoDrive, a special 

piezo amplifier circuit integrated 

into the stage, further 

facilitating setup and operation. 

A power supply for the 

integrated driver and a motor 

cable are also included. 

Lifetime 

PIline drives are based on 

PI’s 30+ years of experience 

with piezo nanopositioning technology 

and offer exceptional 

precision and reliability with an 

MTBF of > 20,000 hours. Components 

such as gears, shafts 

and moving cables that are 

prone to failure in conventional 

motion systems, are simply 

not part on the PIline design. 

* For using NI controllers please request 

further info on the C-809 motion 

interfaces (see p. 9-28). For GALIL 

controllers, a special option is required. 

Custom long travel XY microscopy 

stage (PIline piezo motor driven) 

with P-527 sub-nanometer resolution 

XYZ Piezo NanoScanning stage 

mounted on top. CD for size 

comparison.

Dimensions of the M-665.2PM in mm. 

M-665 for vacuum applications to 10 -8 hPa 


PZT Actuators 









Index 


Models M-665.2PM Units Notes 

Travel range 50 mm 

Design resolution 0.1 µm A3 

Min. incremental motion 0.5 µm A4 

Unidirectional repeatability ± 0.3 µm 

Pitch (� Y ) 70 µrad 

Yaw (� Z ) 70 µrad 

Max. velocity 130 mm/sec 

Max. normal load capacity 10 kg B1 

Max. push/pull force 3 N B2 

Max. holding force 5 N 

Operating voltage 12 V 

Operating current < 200 mA 

Weight 0.8 kg 

Body material Al L 

Recommended controller C-843 

info@pi.ws 

PIline Stage driven with 1 µm steps. Piezo linear motors are auto locking. 

Once a stable position has been reached, there is no servo dither as is common 

with other linear motors (measurement taken with GALIL controller). 

7-103

Ordering 

Information 

P-661.2P0 

PIline ultra-compact OEM Piezo 

Linear Motor, OEM Driver, 10 mm 

Travel Friction Bar 

P-661.4P0 




P-661.6P0 




P-665.2PM 




P-665.4PM 




P-665.6PM 




Optional: 

C-182.P0 

Bench-top Driver, Power Supply 

and Motor Cable 

7-104 

P-661 

P-665 

P-661 and P-665 piezo linear motor drives with P-661 OEM driver board and 30 mm 

friction bar presented on a credit card for size comparison. 

PIline OEM Ultrasonic 

Piezo Linear Motors 

� Smallest Linear Piezo 

Motors on the Market 

� New Design boasts 

Significantly Higher 

Forces 



� Resolution to 0.1 µm 


� 20,000 h MTBF 

PIline—OEM Business in 

Motion 

PIline P-661 and P-665 are 

the smallest piezo linear motor 

drives currently available on 

the market. In addition to 

being ultra-compact they also 

boast significantly higher drive 

and holding forces than conventional 

piezo motors. 

Both versions incorporate a 

novel, ultra-small, high-speed 

ultra-sonic piezo-drive, developed 





longitudinal and transversal oscillation 


ceramic plate, creating an elliptical 

motion at the ceramic tip. 


info@pi.ws 

Each cycle produces a tiny 

step, as small as a few nanometers, 

allowing continuous 



in an appropriate-length translation 

(or rotation) stage. 

High Speed & Acceleration, 

Self-Locking 

PIline piezo linear motors 

can be operated in any orientation. 


drive combines extremely 

high acceleration (up to 20 g) 

and velocity up to 800 mm/s 

with excellent position resolution 

and high holding forces. 

Since the ceramic tip of the 

motor is preloaded against the 

moving part of the stage, it 

creates a braking force while 

Custom high-force, low-profile pusher with 

PIline TM piezo motor drives for automation purposes. 

Application 

Examples 

� Bio Technology 





� Metrology 


� R&D 

� Photonics Packaging 

at rest. The benefits are the 

elimination of heat dissipation 

and servo dither (if used with a 

closed-loop system) in steadystate 

mode. Note that there 

will not be a position shift in 

holding mode, as is common 

with mechanical motor brakes! 

There are no gears, leadscrews 

or other mechanical 

components to contribute play 

or backlash. 

Integration 

P-661 and P-665 series piezo 

motors can be mounted in any 

orientation, horizontally or vertically. 

To achieve the best performance, 

the motor and friction 

bar have to be mounted 

on even surfaces to avoid torsion 

of the basic profiles. The 

0.3 µm steps performed in open-loop with a P-661.4P0 built into a M-662.4P0 translation 

stage.

P-661 and P-665 series motors 

and associated electronics 

should be operated in clean 

environments, protected from 

metal dust and liquid spray. 

Driver Included 

PIline piezo linear motors are 

powered by a small external 

driver board (included) that 

converts PWM input signals 

into ultrasonic oscillations for 

the piezo motor. An optional 

bench-top driver, motor cable 

and power supply “starter 

package” is also available. 

The drivers are controlled 

through a 12 V PWM (Pulse 

Width Modulation) signal. The 

distance moved by the motor 

corresponds to the width of 

the pulse. The smallest achievable 

step is on the order of 

0.1 µm and corresponds to a 

10 µs input pulse (shorter 

pulses are not recognized). By 

varying the length of the inputactive 

period, the step length 

and thus the velocity can be 

controlled. 


Lifetime 

PIline drives are based on 

PI’s 30+ years of experience 

with piezo nanopositioning 

technology and offer exceptional 

precision and reliability 

with an MTBF of > 20,000 

hours. Components such as 

gears, shafts and moving cables 

that are prone to failure in 

conventional motion systems, 

are simply not part on the 

PIline design. 

P-665.xPM dimensions (in mm) 

Models P-661.xP0 P-665.xPM Units Notes 

Travel range)* unlimited unlimited mm 

Min. incremental motion)** 0.1 0.1 µm 

Max. velocity 800 300 mm/sec 

Max. push/pull force 3 5 N B2 

Max. holding force 5 8 N 

Weight 10 20 g 

Operating Voltage 12 12 V 

Operating Current 200 200 mA 

* The travel range of piezo linear motors is virtually unlimited and depends on the 

length of the friction bar. PI currently offers the following standard packages: 

P-661.2P0: 10 mm; P-661.4P0: 20 mm; P-661.6P0: 50 mm. The same ranges are 

offered for the P-665. 

** The minimum incremental motion is a typical value that can achieved in the openloop 

mode of a piezomotor stage. To reach the specs it is important to follow the 

mounting guidelines of the OEM-motors. 

Translation Stages? 

Should you be interested in a 

complete translation stage, 

talk to our engineers! We offer 

a line of standard open and 

closed loop piezo motor driven 

translation stages and actuators 

and also provide custom 

solutions tailored to our customer’s 

requirements. 

Piezo driver block diagram 

PZT Actuators 









Index 

P-661.xP0 dimensions (in mm) 


info@pi.ws 

7-105

Application 

Examples 



� Life Sciences 

� X-ray Diffraction Measurements 

� Semiconductor Handling Systems 

� Tool Control for 

Precision Machining & 

Manufacturing 

Ordering 

Information 

M-840.5PD 

Hexapod 6-Axis MicroMotion Robot 

with Motion Controller, Direct Drive 

M-840.5DG 


with Motion Controller, 

Gearhead Version 

Optional Optical Power Meters 

F-206.00U 

Optical Board (vis. range) 

F-206.iRU 

Optical Board (IR range) 

F-361.10 

Optical Power Meter, NIST Traceable, 

1000 to 1600 nm Wavelength 



Optical device scan with M-840.5PD and 

F-206.IRU optical power meter. 

7-106 

M-840 

HEXALIGHT Fast Six-Axis 

Parallel Kinematics Robot (Hexapod) 

M-840 HEXALIGHT 6D micropositioner 

� Six Degrees of Freedom 

� Fast Step-and-Settle 

� No Moving Cables for 

Improved Reliability, 

Ease of Setup and 

Reduced Friction 

� Load Capacity 10 kg 

� Repeatability to 2 µm 

(Six-Axis Moves) 

� Significantly Smaller and 

Stiffer Package than 

Conventional Multi-Axis 

Positioners 

� Better Dynamics & 

Throughput 

� True Path Control 

� PivotAnywhere 

Virtualized Center of 

Rotation Set by Software 

� User-Friendly Software 

and Control Electronics 

The M-840 HEXALIGHT robot 

is based on PI’s experience in 

high-resolution parallel kinematic 

machines (PKM) over 

more than a decade. PI Hexapods 

were originally used in 

astronomical telescopes for 

mirror and antenna adjustments 

over wide ranges in 


info@pi.ws 

small step sizes. The M-840 

provides six degrees of freedom 

with 3 µm minimum incremental 

motion (combined 

6-axis move, design-resolution 

of individual struts is 0.016 µm 

for the M-850.5DG) and allows 

the user to define the center of 

rotation (pivot point) anywhere 

inside or outside the system. 

The M-840 Hexapod is of great 

value for any complex, highaccuracy 

positioning and alignment 

task where independent 

motion in six degrees of freedom 

is required. 

Fast Positioning in Space 

Compared to the M-850 Hexapods 

(see page 7-108) the 

M-840 is built for higher speeds 

with lower loads. Up to 10 kg in 

any orientation can be moved 

at with up to 50 mm/sec 

(600 mrad/sec) true path control. 

The control system automatically 

manages its path planning 

and the coordination of the 

six motors and minimizes runout 

and unwanted motion. 

6-DOF Parallel Machines 

The M-840 Hexapod consists 

of six struts which expand and 

contract between a bottom 

and a top platform. All motion 

in space of the top platform is 

achieved by changing the 

length of the individual struts 

with sub-micron resolution. 

In contrast to conventional 

multi-axis positioning systems, 

where single-axis positioners 

are stacked upon each other, 

parallel kinematics systems 

such as the Hexapod do not 

exhibit error-summation. Single 

stage inaccuracies, moving 

cables of the upper stages, 

cosine errors due to stack 

height of the single positioners 

are all eliminated, and a repeatability 

in space of a few microns 

can be achieved. Another big 

advantage is that with PI Hexapods 

the center of rotation 

(pivot point) stays where programmed 

during all motion. 

PivotAnywhere 

Virtualized Rotation 

Capability 

Hexapod motion is not determined 

by fixed bearings, but 

rather by sophisticated realtime 

6-space control algorithms. 

For positioning tasks 

such as alignments, it is important 

to define a certain point in 

space as the center of rotation. 

This point can be chosen freely 

with a single software command. 

Easy Programming Logical 

Axes and Open Interface 

Control of the M-840 is facilitated 

by the controller’s open 

interface architecture which 

provides a variety of high-level 

commands for minimized

Hexapod digital motion controller. Display and keyboard are optional. 

F-361 high-speed optical power meter 

The travel ranges of the individual coordinates 

(X, Y, Z, � X , � Y , � Z ) are interdependent. 

Resulting working space of the 

M-840 in X, Y, Z for � X = � Y = � Z = 5°. 

communication. The userfriendly 

software and command 

structure allows direct 

six-axis positioning by entering 

Cartesian coordinates X, Y, 

Z and � X , � Y , � Z . 

Automated Optical 

Alignment 

The M-840 can be upgraded 

with an integrated photometer 

card (infrared or visible light) 

for optical alignment and builtin 

automatic alignment procedures, 

similar to the compact 

F-206 HexAlign photonics 

alignment robot (option 

F-206.IRU or F-206.00U, see 

p. 8-13). The F-361 highspeed, 

absolute measuring 

photometer (see p. 8-32) can 

also be used with the M-840. 

M-840 

dimensions 

in mm. 


PZT Actuators 









Index 


Models M-840.5PD M-840.5DG Units 

Travel X,Y** ±50 ±50 mm 

Travel Z** ±25 ±25 mm 

Travel � X , � Y ** ±15 ±15 deg 

Travel � Z ** ±30 ±30 deg 

Actuator stroke ±25 ±25 mm 

Actuator design resolution 0.5 0.016 µm 

Min. incremental motion X, Y 3 1 µm* 

Min. incremental motion Z 1 0.5 µm* 

info@pi.ws 

Min. incremental motion � X , � Y , � Z 5 5 µrad* 

Repeatability X, Y ±2 ±2 µm 

Repeatability Z ±1 ±1 µm 

Repeatability � X , � Y , � Z ±20 ±20 µrad 

Typ. velocity X, Y, Z 30 2 mm/sec 

Max. velocity X, Y, Z 50 2.5 mm/sec 

Typ. velocity � X , � Y , � Z 300 20 mrad/s 

Max. velocity � X , � Y , � Z 600 30 mrad/s 

Load capacity 10 10 kg 

Weight 12 12 kg 

* simultaneaous motion of all 6 actuators. No moving cables. No friction, bending or 

twisting forces induced by moving cables as with stacked units. 

** The travel ranges of the individual cordinates (X, Y, Z, � X , � Y , � Z ) are interdependent. 

The data in this table show maximum travel (where at least one actuator is totally 

extended). If motion from a particular point or in more than one axis is desired, the 

available travel may be less. 

7-107

M-850 Hexapod 6D MicroMotion Robot 

Application 

Examples 

� Alignment of Optics, Electron Guns, 

Lasers, or Other Directed-Energy 

Sources 

� Microwave Antenna Test Beds 

� Surgical Robots 


� Micromanipulation (Life Sciences) 

� X-ray Diffraction Measurements 

� Semiconductor Handling Systems 

� Tool Control for Precision 

Machining & Manufacturing 

� Fine Positioning of Active 

Secondary Mirror Platforms in 

High-Resolution Telescopes 

Ordering 

Information 

M-850.11 


with Motion Controller, 0.5 mm/sec 

M-850.50 


with Motion Controller, 8 mm/sec 

Optional Optical Power Meters 

F-206.00U 

Optical Board (vis. range) 

F-206.iRU 

Optical Board (IR range) 

F-361.10 

Optical Power Meter, NIST Traceable, 

1000 to 1600 nm wavelength 

Custom Designs for Volume 

Buyers 

7-108 

M-850 

HEXAPOD Six-Axis 

Parallel-Kinematics MicroMotion Robot 

� Six Degrees of Freedom 

� Works in any Orientation 

� No Moving Cables, for 

Improved Reliability, 

Ease of Setup and 

Reduced Friction 

� Load Capacity 200 kg 

Vertically, 50 kg Random 

Orientation 

� Heavy-Duty, Ultra-High- 

Resolution Bearings for 

24/7 Applications 

� Repeatability ±1 µm (Z) 

±2 µm (Six-Axis Moves) 

� To 0.005 µm 

Design Resolution 

� Significantly Smaller and 

Stiffer Package than 

Conventional Multi-Axis 

Positioners Provides 

Better Dynamics & 

Throughput 

� True Path Control 

� Linear and Rotary 

Multi-Axis Scans 

� PivotAnywhere 

Virtualized Center of 

Rotation (Pivot Point) 

Set by Software 

� Sophisticated, User- 

Friendly Software and 

Control Electronics 

The M-850 MicroMotion robot 

is based on PI’s ultra-high-resolution 

hexapod technology 

developed for aligning optics in 

astronomical telescopes a 

decade ago. It provides six 

degrees of freedom with 1 µm 

minimum incremental motion 

(design resolution of individual 

struts is 0.005 µm for the 

M-850.11) and allows the user 

to define the center of rotation 

(pivot point) anywhere inside 

or outside the system envelope 

by one simple software 

command. Rotation about that 

pivot point can be specified 


info@pi.ws 

(with microradian resolution) 

for any axis of rotation. 

The M-850 Hexapod is of great 

value for any complex, highaccuracy 

positioning and alignment 

task where independent 

motion in six degrees of freedom 

is required. 


The M-850 Hexapod consists 

of six struts which expand and 

contract between a bottom 

and a top platform. Similar in 

geometry to positioning systems 

used in flight simulators, 

it is the first commercially available 

system to introduce this 

design to sub-micron-resolution 

positioning. 

The use of extremely stiff and 

accurate components for all 

moving parts, such as joints, 

bearings and drive screws, 

results in an unusually high natural 

frequency (500 Hz @ 10 kg 

load). Because the six 

Hexapod struts and the six 

orthogonal coordinates (X, Y, Z, 

� ,� ,� ) are all interrelated, the 

X Y Z 

twelve strut-end universal 

joints must guarantee zero 

backlash and zero runout. To 

meet this challenge in Hexapod 

construction, CAD, FEA (finite 

element analysis) and laser 

vibrometry were employed for 

system optimization. 

Optical device scan with M-850.50 and 

F-206.IRU optical power meter 

In contrast to conventional 

multi-axis positioning systems, 

where a change in one coordinate 

also affects the pivot 

point and the other coordinates, 

the M-850 system 

automatically manages its 

path planning and the coordination 

of its six motors and 

minimizes runout and unwanted 

motion. 

PivotAnywhere 

Virtualized Rotation Capability 

A highly useful feature is the 

M-850’s PivotAnywhere fully 

virtualized rotation capability. 

Hexapod motion is not defined 

by fixed bearings, but rather by 

sophisticated real-time 6-space 

control algorithms. You can 

define any point in space to be 

the center of rotation with a 

single software command. 

This is ideal for any kind of for 

angular alignment. All commands 

and operations are 

high-level, using human-readable 

units (mm, degrees) and 

coordinates (X, Y Z, � X , � Y , � Z ). 

Open Interface 

Control of the M-850 is facilitated 

by the controller’s open 

interface architecture which 

provides a variety of high-level 

commands for minimized com- 

Custom Hexapod for brain surgery. 

Photo courtesy of IPA

M-850 

Hexapod, 

dimensions 

(in mm) 

Custom “6+3” Hexapod with additional 

struts providing independant 

position feedback and M-531 translation 

stage for extended Z-travel. 

Custom water-resistant Hexapod 

munication overhead & bandwidth. 

The user-friendly software 

allows direct six-axis 

positioning by entering the 

X,Y,Z and � X ,� Y ,� Z coordinates 

and the position of the pivotpoint 

using human-readable 

units (mm, degrees). The software 

also allows easy programming 

of motion sequences. 

A smaller Hexapod with 

higher resolution is available 

as product number F-206 

(see p. 8-8 in the “Photonics” 

section). 

Automated Optical 

Alignment 

The M-850 can be upgraded 

with an integrated photometer 

card (infrared or visible light) 

for optical alignment and builtin 

automatic alignment procedures, 

similar to the compact 

F-206 HexAlign photonics 

alignment robot (option 

F-206.IRU or F-206.00U, see 

page 8-13). The F-361 highspeed, 

absolute measuring photometer 

(see page 8-32) can 

also be used with the M-850. 


PZT Actuators 









Index 


info@pi.ws 

F-206 “Micro-Hexapod” (see p. 8-8 in 

the “Photonics” section for details) 

Models M-850.11 M-850.50 Units 

Travel X, Y ** ±50 ±50 mm 

Travel Z ** ±25 ±25 mm 

Travel � X , � Y ** ±15 ±15 deg 

Travel � Z ** ±30 ±30 deg 

Actuator stroke (L S ) ±25 ±25 mm 

Actuator design resolution 0.005 0.049 µm 

Min. Incremental Motion X, Y, Z 1 (XY), 1 (XY), µm (6-axis 

0.5 (Z) 0.5 (Z) move!) * 

Min. Incremental Motion � X , � Y , � Z 5 5 µrad (6-axis 

move!) 

Repeatability X, Y ±2 ±2 µm 

Repeatability Z ±1 ±1 µm 

Repeatability � X , � Y , � Z ±10 ±10 µrad 

Velocity X, Y, Z (typ.) 0.3 5 mm/sec 

Velocity X, Y, Z (max.) 0.5 8 mm/sec 

Velocity � X , � Y , � Z (typ.) 3 50 mrad/sec 

Velocity � X , � Y , � Z (max.) 6 100 mrad/sec 

Stiffness(k X ), (k Y ) 3 3 N /µm 

Stiffness(k Z ) 100 100 N /µm 

Weight 17 17 kg 

Load capacity (vertically/random) 200/50 200/50 kg 

Resonant frequency F X ,F Y *** 90 90 Hz 

Resonant frequency F Z *** 500 500 Hz 

* No moving cables! No friction, bending or twisting forces induced by moving cables as 

with stacked units. 

** The travel ranges of the individual coordinates (X, Y, Z, � , � , � ) are interdependent. 

X Y Z 

The data in this table show maximum travel (where at least one strut is totally 

extended). If motion from a particular starting point or in more than one axis is 

desired, the available travel may be less. 

Example: The following combination of travel is possible: 

X : + 20 mm � : +10° 

X 

Y : + 20 mm � : +10° 

Y 

Z : + 5 mm � : -2° Z 

*** Vertical orientation and 10 kg load 

7-109

Application 

Examples 

� Quality control 

� Test equipment 

� Flexible automation 

� Metrology 


� Fiber alignment 

Ordering 

Information 

M-235.2DG 

Heavy-Duty, High-Resolution 

DC-Mike Actuator, 20 mm, 

Ballscrew, Limit Switches 

M-235.2DD 


DC-Mike Actuator, Direct Drive, 

20 mm, Ballscrew, Limit Switches 

M-235.22S 


Stepper-Mike Actuator, 20 mm, 


M-235.5DG 


DC-Mike Actuator, 50 mm, 


M-235.5DD 


DC-Mike Actuator, Direct Drive, 

50 mm, Ballscrew, Limit Switches 

M-235.52S 

Heavy-Duty, High-Resolution Stepper- 

Mike Actuator, 50 mm, Ballscrew, 

Limit Switches 

Higher Speed M-235 

versions on request 



7-110 

M-235 

Heavy-Duty High-Resolution Closed- 

Loop DC-Mike & Stepper Actuators 

M-235.2DG (top) and M-235.5DG (bottom) 

high-resolution DC-Mike, ballscrew. 

� 20 mm or 50 mm 

Travel Range 

� 0.1 µm Minimum 

Incremental Motion 

� High-Speed Direct Drive 

Option 

� 120 N Push/Pull Load 

� 100 N Lateral Load Limit 

� Preloaded Ultra-Low- 

Friction Ball Screw with 

Non-Rotating Tip 

� Closed-Loop DC Motors 

and Stepper Motors 


Leading Industrial 

Motion Controllers 

� Integrated Hall-Effect 

Limit & Origin Switches 

� >20,000 Hours MTBF 

The M-235 is an ultra-high-resolution 

linear actuator providing 

linear motion of up to 

50 mm with sub-micron resolution 

in a compact package. It 

consists of a preloaded ultralow-friction, 

heavy-duty 

ballscrew which is driven by a 

2-phase stepper motor or a 

closed-loop DC motor with 

motor-shaft-mounted, highresolution 

encoder (2048 counts/ 

rev.). 


info@pi.ws 

Non-Rotating Tip 

Compared to conventional rotating-tip 

micrometer drives, 

the non-rotating-tip design 

offers several advantages: 

� Elimination of torqueinduced 

positioning errors 

� Elimination of sinusoidal 

motion errors 

� Elimination of wear at the 

contact point 

� Elimination of tip-angledependent 

wobble 

M-235 actuators provide a 

cost-effective solution for 

heavy-duty industrial and OEM 

environments. They feature an 

extremely low stiction, lowfriction 

construction, allowing 

for minimum incremental 

motion as low as 100 nanometers. 

The M-235.5DD version 

is equipped with a direct drive 

motor for high-speed positioning 

applications. 

Non-Contact Limit and 

Origin Switches 

Integrated, non-contact, highprecision 

Hall-effect origin and 

limit switches, protect your 

equipment and increase versatility 

in automation applications. 

M-235.52S high-resolution Stepper-Mike, 

50 mm travel range, ballscrew. 

Integrated Line Drivers 

M-235 actuators with DC motors 

include an integral 0.5 m 

cable with 15-pin sub-D connector 

and a 3 m extension 

cable. The connector features 

integrated line drivers for cable 

lengths up to 10 meters between 

actuator and controller. 

A screw-on ball tip and a flat tip 

are included. 

For smaller sizes and lowerduty 

applications, refer to the 

M-230, M-231, M-232 and 

M-227 and M-168 on pages 

7-68, 7-70 and 7-74.

Ball tip (included) 


M-235.22S and M-235.52S dimensions (in mm). 

Technical Data Models M-235.2DG M-235.2DD M-235.22S M-235.5DG M-235.5DD M-235.52S Units Notes 

see p. 7-96 

Travel range 20 20 20 50 50 50 mm 

Design resolution 0.016 0.5 0.05 0.016 0.5 0.05 µm A3 

Min. incremental motion 0.1 0.5 0.1 0.1 0.5 0.1 µm A4 

Unidirectional repeatability 0.1 0.5 0.2 0.1 0.5 0.2 µm 

Bidirectional repeatability 1 1 1 1 1 1 µm 

Max. velocity 3 >30 20 3 >30 20 mm/sec 

Max. push/pull force 120 >50 100** 120 >50 100** N 

Max. lateral force 100 100 100 100 100 100 N (at tip) 

Encoder resolution 2048 2048 - 2048 2048 - counts/rev. 

Motor resolution - - 20000* - - 20000* steps/rev. 

Ballscrew pitch 1 1 1 1 1 1 mm/rev. 

Gear ratio 29.6 : 1 - - 29.6:1 - - 

Nominal motor power 4 17 - * 4 17 -* W 

Motor voltage range 0 to ±12 0 to ±12 24 * 0 to ±12 0 to ±12 24 * V 

Origin and limit switches Hall-Effect Hall-Effect Hall-Effect Hall-Effect Hall-Effect Hall-Effect 

Mass 0.55 0.50 0.65 0.7 0.65 0.8 kg 

Recommended motor C-843, C-862 C-600, C-843, C-862 C-600, D2 

controllers C-848, C-630 C-848, C-630 

C-862 C-862 

* 2-phase stepper, 24 V chopper voltage, max. 1.5 A / phase, 20,000 microsteps with C-600, C-630 controllers 

** at up to 10 mm/sec 

PZT Actuators 









Index 


M-235.2DD, .2DG and M-235.5DD, .5DG. 

Cable length: 500 mm, 15-pin sub-D 

connector with integrated line drivers. 

Dimensions in mm. 

info@pi.ws 

7-111

M-451.1PD elevation stage 

Application 

Examples 

� Wafer alignment (with 

NanoPositioning systems) 

� Semiconductor adjustment 

� Metrology 


� R&D 

Ordering 

Information 

M-451.1PD 

Vertical Stage, 12.5 mm, ActiveDrive 

DC Motor (Includes Power Supply for 

Servo Amplifier) 

M-451.1DG 

Vertical Stage, 12.5 mm, DC 

Motor/Gearhead 

M-451.12S 

Vertical Stage, 12.5 mm, 2-phase 

Stepper Motor 

7-112 

M-451 

P-562.3CD PIMars XYZ Piezo NanoPositioning 

& Scanning system (200 µm x 200 µm x 200 µm) 

mounted on an M-451.1PD elevation stage. 

Vertical MicroPositioning Stage 

� 3 Nanometer Design 

Resolution 

�


Models M-451.1PD M-451.1DG M-451.12S Units 

Travel range 12.5 mm 12.5 mm 12.5 mm mm 

Design resolution 0.042 0.0028 0.0084 µm 

Min incremental motion 0.2 0.1 0.2 µm 

Unidirectional repeatability 0.3 0.3 0.3 µm 

Backlash 1 1 1 µm 

Max. velocity 3 0.5 0.8 mm/s 

Max. normal load 120 120 120 N 

Encoder resolution 4000 2000 - counts/rev. 

Motor Resolution* - - 20000 steps/rev. 

Leadscrew pitch 0.5 0.5 0.5 mm/rev. 

Gear ratio - 29.6:1 - 

Wedge ratio 3:1 3:1 3:1 

Nominal motor power 30 3 -* W 

Motor voltage range 0 to ±24 0 to ±12 24* V 

Body material Al Al Al 

Recommended controller C-843, C-848, C-862 C-843, C-848, C-862 C-600, C-630 

** 2-phase stepper, 24 V chopper voltage, max. 1.5 A / phase, 20,000 microsteps with C-600, C-630 controllers. 

Dimensions of the M-451.1DG elevation stage, in mm. 

PZT Actuators 









Index 

Dimensions of the M-451.1PD elevation stage, in mm 


info@pi.ws 

7-113

Application 

Examples 

� Photonics packaging automation 

� Fiber optic instrumentation 


� Metrology 




Ordering 

Information 

M-110.1DG 

Micro-Translation Stage, 5 mm, 

Closed-Loop DC Motor 

M-111.1DG 



M-112.1DG 



M-110.12S 


2-Phase Stepper Motor 

M-111.12S 



M-112.12S 





7-114 

M-110.1 

M-111.1 

M-112.1 

High-Resolution 

Micro-Translation Stages 

M-110.1DG micro-translation stage 

(battery for size comparison). 

� 0.05 µm Minimum 

Incremental Motion 

� 5, 15 and 25 mm Travel 

Ranges 

� Velocity to 1.5 mm/sec. 

� Closed-Loop DC Motors 

and Stepper Motors 

� Integrated Hall-Effect 

Limit and Reference 

Switches 



info@pi.ws 

M-110, M-111 and M-112 are 

ultra-high resolution motorized 

translation stages providing 

linear motion of 5 to 25 mm in 

an extremely compact package. 

They feature a precision 

leadscrew with sub-micron 

resolution and precision linear 

ball bearings guaranteeing 

< 0.5 µm straightness of travel. 

Stepper and Servo Motors 

Both drive options provide a 

cost effective solution for industrial 

and OEM environments. A 

miniature DC or stepper motor 

actuates motion via a backlashcompensated 

leadscrew / nut 

system and gearhead. To meet 

the most critical positioning 

demands, the DC motor is 

equipped with a high resolution 

encoder featuring resolution of 

0.007 µm per count. The combination 

of the extremely low 

stiction / friction construction 

and high-resolution encoder 

allows for minimum incremental 

motion of 50 nanometers at 

speeds up to 1.5 mm/sec. 

Non-Contact Limit and 

Reference Switches 

To protect your investment, 

non-contacting Hall-effect limit 

and reference switches are 

installed. Each stage includes a 

0.5 m cable with 15-pin sub-D 

connector and a 3 m extension 

cable. The connector on the 

DC-servo versions features 

integrated line drivers for 

cable lengths up to 10 meters 

between actuator and controller. 

M-110, M-111 and M-112 can 

be combined to XY and XYZ 

systems for multiaxis alignment 

applications. A variety of 

add-on PiezoNanoAlignment 

units are also available see the 

„Photonics“ section. 

Models M-110.1DG M-111.1DG M-112.1DG M-110.12S M-111. 12S M-112.12S Units 


Design resolution 0.007 0.007 0.007 0.006 0.006 0.006 µm 

Min. incremental motion 0.05 0.05 0.05 0.05 0.05 0.05 µm 


Backlash 2 2 2 2 2 2 µm 

Max. velocity 1 1.5 1.5 1 1 1 mm/sec 

Max. normal load capacity 3 3 2 3 3 2 kg 

Max. push/pull force 10 10 10 10 10 10 N 

Max. lateral force 10 10 10 10 10 10 N 

Encoder resolution 2048 2048 2048 - - - counts/rev. 

Motor resolution - - - 2400* 2400* 2400* steps/rev. 

Drive screw pitch 0.4 0.4 0.4 0.4 0.4 0.4 mm/rev. 

Gear ratio 28.44444:1 28.44444:1 28.44444:1 28.44444:1 28.44444:1 28.44444:1 

Nominal motor power 0.6 2 2 * * * W 

Motor voltage range 0 to ±12 0 to ±12 0 to ±12 24* 24* 24* V 

Weight 0.3 0.4 0.5 0.3 0.4 0.5 kg 

Recommended C-843, C-848, C-843, C-848, C-843, C-848, C-600, C-630 C-600, C-630 C-600, C-630 

motor controllers C-862 C-862 C-862 

* 2-phase stepper, 24 V chopper voltage, 2,400 microsteps with C-600, C-630 controllers

M-110, M-111 and M-112. Cable length: 500 mm, 15-pin sub-D connector with integrated encoder line drivers. 

M-110, M-111, M-112 Z-mounting bracket, 

dimensions (in mm). 

PZT Actuators 









Index 


info@pi.ws 

F-130 fiber alignment system consisting of an M-110 XYZ positioning system and a P-611 XYZ Piezo- 

NanoPositioning system. This combination can be operated by the C-880 controller or NI controllers 

(request our technote!) 

7-115

Application 

Examples 







Ordering 

Information 

M-110.2DG 


Closed-Loop DC Motor, Ballscrew 

M-111.2DG 



M-112.2DG 



M-110.22S 


Stepper Motor, Ballscrew 

M-111.22S 



M-112.22S 



Adaptors and Angle Brackets 

Same as for Leadscrew Versions 

M-110.1/M-111.1/M-112.1. 

Custom Designs for Volume Buyers 

7-116 

M-110.2 

M-111.2 

M-112.2 

High-Resolution Micro-Translation 

Stages with Ballscrew Drive 

M-112.2DG, M-111.2DG, M-110.2DG 

(from front to back) providing 25 mm, 

15 mm and 5 mm travel range 

� 5 to 25 mm Travel Ranges 

� 5000 h MTBF 

� Very Cost Effective 

� 200 nm Minimum Inc. 

Motion 

� Hall-Effect Limit & 

Reference Switches 

� Recirculating Ballscrew 


Models M-110.2DG M-111.2DG M-112.2DG M-110.22S M-111.22S M-112.22S Units 


Design resolution 0.0085 0.0085 0.0085 0.0073 0.0073 0.0073 µm 

Min. incremental motion 0.2 0.2 0.2 0.2 0.2 0.2 µm 


Backlash

M-110, M-111, M-112 dimensions in mm 

Low Cost of Ownership 

As mentioned before, these 

compact PI stages are extremely 

cost effective in industrial 

applications. The combination 

of the M-11x.2DG and the 

networkable C-862 Mercury 

single channel servo controller/ 

driver offers high performance 

for a very competitive price in 

both single and multi-axis configurations. 

PZT Actuators 









Index 


info@pi.ws 

7-117

M-116.DG micro rotary stage 

Application 

Examples 

� Beam lines 

� Adjustment of optics 

� Metrology 



� R&D 

Ordering 

Information 

M-116.DG 

Micro Rotation Stage, 360°, Closed- 

Loop DC-Motor / Gearhead Drive 

M-116.DGH 

Micro Rotation Stage, 360°, Closed- 

Loop DC-Motor / Zero-Backlash 

Gearhead Drive 

M-116.2S 

Micro Rotation Stage, 360°, 2-Phase 

Stepper-Motor / Gearhead Drive 

M-116.2SH 

Micro Rotation Stage, 360°, 2-Phase 

Stepper-Motor / Zero-Backlash 


M-116.AL1 

Lens Adapter for 0.5” Optics 

Custom Designs for 

Volume Buyers 

7-118 

M-116 

Micro Rotation Stages with 

Worm Gear Drive 

� Ultra-Compact Design 

� Continuous Rotation 

� 2.1 µrad Design 

Resolution 

� Clear Aperture 

� Velocity up to 

20 degrees/second 

� Preloaded Anti-Backlash 

Worm Drive 

� Fits Directly on M-110 

Micro Translation Stages 


Leading Industrial Motion 

Controllers 

� Non-Contact Reference 

Switch 

� To 10 µrad Repeatability 

M-116 rotation stages are 

equipped with low-friction, 

spring-preloaded worm gear 

drives allowing unlimited rotation 

in either direction in an 

extremely compact package. 

Stepper and Servo Motors 

Both drive options provide a 

cost-effective solution for 

industrial and OEM environments. 

A miniature DC or stepper 

motor actuates motion via 


info@pi.ws 

a spring-preloaded worm gear 

drive and zero-backlash (with 

M-116.xxH versions) gearhead. 

To meet the most critical 

positioning demands, the DC 

motor is equipped with a highresolution 

encoder featuring 

resolution of 2.048 counts per 

revolution The combination of 

the extremely low-stiction / 

low-friction construction and 

high-resolution encoder allows 

for minimum incremental 

motion of 25 µrad at speeds up 

to 20 degrees/ second. 

Multi-Axis Combinations 

M-116 rotary stages can be 

combined with the M-110, 

M-111 and M-112 micro linear 

stages without an additional 

adapter plate to keep the total 

height at a minimum. A variety 

of addon Piezo-NanoAlignment 

units are also available, see the 

“Photonics” section. 

M-116 dimensions, in mm. 

XY� Z micropositioning combination 

consisting of (from top to bottom) 

M-116 micro rotary stage and two 

M-111 translation stages (M-110.01 

adapter for mounting the M-111 on a 

honeycomb breadboard with M6 on 

25 mm centers).

Clear Aperture, Lens 

Adapter 

The M-116 is designed with a 

clear aperture for extended 

versatility in optics applications. 

The M-116.AL1 lens adapter 

is available to accommodate 

0.5” optics such as polarizers. 

Non-Contact Reference 

Switch 

M-116 micro rotary stages are 

equipped with an integrated 

optical reference switch. For 

ease of operation and setup, all 

models come with a scale ring 

on the outer edge of the 

turntable. 

Optional Limit Switches 

To protect your equipment and 

increase versatility in automation 

applications, the rotary stage 

can optionally be equipped 

with optical limit switches. The 

travel can be limited to a range 

between 0° and 330° ± 2° (reference 

switch between 30° 

and 330°). 


PZT Actuators 









Index 


info@pi.ws 

Models M-116.DG M-116.DGH M-116.2S M-116.2SH Units Notes 

Rotation range continuous continuous continuous continuous degrees 

Design resolution 2.45, 3.16, 2.09, 2.70, µrad, A3 

(0.00014) (0.00018) (0.00012) (0.00015) (deg) 

Min. incremental motion 50 25 50 25 µrad A4 

Unidirectional repeatability 12 10 12 10 µrad 

Backlash 800

M-060 

M-061 

M-062 

M-062.PD, M-061.PD and M-060.PD from front to rear 

� Continuous Rotation 

� Ultra-High Resolution 

� Velocity up to 90 deg/sec. 

� Preloaded Worm Drive 

for Zero Backlash 

� ActiveDrive DC-Motor, 

Stepper-Motor and Manual 

Versions 

� Compatible with Leading 

Industrial Motion Controllers 

� Direction-Sensing Origin 

Switch 

Application 

Examples 

� Metrology 





� R&D 

7-120 

Series Rotation Stages with 

Worm Gear Drive 

M-06x series rotation stages 

are equipped with ultra-precise, 

ultra-low-friction, spring-preloaded 

worm gear drives allowing 

unlimited rotation in either 

direction. Models M-060 feature 

a 60 mm diameter turntable, 

models M-061, a 100 mm table 

and models M-062, a 120 mm 

table. One manual drive and 

three motor drives (four with 

M-062 models) are available: 

M-06x.PD ActiveDrive 

This version features a directcoupled 

motor/encoder. For 

superior dynamic performance, 

we integrated our unsurpassed 

ActiveDrive system. This 

unique design features a highefficiency, 

PWM servo-amplifier 

mounted side-by-side with 

the motor. It provides several 

decisive advantages: 

� Increased efficiency, by eliminating 

power losses between 

the amplifier and motor 


info@pi.ws 

� Reduced cost of ownership 

and improved reliability, because 

no external driver is 

required 

� Elimination of PWM amplifier 

noise radiation, because 

the amplifier and motor are 

mounted together in the 

same electrically shielded 

case 

M-06x.DG 

DC Motor/Gearhead Drive 

The M-06x.DG are equipped 

with 3-watt DC motors with 

zero-backlash gearhead and 

shaft-mounted encoders (2048 

counts/rev.). The gear ratio of 

29.6 : 1, provides higher resolution 

than the direct drive 

motors. 

M-60x.2S 

Stepper Motor Drive 

The M-060x.2S are equipped 

with direct-drive, microstepped, 

2-phase, stepper 

motors (20,000 counts/rev. 

with C-600 controller), providing 

ultra-smooth, vibration-free 

positioning. 

Non-Contact Origin Switch 

Motorized models are equipped 

with an integrated Halleffect 

origin switch. For ease 

of operation and setup, all 

models come with a scale ring 

on the outer edge of the turntable, 

graduated in 2-degree 

increments. The manual versions 

also feature a driveshaft-mounted 

indicator with 

0.1-degree graduations. 

Optional Limit Switches 

To protect your equipment and 

increase versatility in automation 

applications, the rotary 

stage can optionally be equipped 

with Hall-effect limit 

switches. Travel can be limited 

to a range between 0° and 

268° (± 2°). 

Ordering 

Information 

M-060.PD 

Rotation Stage, ø 60 mm, 360° +, 

ActiveDrive DC-Motor 

(Includes Power Supply) 

M-060.DG 


Closed-Loop DC-Motor / 


M-060.2S 


2-Phase Stepper-Motor Drive 

M-060.M0 


Manual Drive 

M-061.PD 




M-061.DG 




M-061.2S 



M-061.M0 


Manual Drive 

M-062.PD 




M-062.DG 




M-062.2S 



M-062.M0 


Manual Drive 


for Volume Buyers

C-161.2i PIIntelliStep motor with integrated controller, attached to the PI M-062.M0 

rotary stage. 


PZT Actuators 









Models M-060.M0 M-060.PD M-060.DG M-060.2S M-061.M0 M-061.PD M-061.DG M-061.2S M-062.M0 M-062.PD M-062.DG M-062.2S Units 

Index 


Rotation range continuous continuous continuous continuous continuous continuous continuous continuous continuous continuous continuous continuous degrees 

Design resolution 32 2.1 6.3 – 17.5 1.2 3.5 – 15 0.96 2.9 µrad 

(0.0018) (0.00012) (0.00036) (0.001) (6.9 x 10 -5 ) (0.0002) (0.0008) (5.5x10 -5 ) (0.00016) (deg) 

Min. incremental motion – 32 6.3 19 – 17.5 6 10.5 – 15 5 9 µrad 

Unidirectional repeatability – 50 50 50 – 50 50 50 – 60 60 60 µrad 

Backlash – 200 200 200 – 200 200 200 – 240 240 240 µrad 

Max. velocity – 90 16 36 – 90 9 20 – 90 7.3 16 deg/ sec. 

Maximum axial force 

Maximum torque 

±500 ±500 ±500 ±500 ±550 ±550 ±550 ±550 ±650 ±650 ±650 ±650 N 

(� , � ) X Y ±6 ±6 ±6 ±6 ±6 ±6 ±6 ±6 ±7 ±7 ±7 ±7 Nm 

Encoder resolution – 4000 2000 – – 4000 2000 – – 4000 2000 – counts / rev. 

Motor resolution – – – 20000 * – – – 20000 * – – – 20000 * 

Gear ratio – – (28/12) 4 :1 – – – (28/12) 4 :1 – – – (28/12) 4 :1 – 

�29.6:1 �29.6:1 �29.6:1 

Worm gear ratio 50:1 50:1 50:1 50:1 90:1 90:1 90:1 90:1 110:1 110:1 110:1 110:1 

Nominal motor power – 30 3 – 30 3 – 30 3 W 

Motor voltage range – 0 to ± 24 0 to ±12 24* – 0 to ± 24 0 to ±12 24* – 0 to ± 24 0 to ±12 24* V 

Weight 0.42 0.94 0.94 0.96 1.36 1.88 1.88 1.90 2.24 2.76 2.76 2.78 kg 

Body material Al Al Al Al Al Al Al Al Al Al Al Al 

Recommended C-842, C-842, C-600, C-842, C-842, C-600, C-842, C-842, C-600, 

motor controller C-843, C-843, C-630 C-843, C-843, C-630 C-843, C-843, C-630 

C-862 C-862 C-862 C-862 C-862 C-862 

* 2-phase stepper, 24 V chopper voltage, max. 1.5 A / phase, 20,000 microsteps with C-600 or C-630 controller 

** ActiveDrive (integrated PWM servo-amplifier) 

info@pi.ws 

7-121

7-122 

M-060.2S, M-061.2S, 

M-062.2S rotation stages, 

dimensions (in mm) 

M-060.DG, M-061.DG, 

M-062.DG rotation stages, 



info@pi.ws 

M-060.PD, M-061.PD, 

M-062.PD rotation stages, 


M-060.M0, M-061.M0, 

M-062.M0 rotation stages, 

dimensions (in mm)

C-161.2i 

Application 

Examples 

� Flexible Automation 

� Quality Control 

� Test Equipment 

� Micropositioning 

Ordering 

Information 

C-161.2i 

PIIntelliStep Motor, RS-232 Interface 

C-161.2i attached to the PI M-062.M0 

rotary stage. 

C-161.2i 

PIIntelliStep Stepper Motor with 

Integrated Controller/Driver 

� Stepper Motor & 

Controller in One Package 

� Compact Size, Ideal for 

OEM Applications 

� 20,000 Steps/Rev. for 

Smooth Positioning 

� Daisy-Chain Network 

Feature for up to 

9 Devices 

� Configurable TTL-Level 

Limit Switch Inputs 

� Compatible with Apollo 

and PIIntelliStage 

� Mechanically Compatible 

with PI Micropositioners 

The C-161.2i PIIntelliStep 

unit is a very cost-effective 

solution for flexible automation 

and positioning tasks in reseach 

and industry. The PI- 

IntelliStep combines a highresolution 

stepper motor and a 

motion controller/driver in an 

extremely compact package. 

High Reliability 

Because of the high level of integration, 

PIIntelliStep motors 

contain less than 50% of 

the components of a classical 

controller/motor setup (electronics, 

mechanics and cables). 

The motor itself is a 2-phase 

stepper motor providing more 

than 20,000 hours MTBF. 

Finally, limit and origin sensor 

inputs help to protect your positioning 

equipment and offer the 

highest level of compatibility. 

Network Capability 

Up to 9 units can be daisychained 

and controlled from a 

single RS-232 interface. This is 

a tremendous advantage in 

multi-axis setups for automation 

tasks. 

PIIntelliStep – 

PIIntelliStage 

Mechanically attached to a 

micropositining stage, the 

PIIntelliStep motor results 

in a complete high resolution 

micropositioning system. It is 

software compatible with the 

PI PIIntelliStage M-5x1.5i 

series and the C-630.32 

Apollo stepper motor controllers. 

Apollo Controller, 

PIIntelliStage and PIIntelli- 

Step motor can be mixed in 

the same network of up to 9 

axes. 


PZT Actuators 









Index 


info@pi.ws 

C-161.2i seamlessly fits all PI 

flanged motor stages, such as 

the M-126 or M-400 translation 

stage series or M-037, 

M-038 and M-060 rotary stage 

series. 

Model C-161.2i 

Function Stepper motor with integrated controller and driver 

Motor 2-phase stepper motor, 24 V chopper voltage 

Resolution 20,000 microsteps/rev. 

Step-size 314 µrad/microstep (0.018°/microstep) 

Velocity to 100,000 microsteps/sec 

Acceleration to 2,500,000 microsteps/sec2 Torque 0.31 Nm 

Supply power 18-27 V DC, max. 0.7 A 

Controller Integrated into motor housing 

Command set, programming ASCII command set, 

Windows operating software, 

DLL and LabVIEW drivers 

RS-232 Interface 9.6 or 57.6 kbaud (default 9.6 kbaud), 

ring-bus topology support 

Connectors 2 x 9-pin (m/f) sub-D, 3-pin power 

Daisy-chain networking up to 9 devices 

Limit switche inputs 4 TTL, programmable, 200 mm cable 

Dimensions 80.9 x 63.5 x 39.0 mm3 C-161.2i dimensions in mm, decimal places separated by comma. 

7-123

Ordering 

Information 

8-30 

F-311 

F-311 PIMotion&Vision software integrates 

vision systems with PI Micro- and Nanopositioners. 

F-311.V01 

PIMotion&Vision Basic Module, 1CH 

F-311.V04 

PIMotion&Vision Basic Module, 4CH 

F-311.V11 

PIMotion&Vision Pro Module, 1CH 

F-311.V14 

PIMotion&Vision Pro Module, 4CH 

F-311.V1U 

PIMotion&Vision Upgrade to 

Pro Module 

F-311.L10 

PIMotion&Vision Illumination System 



PIMotion&Vision—Integration of Vision 

System and Micro-/Nanopositioning 

� Vision System for Integration 

with PI Micro- and 

Nanopositioning Systems 

� Controls up to Six DOF 

Motion with Sub-µm or 

Sub-nm (Sub-µrad) 

Resolution 

� National Instruments 

Compatible Vision 

System 

� Multi-Channel Vision for 

a Mix of Resolutions 

and/or 3D Observation 

� Powerful LabView VIs 

for PIMotion&Vision 

PIMotion&Vision offers an 

integrated solution for difficult 

tasks such as automated positioning 

of optics, semi-conductor 

wafers, microsystems 

technology MEMS fabrication 


info@pi.ws 

or alignment and scanning of 

samples under a microscope. 

� Basic functions such as 

autofocus, edge and pattern 

recognition, and gap measurement. 

� Intelligent automated procedures. 

� Motion systems capable 

of carrying out the positioning 

or scanning required. 

NI Framegrabber 

The hardware for the F-311 

PIMotion&Vision system consists 

of a National Instruments 

PCI bus framegrabber card. 

This fact guarantees a high 

degree of compatibility for further 

system integration. The 

framegrabber card supports a 

number of camera systems 

and is available with one or 

four channels. 

Software Interface to Microand 

Nanopositioners 

PIMotion&Vision offers a large 

number of LabView drivers 

for continuous monitoring and 

processing of the image information, 

including standard procedures 

for gap measurement, 

autofocus, aligning edges all 

the way to complex alignment 

routines in six degrees of freedom 

with up to 80 axes of 

motion, switching functions 

and read-in of analog signals 

(e. g. photometer signals for 

optical fiber alignment). 

Motion is commanded using 

the PI General Command Set, 

which is supported by all PI 

multi-axis micropositioning and 

nanopositioning controllers. 

The basic version contains all 

the drivers provided by PI; the 

Pro Version includes the full 

IMAQ development environ- 

ment from National Instruments, 

making possible an 

even wider range of system 

integration and function development. 

Simple setup with a single camera, two 

M-111 stages in an XY configuration 

and an M-116 rotatary platform (all 

controlled from a C-843 PCI card). This 

sample setup can be used for pattern 

recognition, as can be seen in the next 

graphics. 

Application 

Examples 

� Optical 6D Alignments 

� Autofocussing 

� Gap Measurements 

� Pattern Matching 

in 

� Semiconductor Industry 


� Life Science 

� MEMS Manufacturing/MST 

� Photonics

PIMotion&Vision sample pattern recognition task. The sample program searches for 

PI logos, counts and aligns them. The logos are 1 x 0.5 mm in size. 

Gap measurement with PIMotion&Vision is linear down to 5 µm, and at separations down 

to 1 µm the values provided can be used with correction. Optical gap measurement then 

begins to be limited by refraction and optical imperfections. The reference measurements 

were made with a P-611 NanoCube piezo NanoPositioning system. 

Optical fiber-alignment with F-206 

6-axis-alignment system and P-611 

Nanocube 3D piezo nanopositioning / 

scanning system. Two cameras allow 

a 3-dimensional visual automated 

coarse alignment. 

PZT Actuators 









Index 

Notes 


info@pi.ws 

Optimal performance in transmittedlight 

applications can be obtained with 

the F-311.L10 illumination system, 

developed by PI. The light intensity is 

adjustable and the use of LEDs assure 

long lifetime. The unit can be powered 

directly from the PI controller, 

a feature which helps reduce the 

number of components. 

8-31

Application 

Examples 

� Fiber Alignment 

� Optical Measurement 

� Characterisation of optical parts or 

MEMS 

� Quality assurance of optical parts 

or MEMS 

Ordering 

Information 

F-361.10 

High-Speed Optical Power Meter, NIST 

Tracable, 1000-1600 nm wavelength 

8-32 

F-361 

F-361 integrating sphere and optical power meter. 

High-Speed Integrating Sphere 

Optical Power Meter 

� Ultra Fast: 5 ksamples/s 

� Power Range 1 nW 

to 10 mW 

� Absolute Power 

Measurement, NIST 

Traceable 

� Display for Instantaneous 

and Test Measurements 

� Spectral Range 1000 nm 

to 1600 nm 



info@pi.ws 

� Compatible to PI 

F-206, M-840 & M-850 

Hexapod Systems 

� Compatible to PI C-880 

Multiaxis Alignment 

Absolute Power 

Measurement, NIST 

Traceable 

F-361 is a very sensitive, 

absolute measuring power 

meter. All incoming light is 

detected by three InGaAs 

detectors in its integrating 

sphere. All F-361 are calibrated 

and NIST traceable. 

107 Power Range 

The F-361 is extremely sensitive, 

the minimum signal resolution 

already starts at 1 nW. It 

covers a range of 7 orders of 

magnitude to 10 mW. For 

higher optical power, an attenuator 

can be used. 

High Speed 

The F-361 provides a high bandwith 

of 5 kHz, a prerequisite 

for automatic alignment. Its 

high-throughput RS-232 interface 

provides up to 5,000 samples/s 

an extraordinary value. 

Compatibility to PI 

Alignment Systems 

PI offers various photonics 

alignment systems consisting 

Model F-361.10 

Function High-speed optical power meter for absolute power measurement 

Channels 1 

Spectral Range 1000 nm to 1600 nm 

Calibration NIST traceable 

Power Range 1 nW to 10 mW 

Absolute accuracy 8.5% 

Autoranging time 140 µs 

Interface USB, RS-232 

RS-232 throughput 5 ksamples/s, max 7 ksamples/s 

Fiber Connector FC 

Detector 3 x InGaAs 

Dimensions 99.5 x 88 x 78 

Weight 865 g 

Compatible to 

� M-840 Fast Six-Axis Parallel 

Kinematics Hexapod 

� M-850 Hexapod Parallel 

Kinematics MicroMotion 

Robot 

� F-206 HexAlign Six-Axis 

MicroMotion Robot and 

Alignment System 

� C-880 Multi-Axis Automation 

Platform 

of precision mechanics up 

to 1nm resolution, advanced 

motion controllers, high level 

software and open-source 

alignment routines. 

The F-361 is compatible to all 

PI alignment systems such 

as M-840/M-850, F-206 and 

C-880 and existing systems 

with relative power meters 

can be upgraded (firmware 

update required). Up to two 

F-361 can be used with the 

above alignment systems. 

F-361 comes with an RS-232 

interface board for the PI 

motion controllers, interface 

cables, power supply, installation 

and operation manual and 

software.

F-361 power meter with F-206 HexAlign robot. 

Dimensions of the F-361 

PZT Actuators 









Index 

Spectral sensitivity of the InGaAs sensor. The measured optical power is standardized. 


info@pi.ws 

8-33

Mercury II Palm-Top Controller 

front and back view. Euro and dollar 

coins for size comparison. 

Application 

Examples 






Ordering 

Information 

C-862.00 

Mercury II Palm-Top DC-Motor 

Controller Set, Including Power Supply 

C-890.PS 

Wide-Range Power Supply for Mercury 

Controller 

C-862.CN 

Additional Network Connecting Cable 

C-860.CN 

Network Connecting Cable with C-860 

Mercury Controller 

C-862.IO 

I/O Connecting Cable with Open End 

for C-862 Mercury Controller 

9-20 



C-862 

Mercury II DC-Motor 

Controller/Driver 

� High Performance 

at Low Cost 

� Integrated Driver, 

no External Amplifier 

Required 

� Stand-Alone Functionality 

� Daisy-Chain Network for 

Multi-Axis Applications 

� Easy Address Setting 

� Macro Command 

Language 

� Non-Volatile EEPROM for 

Macros and Parameters 

� Parameters can Be 

Changed On-the-Fly 

� TTL Inputs for Limit & 

Origin Switches 

� Motor-Brake Control 

� Additional TTL I/O Lines 

The Mercury Palm-Top DC- 

Motor Controller is the optimal 

solution for motion control 

applications where a precision 

positioner is to be controlled 

by a PC or PLC (programmable 

logic controller). 


info@pi.ws 

Integrated Amplifier and 

PWM Outputs 

The unique Mercury concept 

combines a high-performance 

motion controller and an integrated 

power amplifier in an 

extremely small package. Additional 

PWM control outputs 

allow the direct operation of 

any DC-motor-driven PI micropositioning 

system–even highspeed 

stages such as the 

M-500 ActiveDrive Translation 

Stages–reducing costs, 

increasing reliability and simplifying 

the setup. 

Dual Processor Architecture 

The Mercury II controller 

employs a highly specialized 

processor providing high-performance 

PID motion control 

with many options for trajectory 

generation and filter settings. 

Position, velocity and other 

motion parameters can be 

changed on-the-fly. For heightened 

system safety and performance, 

all communication 

and command parsing activity 

is handled by a second, independent 

processor. Any quadrature 

TTL incremental encoder 

can be used for position feed- 

back (linear scales, rotary 

encoders, interferometers). 

Limit and origin switch inputs 

and a motor-brake output are 

also standard. 

Macro Command Language 

The Mercury II controller 

offers a high-level mnemonic 

command language with 

macro and compound command 

functionality. Macros 

can be stored in the nonvolatile 

EEPROM for later 

recall. An autostart macro is 

available to run automation 

tasks at power up (no run-time 

computer communication required!). 


Up to 16 Mercury II controllers 

can be daisy-chained 

for multi-axis motion control 

applications. Each controller 

includes software, an RS-232 

communications cable and a 

network cable. The C-862.00 

set also includes the C-890.PS 

wide-range power supply, networkcable 

and a null modem 

cable for PC connection.

Mercury software, showing the terminal window and selection of controllers 1 through 4. 


Model C-862 

Function Stand-alone DC-servo-motor controller 

Servo characteristics 31-bit velocity, acceleration & position registers, 16-bit programmable 

PID, 256 µs, parameter changes on-the-fly 

Output power 15-watt PWM on-board, additional output for PWM drivers 

Encoder input A/B (quadrature) TTL signals (single-ended or RS-422 differential 

mode), max. 10 6 counts / sec 

Stall detection Motor stop, servo off, triggered by programmable position error 

Limit switches 2 TTL (pull-up/pull-down, programmable) 

Origin switches 1 TTL (pull-up/pull-down, programmable), real-time position capture 

Motor brake output 5 V TTL , software controllable 

Additional I/O Lines 5 V TTL 

Interface / Communication RS-232, 9-pin (m) sub-D (cable included) 

Command Set: 40 high-level mnemonic commands, ASCII format, compound & 

macro command capability (non-volatile EEPROM) 

Motor connector 15-pin (f) sub-D 

Internal safety features Watchdog timer 

Operating voltage 12 - 15 V, 1 - 2 A 

Weight 0.3 kg 

Mercury software, start screen 

C-862 dimensions in mm 

PZT Actuators 









Index 


info@pi.ws 

9-21

Application 

Examples 






Ordering 

Information 

C-630.32 

Apollo Controller for 2-Phase 

Stepper Motors, 3 Axes, 


M-500.PS 

Power Supply for Apollo Controller 

(Included in C-630.32) 

C-863.633 

Interface Cable for Operation with 

PIIntelliStage Translation Stages 

(3 m) 

Apollo Controller front and back view. 

9-22 

C-630 

Apollo Motion Controller/Driver 

for Stepper Motors 

� 3-Axis, Compact Stepper- 

Motor Controller/Driver 

for 2-Phase Motors 

� Up to 50 x Microstep 

Resolution for Smooth, 

High-Resolution 

Positioning 

� Network Feature for 

Multi-Channel Applications 

� PIIntelliStage & 

PIIntelliStep compatible 

The new C-630 Apollo controller 

combines a high-resolution 

motion controller and 

driver in an extremely small 

package. The Apollo is a very 

cost-effective solution for automation, 

precision measurements 

or general positioning 

tasks in research and industry. 

Integrated Drives for 

High-Resolution Motion 

Apollos can drive up to three 

2-phase stepper motors simultaneously, 

and feature microstep 

technology with up to 

20,000 steps/rev. for ultrasmooth, 

high-resolution motion. 

Limit switch and reference 

switch inputs for each 

axis are provided to protect the 

mechanics and for easy operation. 


Model C-630.32 

Function Stepper-motor controller and driver for 2-phase motors 

Axes 3 

Trajectories Point-to-point, 3D linear interpolation 

Motor resolution Up to 50 x microstep resolution (up to 20,000 steps/rev) with PI stepper motors) 

Motor current Up to 800 mA, 24 V, chopped 

Limit switches / reference switches / I/O ports (per axis) 4 TTL, programmable 

Interface / communication RS-232 (cable included), 9.6 to 57 kbit/sec. 

Daisy-chain function Up to 3 units 

Command set, programming ASCII command set 

Host Software Windows operating software and DLLs, LabView Drivers 

Motor connectors (per axis) 15-pin (f) sub-D 

Operating voltage 24 V DC, provided by external wide-range P/S 85 to 240 VAC, 50 to 60 Hz 

Dimensions 260 mm x 145 mm x 45 mm 

Weight 1 kg 


info@pi.ws 


for Flexible Automation 

For control of more than three 

axes, the Appollo’s network 

functionality comes in handy. 

Up to three controllers can be 

linked and controlled over a 

single interface. 

The network may include up to 

three Apollo controllers or a 

combination of up to three PI- 

IntelliStagesTM and two Apollos. 

Each Apollo controller includes 

software, an RS-232 communications 

cable and a wide-range 

power supply for universal 

operation. 

C-630 Apollo Controller with M-112.22S 

linear translation stage. 

Easy-To-Use Software 

and Drivers 

WindowsTM software is provided 

with Apollo controllers 

for easy installation and operation. 

It is derived from the 

PIIntelliStageTM Lance Software, 

and is able to run both 

Apollos and PIIntelliStagesTM in 

the same window. 

Window DLLs and LabViewTM Drivers are also provided for 

advanced programming and 

integration into existing user 

program environments.

C-630 

PIIntelliStage means high-precision 

translators with 0.2 micron repeatability and 

motor controller in a single package. 

M-511.5iM PIIntelliStage with integrated 

motion controller. PIIntelliStages are 

available with travel ranges up to 300 mm 

The LANCE software command editor for 

controlling multiple stage in one network 

from one computer 


Configuration example of a combined PIIntelliStage Apollo network: 4-Axis of 

motion consisting of 2 PIIntelliStages for X and Y motion with an M-062.2S rotary 

stage for rotation around the vertical (Z) axis and a second smaller M-060.2S for rotation 

around X or Y. For setup and wiring see block diagram below on the next picture. 

PIIntelliStage, master cable, 3m 

(C-816.5M comes with master stage) 

PIIntelliStage, slave cable, 3m 

(C-816.5S comes with slave stage) 

PIIntelliStage/Apollo interface cable 

3m, C-663.633, optional 

RS-232 

P/S, 24 V DC (M-500.PS comes with PIIntelliStage master Set) 

PIIntelliStage, master, e. g. M-511.5iM 

PIIntelliStage, slave, e. g. M-511.5iS 

PI standard motor cable 

(C-815.34 comes with every stage) 

Apollo controller 

C-630.32 

P/S, 24V DC (M-500.PS comes with Apollo controller) 

PZT Actuators 









Index 

The same configuration example 

as block diagram. 

All stages can be controlled from 

a single RS-232 Interface. 

PI stage with stepper motor 

e. g. M-062.2S 

PI stage with stepper motor 

e. g. M-060.2S 


info@pi.ws 

9-23

Ordering 

Information 

C-843.20 

DC-Motor Controller PCI PC Board, 

2-Axis 

C-843.40 

DC-Motor Controller PCI PC Board, 

4-Axis 

C-843.JS 

Joystick and PCI Interface Board 

for C-843 Motor Controller 

9-24 

C-843.20 

C-843.40 

C-843.40 DC-motor controller board with 

M-110.DG linear stage, M-235.5DG heavy 

duty linear actuator, M-511.DD direct drive 

translation stage and M-501.1DG vertical 

stage. No external amplifier is required 

to drive any of these or other PI stages. 

Small motors are driven through the C-843’s 

onboard linear amplifiers, direct-drive PI 

stages (e.g. M-511.DD) employ ActiveDrive TM 

controlled off the C-843’s PWM outputs. 

9050} {art 

Servo Motion Controller/ 

Driver PCI Board 

� Very Cost-Effective: Servo 

Amplifiers On-Board 

� Additional PWM Outputs 

for High-Power Motors 

� Trapezoidal Curve, 

S-Curve and Velocity 

Contouring 

� 64 kWord RAM for High- 

Speed Trace Operations 

� Hardware Interrupts for 

Process Control 

� 16 I/O Lines for Flexible 

Automation 

� Electronic Gearing 


Output 


Support 

The new C-843 PCI motion 

controller card drives up to 4 

axes of micropositioning 

equipment. Because there is 

no need for external servoamplifiers, 

this new card is a 

very cost-effective, easy-toset-up 

solution. 

On-Board Servo Amplifiers 

Unlike other PCI controller 

cards, the new C-843 comes 


info@pi.ws 

with on-board, low-noise linear 

amplifiers for the small DC 

motors used in most compact 

micropositioning stages and 

actuators. 

In addition, PWM outputs are 

available to drive more powerful 

equipment (all direct-drive 

translation and rotation stages 

from PI feature the integrated 

ActiveDriveTM PWM amplifiers, 

and also connect to the C-843 

with no external power amplifiers). 

The PWM mode and linear 

amplifier mode can be programmed 

individually for each 

of the 4 (or 2) channels. 

High-Performance 

PID Control 

The C-843 employs a fast DSP 

(digital signal processor) providing 

high-performance PID 

motion control with many 

options for trajectory generation 

and filter settings for superior 

positioning and tracking accuracy. 

Position, velocity, acceleration 

and several other motion 

parameters can be program- 

med individually for each axis 

on-the-fly. High-bandwidth 

counters (5 MHz) support differential 

encoder feedback (incremental 

rotary encoders or linear 

scales) for fast and accurate 

positioning. 

I/O for Flexible Automation 

In addition to 3 TTL inputs per 

channel for limit and reference 

signals, 16 more I/O lines are 

available for flexible automation 

tasks (trigger functions, 

etc.). The C-843 also features 

motor-brake output lines (e. g. 

for M-531.DDB stages). 

High-Speed Tracing 

The integrated 64 kiloword 

trace memory allows online 

tracing of up to four independent 

system variables (positions, 

velocities, internal register 

contents, etc.) at integer 

multiples of the servo-loop 

time. 

Easy-to-Use Software / 

Programming 

For ease of operation, the 

C-843 is compatible with the PI 

General Command Set, 

designed to allow flexible combinations 

with other PI motion 

controllers (fiber aligners, stepper-motor 

controllers and piezo 

controllers for ultra-fast, subnanometer 

motion control). 

Communications to/from the 

board consist of packet-based 

messages passed via memory 

access. An interrupt line is provided 

so that the chipset can 

signal the PC when special 

conditions arise, such as 

reception of an encoder index 

pulse. 

In addition to an ample array of 

software tools, such as Lab- 

VIEW drivers and DLL libra-

ies, the C-843 comes with the 

PISmartMove operating software 

providing all functions for 

single command execution as 

well as macro command facilities. 

To facilitate setup, any supported 

PI MicroPositioning system 

just needs to be selected from 

a PISmartMove menu and all 

default control parameters will 

be set. 

For system integration, the 

C-843 offers full access to the 

motion DSP via a PCI bridge. 


To facilitate setup, any supported PI MicroPositioning stage just needs to be selected from 

a PISmartMove menu and all default control parameters will be set. 

Model C-843 

Function PC plug-in DC-Servo-Motor Controller Board, 32-bit plug-and-play 

PCI-bus, supported by main boards with 3.3 V and 5 V PCI bus connectors 

(universal card) 

Axes 2 / 4 

Servo characteristics Programmable PID V-ff filter, parameter changes on-the-fly 

Profile modes Trapezoidal, S-curve, velocity profile; electronic gearing 

Output power / Analog 3 watts/channel, 12-bit D/A converters, PWM 10-bit, 

resolution 24.5 kHz 

Current limitation 250 mA per channel (short-circuit-proof) 

Encoder input AB (quadrature) differential TTL signals, 5 x 106 counts/s 

Stall detection Servo off, triggered by programmable position error 

Limit switches 8 TTL (active high/low, programmable) 

Origin switches 4 TTL (active high/low, programmable) 

I/O ports 8 TTL inputs, 8 TTL outputs 

Motor connectors 15-pin (f) sub-D per channel (2 on board, 2 on bracket) 

Interface/communication PC PCI bus 

Command set Choice of PI General Command Set or C-842 compatible (QFL) commands 

PISmartMove software is easy to use. 

PZT Actuators 









Index 


info@pi.ws 

PI General Command 

Set permits 

consistent 

programming 

of a wide variety 

of PI motion systems. 

9-25

Ordering 

Information 

C-848.40 

DC-Motor Controller, 4 Axes, 

19” Rack Mount, RS-232 

C-848.40i 


19” Rack Mount, RS-232 and IEEE488 

C-848.20 


19” Rack Mount, RS-232 

C-848.20i 


19” Rack Mount, RS-232 and IEEE488 

Accessories 

C-819.10 

Analog Joystick 

9-26 

C-848 

C-848.40 DC-Motor Controller with various 

PI-stages: M-112.2DG micro-translation stage; 

M-232.17 DC-Mike, M-062.DG rotary stage 

and M-235.5DG heavy duty DC-Mike. 

Multi-Axis DC-Motor Controller 

� Integrated Linear Power 

Amplifiers and PWM 

Outputs 

� Simultaneous Control of 

up to 4 DC Servo-Motors 

� Powerful Macro 

Command Language 

� Programmable Torque 

Limit 

� Fast 32-bit Digital PID V-ff 

Servo Loop 

� 16 I/O Lines for Flexible 

Automation 

� Electronic Gearing 


Output 


Support 

� RS-232 and Optional 

IEEE-488.2 Interfaces 

The C-848 is a flexible, multipurpose, 

rackmount positioning 

and motion controller for 

DC servo-motors. It is designed 

for general positioning and 

automation tasks in research 

and industry. 

Flexibility, Multi-Processor 

Architecture 

Based on a rugged, high-performance 

industrial PC, the 

C-848 offers the flexibility 


info@pi.ws 

required in today’s demanding 

and rapidly changing automation, 

prototyping and production 

processes. In addition to 

the general processor handling 

communication and macro 

command execution, a fast 

DSP motion-control chip set is 

dedicated to trajectory generation 

and servo-control based 

on position information supplied 

by incremental encoders 

(linear scales, rotary encoders). 

In addition to 3 inputs per 

channel for limit switches and 

home position, eight TTL 

inputs and eight TTL outputs 

are available for flexible 

automation. 

The C-848 provides flexible 

and fast high-level-command 

handling and has advanced 

features such as stackable 

macros. The command language 

complies with the PI 

General Command Set, which 

is a user-friendly, well structured 

language reflecting 

the device’s functionality. The 

C-848 also offers advanced 

features such as linear interpolation, 

electronic gearing, realtime 

origin position capture 

and fast 32-bit PID +V-ff servocontrol 

parameters (can be 

changed on-the-fly). 

Integrated Servo Amplifiers / 

PWM Output 

Integrated, low-noise, 5-watt 

linear power amplifiers allow 

operation of any PI micropositioning 

system without additional 

external amplifiers, 

reducing costs and simplifying 

the setup. In addition to the linear 

motor drivers, PWM (pulse 

width modulation) output signals 

are available to drive PI 

micropositioning stages equipped 

with ActiveDrive motors 

(e.g. M-511.DD, M-126.PD) or 

external PWM power amplifiers 

from other manufacturers. 

Easy-to-Use Software / 

Programming 

For ease of operation, the 

C-848 is compatible with the PI 

General Command Set, designed 

to allow flexible combinations 

with other PI motion 

controllers (fiber aligners, stepper-motor 

controllers and piezo 

controllers for ultra-fast, subnanometer 

motion control). 

This intuitive command set 

saves valuable programming 

time by its convenient and 

easy-to-remember structure. 

Control of the C-848 is provided 

through the RS-232 or an 

optional IEEE-488 interface. 

For manual control, the unit can 

be operated with a C-819.10 

joystick. 

In addition to an ample array 

of software tools such as 

LabVIEW drivers and DLL 

libraries, the C-848 comes with 

the operating software C-848 

Control providing all functions 

for single command execution 

as well as macro command 

facilities. 

To facilitate setup, any supported 

PI MicroPositioning 

stage just needs to be 

selected from a menu and all 

default control parameters will 

be set. The C-848 can also run 

in stand-alone mode, and a 

standard computer keyboard 

and monitor can be plugged for 

direct programming. 


The C-848 is to a large extent 





to most PI piezo and 

motor controllers, and is de-

Easy configuration of the C-848 motion controller. 

C-848 Control 

signed for multi-axis operation. 

This greatly reduces the effort 

required to produce custom 

programs, especially in environments 

which include a 

number of different controllers. 

Included with the C-848 is 

user-interface software as well 


sets. 


PZT Actuators 









Model C-848 

Function Rack-mountable DC-servo-motor controller 

Channels 4 (C-848.40), 2 (C-848.20) 

Servo characteristics 32-bit programmable PID V-ff filter, 100 µs/ enabled axis; 

parameter changes on-the-fly 

Profile modes Trapezoidal, electronic gearing 

Output power / resolution Analog H-bridge ± 12 V, 5 watts/channel, 12-bit D/A converters, optional 

output for PWM drivers (10 bit, 24 kHz) 

Current limitation 1 A peak (short-circuit proof) 

Encoder input AB (quadrature) TTL signals (single-ended or RS-422 differential mode), 

max. 10 6 counts/sec 

Stall detection Motor stop, triggered by programmable position error 

Limit switches (per axis) 2 TTL 

programmable soft limits 

Origin switches (per axis) 1 TTL 

real-time position capture 

I/O ports 8 TTL inputs, 8 TTL outputs (pull-up) 

Motor brake output 12 V, software controllable 

Interface / Communication RS-232 (cable included), (IEEE 488.2 optional) 

Command Set > 100 high-level commands, PI General Command Set compatible 

Host software & programming Tools C-848 Control statt operating program, LabView drivers, libraries for C, 

Pascal, BASIC for Windows Firmware updates By floppy disk drive 

Motor connectors (per axis) 15-pin (f) sub-D 

Operating voltage 90 to 264 VAC, 50 to 60 Hz, wide range P/S 

Dimensions 447 x 450 x 90 mm (19” rack mountable) 

Weight 8.4 kg 

Index 


info@pi.ws 

9-27

C-809.40 Amplifier/Interface shown with NI PCI 7344 Card and two PI micropositioning 

stages. 

Application 

Examples 










� Metrology 

Ordering 

Information 

C-809.40 

4 Channel Servo Amplifier 

Motion I/O Interface for NI 

Motion Controllers. 

9-28 

C-809.40 

4-Channel Servo-Amplifier Motion I/O 

Interface for NI Motion Controllers 

� Compatible with NI 

Motion Controllers 

� Integrated 4 Channel 

Analog & PWM Amplifier 

� Plug & Play Operation 

� Uses Standard 68 Pin NI 

Connection Cable 

� 37 Pin I/O Interface for 

User-Specific Purposes 

(Triggering, etc.) 

Many customers wish to use 

PI’s unique DC servomotor and 

piezomotor motion devices 

with third-party controls such 

as the 4-axis 7344 from 

National Instruments. To support 

these customers and 

ease the job of cabling and provisioning, 

the C-809.40 provides 

four axes of amplification, 

conditioning and analog/PWM 

conversion to drive 

open- and closed-loop DC servomotor 

stages* of up to 6W. 

The C-809 also converts differential 

encoder signals into the 

single-ended signals required 

by NI controllers. 


info@pi.ws 

Its automatic analog / PWM 

conversion supports linear and 

rotary stages and actuators 

using either type of drive**. To 

facilitate neat and professional 

installations, all motor power, 

encoder signals and limit/reference 

switch information is provided 

via front-panel connectors***. 

Convenient fan-out of 

auxiliary and I/O lines from the 

NI 7344 is also provided via a 

front-panel sub-D connector. 

24 VDC power outputs are 

also provided to support 

stages with internal PWM 

amplifiers. The C-809.40 is a 

particularly neat and tidy solution 

to using PI high-performance 

motorized and piezomotor 

servo stages with NI’s 

popular controllers. 

The C-809.40 is also compatible 

with many third-party 

mechanisms - consult with 

your local PI applications engineer 

for more information. 

Tecnical Data 

Model C-809.40 

Function Amplifier/Interface for National Instruments motion controllers 

Channels 4 

Output power Analog: 6 watts/channel, PWM: power for ActiveDrive 

stages supplied by separate power-supply 24V/channel 

Max. power 110-120 W / 24 V (for PWM stages) 

Current limitation 1 A per channel for analog DC motors (short-circuit proof) 

Motor connectors 15-pin (f) sub-D per channel 

I/O Connector 37-pin sub-D f connector 

Motion I/O Connector 68-pin VHDCI motion I/O connector (SCSI 4 type), 

works with NI cable SHC68-C68-S 

Dimensions 450 x 105 x 390 mm 

Power supply Wide-range, 90 to 240 V AC at 50 to 60 Hz 

* Standard linear and rotary stages with DB 15 connector and DC motor. For compatibility 

with PILine piezomotor stages, please ask individually. Motor brake functionality is 

not supported. 

** Call PI for the configuration changes required if you want the C-809 to receive and route 

PWM signals generated by the NI card. 

*** The appropriate cable SHC68-C68-S is available from National Instruments, order 

number 186380-02 (2 m length) or 186380-0R5 (0.5 m length).

GERMANY 

Physik Instrumente (PI) 

GmbH & Co. KG 

Auf der Roemerstrasse 

76228 Karlsruhe 

Tel: +49 (721) 4846-0 

Fax: +49 (721) 4846-100 

www.pi.ws 

info@pi.ws 

GERMANY 

PI Ceramic GmbH 

Lindenstrasse 

07589 Lederhose 

Tel: +49 (36604) 882-0 

Fax: +49 (36604) 882-25 

www.piceramic.com 

info@piceramic.com 

USA 

PI (Physik Instrumente) USA West 

1342 Bell Avenue, Suite 3A 

Tustin, CA 92780 

Tel: +1 (714) 850 1835 

Fax: +1 (714) 850 1831 

Email: info@pi-usa.us 

http://www.pi-usa.us 

PI (Physik Instrumente) USA East 

16 Albert Str. 

Auburn, MA 01501 

Tel: +1 (508) 832 3456 

Fax: +1 (508) 832 0506 

Email: info@pi-usa.us 

http://www.pi-usa.us 

JAPAN 

PI-Polytec Co., Ltd. 

2-38-5 Akebono-cho 

Tachikawa-shi 

Tokyo 190-0012 

Tel: +81 (42) 526 7300 

Fax: +81 (42) 526 7301 

Email: info@pi-polytec.co.jp 

JAPAN 

PI-Polytec Co. Ltd. 

Hanahara Dai-ni Building, #703 

4-11-27 Nishinakajima, 

Yodogawa-ku, Osaka-shi 

Osaka 532-0011 

Tel: +81 (6) 6304 5605 

Fax: +81 (6) 6304 5606 

Email: info@pi-polytec.co.jp 

GREAT BRITAIN 

Lambda Photometrics Ltd. 

Lambda House 

Batford Mill 

Harpenden, Hertfordshire 

AL5 5BZ 

Tel: +44 (1582) 76 43 34 

Fax: +44 (1582) 71 20 84 

Email: info@lambdaphoto.co.uk 

http://www.lambdaphoto.co.uk 

FRANCE 

Polytec PI S.A. 

32 rue Delizy 

F-93694 Pantin Cedex 

Tel: +33 (1) 48 10 39 30 

Fax: +33 (1) 48 10 08 03 

Email: pi.phot@polytec-pi.fr 

http://www.polytec-pi.fr 

ITALY 

Physik Instrumente (PI) S. r. l. 

Via E. De Amicis, 2 

I-20091 Bresso (MI) 

Tel: +39 (02) 665 011 01 

Fax: +39 (02) 665 014 56 

Email: info@pionline.it 

http://www.pionline.it

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