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P-615 NanoCube 350C NanoPositioning
System, 350 x 350 x 250 µm travel range.
Application
Examples
� Micromachining
� Micromanipulation
� Life sciences
� Semiconductor test systems
� Photonics packaging
P-615 with optional fiber holder F-603.22.
2-64
P-615
Ordering
Information
P-615.3CD
NanoCube XYZ Piezo NanoPositioning
Stage, 350 � 350 � 250 µm,
Capacitive Sensors, Sub-D-Connector
P-615.3CL
NanoCube XYZ Piezo NanoPositioning
Stage, 350 � 350 � 250 µm,
Capacitive Sensors, Lemo Connectors
P-615.30L
NanoCube XYZ Piezo NanoPositioning
Stage, 350 � 350 � 250 µm,
Open-Loop, Lemo Connector
NanoCube 350C XYZ
Piezo NanoAlignment Systems
� 350 � 350 � 250 µm
Closed-Loop Travel Range
� Parallel-Kinematics
Design & Direct Capacitive
Metrology for
Highest Multi-Axis
Accuracy
� Compact Design:
80 � 80 � 42 mm
(Closed-Loop Version!)
� 10 mm Clear Aperture
� New PICMA ® PZT Drive
with Extended Lifetime
� 1 nm Resolution
� Ideal for Alignment and
Photonics Packaging
Applications
� Closed- and Open-Loop
Versions
� Vacuum Compatible to
10 -6 hpa
The P-615 NanoCube 350C
is a novel, closed-loop, multiaxis
Piezo NanoPositioning and
alignment system. Its 350 �
350 � 250 µm, XYZ positioning
and scanning range comes
in an extremely compact package.
Equipped with a zero-stiction,
zero-friction guiding system,
this NanoCube provides
motion with ultra-high
resolution and settling times of
only a few milliseconds. Openand
closed-loop versions are
offered to suit your application.
Higher Precision Through
Parallel-Motion Metrology
& Parallel-Kinematics
P-615s are based on a newly
developed frictionless XYZ
piezo scanner, equipped with
direct-measuring, multi-axis
capacitve position sensors
(parallel metrology). The capacitive
sensors directly measure
the position of the moving platform
(rather than strain in the
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drive system,as is common with
lower-precision strain gauge
sensors). Parallel metrology
can “see” all controlled degrees
of freedom simultaneously and
compensate for runout and
crosstalk of orthogonal axes.
This technique, combined with
the inherent precision of the
non-contact capacitive sensor
an the parallel-kinematics design
results in higher linearity,
and provides superior responsiveness,
resolution, repeatability
and stability at the nanometer
level.
Double Stiffness
As do the single-axis Nano-
Positioners of the P-620
PIHera Series, the P-615
NanoCube 350C provides
high stiffness combined with
very large travel ranges. The
unique flexure design provides
for twice the stiffness in
the vertical axis, (compared to
X or Y), allowing for faster
response and higher operating
frequencies under load. For
example, the settling-time
(with 100 g load!) to reach a
commanded position with 1%
accuracy is only 15 ms in
the Z-axis (approximately 35 %
faster without load).
Photonics Alignment
The NanoCube 350C is
equipped with a fiber adapter
interface similar to the
P-611.3SF NanoCube (page
8-16) and accommodates all
F-603-series fiber holders and
accessories (page 8-26).
Working Principle with
Increased Lifetime
P-615 NanoPositioners are
equipped with the unique
P-885 PICMA ® monolithic
multilayer piezo actuators integrated
into a sophisticated
flexure guiding system. The
wire-EDM-cut flexures are FEA
(finite element analysis) modeled
for zero stiction and zero
friction, highest possible resolution
and exceptional guiding
precision. The newly designed
and highly optimized drives are
more robust than conventional
piezo actuators, and feature
superior lifetime in dynamic and
static applications. Because
guidance and sensors are all
frictionless and maintenancefree,
NanoCube systems
achieve exceptional levels of
reliability. Integrated capacitive
position feedback sensors provide
nanometer-scale resolution
and stability in closed-loop
operation (with PI control electronics).
Notes
See the “PZT Control Electronics”
section for our comprehensive line
of low-noise modular and OEM
control electronics for computer
and manual control.