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7-102
M-665.2PM
M-665.2PM piezo linear motor stage with integrated linear encoder (direct motion
metrology) and ActivePiezoDrive.
Application
Examples
� Bio Technology
� Micromanipulation
� Microscopy
� Quallity control
� Semiconductor test equipment
� Metrology
� Disk drive test assemblies
� R&D
� Photonics Packaging
Ordering
Information
M-665.2PM
PIline Low-Profile Translation Stage,
50 mm, Piezo Linear Motor,
Closed-Loop, 0.1 µm Linear Encoder,
ActivePiezoDrive Integrated Driver,
Power Supply
PIline Low-Profile Translation
Stages with Piezo Linear Motor
� Piezo-Motor-Driven
Translation Stage
� Low-Profile, only 26.5 mm
� Velocity to 130 mm/s
� Integrated ActivePiezo-
Drive Piezo Power
Amplifier
� Acceleration to 10 g
� 0.1 µm Linear Encoder
(Direct-Motion Metrology)
� 50 mm Travel
� AutoLock Feature
Eliminates Servo Dither
� XY Combinations
Available
� 20,000 h MTBF
� Vacuum Versions to
10 -8 hPa Available
PIline—Ultimate motion
in the smallest package
The PIline M-665.2PM is a
low profile, closed-loop translation
stage combining the advantages
of linear piezo-motor
drives with PI precision micro
mechanics.
Its novel linear motor is based
on a ultra-small, high-speed
ultra-sonic piezo-drive, developed
and manufactured by PI
and PI Ceramic. The ultrasonic
http://www.pi.ws
info@pi.ws
piezo motor operating principle
is based on the simultaneous
longitudinal and bending oscillation
of a special piezoelectric
ceramic plate, creating an elliptical
motion at the ceramic tip.
Each cycle produces a tiny
step, as small as a few nanometers,
allowing continuous
smooth motion with virtually
unlimited travel when installed
in an appropriate-length translation
(or rotation) stage.
The lightweight, low-profile
drive combines extremely high
acceleration (up to 20 g) and
velocity up to 130 mm/s with
excellent position resolution
and high holding forces. Since
the ceramic tip of the motor is
preloaded against the moving
part of the stage, it creates a
braking force while at rest. The
benefits are the elimination of
heat dissipation and servo
dither (if used with a closedloop
system) in steady-state
mode. Note that there will not
be a position shift in holding
mode, as is common with
mechanical motor brakes!
There are no gears, leadscrews
or other mechanical
components to contribute play
or backlash.
High-Speed Closed-Loop
Operation with Direct-
Motion Metrology
M-665 translation stages are
equipped with integrated highprecision
optical linear encoders
(non-contact, direct motion
metrology) for closed-loop
operation with standard DC
servo-motor controllers, such
as the PI C-843 card. Special
controllers such as the NI
7344, the GALIL DMC-1810 or
DMC-2020* allow the setting
of additional piezo motor relevant
parameters and provide
even higher performance.
Complete Package
with Driver, Power Supply
and Cables
Unlike conventional piezo
motor stages, the M-665
comes as a complete package,
ready for operation. M-665
stages are equipped with the
ActivePiezoDrive, a special
piezo amplifier circuit integrated
into the stage, further
facilitating setup and operation.
A power supply for the
integrated driver and a motor
cable are also included.
Lifetime
PIline drives are based on
PI’s 30+ years of experience
with piezo nanopositioning technology
and offer exceptional
precision and reliability with an
MTBF of > 20,000 hours. Components
such as gears, shafts
and moving cables that are
prone to failure in conventional
motion systems, are simply
not part on the PIline design.
* For using NI controllers please request
further info on the C-809 motion
interfaces (see p. 9-28). For GALIL
controllers, a special option is required.
Custom long travel XY microscopy
stage (PIline piezo motor driven)
with P-527 sub-nanometer resolution
XYZ Piezo NanoScanning stage
mounted on top. CD for size
comparison.