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Ordering Information Application Examples � Atomic Force Microscopy � Micromanipulation � Biotechnology � Nanomanipulation � Nano-imprinting � Nanometrology � Nanolithography 2-56 P-363 P-363.2CD and .3CD (background) PicoCube, high-performance piezo positioning- and scanning systems. Smart media card for size comparsion. P-363.3CD PicoCube XYZ Positioning- and Scanning System, 6x6x6 µm,Parallel- Motion Metrology, Capacitive Sensors, Sub-D Connectors P-363.2CD PicoCube XY Positioning- and Scanning System, 6 x 6 µm, Parallel- Motion Metrology, Capacitive Sensors, Sub-D Connectors P-363.3CL PicoCube XYZ Positioning- and Scanning System, 6x6x6 µm,Parallel- Motion Metrology, Capacitive Sensors, Lemo Connectors P-363.2CL PicoCube XY Positioning- and Scanning System, 6 x 6 µm, Parallel- Motion Metrology, Capacitive Sensors, Lemo Connectors Different travel ranges or dimensions on request. PicoCube Ultra-Fast, XY and XYZ NanoPositioning and Scanning Stages � Ultra-High-Performace Closed-Loop Scanner for AFM/SPM � Superior Manipulation Tool for Nanotechnology � Resonant Frequency 9.8 kHz � Ultra-High-Resolution Capacitive Feedback � Parallel-Motion Metrology for Highest Linearity and Stability � 50 Picometer Resolution � 6 x 6 x 6 µm Travel Range � Very Small Package � Rugged Design Ultra-High-Performance Scanner/Manipulator for Nanotechnology The P-363 PicoCube XY/XYZ is an ultra-high-performance closed-loop piezo scanning system. Designed for AFM, SPM and nanomanipulation applications, it combines an ultra-low inertia, high-speed XY/XYZ piezo scanner with non-contact, direct-measuring, parallelmetrology capacitive feedback capable of 50 picometers resolution. On top of being extremely precise, the PicoCube system is also very small and rugged. Measuring only 30 x 30 x 40 mm (30 x30 x26 mm for XY version), it is easy to integrate in any scanning apparatus. AFM, STM, SPM, Nanolithography, Nano-Imprinting, Nanometrology The PicoCube was specifically developed to overcome the limitations of the piezoelectric scanners currently available for STM, AFM and SPM. In addition to these applications, the PicoCube is also the ideal scanning and manipu- http://www.pi.ws info@pi.ws lation tool for nano-imprinting, nanolithography, ultra-high-resolution near-field scanning optical microscopy and nano-surface-metrology applications. Higher Precision Through Parallel-Motion Metrology The PicoCube is based on a proprietary, newly developed ultra-fast, frictionless XY/XYZ piezo scanner equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors measure the position of the moving platform rather than strain in the actuator (as is common with lower-precision piezo resistive strain gauge sensors). Parallel metrology can “see” all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. This technique, combined with the inherent linearity and precision of the PI non-contact twoplate capacitive sensor and the ultra-compact, temperaturecompensated design, results in higher linearity scans and provides superior responsiveness, resolution, repeatability and stability at the sub-nanometer level. PI capacitive sensors are equipped with the proprietary ILS (Integrated Linearization System) for enhanced linearity and are also much less sensitive to EMI than other high-resolution sensors. Nanometer Accuracy in 1 Millisecond with 50-Picometer Resolution. PicoCube systems provide resolution of 50 picometers and below. The ultra-fast XY/XYZ piezo drives offer resonant frequencies of 9.8 kHz in Z and >3 kHz in X and Y! The high resonant frequency and high-bandwidth capacitive feedback allow step & settle to 1% accuracy in as little as one millisecond. Rugged Design In spite of its ability to move and position on an atomic scale, the PicoCube boasts a rugged design for real-world applications. For extra-high stability and reduced mass, the body is precision machined from heat-treated and stressrelieved titanium. The sophisticated frictionless design also ensures that the (moving) top plate protects the internal actuator/sensor unit from foreign objects. The P-363 settles to within 1 nm in 1 ms (100 nm step, X and Y motion; faster response in Z).
Dimensions of the P-363.3CD in mm. Removable top plate. Dimensions of the P-363.2CD in mm. Removable top plate. Control The PicoCube controller is based on the E-500, 19” rackmount chassis with one E-509.CA3 servo-controller and three E-507.36 power amplifier modules. This controller is equipped with high-speed analog interfaces (0 to 10 V). An optional E-516 20-bit interface module (see page 6-58) is also available. Technical Data PZT Actuators PZT Flexure NanoPositioners PZT Active Optics / Steering Mirrors Tutorial: Piezoelectrics... Capacitive Position Sensors PZT Control Electronics MicroPositioners / Hexapod Systems Photonics Alignment & Packaging Systems Motor Controllers Index Model P-363.3CL P-363.2CL Units Active axes X, Y, Z X, Y Closed-loop travel 6, 6, 6 6, 6 µm Min. open-loop travel -250 to +250V 7, 7, 6.5 7, 7 µm Integrated feedback sensor capacitive capacitive Closed- / Open-loop resolution* 0.1/0.05 0.1/0.05 nm Closed-loop linearity (X,Y, typ.) 1 1 nm Max. Load 10 10 N Tilt, off-axis (typ.) 0.5 0.5 µrad Electrical capacitance 60 (X, Y); 110 (Z) 60 nF ±20% Unloaded resonant frequency (X,Y) 3.1 4.2 kHz ±20% Unloaded resonant frequency (Z) 9.8 – kHz ±20% Resonant frequency @20g load (X,Y) 1.5 2.1 kHz ±20% Operating temperature range -40 to 120 – 40 to 120 °C Voltage and sensor connection Sub-D special Sub-D special connector with connector with Lemo adapter Lemo adapter Weight (with cables) 225 190 g ±5% Body material Titanium Titanium Recommended controller E-500 System with E-500 System with E-507.36 amplifier E-507.36 amplifier * Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-509.C3A controller and E-507.36 amplifier. http://www.pi.ws info@pi.ws 2-57
Page 1 and 2: For the latest version go to http:/
Page 3 and 4: Nanopositioning, Nanomechanics Lead
Page 5 and 6: Parallel Kinematics Multi- Axis Mic
Page 7 and 8: E-831, piezo power amplifier module
Page 9 and 10: The displacement of PICMA ® actuat
Page 11 and 12: Technical Data / Ordering Numbers O
Page 13 and 14: Dimensions of the P-721.CLQ, CDQ or
Page 15 and 16: P-721.12Q QuickLock thread adapter,
Page 17 and 18: Dimensions of the P-62x.1CD/.1CL/.1
Page 19 and 20: Dimensions of the P-62x.2CD/.2CL/.2
Page 21: Dimensions of the P-62x.ZCD/.ZCL/.Z
Page 25 and 26: Dimensions of P-733.2DD and .3DD in
Page 27 and 28: Technical Data Models P-733.2CL P-7
Page 29 and 30: sophisticated single-module, parall
Page 31 and 32: P-615 dimensions in mm. The clear a
Page 33 and 34: Technical Data Models S-334.2SL Act
Page 35 and 36: S-325.20L dimensions in mm S-325.2S
Page 37 and 38: System Analysis—Advanced Software
Page 39 and 40: Technical Data Model E-710.3CD E-71
Page 41 and 42: E-621 open-loop frequency response
Page 43 and 44: E-665, open-loop frequency with var
Page 45 and 46: Tiny: E-841.05/E-842.05 dimensions
Page 47 and 48: WaveEditor-Function Generator WaveE
Page 49 and 50: M-661 M-662 M-663 PIline ultra-comp
Page 51 and 52: Technical Data Did you know that PI
Page 53 and 54: Dimensions of the M-665.2PM in mm.
Page 55 and 56: P-661 and P-665 series motors and a
Page 57 and 58: Hexapod digital motion controller.
Page 59 and 60: M-850 Hexapod, dimensions (in mm) C
Page 61 and 62: Ball tip (included) Technical Data
Page 63 and 64: Technical Data Models M-451.1PD M-4
Page 65 and 66: M-110, M-111 and M-112. Cable lengt
Page 67 and 68: M-110, M-111, M-112 dimensions in m
Page 69 and 70: Clear Aperture, Lens Adapter The M-
Page 71 and 72: C-161.2i PIIntelliStep motor with i
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C-161.2i Application Examples � F
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PIMotion&Vision sample pattern reco
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F-361 power meter with F-206 HexAli
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Mercury software, showing the termi
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C-630 PIIntelliStage means high-pre
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ies, the C-843 comes with the PISma
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Easy configuration of the C-848 mot
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GERMANY Physik Instrumente (PI) Gmb
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