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Application Examples � Photonics packaging automation � Fiber optic instrumentation � Fiber alignment � Metrology � Quality control � Test equipment � Micromachining Ordering Information M-110.1DG Micro-Translation Stage, 5 mm, Closed-Loop DC Motor M-111.1DG Micro-Translation Stage, 15 mm, Closed-Loop DC Motor M-112.1DG Micro-Translation Stage, 25 mm, Closed-Loop DC Motor M-110.12S Micro-Translation Stage, 5 mm, 2-Phase Stepper Motor M-111.12S Micro-Translation Stage, 15 mm, 2-Phase Stepper Motor M-112.12S Micro-Translation Stage, 25 mm, 2-Phase Stepper Motor Custom Designs for Volume Buyers 7-114 M-110.1 M-111.1 M-112.1 High-Resolution Micro-Translation Stages M-110.1DG micro-translation stage (battery for size comparison). � 0.05 µm Minimum Incremental Motion � 5, 15 and 25 mm Travel Ranges � Velocity to 1.5 mm/sec. � Closed-Loop DC Motors and Stepper Motors � Integrated Hall-Effect Limit and Reference Switches Technical Data http://www.pi.ws info@pi.ws M-110, M-111 and M-112 are ultra-high resolution motorized translation stages providing linear motion of 5 to 25 mm in an extremely compact package. They feature a precision leadscrew with sub-micron resolution and precision linear ball bearings guaranteeing < 0.5 µm straightness of travel. Stepper and Servo Motors Both drive options provide a cost effective solution for industrial and OEM environments. A miniature DC or stepper motor actuates motion via a backlashcompensated leadscrew / nut system and gearhead. To meet the most critical positioning demands, the DC motor is equipped with a high resolution encoder featuring resolution of 0.007 µm per count. The combination of the extremely low stiction / friction construction and high-resolution encoder allows for minimum incremental motion of 50 nanometers at speeds up to 1.5 mm/sec. Non-Contact Limit and Reference Switches To protect your investment, non-contacting Hall-effect limit and reference switches are installed. Each stage includes a 0.5 m cable with 15-pin sub-D connector and a 3 m extension cable. The connector on the DC-servo versions features integrated line drivers for cable lengths up to 10 meters between actuator and controller. M-110, M-111 and M-112 can be combined to XY and XYZ systems for multiaxis alignment applications. A variety of add-on PiezoNanoAlignment units are also available see the „Photonics“ section. Models M-110.1DG M-111.1DG M-112.1DG M-110.12S M-111. 12S M-112.12S Units Travel range 5 15 25 5 15 25 mm Design resolution 0.007 0.007 0.007 0.006 0.006 0.006 µm Min. incremental motion 0.05 0.05 0.05 0.05 0.05 0.05 µm Unidirectional repeatability 0.1 0.1 0.1 0.1 0.1 0.1 µm Backlash 2 2 2 2 2 2 µm Max. velocity 1 1.5 1.5 1 1 1 mm/sec Max. normal load capacity 3 3 2 3 3 2 kg Max. push/pull force 10 10 10 10 10 10 N Max. lateral force 10 10 10 10 10 10 N Encoder resolution 2048 2048 2048 - - - counts/rev. Motor resolution - - - 2400* 2400* 2400* steps/rev. Drive screw pitch 0.4 0.4 0.4 0.4 0.4 0.4 mm/rev. Gear ratio 28.44444:1 28.44444:1 28.44444:1 28.44444:1 28.44444:1 28.44444:1 Nominal motor power 0.6 2 2 * * * W Motor voltage range 0 to ±12 0 to ±12 0 to ±12 24* 24* 24* V Weight 0.3 0.4 0.5 0.3 0.4 0.5 kg Recommended C-843, C-848, C-843, C-848, C-843, C-848, C-600, C-630 C-600, C-630 C-600, C-630 motor controllers C-862 C-862 C-862 * 2-phase stepper, 24 V chopper voltage, 2,400 microsteps with C-600, C-630 controllers
M-110, M-111 and M-112. Cable length: 500 mm, 15-pin sub-D connector with integrated encoder line drivers. M-110, M-111, M-112 Z-mounting bracket, dimensions (in mm). PZT Actuators PZT Flexure NanoPositioners PZT Active Optics / Steering Mirrors Tutorial: Piezoelectrics... Capacitive Position Sensors PZT Control Electronics MicroPositioners / Hexapod Systems Photonics Alignment & Packaging Systems Motor Controllers Index http://www.pi.ws info@pi.ws F-130 fiber alignment system consisting of an M-110 XYZ positioning system and a P-611 XYZ Piezo- NanoPositioning system. This combination can be operated by the C-880 controller or NI controllers (request our technote!) 7-115
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