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sophisticated single-module,
parallel-kinematics flexure guiding
system. The newly designed
and highly optimized
piezo drives (first with 100%
ceramic insulation) are more
robust than conventional piezo
actuators, and feature superior
lifetime in dynamic and static
applications. The wire-
EDM-cut flexures are FEA
modeled for zero-stiction/zerofriction,
ultra-high resolution
and exceptional guiding precision.
Integrated capacitive
position feedback sensors in a
parallel-metrology configuration
provide sub-nanometer
resolution and stability in closed-loop
operation (with PI
electronics).
Because guidance, sensors
and actuators are all friction-
P-562.3CD (unloaded) step and settle
is faster than 15 ms in X, Y and Z.
P-562.3CD with 330 g load settles
within 40 milliseconds.
less and maintenance-free,
PIMars systems achieve
exceptional levels of reliability.
Ultra-High Vacuum Option
For applications in ultrahigh
vacuum (to 10 -9 hPa) PI offers
a special version of the
P-562.3UD. It is non-magnetic
(as well as non magnetizable)
and contains vacuum qualified
components only. These guarantee
minimal outgassing
rates and an optimal UHV
suitability.
P-561.3DD: same footprint, different direct-drive technology for
highest resonant frequencies and ultra-fast scanning dynamics.
Technical Data
PZT Actuators
PZT Flexure NanoPositioners
PZT Active Optics / Steering Mirrors
Tutorial: Piezoelectrics...
Capacitive Position Sensors
PZT Control Electronics
MicroPositioners / Hexapod Systems
Photonics Alignment & Packaging Systems
Motor Controllers
Index
P-562.3CD dimensions in mm.
http://www.pi.ws
info@pi.ws
Model P-561.3CD P-562.3CD P-563.3CD P-561.3DD Units
Active axes XYZ XYZ XYZ XYZ
Closed-loop travel 100x100x100 200x200x200 300x300x250 45x45x10 µm
Min. open-loop travel -20 to 120V 150x150x150 220x220x220 55x55x15 µm
Integrated feedback sensor capacitive capacitive capacitive capacitive
Open-loop resolution* 0.2 0.4 0.7 0.1 nm
Closed-loop resolution* 0.8 1 1 0.2 nm
Closed-loop linearity (typ.) 0.03 0.03 0.03 0.03 %
Push force capacity (in X, Y, Z) 200, 200, 50 200, 200, 50 200, 200, 50 200, 200, 50 N
Pull force capacity (in X, Y, Z) 30, 30, 30 30, 30, 30 30, 30, 30 30, 30, 30 N
Maximal load 50 50 50 50 N
Resonant frequency unloaded (X, Y, Z) 190, 190, 380 170, 170, 315 920, 920, 1050 Hz ±20%
Resonant frequency with 66 g load (X, Y, Z) 810, 810, 880 Hz ±20%
Resonant frequency with 330 g load (X, Y, Z) 140, 140, 300 140, 140, 195 Hz ±20%
Operating temperature -20 to 80 -20 to 80 -20 to 80 -20 to 80 °C
Voltage & sensor connection Sub-D special Sub-D special Sub-D special Sub-D special
Body material Al Al Al Al
Recommended controller E-710, E-710, E-710, E-710,
E-500 System E-500 System E-500 System E-500 System
* Resolution of PI Piezo NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-710 digital piezo controller.
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