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P-615 NanoCube 350C NanoPositioning System, 350 x 350 x 250 µm travel range. Application Examples � Micromachining � Micromanipulation � Life sciences � Semiconductor test systems � Photonics packaging P-615 with optional fiber holder F-603.22. 2-64 P-615 Ordering Information P-615.3CD NanoCube XYZ Piezo NanoPositioning Stage, 350 � 350 � 250 µm, Capacitive Sensors, Sub-D-Connector P-615.3CL NanoCube XYZ Piezo NanoPositioning Stage, 350 � 350 � 250 µm, Capacitive Sensors, Lemo Connectors P-615.30L NanoCube XYZ Piezo NanoPositioning Stage, 350 � 350 � 250 µm, Open-Loop, Lemo Connector NanoCube 350C XYZ Piezo NanoAlignment Systems � 350 � 350 � 250 µm Closed-Loop Travel Range � Parallel-Kinematics Design & Direct Capacitive Metrology for Highest Multi-Axis Accuracy � Compact Design: 80 � 80 � 42 mm (Closed-Loop Version!) � 10 mm Clear Aperture � New PICMA ® PZT Drive with Extended Lifetime � 1 nm Resolution � Ideal for Alignment and Photonics Packaging Applications � Closed- and Open-Loop Versions � Vacuum Compatible to 10 -6 hpa The P-615 NanoCube 350C is a novel, closed-loop, multiaxis Piezo NanoPositioning and alignment system. Its 350 � 350 � 250 µm, XYZ positioning and scanning range comes in an extremely compact package. Equipped with a zero-stiction, zero-friction guiding system, this NanoCube provides motion with ultra-high resolution and settling times of only a few milliseconds. Openand closed-loop versions are offered to suit your application. Higher Precision Through Parallel-Motion Metrology & Parallel-Kinematics P-615s are based on a newly developed frictionless XYZ piezo scanner, equipped with direct-measuring, multi-axis capacitve position sensors (parallel metrology). The capacitive sensors directly measure the position of the moving platform (rather than strain in the http://www.pi.ws info@pi.ws drive system,as is common with lower-precision strain gauge sensors). Parallel metrology can “see” all controlled degrees of freedom simultaneously and compensate for runout and crosstalk of orthogonal axes. This technique, combined with the inherent precision of the non-contact capacitive sensor an the parallel-kinematics design results in higher linearity, and provides superior responsiveness, resolution, repeatability and stability at the nanometer level. Double Stiffness As do the single-axis Nano- Positioners of the P-620 PIHera Series, the P-615 NanoCube 350C provides high stiffness combined with very large travel ranges. The unique flexure design provides for twice the stiffness in the vertical axis, (compared to X or Y), allowing for faster response and higher operating frequencies under load. For example, the settling-time (with 100 g load!) to reach a commanded position with 1% accuracy is only 15 ms in the Z-axis (approximately 35 % faster without load). Photonics Alignment The NanoCube 350C is equipped with a fiber adapter interface similar to the P-611.3SF NanoCube (page 8-16) and accommodates all F-603-series fiber holders and accessories (page 8-26). Working Principle with Increased Lifetime P-615 NanoPositioners are equipped with the unique P-885 PICMA ® monolithic multilayer piezo actuators integrated into a sophisticated flexure guiding system. The wire-EDM-cut flexures are FEA (finite element analysis) modeled for zero stiction and zero friction, highest possible resolution and exceptional guiding precision. The newly designed and highly optimized drives are more robust than conventional piezo actuators, and feature superior lifetime in dynamic and static applications. Because guidance and sensors are all frictionless and maintenancefree, NanoCube systems achieve exceptional levels of reliability. Integrated capacitive position feedback sensors provide nanometer-scale resolution and stability in closed-loop operation (with PI control electronics). Notes See the “PZT Control Electronics” section for our comprehensive line of low-noise modular and OEM control electronics for computer and manual control.
P-615 dimensions in mm. The clear aperture has a diameter of 10 mm. P-615, X-axis with 100 g load performing 100 nm steps in rapid sequence without overshoot. Settling time for the Z-axis to reach a commanded position with 1 % accuracy is only 15 ms. Technical Data PZT Actuators PZT Flexure NanoPositioners PZT Active Optics / Steering Mirrors Tutorial: Piezoelectrics... Capacitive Position Sensors PZT Control Electronics MicroPositioners / Hexapod Systems Photonics Alignment & Packaging Systems Motor Controllers Index http://www.pi.ws info@pi.ws Models P-615.3CD P-615.30L Units Notes see p. 2-44 Active axes X,Y,Z X,Y,Z Min. open-loop travel 400 in X,Y; 400 in X,Y; -20 to 120 V 300 in Z 300 in Z µm A2 Closed-loop travel 350 in X, Y; 250 in Z - µm A5 Integrated feedback sensor capacitive - B Closed / open-loop* resolution 1.0/0.5 - /0.5 nm C1 Closed loop linearity (typ.) 0.02 - % Pitch and yaw
Page 1 and 2: For the latest version go to http:/
Page 3 and 4: Nanopositioning, Nanomechanics Lead
Page 5 and 6: Parallel Kinematics Multi- Axis Mic
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Page 19 and 20: Dimensions of the P-62x.2CD/.2CL/.2
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GERMANY Physik Instrumente (PI) Gmb
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