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Dimensions of <strong>the</strong> M-665.2PM in mm.<br />
M-665 for vacuum applications to 10 -8 hPa<br />
Technical Data<br />
PZT Actuators<br />
PZT Flexure NanoPositioners<br />
PZT Active Optics / Steering Mirrors<br />
Tutorial: Piezoelectrics...<br />
Capacitive Position Sensors<br />
PZT Control Electronics<br />
MicroPositioners / Hexapod Systems<br />
Photonics Alignment & Packaging Systems<br />
Motor Controllers<br />
Index<br />
http://www.pi.ws<br />
Models M-665.2PM Units Notes<br />
Travel range 50 mm<br />
Design resolution 0.1 µm A3<br />
Min. incremental motion 0.5 µm A4<br />
Unidirectional repeatability ± 0.3 µm<br />
Pitch (� Y ) 70 µrad<br />
Yaw (� Z ) 70 µrad<br />
Max. velocity 130 mm/sec<br />
Max. normal load capacity 10 kg B1<br />
Max. push/pull force 3 N B2<br />
Max. holding force 5 N<br />
Operating voltage 12 V<br />
Operating current < 200 mA<br />
Weight 0.8 kg<br />
Body material Al L<br />
Recommended controller C-843<br />
info@pi.ws<br />
<strong>PI</strong>line Stage driven with 1 µm steps. Piezo linear motors are auto locking.<br />
Once a stable position has been reached, <strong>the</strong>re is no servo di<strong>the</strong>r as is common<br />
with o<strong>the</strong>r linear motors (measurement taken with GALIL controller).<br />
7-103
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