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Application Examples � Scanning interferometry � Surface structure analysis � Disk drive testing � Autofocus systems � Confocal microscopy � Biotechnology � Semiconductor test equipment Ordering Information P-721.CLQ PIFOC ® Objective Positioner & Scanner, 100 µm, Capacitive Sensor, LEMO Connectors, for Quick Lock Thread Adapters P-721.CDQ PIFOC ® Objective Positioner & Scanner, 100 µm, Capacitive Sensor, Sub-D connector, for Quick Lock Thread Adapters P-721.LLQ PIFOC ® Objective Positioner & Scanner, 100 µm, LVDT Sensor, LEMO Connectors, for Quick Lock Thread Adapters Custom Designs for Volume Buyers 2-46 P-721 P-721.CLQ with quick lock option P-721.12Q and objective (not included). 2-1 to 2-45 see the hardbound PI catalog PIFOC ® High-Speed Piezo Nano-Focussing Device with Direct Metrology Feedback � Scans and Positions Objectives with Sub-nm Resolution � High Linearity and Stability with Direct- Measuring Capacitive Sensors/LVDTs � Travel to 100 µm � Straightness of Travel � 13 µrad � Fast Settling Time � Compatible with Metamorph Imaging Software P-721 are high-end microscope objective nanofocussing devices for travel ranges to 100 µm with a resolution to less than a nanometer. The units are screwed between the turret and the objective, providing a positioning and scanning range of up to 100 µm with subnanometer resolution, while extending the optical path by only 12.5 mm (infinity-corrected microscope required; extension tubes are available to adjust path lengths of other objectives on the turret). Superior Accuracy Through Direct Motion Metrology / Capacitive Feedback P-721.CLQ and .CDQ are equipped with direct-measuring capacitve position sensors. Unlike conventional systems, they measure the position rather than strain in the actuator / guiding system. This technique, combined with the inherent precision of the noncontact capacitive sensor and the temperature compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability at the nanometer level. http://www.pi.ws info@pi.ws Model P-721.LLQ is a lower cost version, equipped with a direct measuring LVDT sensor providing 10 nm resolution. A variety of analog and digital controllers (OEM, bench-top and rackmount) are available to drive the units. Model P-721.CDQ can be operated with the new E-665 servo-controller through an anlalog or RS-232 interface or the E-750 high-speed digital NanoAutomation ® controller. This controller also features a number of options such as high-throughput PIO (parallel I/O port) or fiber link interfaces and Input- Shaping signal processing for the fastest possible settling. Working Principle PIFOC ® positioners are equiped with high-performance piezoelectric drives integrated into a sophisticated flexure guiding system. The force exerted by the piezo drive pushes a flexure parallelogram via an integrated motion amplifier. The wire-EDM-cut flexures are FEA modeled for zero stiction/friction, high resolution and exceptional guiding precision. Integrated, absolute measuring, direct metrology position sensors provide highest possible resolution, linearity and stability in closed-loop operation. Quick Lock The new quicklock thread adapter options allow � Easy attachment of the PIFOC ® to the microscope. � Flexible use of several thread adapter options with one PIFOC ® nanofocussing device. After the thread adapter is screwed into the microscope, the PIFOC ® is attached to the adapter with the quick lock system in the desired position. Mounting does not require rotation of the PIFOC ® unit, so there are no cable twisting issues. Please order thread adapters separately, the basic PIFOC ® units P-721.CDQ, P-721.CLQ and P-721.LLQ do not include any thread adapter. Other PIFOC ® s PIFOC ® s are also available with up to 400 µm travel (P-725, see p. 2-48) and for open loop operation only (P-720, see p. 2-10). Custom units for moving the whole turret are available on request. Quick lock thread adapter P-721.12Q exploded view with microscope objective and PIFOC ® P-721.CLQ. Mounting tools are included.
Dimensions of the P-721.CLQ, CDQ or LLQ in mm (dimensions including thread adapter). Notes Quick Lock Thread Adapters P-721.11Q Quick lock Thread Adapter M25 x 0.75 P-721.12Q Quick lock Thread Adapter W0.8 x 1/36” P-721.02Q Quick lock Thread Adapter M26 x 0.75 P-721.03Q Quick lock Thread Adapter M27 x 0.75 P-721.04Q Quick lock Thread Adapter M28 x 0.75 P-721.05Q Quick lock Thread Adapter M32 x 0.75 Technical Data P-721.06Q Quick lock Thread Adapter M26 x 1/36” P-721.08Q Quick lock Thread Adapter M19 x 0.75 Objective Extension Tubes P-721.90Q Objective extension tube, 12.5 mm, thread W0.8 x 1/36” P-721.91Q Objective extension tube, 12.5 mm, thread M25 x 0.75 P-721.92Q Objective extension tube, 12.5 mm, thread M26 x 0.75 PZT Actuators PZT Flexure NanoPositioners PZT Active Optics / Steering Mirrors Tutorial: Piezoelectrics... Capacitive Position Sensors PZT Control Electronics MicroPositioners / Hexapod Systems Photonics Alignment & Packaging Systems Motor Controllers Index http://www.pi.ws info@pi.ws Models P-721.CLQ P-721.LLQ units Notes see p. 2-44 Max. objective diameter 39 39 mm Open-loop travel @ 0 to 100 V 90 90 µm ± 20% A2 Closed-loop travel 100 100 µm A5 Integrated feedback sensor Capacitive LVDT B Closed-loop ** resolution 0.7 10 nm C1 Closed-loop linearity (typ.) 0.03 0.1 % Full-range repeatability (typ.) ± 5 ± 20 nm C3 Stiffness 0.3 0.3 N/µm ± 20% D1 Push/pull force capacity (in operating direction) 100 / 20 100 / 20 N D3 Tilt (� ) (typ.) X 0.5 0.5 µrad E1 Tilt (� ) (typ.) Y 13 13 µrad E1 Lateral runout (Y) (typ.) 100 100 nm E2 Electrical capacitance 3.6 3.6 µF ±20% F1 * Dynamic operating current coefficient (DOCC) 5 5 µA/(Hz �µm) F2 Unloaded resonant frequency 580 580 Hz ±20% G2 Resonant frequency @ 120 g load 250 250 Hz ±20% G3 Resonant frequency @ 200 g load 190 190 Hz ±20% G3 Operating temperature range – 20 to 80 – 20 to 80 °C H2 Voltage connection P-721.CLQ: VL; P-721.CDQ: D VL J1 Sensor connection P-721.CLQ: 2 � C; P-721.CDQ: D L J2 Weight (with cables) 240 230 g ±5% Body material Recommended driver/controller Al Al L (codes explained in the catalog p. 6-46p. 6-46) H, M, F H, E ** Dynamic Operating Current Coefficient in µA per hertz and µm. Example: Sinusoidal scan of 30 µm at 10 Hz requires approximately 1.4 mA drive current. ** Resolution of PZT NanoPositioners is not limited by friction or stiction. Noise equivalent motion with E-503 amplifier. P-721.93Q Objective extension tube, 12.5 mm, thread M27 x 0.75 P-721.94Q Objective extension tube, 12.5 mm, thread M28 x 0.75 P-721.95Q Objective extension tube, 12.5 mm, thread M32 x 0.75 P-721.96Q Objective extension tube, 12.5 mm, thread M26 x 1/36” P-721.98Q Objective extension tube, 12.5 mm, thread M19 x 0.75 2-47
Page 1 and 2: For the latest version go to http:/
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GERMANY Physik Instrumente (PI) Gmb
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