10.07.2015 Views

E-625 Piezo Servo-Controller & Driver - PZT & Piezo Actuators: Sub ...

E-625 Piezo Servo-Controller & Driver - PZT & Piezo Actuators: Sub ...

E-625 Piezo Servo-Controller & Driver - PZT & Piezo Actuators: Sub ...

SHOW MORE
SHOW LESS
  • No tags were found...

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

<strong>Piezo</strong> • Nano • PositioningE-<strong>625</strong> <strong>Piezo</strong> <strong>Servo</strong>-<strong>Controller</strong> & <strong>Driver</strong>Compact Bench-Top Device with High-Speed Interface© Physik Instrumente (PI) GmbH & Co. KG 2008. <strong>Sub</strong>ject to change without notice. All data are superseded by any new release.The newest release for data sheets is available for download at www.pi.ws. R3 11/04/14.0The single-channel E-<strong>625</strong> piezocontroller is equipped with aRS-232 and USB interface andprecision 24-bit A/D convertersfor exceptional positional stabilityand resolution. It integrates alow-noise integrated piezoamplifier which can output andsink peak currents of 120 mA forlow-voltage piezoelectric actuators.<strong>Servo</strong>-controller versionsfor position sensing with capacitiveor SGS sensors are available.PI employs proprietary positionsensors for fast response andoptimum positioning resolutionand stability in the nanometerrange and below. For high-endapplications, capacitance sensorsprovide direct and non-contactposition feedback (directmetrology). Strain gauge sensors(SGS) are available for costeffectiveapplications. The integratednotch filters (adjustableE-<strong>625</strong>.CR compact piezo servo-controller Integrated 24-Bit USB Interface Network Capability with up to 12 Channels 120 mA Peak Current Position Control with Strain Gauge or Capacitive Sensor Notch Filter for Higher Bandwidth Table for User-Defined Curves Additional Analog Interfacefor each axis) improve the stabilityand allow high-bandwidthoperation closer to the resonantfrequency of the mechanics.Multi-Axis Network for up to12 ChannelsUp to twelve E-<strong>625</strong> for capacitiveor SGS sensors can be networkedand controlled over a singlePC interface. The different unitsare connected in parallel (notdaisy-chained) over the link providinghigher data rates thanpossible with serial links. Betweenthe individual E-<strong>625</strong>s,parallel networking is realizedvia optional E-<strong>625</strong>.CN cables.High-Resolution DigitalInterfaceThe digital interface includeshigh-precision 24-bit A/D convertersfor optimum positionstability and resolution and supportsfast communication withthe host-computer.Waveform MemoryThe built-in wave table can storeuser-defined data points internally.These values can then beoutput automatically (or underthe control of an external signal)and programmed for point-bypointor full-scan triggering.Thus, trajectory profiles can berepeated reliably and commandedeasily.Ordering InformationE-<strong>625</strong>.CR<strong>Piezo</strong> Amplifier / <strong>Servo</strong>-<strong>Controller</strong>,1 Channel, -30 to 130 V, CapacitiveSensor, USB, RS-232E-<strong>625</strong>.SR<strong>Piezo</strong> Amplifier / <strong>Servo</strong>-<strong>Controller</strong>,1 Channel, -30 to 130 V, SGS-Sensor, USB, RS-232E-<strong>625</strong>.CNNetwork Cable for Networking ofTwo E-<strong>625</strong>E-<strong>625</strong>.C0PIFOC ® <strong>Piezo</strong> Amplifier / <strong>Servo</strong>-<strong>Controller</strong>, 1 Channel, -30 to 130 V,Capacitive SensorE-<strong>625</strong>.S0PIFOC ® <strong>Piezo</strong> Amplifier / <strong>Servo</strong>-<strong>Controller</strong>, 1 Channel, -30 to 130 V,SGS-SensorExtensive Software SupportThe controllers are deliveredwith Windows operating software.Comprehensive DLLs andLabVIEW drivers are availablefor automated control.The extensive command set isbased on the hardware-independentGeneral Command Set(GCS),whichiscommontoallcurrent PI controllers for bothnano- and micropositioning systems.GCS reduces the programmingeffort in the face ofcomplex multi-axis positioningtasks or when upgrading a systemwith a different PI controller.E-<strong>625</strong>: operating limitswith various <strong>PZT</strong> loads(open-loop), capacitanceis measured in μFIdeal system configuration:E-<strong>625</strong>.CR with P-725 PIFOC ® microscopeobjective positioner


<strong>Piezo</strong> • Nano • PositioningLinear <strong>Actuators</strong> & MotorsNanopositioning / <strong>Piezo</strong>electrics<strong>Piezo</strong> Flexure Stages /High-Speed Scanning SystemsLinearVertical & Tip/Tilt2- and 3-Axis6-AxisTwo single-channel piezocontrollers: E-<strong>625</strong> and themore powerful E-665(background)Fast Steering Mirrors /Active Optics<strong>Piezo</strong> <strong>Driver</strong>s /<strong>Servo</strong> <strong>Controller</strong>sSingle-ChannelMulti-ChannelTechnical DataModelE-<strong>625</strong>.SR / E-<strong>625</strong>.CRFunction<strong>Piezo</strong> Amplifier / <strong>Servo</strong>-<strong>Controller</strong>Axes 1Sensor<strong>Servo</strong> characteristics P-I (analog), notch filterSensor typeSGS (.S) / capacitive (.C)AmplifierControl input voltage range -2 to 12 VMin. output voltage-30 to 130 VPeak current, < 5 ms 120 mAAverage current60 mACurrent limitationShort-circuit-proofNoise, 0 to 100 kHz0.8 mVrmsVoltage gain 10 ±0.1Input impedance100 kΩInterfaces and operationInterface / communication* USB, RS-232 (9-pin <strong>Sub</strong>-D connector,9.6–115.2 kBaud), 24-bit A/D and 20-bit D/A<strong>Piezo</strong> connectorLEMO ERA.00.250.CTL (.SR) / <strong>Sub</strong>-D Special (.CR)Sensor connectionLEMO EPL.0S.304.HLN (.SR) / <strong>Sub</strong>-D Special (.CR)Control input sockets SMBSensor monitor socket SMB<strong>Controller</strong> networkup to 12 channels, parallelCommand set*PI General Command Set (GCS)User software*PIMikroMoveSoftware drivers*LabVIEW drivers, DLL'sSupported functionality* Wave table, 256 data points, external trigger,16 macrosMiscellaneousOperating temperature range +5 to +50 °COverheat protection Deactivation at 75°CDimensions205 x 105 x 60 mmMass1.05 kgOperating voltage12 to 30 V DC, stabilized (power supply included)Current consumption 2 A* E-<strong>625</strong>.S0 and E-<strong>625</strong>.C0 without interfaceModularAccessories<strong>Piezo</strong>electrics in PositioningNanometrologyMicropositioningIndex

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!