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Hilmi Volkan Demir - KTH

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Design, epigrowth and fabrication<br />

– Epidesign p g<br />

– Epigrowth<br />

– Standard semiconductor fabrication<br />

• Photolithography<br />

• Thin film coating<br />

• Reactive ion etching<br />

• Rapid thermal annealing<br />

<strong>Hilmi</strong> <strong>Volkan</strong> <strong>Demir</strong>

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