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Design, epigrowth and fabrication<br />
– Epidesign p g<br />
– Epigrowth<br />
– Standard semiconductor fabrication<br />
• Photolithography<br />
• Thin film coating<br />
• Reactive ion etching<br />
• Rapid thermal annealing<br />
<strong>Hilmi</strong> <strong>Volkan</strong> <strong>Demir</strong>