Novellus C2 Dual Speed System - Macquarie
Novellus C2 Dual Speed System - Macquarie
Novellus C2 Dual Speed System - Macquarie
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<strong>Macquarie</strong> Electronics USA Inc.<strong>Novellus</strong> <strong>C2</strong> <strong>Dual</strong> <strong>Speed</strong> <strong>System</strong>SN 99-37-<strong>C2</strong>5725• 1999 vintage• 200mm• DLCMo MAG 7 robot• Ceramic blade (one blade missing)o Pfeiffer TMH 260 turboo Millipore throttle valveo Signal towero Slit valve - SMC L-Motiono IOC vers 4.1• Chamber 1 – shrink foot print <strong>Speed</strong>o STI / IMD Process (Nanofill 1)o MC ESCo Pfeiffer TPH2101 PCoooooooMKS throttle valveMKS manometers• 10 torr• 100 mtorrAE RFG5500 high freq RF generator --- BAD (HF RF Cable burned)Missing low freq RF generatorAE RF matchGas Box• MFCs: AERA PA-7800C/AERA FC-7800CDGas Lines• #1: H2 (300), #2: O2 Missing, #3: NF3 (2500), #4: Missing, #5: HE (1000), #8: H2(2000)• Chamber 2 – shrink foot print <strong>Speed</strong>o STI / IMD Process (Nanofill 1)o MC ESCo Pfeiffer TPH2101 PCo Left turbo missingo Millipore throttle valveo Millipore manometers• 10 torr• 100 mtorrooAE RFG5500 high freq RF generator --- BADMissing low freq RF generatorThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2012 <strong>Macquarie</strong> Group
<strong>Macquarie</strong> Electronics USA Inc.oooTrazar RF matchGas Box• MFCs: AERA PA-7800C/AERA FC-7800CDGas Lines• #1: H2 (300), #2: O2 (500), #3: NF3 (2500), #4: SiH4 (200), #5: HE (1000)#8: H2 (2000)This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2012 <strong>Macquarie</strong> Group
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