Lam Research Rainbow 4420 Poly Etch System - Macquarie
Lam Research Rainbow 4420 Poly Etch System - Macquarie
Lam Research Rainbow 4420 Poly Etch System - Macquarie
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<strong>Macquarie</strong> Electronics USA Inc.SEZ RST-203Spin Processing Wet <strong>System</strong>SN RST00396• Currently Configured for 200mm Wafer Sizes• Capable of processing 125mm, 150mm, 200mm wafer sizes• MFG Date: Jan 2000• CE Marked• Model: SP 203-8-BF• Install Type: Stand-Alone• Process Type: Single Wafer (notch)• Cassette Interface:o (2) Asyst Integrated SMIF• Process Application(s):o Cleaningo <strong>Poly</strong>mer Clean BEOLo Backside/Bevel Removalo Backside/Bevel Cleano Backside Film <strong>Etch</strong> & Clean• Handler:o Koller, Model: FM04o Single Blade, Ceramico Robot Support Plateo Vacuum End-Effectero Non AGV–Ready config• Main Unit (MU) / Process Chamber:o <strong>System</strong> Software: v115 23.05.2003, GEM 4.8o Dispenser: Suction Nozzleo Chuck: Pinless Chuck (for 8” wafer in 8” process chamber)o Pre-Flush (Med Rinse for Process Start)o Front-side configured for <strong>Etch</strong>/Stripo Back-side configured for Clean• Chemical Delivery <strong>System</strong> (CDS) Configuration:o Controlling Software: SCC32 4.1o MFM (N2 Chuck) + MFM (N2 Bypass)o Common Features (CHC 1/2/3/DI):• Flow Configuration: 2 Liter• Filter Housing• Sampling Post• Separate Draino CHC 1 Chem: NH4OH + H2O2 +DIo CHC 2 Chem: H2O2 + DI + HCLo CHC 3 Chem: HPM (Suspend)This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 <strong>Macquarie</strong> Group
<strong>Macquarie</strong> Electronics USA Inc.• Double Containment Box (DC Box):o Med 1: HF (PVC insert)o Med 2: APM (PVC insert)o Med 3: HPM (PVC insert)o Med 4: N/Ao Heat Exchanger Overflowo Through the Wall (TTW) Kit• Chemicals:o NH4OH (1/2” PFA material)o H2O2 (1/2” PFA material)o HCL (1/2” PFA material)o HF (1/2” PFA material)• Drains:o Drain Direction: Downo Main: PP, 50Ao Acid: PP, 50Ao Alkali: PP, 50A• Exhaust:o Exhaust Direction: Downo Main: PVC, 250mm Flangeo Acid: PVC, 250mm Flangeo Alkali: PVC, 250mm Flange• Safety :o Earthquake Protectiono Additional EMOso LOTO• Mini-Environment (FFU)• Ionizer: Model 5024e• Status <strong>Lam</strong>p Tower• GEM / SECS II Interface• Heat Exchanger/Chiller:o (2) Lauda Heat Exchangers• Power Requirements: V 208, A 40, Phase 3, 5-wire, Freq 60HzThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 <strong>Macquarie</strong> Group
<strong>Macquarie</strong> Electronics USA Inc.This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 <strong>Macquarie</strong> Group
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