Lam Research Rainbow 4420 Poly Etch System - Macquarie

Macquarie Electronics USA Inc.• Double Containment Box (DC Box):o Med 1: HF (PVC insert)o Med 2: APM (PVC insert)o Med 3: HPM (PVC insert)o Med 4: N/Ao Heat Exchanger Overflowo Through the Wall (TTW) Kit• Chemicals:o NH4OH (1/2” PFA material)o H2O2 (1/2” PFA material)o HCL (1/2” PFA material)o HF (1/2” PFA material)• Drains:o Drain Direction: Downo Main: PP, 50Ao Acid: PP, 50Ao Alkali: PP, 50A• Exhaust:o Exhaust Direction: Downo Main: PVC, 250mm Flangeo Acid: PVC, 250mm Flangeo Alkali: PVC, 250mm Flange• Safety :o Earthquake Protectiono Additional EMOso LOTO• Mini-Environment (FFU)• Ionizer: Model 5024e• Status Lamp Tower• GEM / SECS II Interface• Heat Exchanger/Chiller:o (2) Lauda Heat Exchangers• Power Requirements: V 208, A 40, Phase 3, 5-wire, Freq 60HzThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 Macquarie Group