Macquarie Electronics USA Inc. Applied Materials 300mm Reflexion ...

Macquarie Electronics USA Inc.Applied Materials 300mm Reflexion LKChemical Mechanical Polishing SystemSN 403677• Currently Configured for 300mm Wafer Sizes• MFG Date: Jan-04• Install Type: Stand-Alone• Application: STI• Dry In Dry Out• Last Production Wafer run: Mar-09, Wfr Count: 274743• Cassette Interface:o Asyst Factory Interfaceo Kawasaki Roboto Pin/Wrist Wafer Clamp Optiono 3-Station FOUP (25-Slot Cassettes) Loadports• System Software (OS): Windows NT 4.0• System Software: AMAT Panel• Front UI (mounted), Roll-around UI• Status Lamp (RYGB)• Polisher:o Platen 1: High Speed Gear Ratio 4:1, Liquid cooling req’do Platen 2/3: Std Platens, Gear Ratio 7:1o Movable Platen Shields for all Platenso (4) Malema Slurry controllers per Plateno Motor Torque Endpoint systemo ISRM Endpoint for all 3 Platens integrated (Fullscan)o Chemical Endpoint System installed for Platen 3 (non-AMAT Std)o Pads Installed: IC 1010o PC Disk Installed: KINIK, ED3CG-181060o Standard Pad Conditionero Head Type: Contour Heads (5-Zone) w/G4+ upgrade, MKS UPA• (4) Contour Heads installed, (4) spareo Slurry Delivery Arms: Regular TSDAo Slurry Used: Hitachi HS7503GP+HS8505o Clear Process Window Panelso UPSo iAPC computer: IBM Power Edge 1650• Cleaner:o MFG Date: Jan-04o Direct Feed LDMo Buffer Tank Configuredo Kawasaki Wet roboto Chemicals Used: Ammonia, NH4OH, DIW purgeThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 Macquarie Group

Macquarie Electronics USA Inc.• Endpoint:o Wet Nova 3060 (integrated)o NovaScan 3060 SW: 4.5.R2-PA3b29• Safety:o Euro Safety Std Markingso Momentary EMO Switches (Turn to Release)o AMAT Std EMO Shrouds (ring guards)o M/F Labels: English Only• Chiller:o (1) HX300• Power Requirements: 208V, 130A, PH-3, Freq 50/60Hz, 4-wireThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 Macquarie Group