Macquarie Electronics USA Inc. Tokyo Electron UW300Z

Macquarie Electronics USA Inc.Tokyo Electron UW300ZAutomated Wet BenchSN W032088• Currently Configured for 300mm wafer sizes• MFG Date: 2004• System:o FOUP Type 1: Entegris (AF3CWFAB20BUAFW)o FOUP Type 2: Dainichi (SF300-02)o Wafer Spec (12”): Notch (std)o Wafer Pitch: Half Pitcho Number of ARM: 1 armo Wafer Flow Direction: RearFronto Number of wafers in (1) Process: (2) FOUP (1-FOUP possible)o 25-Slot FOUPso Chemical Central Supply (std)o Main Display: English Languageo SD2 Dryer: Rinse + Dry (std)o Stocker: (12) FOUP Stockero Chemical: HF, NH4OH, H2O2, HCL, IPA, O3Wo Mainframe: (1) Frame per (2) Bath modules (std)o Chemical Bath (excluding CW & SD2): (4) Bath ModulesooFactory Mutual (Materials): NoExternal Units:• Fire Extinguisher• O3 Gas Generatoro Fluorescent Lamp (Light): No (std)o Adjuster Plate:• SS-304: t5x100x100 mmo Seismic Bracingo Air Operated Valveo Display Bath Level Sensor: Arm side +M/Co Outer Panel Material (C/S & SD2): SPCCo Chemical Area Panel Material: Clear PVCo AMHS: OHTo MMHS: No (std)o FOUP ID Reader: Reader Onlyo On-Line: GEM: SEMI E5&E30o I/O Interface: HSMS to LAN (SEMI E37)o Signal Tower (R/B/Y/G/Audible): Front & Maintenance areao Software specification:• CPU: PIII (600MHz)• OS: WinNT 4.0 SP6• Media:• Floppy• ZipThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2012 Macquarie Group

Macquarie Electronics USA Inc.• FOUP Station:o Load Port:• Number of FOUPs: (2)• FOUP Present Sensor• Notch Adjustment Function• Shutter• Area Sensor• FOUP ID Reader: Keyence BL601o FIMS Port (POD Opener):• Jump slot Sensor• Wafer number & slot sensor• Carrier Transfer: FOUP Check Sensoro Stocker: 12 FOUPso FFU:• Location: Upper section of LD/ULD (PTFE)o Course Changer:• Pre-Post Changeover• Process number: 25 wafers (std)o Posture Changer:• Pre-Post Changeover• Process Number: 25 wafers (std)o LD/ULD:• Changes Pre-Post• Wafer Hand Turn Function• Face to Face Function (1 lot = 2 carriers)• Wafer Hand Material: PCTFE• Ionizer: 5024CE Controllero Other:o Direction of the access by the M/C Media: Right Side (std)o Temporary Wafer Holder• Process Modules:o Module 1: SPOM• Process Temp: 80~140°C• Heating Method: CS Heater (Komatsu AIH-64QS)• Bath Material: Quartzo Module 2: QDR (Hot)• Process Temp: 70/20°C• Hot DIW Gen: No, Central supply• Bath Material: Quartz• Megasonic: No• DIW Shower: Yes (Hot only)o Module 3: SC1(M/S)• Process Temp: 30~70°C• Heating Method: CS Heater + Water Jacket• Change Mixing Ration by Recipe: Yes• Bath Material: PTFE• Concentration Monitoring: Horiba CS-131• Megasonic: 2.4kW Kokusai AlfaThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2012 Macquarie Group

Macquarie Electronics USA Inc.o Module 4: POU• Process Temp: RT°C / Hot 70°C• Hot DIW Gen: No, supplied• Bath Material: Quartz• Chemical: HCLo SD2 (Rinse + Dry)• Facilities:o CDAo N2o DIWo PCWo CM1: H2SO4o CM2: H2O2o CM3: NH4OHo CM4: HCLooooCM5: IPAExhaust:• General• Solvent (SD2)• Acid (SD2, POU)• Alkali (POU, SC1)• Acid (SPOM, QDR)Separate Drains (see OEM Report for details)AC Power:• EP1(Normal): 208VAC, 3P, 125A• EP2(CVCF/UPS): 208VAC, 1P, 50A• EP3(CVCF): 120VAC, 1P, 5AThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at Macquarie Electronics for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2012 Macquarie Group