Macquarie Electronics USA Inc. Varian VIISta 80 HP High Current ...
Macquarie Electronics USA Inc. Varian VIISta 80 HP High Current ...
Macquarie Electronics USA Inc. Varian VIISta 80 HP High Current ...
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<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.• VIISTA <strong>Varian</strong> Control System (VCS):o Operating System: Win NT/2000o Auto-Recipe Set-up, Optimization, Control, Production Scheduling, WIP Tracking, etc…o HSMS SECS / GEM Interfaceo 300mm SEMI Standards SW: includes E5, E30, E37, E37.1, E39, E40, E87, E90, E94• Power Requirements: 208V (50kVA), 175A, 3-Phase, 5-Wire, Freq 50/60Hz• Safety/Regulatory:o S2-93A Complianto <strong>High</strong> Voltage Warning Displays (5 Locations)o Source Exhaust Flow INTLKo Lead Floor Radiation Shieldo Hinged Enclosure Doors (interlocked)o Status Lamp (RYGB, INCDST, CE certified)o UPS – Control System & Plateno EMO Interlocked Vesda Smoke Detectiono Exhaust (Gas Box, Mech. pumps, Cryo pumps) designed for thru-the-roof connections• Installed Options:o Replaceable Source Linerso Vaporizer & Power Supplyo Ar External Purge Assembly (slot 1, UNIT MFC)o Inert Process Gas Option for Slot 7o Optional <strong>HP</strong> Gas Stick, Unit MFCso Stainless Steel UES Exhausto Thru-Beam Wafer Mappingo SEMI E58 ARAMS Complianceo SEMI E84 Complianceo V<strong>80</strong> Factory Automation Kit (Infineon Specific)o Wafer Viewing, Wafer ID (300mm backside OCR Semi M12 Reader)o 4-Pole GFI Power Kito CE Marked Line Filtero Reduced Brass Kito Teflon Toxic Exhaust Roughing Lineo Grounding Kit using Star Washerso Customer supplied 50HZ Freq converters for CTI CryosThis data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2009 <strong>Macquarie</strong> Group
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