Agilent B1500A Semiconductor Device Analyzer

HPSMU module specificationsVoltage range, resolution, and accuracy (high resolution ADC)Voltage Force Measure Force accuracy¹ Measure accuracy¹ Maximum currentrange resolution resolution±2 V 100 µV 2 µV ±(0.018 % + 400 µV) ±(0.01 % + 140 µV) 1 A±20 V 1 mV 20 µV ±(0.018 % + 3 mV) ±(0.01 % + 140 µV) 1 A±40 V 2 mV 40 µV ±(0.018 % + 6 mV) ±(0.01 % + 1 mV) 500 mA±100 V 5 mV 100 µV ±(0.018 % + 15 mV) ±(0.012 % + 2.5 mV) 125 mA±200 V 10 mV 200 µV ±(0.018 % + 30 mV) ±(0.014 % + 2.8 mV) 50 mA1. ± (% of read value + offset voltage V)Current range, resolution, and accuracy (high resolution ADC)Current Force Measure Force accuracy² Measure accuracy² Maximum voltagerange resolution resolution¹±1 nA 50 fA 10 fA ±(0.1 %+300 fA+1 fA x Vo) ±(0.1 %+300 fA+1 fA x Vo) 200 V±10 nA 500 fA 10 fA ±(0.1 %+3 pA+10 fA x Vo) ±(0.1 %+2.5 pA+10 fA x Vo) 200 V±100 nA 5 pA 100 fA ±(0.05 %+30 pA+100 fA x Vo) ±(0.05 %+25 pA+100 fA x Vo) 200 V±1 µA 50 pA 1 pA ±(0.05 %+300 pA+1 pA x Vo) ±(0.05 %+100 pA+1 pA x Vo) 200 V±10 µA 500 pA 10 pA ±(0.05 %+3 nA+10 pA x Vo) ±(0.04 %+2 nA+10 pA x Vo) 200 V±100 µA 5 nA 100 pA ±(0.035 %+15 nA+100 pA x Vo) ±(0.03 %+3 nA+100 pA x Vo) 200 V±1 mA 50 nA 1 nA ±(0.04 %+150 nA+1 nA x Vo) ±(0.03 %+60 nA+1 nA x Vo) 200 V±10 mA 500 nA 10 nA ±(0.04 %+1.5 nA+10 nA x Vo) ±(0.03 %+200 nA+10 nA x Vo) 200 V±100 mA 5 µA 100 nA ±(0.045 %+15 µA+100 nA x Vo) ±(0.04 %+6 µA+100 nA x Vo) ³±1 A 50 µA 1 µA ±(0.4 %+300 µA+1 µA x Vo) ±(0.4 %+150 µA+1 µA x Vo) ³1. Specified measurement resolution is limited by fundamental noise limits.2. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.Voltage range, resolution, and accuracy (high speed ADC)Voltage Force Measure Force accuracy¹ Measure accuracy¹ Maximum currentrange resolution resolution±2 V 100 µV 2 µV ±(0.018 % + 400 µV) ±(0.01 % + 700 µV) 1 A±20 V 1 mV 20 µV ±(0.018 % + 3 mV) ±(0.01 % + 4 mV) 1 A±40 V 2 mV 40 µV ±(0.018 % + 6 mV) ±(0.015 % + 8 mV) 500 mA±100 V 5 mV 100 µV ±(0.018 % + 15 mV) ±(0.02 % + 20 mV) 125 mA±200 V 10 mV 200 µV ±(0.018 % + 30 mV) ±(0.035 % + 40 mV) 50 mA1. ± (% of read value + offset voltage V)5

Current range, resolution, and accuracy (high speed ADC)Current Force Measure Force accuracy² Measure accuracy² Maximum voltagerange resolution resolution¹±1 nA 50 fA 10 fA ±(0.1 %+300 fA+1 fA x Vo) ±(0.25 %+300 fA+1 fA x Vo) 200 V±10 nA 500 fA 10 fA ±(0.1 %+3 pA+10 fA x Vo) ±(0.25 %+2 pA+10 fA x Vo) 200 V±100 nA 5 pA 100 fA ±(0.05 %+30 pA+100 fA x Vo) ±(0.1 %+20 pA+100 fA x Vo) 200 V±1 µA 50 pA 1 pA ±(0.05 %+300 pA+1 pA x Vo) ±(0.1 %+200 pA+1 pA x Vo) 200 V±10 µA 500 pA 10 pA ±(0.05 %+3 nA+10 pA x Vo) ±(0.05 %+2 nA+10 pA x Vo) 200 V±100 µA 5 nA 100 pA ±(0.035 %+15 nA+100 pA x Vo) ±(0.05 %+20 nA+100 pA x Vo) 200 V±1 mA 50 nA 1 nA ±(0.04 %+150 nA+1 nA x Vo) ±(0.04 %+200 nA+1 nA x Vo) 200 V±10 mA 500 nA 10 nA ±(0.04 %+1.5 µA+10 nA x Vo) ±(0.04 %+2 µA+10 nA x Vo) 200 V±100 mA 5 µA 100 nA ±(0.045 %+15 µA+100 nA x Vo) ±(0.1 %+20 µA+100 nA x Vo) ³±1 A 50 µA 1 µA ±(0.4 %+300 µA+1 µA x Vo) ±(0.5 %+300 µA+1 µA x Vo) ³1. Specified measurement resolution is limited by fundamental noise limits.2. ± (% of read value + offset current (fixed part determined by the output/measurement range + proportional part that is multiplied by Vo))3. 200 V (Io ≤ 50 mA), 100 V (50 mA < Io ≤ 125 mA), 40 V (125 mA < Io ≤ 500 mA), 20 V (500 mA < Io ≤ 1 A), Io is the output current in Amps.Power consumptionVoltage source modeVoltage range Power2 V 20 x Ic (W)20 V 20 x Ic (W)40 V 40 x Ic (W)100 V 100 x Ic (W)200 V 200 x Ic (W)Where Ic is the current compliance setting.Current source modeVoltage compliance PowerVc ≤ 2020 x Io (W)20 < Vc ≤ 40 40 x Io (W)40 < Vc ≤ 100 100 x Io (W)100 < Vc ≤ 200 200 x Io (W)Where Vc is the voltage compliancesetting and Io is output current.HPSMU measurement and output rangeCurrent (mA)100050012550-200 -100 -40 -20 20 40 100 200-50Voltage (V)-125-500-10006

Output terminal/connectionDual triaxial connector, Kelvin (remotesensing)Voltage/current compliance(limiting)The SMU can limit output voltage orcurrent to prevent damaging the deviceunder test.Voltage:0 V to ±100 V (MPSMU, HRSMU)0 V to ±200 V (HPSMU)Current:±10 fA to ±100 mA (HRSMU with ASU)±100 fA to ±100 mA (HRSMU)±1 pA to ±100 mA (MPSMU)±1 pA to ±1 A (HPSMU)Compliance accuracy:Same as the current or voltage setaccuracy.About measurement accuracyRF electromagnetic field and SMUmeasurement accuracy:SMU voltage and current measurementaccuracy can be affected by RFelectromagnetic field strengths greaterthan 3 V/m in the frequency range of80 MHz to 1 GHz. The extent of thiseffect depends upon how the instrumentis positioned and shielded.Induced RF field noise and SMUmeasurement accuracy:SMU voltage and current measurementaccuracy can be affected by induced RFfield noise strengths greater than 3 V rmsin the frequency range of 150 kHz to80 MHz. The extent of this effectdepends upon how the instrument ispositioned and shielded.Pulse measurementPulse width: 500 µsec to 2 sPulse period: 5 ms to 5 sPeriod ≥ width + 2 ms(when width ≤ 100 ms)Period ≥ width + 10 ms(when width > 100 ms)Pulse resolution: 100 µsSMU pulse setting accuracy(fixed measurement range,supplemental information):Width: 0.5 % + 50 µsPeriod: 0.5 % + 100 µsSupplemental informationMaximum allowable cable resistance(Kelvin connection):Sense: 10 ΩForce: 10 Ω (≤ 100 mA), 1.5 Ω (>100 mA)Voltage source output resistance:(Force line, Non-Kelvin connection)0.2 Ω (HPSMU)0.3 Ω (MPSMU, HRSMU)Voltage measurement input resistance:≥ 10 13 ΩCurrent source output resistance:≥ 10 13 Ω (1 nA range)Current compliance setting accuracy(for opposite polarity):For 1 pA to 10 nA ranges:I setting accuracy ±12 % of rangeFor 100 nA to 1 A ranges:I setting accuracy ±2.5 % of rangeMaximum capacitive load:1 pA to 10 nA ranges: 1000 pF100 nA to 10 mA ranges: 10 nF100 mA and 1 A ranges: 100 µFMaximum guard capacitance:900 pF (HPSMU, MPSMU, HRSMU)660 pF (HRSMU with ASU)Maximum shield capacitance:5000 pF (HPSMU, MPSMU, HRSMU)3500 pF (HRSMU with ASU)Maximum guard offset voltage:±1 mV (HPSMU)±3 mV (MPSMU, HRSMU)±4.2 mV (HRSMU with ASU, Iout≤100 µA)Noise characteristics (filter ON):Voltage source: 0.01 % of V range (rms.)Current source: 0.1 % of I range (rms.)Overshoot (typical, filter ON):Voltage source: 0.03 % of V rangeCurrent source: 1 % of I rangeRange switching transient noise (filter ON):Voltage ranging: 250 mVCurrent ranging: 70 mVSlew rate: 0.2 V/µs (maximum)Voltage range, resolution, andaccuracy (high speed ADC)VoltagerangeMeasureresolutionMeasureaccuracy¹ , ²±0.5 V³ 25 µV ±(0.01 % + 250 µV)±2 V 100 µV ±(0.01 % + 700 µV)±5 V³ 250 µV ±(0.01 % + 2 mV)±20 V 1 mV ±(0.01 % + 4 mV)±40 V 2 mV ±(0.015 % + 8 mV)±100 V 5 mV ±(0.02 % + 20 mV)±200 V 4 10 mV ±(0.035 % + 40 mV)1. ± (% of read value + offset voltage V)2. Averaging is 128 samples in 1 PLC.3. Only for MPSMU and HRSMU.4. Only for HPSMU.Current range, resolution, andaccuracy (high speed ADC)Current Measure Measure accuracy 3range resolution¹ , ²±1 pA 4 100 aA ±(1.8 %+12 fA)±10 pA 5 1 fA ±(0.5 %+15 fA+10 aA x Vo)±100 pA 5 5 fA ±(0.3 %+30 fA+100 aA x Vo)±1 nA 50 fA ±(0.1 %+300 fA+1 fA x Vo)±10 nA 500 fA ±(0.1 %+2 pA+10 fA x Vo)±100 nA 5 pA ±(0.05 %+20 pA+100 fA x Vo)±1 µA 50 pA ±(0.05 %+200 pA+1 pA x Vo)±10 µA 500 pA ±(0.04 %+2 nA+10 pA x Vo)±100 µA 5 nA ±(0.03 %+20 nA+100 pA x Vo)±1 mA 50 nA ±(0.03 %+200 nA+1 nA x Vo)±10 mA 500 nA ±(0.03 %+2 µA+10 nA x Vo)±100 mA 5 µA ±(0.04 %+20 µA+100 nA x Vo)±1 A 6 50 µA ±(0.4 %+300 µA+1 µA x Vo)1. Specified measurement resolution is limited byfundamental noise limits. Minimum displayedresolution is 1 aA at 1 pA range by 6 digits.2. Measurements made in the lower ranges canbe greatly impacted by vibrations and shocks.These specifications assume an environmentfree of these factors.3. ± (% of read value + offset current(fixed part determined by the output/measurement range + proportional partthat is multiplied by Vo)4. 1 pA range is for HRSMU with ASU.5. 10 pA range and 100 pA range is for HRSMUwith or without ASU.6. Only for HPSMU.7

MFCMU (multi frequency capacitance measurement unit) module specificationsMeasurement functionsMeasurement parameters:Cp-G, Cp-D, Cp-Q, Cp-Rp, Cs-Rs, Cs-D,Cs-Q, Lp-G, Lp-D, Lp-Q, Lp-Rp, Ls-Rs,Ls-D, Ls-Q, R-X, G-B, Z-θ, Y-θRanging:Auto and fixedMeasurement terminal:Four-terminal pair configuration, fourBNC (female) connectorsCable length:1.5 m or 3 m, automatic identification ofaccessoriesTest signalFrequency:Range: 1 kHz to 5 MHzResolution: 1 mHz (minimum)Accuracy: ±0.008 %Output signal level:Range: 10 mV rmsto 250 mV rmsResolution: 1 mV rmsAccuracy:±(10.0 % + 1 mV rms)at the measurement port of the MFCMU±(15.0 % + 1 mV rms)at the measurement port of the MFCMUcable (1.5 m or 3.0 m)Output impedance: 50 Ω, typicalSignal level monitor:Range: 10 mV rmsto 250 mV rmsAccuracy (open load):±(10.0 % of reading + 1 mV rms)at the measurement port of the MFCMU±(15.0 % of reading + 1 mV rms)at the measurement port of the MFCMUcable (1.5 m or 3 m)DC bias functionDC bias:Range: 0 to ±25 VResolution: 1 mVAccuracy: ±(0.5 % + 5.0 mV) at themeasurement port of the MFCMU or theMFCMU cable (1.5 m or 3.0 m)Maximum DC bias current(supplemental information)Impedance range Maximum DCbias current50 Ω 10 mA100 Ω 10 mA300 Ω 10 mA1 kΩ 1 mA3 kΩ 1 mA10 kΩ 100 µA30 kΩ 100 µA100 kΩ 10 µA300 kΩ 10 µAOutput impedance: 50 Ω, typicalDC bias monitor:Range: 0 to ±25 VAccuracy (open load):±(0.2 % of reading + 10.0 mV) at themeasurement port of the MFCMU or theMFCMU cable (1.5 m or 3.0 m)Sweep characteristicsAvailable sweep parameters:Oscillator level, DC bias voltage,frequencySweep type: linear, logSweep mode: single, doubleSweep direction: up, downNumber of measurement points:Maximum 1001 pointsMeasurement accuracyThe following parameters are used toexpress the impedance measurementaccuracy at the measurement port ofthe MFCMU or the MFCMU cable(1.5 m or 3.0 m).Z X: Impedance measurement value (Ω)D X: Measurement value of DE = E P’ + (Z S’/|Z X| + Y O’|Z X|) x 100 (%)E P’ = E PL+ E POSC+ E P(%)Y O’ = Y OL+ Y OSC+ Y O(S)Z S’ = Z SL+ Z OSC+ Z S(Ω)|Z| accuracy±E (%)θ accuracy±E/100 (rad)C accuracyat D X≤ 0.1±E (%)at D X> 0.1±E x √¯¯¯¯¯¯¯ (1 + D X2) (%)D accuracyat D X≤ 0.1±E/100at D X> 0.1±E x (1 + D X)/100G accuracyat D X≤ 0.1±E/ D X(%)at D X> 0.1±E x √¯¯¯¯¯¯¯ (1 + D X2) /D X(%)Note: measurement accuracy is specifiedunder the following conditions:Temperature: 23 °C ±5 °CIntegration time: 1 PLC or 16 PLC8

Parameters E POSCZ OSCOscillator level E POSC(%) Z OSC(mΩ)125 mV < V OSC≤ 250 mV 0.03 x (250/ V OSC- 1) 5 x (250/ V OSC- 1)64 mV < V OSC≤ 125 mV 0.03 x (125/ V OSC- 1) 5 x (125/ V OSC- 1)32 mV < V OSC≤ 64 mV 0.03 x (64/ V OSC- 1) 5 x (64/ V OSC- 1)V OSC≤ 32 mV 0.03 x (32/ V OSC- 1) 5 x (64/ V OSC- 1)V OSCis oscillator level in mV.Parameters E PLY OLZ SLCable length E PL(%) Y OL(nS) Z SL(mΩ)1.5 m 0.02 + 3 x f/100 750 x f/100 5.03 m 0.02 + 5 x f/100 1500 x f/100 5.0f is frequency in MHz. If measurement cable is extended, open compensation,short compensation, and load compensation must be performed.Parameters Y OSCY OE PZ SFrequency Y OSC(nS) Y O(nS) E P(%) Z S(mΩ)1 kHz ≤ f ≤ 200 kHz 1 x (125/ V OSC– 0.5) 1.5 0.095 5.0200 kHz < f ≤ 1 MHz 2 x (125/ V OSC– 0.5) 3.0 0.095 5.01 MHz < f ≤ 2 MHz 2 x (125/ V OSC– 0.5) 3.0 0.28 5.02 MHz < f 20 x (125/ V OSC– 0.5) 30.0 0.28 5.0f is frequency in Hz.V OSCis oscillator level in mV.Example of calculated C/G measurement accuracyFrequency Measured C accuracy¹ Measured G accuracy¹capacitanceconductance5 MHz 1 pF ±0.61 % ≤ 3 µS ±192 nS10 pF ±0.32 % ≤ 31 µS ±990 nS100 pF ±0.29 % ≤ 314 µS ±9 µS1 nF ±0.32 % ≤ 3 mS ±99 µS1 MHz 1 pF ±0.26 % ≤ 628 nS ±16 nS10 pF ±0.11 % ≤ 6 µS ±71 nS100 pF ±0.10 % ≤ 63 µS ±624 nS1 nF ±0.10 % ≤ 628 µS ±7 µS100 kHz 10 pF ±0.18 % ≤ 628 nS ±11 nS100 pF ±0.11 % ≤ 6 µS ±66 nS1 nF ±0.10 % ≤ 63 µS ±619 nS10 nF ±0.10 % ≤ 628 µS ±7 µS10 kHz 100 pF ±0.18 % ≤ 628 nS ±11 nS1 nF ±0.11 % ≤ 6 µS ±66 nS10 nF ±0.10 % ≤ 63 µS ±619 nS100 nF ±0.10 % ≤ 628 µS ±7 µS1 kHz 100 pF ±0.92 % ≤ 63 nS ±6 nS1 nF ±0.18 % ≤ 628 nS ±11 nS10 nF ±0.11 % ≤ 6 µS ±66 nS100 nF ±0.10 % ≤ 63 µS ±619 nS1. The capacitance and conductance measurement accuracy is specified underthe following conditions:D X= 0.1Integration time: 1 PLCTest signal level: 30 mVrmsAt four-terminal pair port of MFCMU9

Atto-sense and switch unit(ASU) specificationsAUX path specificationMaximum voltage100 V (AUX input to AUX common)100 V (AUX input to circuit common)42 V (AUX common to circuit common)Maximum current0.5 A (AUX input to force output)ASU supplemental informationBand width (at -3 dB)30 MHz (AUX port)SMU CMU unify unit (SCUU)and guard switch unit (GSWU)specificationsThe SCUU multiplexes the outputs fromtwo SMUs (MPSMUs and/or HRSMUs)and the CMU. The SCUU outputs are twosets of Kelvin triaxial ports (Force andSense). The SCUU also allows the SMUsto act as DC bias sources in conjunctionwith the CMU. Special cables are availableto connect the SMUs and CMU withthe SCUU, and an auto-detect featureautomatically compensates for the cablelength going to the SCUU.The GSWU contains a relay that automaticallyopens for IV measurements andcloses for CV measurements, forming aguard return path to improve CV measurementaccuracy.Supported SMUMPSMU and HRSMUFor SCUUInputs:Triaxial ports: Force1, Sense1, Force2,and Sense2BNC ports: for MFCMUControl port: for MFCMUOutputs:Triaxial ports: Force1/CMUH, Sense1,Force2/CMUL, and Sense2Control port: for GSWULEDs: SMU/CMU output status indicatorDocking mode:Direct and indirect modeFor GSWUInput:Control port: for SCUUMini pin plug ports: Guard1, Guard2Output:LED: Connection status indicatorSCUU supplemental informationSMU path:Offset current: < 20 fAOffset voltage: < 100 µV at 300 secClosed channel residual resistance:< 200 mΩChannel isolation resistance: > 10 15 ΩCMU path:Test signalSignal output level additional errors(CMU bias, open load):±2 % (direct docking)±7 % (indirect docking)Signal output level additional errors(SMU bias, open load):±5 % (direct docking, ≥ 10 kHz)±10 % (indirect docking, ≥ 10 kHz)Output impedance: 50 Ω, typicalSignal level monitor additional errors(open load):±2 % (CMU bias), direct docking±5 % (SMU bias), direct docking±7 % (CMU bias), indirect docking±10 % (SMU bias), indirect dockingDC bias functionDC voltage bias (CMU bias):Range: 0 to ±25 VResolution: 1 mVAdditional errors (for CMU bias):±100 µV (open load)DC voltage bias (SMU bias):Range: 0 to ±100 VResolution: 5 mVAdditional errors (for SMU voltageoutput accuracy): ±100 µV (open load)DC bias monitor additional errors (open load):±20 mV, direct docking±30 mV, indirect dockingOutput impedance:50 Ω, typicalDC output resistance: 50 Ω (CMU bias),130 Ω (SMU bias)Measurement accuracyImpedance measurement error is given byadding the following additional error E etothe MFCMU measurement error.E e= ±(A + Z S/|Z X| + Y O|Z X|) x 100 (%)Z X: Impedance measurement value (Ω)A: 0.05 % (direct docking) or0.1 % (indirect docking)Z S: 500 + 500 x f (mΩ)Y O: 1 + 1000 x f/100 (nS)(direct docking, x2 for indirect docking)Note: f is frequency in MHz.When the measurement terminals areextended by using the measurement cable,the measurement accuracy is applied tothe data measured after performing theopen/short/load correction at the DUTside cable end.Note: The error is specified under thefollowing conditions:Temperature: 23 °C ±5 °CIntegration time: 1 PLC or 16 PLC10

HV-SPGU (high voltage semiconductor pulse generator unit) module specificationSpecificationsNumber of output channels:2 channels per moduleModes: pulse, constant, and freerunStandard pulse mode:• Two level pulse• Three level pulse per one channel• Pulse period: 30 ns to 10 sDelay range: 0 s to 9.99 sDelay resolution: 2.5 ns (minimum)Output count: 1 to 1,000,000Voltage monitor minimum samplingperiod: 5 μsTrigger output:Level: TTLTiming: Synchronized with pulse periodTrigger width:Pulse period x 1/2 (pulse period ≤ 10 µs)Maximum 5 µs (pulse period > 10 µs)SPGU supplemental informationPulse width jitter: 0.001 % +150 psPulse period jitter: 0.001 % +150 psMaximum slew rate: 1000 V/µs (50 Ω load)Noise: 10 mV rms(at DC output)Advanced feature:Voltage monitor: The HV-SPGU has avoltage monitor function to measure thevoltage at the DUT terminal.Measurement accuracy (open load):±(0.1 % of reading + 25 mV)Measurement resolution: 50 μVNote: Specified at 1 PLC (20 ms = (5 μssample + 5 μs interval) x 2000 samples.)Voltage compensation: The HV-SPGUcan measure the impedance of DUT andadjust the output voltage according tothe DUT impedance.ALWG (arbitrary linearwaveform generator) functionArbitrary linear waveform generator(ALWG) mode:• Output complex waveform per onechannel of HV-SPGU• Define multi-level pulse and multi-pulsewaveform including open state pulsewith ALWG GUI editor• Sequential pulse waveform fromuser-defined pulse waveform• 1024 points per one channel• Programmable timing range:10 ns to 671.088630 ms, 10 ns resolutionPulse/DC output voltage and accuracyOutput voltage (Vout) 50 Ω load –20 V to +20 VOpen load–40 V to +40 VAccuracy¹ Open load ±(0.5 % + 50 mV)Amplitude resolution 50 Ω load 0.2 mV (±10 V range)0.8 mV (±40 V range)Open load0.4 mV (±10 V range)1.6 mV (±40 V range)Output connectorsSMASource impedance 50 Ω²Short circuit current800 mA peak (400 mA average³)Overshoot/ 50 Ω load ±(5 % + 20 mV)pre-shoot/ringing 4Output limitMonitoring over current limit1. At 1 µs after completing transition.2. Typical (±1 %)3. This value is specified under the following condition: [(Number of installed HV-SPGUs) x 0.2 A]+ [DC current output by all modules (including HV-SPGUs)] < 3.0 A4. Following the specified condition with transition time.Pulse range and pulse parameter¹Frequency range0.1 Hz to 33 MHzPulse period Programmable range 30 ns to 10 sResolution10 nsMinimum100 ns³Accuracy ±1 % (±0.01 % ²)Width Programmable range 10 ns to (period – 10 ns)Resolution2.5 ns (Tr and Tf ≤ 8 µs)10 ns (Tr or Tf > 8 µs)Minimum50 ns (25 ns typical)³Accuracy±(3 % + 2 ns)Transition time 5 Programmable range 8 ns to 400 ms(Tr and Tf)Resolution2 ns (Tr and Tf ≤ 8 µs)8 ns (Tr or Tf > 8 µs)Minimum (typical) < 15 ns³Minimum 20 ns (Vamp ≤ 10 V)30 ns (Vamp ≤ 20 V)60 ns (Vamp > 20 V)Accuracy –5 % to 5 % + 10 ns (Vamp ≤ 10 V)–5 % to 5 % + 20 ns (Vamp ≤ 20 V)Output relay Open/close < 100 µsswitching time 41. Unless otherwise stated, all specifications assume a 50 Ω termination.2. Typical minimum. This is supplemental information.3. This is specified at Vamp ≤ 10 V.4. The time it takes the open state relay to open or close.5. The time from 10 % to 90 % of Vamp which is the amplitude of output pulse.Pulse waveformVpeakVbaseTdelayVamp10%TrTwidthTperiod90% 90%10%Tf11

Example 1. ALWG setup table and pattern15100PatternP3 P4P7 P8P1 P2P5 P6 P9 P100 500 nsPoint Time Voltage1 0 0.0 V2 50 ns 0.0 V3 70 ns 15.0 V4 100 ns 15.0 V5 200 ns 0.0 V6 300 ns 0.0 V7 320 ns 10.0 V8 400 ns 10.0 V9 450 ns 0.0 V10 500 ns 0.0 VExample 2. ALWG complex waveformPattern 1Pattern 2 x 5 Pattern 3Pattern 216440A SMU/pulse generatorselectorThe Agilent 16440A SMU/pulse generatorselector switches either a SMU or PGU tothe associated output port. You canexpand to four channels by adding anadditional 16440A. The PGU port onchannel 1 provides a “PGU OPEN” function,which can disconnect the PGU by openinga semiconductor relay. The Agilent B1500Aand 16445A are required to use the16440A.The following specifications data isspecified at 23 °C ± 5 °C and 50% relativehumidity.• Channel configuration:2 channels (CH 1 and CH 2).Can add an additional 2 channels(CH 3 and CH 4) by adding another16440A (selector expander).12InputOutputChannel 1 (CH 1) 2 (SMU and PGU 1 ) 1Channel 2 (CH 2) 2 (SMU and PGU) 1Channel 3 (CH 3) 2 2 (SMU and PGU 1 ) 1Channel 4 (CH 4) 2 2 (SMU and PGU) 11. PGU channels 1 & 3 have a built-in series semiconductor relay.2. Available when a second 16440A (selector expander) isinstalled.• Voltage and current rangeInput port MaximumvoltageMaximumcurrentSMU 200 V 1.0 APGU 40 V 0.4 A 11. This is peak-to-peak current.16445A SMU/PGU selector connectionadaptorThe Agilent 16445A selector adapteris required to control and to supply DCpower to the Agilent 16440A SMU/pulsegenerator selector.Power requirement: 100 to 240 V, 50/60 HzMaximum volt-amps (VA): 20 VA

WGFMU (waveform generator/fast measurement unit) module specificationOverviewThe WGFMU is a self-contained moduleoffering the combination of arbitrarylinear waveform generation (ALWG) withsynchronized fast current or voltage (IV)measurement. The ALWG function allowsyou to generate not only DC, but alsovarious types of AC waveforms. In additionto this versatile sourcing capability, theWGFMU can also perform measurement insynchronization with the applied waveform,which enables accurate high-speedIV characterization.SpecificationsNumber of output channels:2 channels per moduleModes: Fast IV, PG (pulse generator),DC, and SMU pass-throughRSU:Output Connector: SMASource Impedance: 50 Ω (nominal)at DC in PG modeSMU path: Maximum voltage ±25 V,Maximum current ±100 mAV monitor terminal:Connector: BNCSource Impedance: 50 Ω (nominal) at DCThe terminal outputs a buffered signalequal to 1/10 of Vout (into a 50 Ω load)WGFMU to RSU cable length:The WGFMU and RSU are connected bya special composite cable. The followingconfigurations are available:• 3 m• 5 m• 1.5 m• 2.4 m + connector adapter + 0.6 m• 4.4 m + connector adapter + 0.6 mNote: The connector adapter is used whenrouting the cable through the prober’sconnector panel.Measurement functions, voltage forcing, voltage measurement, and currentmeasurementMode Function V force ranges V measure I measure rangesrangesFast IV V force/I measure,V force/V measure-3 V to +3 V-5 V to +5 V-5 V to +5 V-10 V to +10 V1 µA, 10 µA, 100 µA,1 mA, 10 mA.-10 V to 0 V0 V to +10 VPG V force/V measure -3 V to +3 V-5 V to +5 V-5 V to +5 V —DCSMU passthroughV force/I measure,V force/V measureMeasurementusing SMU-3 V to +3 V-5 V to +5 V-10 V to 0 V0 V to +10 V-5 V to +5 V-10 V to 10 V1 µA, 10 µA, 100 µA,1 mA, 10 mAMax ±25 V — Max ±100 mAVoltage force accuracy, resolution, and timingV force (Fast IV mode) -5 V to 5 V, -10 V to 0 V, 0 V to 10 VV force (PG mode)-5 V to 5 V (open load)-2.5 V to 2.5 V (50 Ω load)Accuracy ±0.1% of setting ±0.1% of range 1Resolution 2 96 μV (-3 to 3V)160 μV (all ranges except for -3 V to 3 V)Overshoot/undershoot ±(5%+20 mV) 34Noise Maximum 0.1 mV rmsRise time T rise(10 to 90%)/ Accuracy: -5% to (+5% +10 ns) of setting 5Fall time T fall(90 to 10%) Minimum: 24 ns, PG mode and 50 Ω loadPulse period Timing Accuracy: ±1% of setting 6Minimum:100 ns, PG mode and 50 Ω loadPulse width Accuracy: ±(3%+2 ns) 7Minimum: 50 ns, PG mode and 50 Ω loadVoltage measurement accuracy, resolution, and noiseAccuracy ±(0.1% of reading ±0.1% of range) 8Resolution 9680 μV (-5 V to +5 V range)1.4 mV (-10 V to +10 V range)Noise 10Maximum 4 mV rms(-5 V to +5 V range)1. Independent of the range or the mode. DC constant voltage output. Load impedance must be ≥ 1 MΩ(1 μA range) or ≥ 200 kΩ (all other current ranges) for Fast IV mode, or ≥ 1 MΩ for PG mode.2. Can vary at most 5% based on the result of calibration.3. PG mode, 50 Ω load, T riseand T fall>16 ns with the 1.5 m cable, >32 ns with 3 m cable, or >56 nswith 5 m cable4. Theoretical value for observed time 100 ns to 1 ms, supplemental information5. PG mode, 50 Ω load, T riseand T fall≥ 24 ns6. PG mode, 50 Ω load, pulse period ≥ 100 ns7. PG mode, 50 Ω load, pulse width ≥ 50 ns8. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000averaging samples for 10 μA range and above; 100,000 averaging samples for the 1 μA range.9. Display resolution. Can vary at most 5% based on the result of calibration.10. 0 V output, open load, no averaging. Maximum 1.5 mV rmsas supplemental information.13

Current measurement accuracy and resolutionAccuracy ±(0.1% of reading ±0.2% of range) 1Resolution 20.014% of rangeNoise (Effective resolution) Maximum 0.2% of range 31. Independent of the range or the mode. DC constant voltage output. Applicable condition: 10,000averaging samples for 10 μA range and above; 100,000 averaging samples for the 1 μA range.2. Display resolution. Can vary at most 5% based on the result of calibration3. Effective value at 0 V output, open load, and no averaging. Supplemental informationALWG functionMaximum number of vectors 2048Maximum number of sequences 512Maximum number of loop counts 1 to 10 12Length of a vector10 ns to 10,000 s with 10 ns resolutionSampling rate5 ns, or 10 ns to 1 s with 10 ns resolutionAveraging time10 ns to 20 ms with 10 ns resolutionHardware memoryAbout 4 M data points/channel (typical)Trigger outputLevel: TTLTrigger width: 10 nsGenerated synchronously with ALWG waveform.Supplemental InformationRSU SMU path:Leak current: < 100 pAResidual resistance:

Minimum timing parameters for voltage measurement 1Voltage applied to DUT 5V 10 VApplied voltage Recommended minimum 105 ns 130 nsconditionpulse width 2Measurement Range 5 V 10 VRecommended minimum 20 ns 20 nsVoltage measurementmeasurement windowconditionSettling time 3 85 ns 110 nsNoise (rms) 4 1.4 mV 1.4 mV1. Measurement conditions: The DUT is a resistive load between 1 kΩ and 10 MΩ. The capacitanceof the cable between the RSU and the DUT is 20 pF. Voltage is applied to the DUT by a channel ofWGFMU/RSU, and voltage measurement is performed by the same channel. (PG mode for 5 V,Fast IV mode for 10 V)2. Recommended minimum pulse width = settling time + recommended minimum measurementwindow.3. The time until the measured value settles to within ± 0.6 % of the final result value after theoutput voltage is changed from the initial value (0 V). Minimum rise/fall time of 70 ns for 10 V, or30ns for 5 V is recommended for minimizing overshoot.4. RMS noise measured over the recommended minimum measurement window.SoftwareInstrument library for WGFMU controlOperating system:Microsoft Windows XP Professional SP3or later, Windows Vista Business SP2or later (32bit only), and Windows 7Professional SP1 or later (32 bit and 64bit)Supported language: English (US)NBTI and general-purpose EasyEXPERTApplication TestsSample programs (NBTI and generalpurposemeasurement using WGFMU andRTS data analysis)WGFMU supported prober vendorsCascade MicrotechSuss MicroTecVector SemiconNote: The maximum number of installableRSUs for a given prober depends uponthe available space. Please contact yourlocal sales representative for details onconnecting and mounting the WGFMUand RSU.15

Agilent EasyEXPERT softwareFunctionsOperation mode:Application test mode, Classic test mode,Quick test modeKey features• Categorized and predefined applicationtest library• GUI-based application test editor• Save/Recall “My Favorite Setups”• Define/customize application library• Execute measurement(Single/Repeat/Append)• Quick test execution• Direct control (GPIB FLEX)• Save/Recall measurement data andsettings• Test result data management• Import/Export device definition,measurement settings, my favoritesetup, measurement data, andapplication library• Graph plot display/analysis/printing• Switching matrix control• Workspace management• Self-test, self-calibration, diagnosticsApplication librarySample application tests are supplied forthe following categories; they are subjectto change without notice.Structure, CMOS, Bipolar (BJT),Memory, Mixed Signal Device, TFT,Discrete, Reliability, Power Device,Nanotechnology, UtilityMeasurement mode detailsThe Agilent B1500A supports the followingmeasurement modes:• Staircase sweep• Multi-channel sweep¹• Pulsed sweep• Staircase sweep with pulsed bias• IV sampling• High speed IV sampling• CV sweep• C-t sampling• C-f sweep• List sweep• Linear search²• Binary search²1. EasyEXPERT does not support VAR1’ inmulti-channel sweep mode.2. They are supported by FLEX command only.Each SMU can be set to VAR1 (primarysweep), VAR2 (secondary sweep), VAR1’(synchronous sweep), or CONST (constantvoltage/current source).VAR1Primary sweep controls the staircase(DC or pulsed) voltage or current sweep.Maximum number of VAR1 steps:N 1= 1001VAR2Subordinate linear staircase or linearpulsed sweep. After primary sweep iscompleted, the VAR2 unit output voltageor current is changed.Maximum number of VAR2 steps:N 2= 1001 (1 ≤ N 1× N 2≤ 128128)VAR1’Staircase or pulse sweep synchronizedwith the VAR1 sweep. Sweep is made witha user specified ratio and offset value.VAR1’ output is calculated as VAR1’ = a xVAR1 + b, where “a” is the user specifiedratio and “b” is the user specified offsetvalue.CONSTA source unit can be set as a constantvoltage or current source depending onthe unit.Staircase sweep measurement modeForces swept voltage or current, andmeasures DC voltage or current. Onechannel can sweep current or voltagewhile up to ten channels can measurecurrent or voltage. A second channel canbe synchronized with the primary sweepchannel as an additional voltage or currentsweep source.Number of steps: 1 to 1001Sweep mode: Linear or logarithmic (log)Sweep direction: Single or double sweepHold time: 0 to 655.35 s, 10 ms resolutionDelay time: 0 to 65.5350 s, 100 µsresolutionPulsed sweep measurement mode:Forces pulsed swept voltage or current,and measures DC voltage or current.A second channel can be programmedto output a staircase sweep voltage orcurrent synchronized with the pulsedsweep output.Staircase sweep with pulsed biasmeasurement modeForces swept voltage or current, andmeasures DC voltage or current. A secondchannel can be programmed to outputa pulsed bias voltage or current. A thirdchannel can be synchronized with theprimary sweep channel as an additionalvoltage or current sweep source.Sampling (time domain)measurement modeDisplays the time sampled voltage/currentdata (by SMU) versus time.Sampling channels: Up to 10Sampling mode: Linear, logarithmic (log)Sampling points:For linear sampling:1 to 100,001/(number of channels)For log sampling:1 to 1+ (number of data for 11 decades)Sampling interval range:100 μs +20 μs x (num. of channels – 1)to 2 ms, 10 µs resolution2 ms to 65.535 s, 1 ms resolutionHold time, bias hold time:-90 ms to -100 µs, 100 µs resolution0 to 655.35 s, 10 ms resolutionMeasurement time resolution: 100 µsStandby modeSMUs in “Standby” remain programmed totheir specified output value even as otherunits are reset for the next measurement.Current offset cancelThis function subtracts the offset currentfrom the current measurement raw data,and returns the result as the measurementdata. This function is used to compensatethe error factor (offset current) causedby the measurement path such as themeasurement cables, manipulators, orprobe card.Time stampThe B1500A supports a time stampfunction utilizing an internal quartz clock.Resolution: 100 µsOther measurement characteristicsMeasurement control:Single, repeat, append, and stopSMU setting capabilities:Limited auto ranging, voltage/currentcompliance, power compliance, automaticsweep abort functions, self-test,and self-calibration16

Arithmetic and analysisfunctionsUser functionsUp to 20 user-defined functions can bedefined using arithmetic expressions.Measured data and pre-defined variablescan be used in the computation. Theresults can be displayed on the LCD.Arithmetic operators+, -, *, /, ^, abs (absolute value),at (arc tangent), avg (averaging), cond(conditional evaluation), delta, diff (differential),exp (exponent), integ (integration),lgt (logarithm, base 10), log (logarithm,base e), mavg (moving average), max,min, sqrt, trigonometric function, inversetrigonometric function, and so on.Physical constantsKeyboard constants are stored in memoryas follows:q: Electron charge, 1.602177E-19 Ck: Boltzman’s constant, 1.380658E-23ε (e): Dielectric constant of vacuum,8.854188E-12Engineering unitsThe following unit symbols are alsoavailable on the keyboard:a (10 -18 ), f (10 -15 ), p (10 -12 ), n (10 -9 ),u or µ (10 -6 ), m (10 -3 ), k (10 3 ), M (10 6 ),G (10 9 ), T (10 12 ) , P (10 15 )Analysis capabilitiesOverlay graph comparisonGraphical plots can be stored and overlaid.ScaleAuto scale and zoomMarkerMarker to min/max, interpolation, directmarker, and marker skipCursorDirect cursorLineTwo lines, normal mode, grad mode,tangent mode, and regression modeAutomatic analysis functionOn a graphics plot, the markers and linescan be automatically located using theauto analysis setup. Parameters can beautomatically determined using automaticanalysis, user function, and read outfunctions.Data variable displayUp to 20 user-defined parameters can bedisplayed on the graphics screen.Analysis functionsUp to 20 user-defined analysis functionscan be defined using arithmeticexpressions.Measured data, pre-defined variables,and read out functions can be used in thecomputation. The results can be displayedon the LCD.Read out functionsThe read out functions are built-in functionsfor reading various values related tothe marker, cursor, or line.Graph plotDisplay modeData display window can be printed. OnlyX-Y graph can be printed.Graph plot fileGraph plot can be stored as image data toclip board or mass storage device.File type: bmp, gif, png, emfOutputDisplay modeX-Y graph, list, and parameterX-Y graph displayX-axis and up to eight Y-axes, linear andlog scale, real time graph plottingList displayMeasurement data and calculated userfunction data are listed in conjunctionwith VAR1 step number or time domainsampling step number. Up to 20 data setscan be displayed.Other functionsImport/export filesFile type:Agilent EasyEXPERT format, XML-SSformat, CSV formatData storageHard disk drive, DVD-ROM/CD-R/CD-RWdriveInterfacesGPIB, interlock, USB (USB 2.0, front 2,rear 2), LAN (100BASE-TX/10BASE-T),trigger in/out, digital I/OTrigger I/OOnly available using GPIB FLEX commands.Trigger in/out synchronization pulsesbefore and after setting and measuringDC voltage and current. Arbitrary triggerevents can be masked or activatedindependently.Supported external instrumentsEasyEXPERT Standard edition:• Supported by switching matrix GUI:B2200A/B2201A• Supported by application tests: E5250A(E5252A cards), 4284A/E4980A, 81110A,3458AEasyEXPERT Plus edition:• All external instruments supported byEasyEXPERT Standard edition• Also supported by switching matrix GUI:E5250A (E5252A cards)Furnished software• Prober control execution files• Desktop EasyEXPERT software withlicense-to-use for Standard edition• 4155/56 setup file converter tool(Supported operating systems:Microsoft® Windows ® XPProfessional (SP3 or later), WindowsVista Business (SP2 or later), andWindows 7 Professional (SP1 or later);Supported language: English (US))• A VXIplug&play driver for the B1500A(Supported operating systems:Microsoft ® Windows ® XP Professional(SP3 or later), Windows Vista Business(SP2 or later), and Windows 7Professional (SP1 or later)Supported language: English (US))17

Agilent Desktop EasyEXPERT softwareDesktop EasyEXPERT is the samesoftware that is built-in to the PC-basedAgilent B1500A Semiconductor DeviceAnalyzer, except that it runs on a standalonePC. Just like standard EasyEXPERT,Desktop EasyEXPERT supports all aspectsof parametric test, from basic manualmeasurements to test automation acrossa wafer in conjunction with a semiautomaticwafer prober.Features and benefitsLarge application test libraryDesktop EasyEXPERT comes with over300 application tests convenientlyorganized by device type, application, andtechnology. Many of these applicationtests will run on the 4155/4156 withoutmodification, and you can easily edit andcustomize the furnished application teststo fit your specific needs.Prober controlAll popular semiautomatic wafer probersare supported by Desktop EasyEXPERT.You can define wafer, die, and moduleinformation for probing across an entirewafer. You can also combine wafer probercontrol with either Quick Test mode or anapplication test based test sequence toperform multiple testing on various devicesacross the wafer.Automatic data exportThe Desktop EasyEXPERT has the abilityto automatically export measurement datain real time, in a variety of formats. Youcan save data to any drive connected tothe PC. If you wish, you can export data toa network drive and view test results onyour desktop PC as your instruments areperforming the testing in your lab.System requirementsSupported instruments• B1500A• 4155B, 4156B, 4155C, and 4156C• Supported 4155/4156 firmware:HOSTC: 03.08 or laterSMUC: 04.08 or laterSupported external instrumentsDesktop EasyEXPERT Standard edition:• Supported by switching matrix GUI:B2200A/B2201A• Supported by application tests: E5250A(E5252A cards), 4284A/E4980A, 81110A,3458ADesktop EasyEXPERT Plus edition:• All external instruments supported byDesktop EasyEXPERT Standard edition• Also supported by switching matrix GUI:E5250A (E5252A cards)Offline capabilityDesktop EasyEXPERT can be run in eitheronline or offline mode. In the offline modeyou can perform tasks such as analyzingdata and creating new application tests.This frees up your existing analyzer frombeing needed for development workand enables you to use it for its primarypurpose: making measurements.GUI-based classic test modeDesktop EasyEXPERT offers a classictest mode that maintains the look, feel,and terminology of the 4155/4156 userinterface. In addition, it improves the4155/4156 user interface by taking fulladvantage of Microsoft Windows GUIfeatures.Easy test sequencingA GUI-based Quick Test mode enablesyou to perform test sequencing withoutprogramming. You can select, copy, rearrangeand cut-and-paste any applicationtests with a few simple mouse clicks. Onceyou have selected and arranged your tests,simply click on the measurement button tobegin running an automated test sequence.The following are the minimum requirementfor executing Desktop EasyEXPERT.Operating systemand service packMicrosoft WindowsXP Professional SP3or laterMicrosoft WindowsVista BusinessSP2 or laterMicrosoft Windows 7ProfessionalSP1 or laterSupportedlanguageEnglish (US)Processer Intel Celeron 2 GHz Vista certified PC Windows 7certified PCMemory 512 MB DDR266 1 GB memory 2 GB memoryDisplayXGA 1024 x 768 (SXGA 1280 x 1024 recommended)HDD1GB free space on the C drive, 10GB (30GB recommended)free space on a drive for test setup / result data storage..NET FrameworkMicrosoft .NET Framework 2.0 SP2IO Libraries(for online mode)Agilent IO Libraries Suite 16.1 or laterSupported GPIB I/F (for online mode)B1500AAgilent 82350B O OAgilent 82357A X OAgilent 82357B X OO = SupportedX = Not supported4155B/C4156B/C18

Supported 4155/4156functionalityDesktop EasyEXPERT Standard edition:• I/V Sweep• B2200A and B2201A switching matrixGUI controlDesktop EasyEXPERT Plus edition:The following functions are additionallysupported.• I/V-t sampling (except thinned out mode)• VSU/VMU (except differential voltagemeasurement using VMU)• PGU (41501B)• E5250A/E5252A switching matrix GUIcontrolSetup converter toolIn addition to Desktop EasyEXPERT,Agilent supplies a free setup convertertool that runs on any Windows-basedPC. This tool can convert 4155 and 4156measurement setup files (file extensionsMES or DAT) into equivalent DesktopEasyEXPERT classic test mode setup files.General specificationsTemperature rangeOperating: +5 °C to +40 °CStorage: -20 °C to +60 °CHumidity rangeOperating: 20 % to 70 % RH,non-condensingStorage: 10 % to 90 % RH, non-condensingAltitudeOperating: 0 m to 2,000 m (6,561 ft)Storage: 0 m to 4,600 m (15,092 ft)Power requirementAC voltage: 90 V to 264 VLine frequency: 47 Hz to 63 HzMaximum volt-amps (VA)B1500A: 900 VARegulatory complianceEMC:IEC61326-1:+A1/EN61326-1:+A1AS/NZS 2064.1Safety:CSA C22.2 No.1010.1-1992IEC61010-1:+A2/EN61010-1:+A2UL3111-1:1994CertificationCE, CSA, NRTL/C, C-TickDimensionsB1500A:420 mm W x 330 mm H x 575 mm DN1301A-100 SMU CMU unify unit:148 mm W x 75 mm H x 70 mm DN1301A-200 guard switch unit:33.2 mm W x 41.5 mm H x 32.8 mm DE5288A Atto-sense and switch unit:132 mm W × 88.5 mm H × 50 mm DB1531A RSU:45.2 mm W x 70 mm H x 82 mm D16440A SMU/PGU selector:250 mm W × 50 mm H × 275 mm D16445A Selector adaptor:250 mm W × 50 mm H × 260 mm DWeightB1500A (empty): 20 kgB1510A: 2.0 kgB1511A: 1.0 kgB1517A: 1.2 kgB1520A: 1.5 kgB1525A: 1.3 kgB1530A: 1.3 kgB1531A: 0.13 kgE5288A: 0.5 kgN1301A-100: 0.8 kgN1301A-200: 0.1 kg16440A: 1.1 kg16445A: 1.0 kgFurnished accessoriesPower cableManual CD-ROMDesktop EasyEXPERT CD-ROMSoftware CD-ROM (including VXIplug&playdriver and utility tools)License-to-use for Desktop EasyEXPERTstandard edition19

Order informationMainframeB1500AB1500A-015B1500A-030B1500A-050B1500A-060B1500A-A6JB1500A-UK6B1500A-ABAB1500A-ABJSemiconductor device analyzer mainframeThe following accessories are included16444A-001 Keyboard16444A-002 USB mouse16444A-003 Stylus pen16493J-001/002 Interlock cable 1.5m or 3.0m*16493L-001/002 GNDU cable 1.5m or 3.0m *16494A-001/002 Tri-axial cable 1.5m or 3.0m *N1254A-100 GNDU to Kelvin adaptorCD-ROMs Manuals, Others*Select B1500A-015 or B1500A-030 to specifycable length1.5m cable (Cable length is set to 1.5m forstandard and add-on packages)3.0m cable (Cable length is set to 3.0m forstandard and add-on packages)50 Hz line frequency60 Hz line frequencyANSI Z540 compliant calibrationCommercial calibration certificate with test dataEnglish paper documentJapanese paper documentOther accessoriesN1301A CMU Accessories for B1500N1301A-100 SMU CMU unify unit (SCUU)N1301A-102 SMU CMU unify unit cable (3m)N1301A-110 SMU CMU unify unit magnetic standN1301A-200 Guard switch unit (GSWU)N1301A-201 Guard switch unit cable (1 m)N1301A-202 Guard switch unit cable (3 m)B1540A EasyEXPERT Software and MeasurementLibrariesB1540A-001 Agilent EasyEXPERT with license-to-use forstandard versionB1540A-002 License-to-use for Agilent EasyEXPERT PlusB1541A Desktop EasyEXPERT software and measurementlibrariesB1541A-001 Agilent Desktop EasyEXPERT with license-to-usefor standard versionB1541A-002 License-to-use for Agilent Desktop EasyEXPERTPlusB1542A Pulse IV Package for B1500 / EasyEXPERTStandard packagesB1500A-A00 Empty Package for Custom SolutionB1500A-A01 Standard Package (MPSMU 4ea. & Cables)B1500A-A02 High Resolution Package (HRSMU 2ea, MPSMU2ea. & Cables)B1500A-A03 High Power Package (HPSMU 2ea, MPSMU 2ea& Cables)B1500A-A04 Basic Flash Memory Cell Package (MPSMU 2ea,HRSMU 2ea, SPGU, Accessories)Add-on packagesB1500A-A10 HPSMU Add-on (HPSMU 1ea. & Cables)B1500A-A11 MPSMU Add-on (MPSMU 1ea. & Cables)B1500A-A17 HRSMU Add-on (HRSMU 1ea. & Cables)B1500A-A20 MFCMU Add-on (MFCMU, Cable)B1500A-A25 HVSPGU Add-on (HVSPGU 1ea. & Cables)B1500A-A28 ASU (Atto Sense Unit) Add-on (ASU 1ea. &Cables)B1500A-A30 WGFMU Add-on (WGFMU 1ea. RSU 2ea. &Cables)B1500A-A31 WGFMU Add-on with Connector Adapter(WGFMU 1ea, RSU 2ea, Cables & ConnectorAdapter)B1500A-A3P WGFMU probe cable kit (8 probe cables. WGFMUis not included.)B1500A-A5F Test fixture for packaged device measurement(16442B 1ea)20

Package Option Contents 1Standard packagesB1500A-A01 Standard packageItem Description QtyB1511A MPSMU (Medium Power SMU) 416494A-001/002 Triaxial cable 1.5m or 3.0m 8B1500A-A02 High resolution packageItem Description QtyB1517A HRSMU (High Resolution SMU) 416494A-001/002 Triaxial cable 1.5m or 3.0m 8B1500A-A03 High power packageItem Description QtyB1511A MPSMU (Medium Power SMU) 2B1510A HPSMU (High Power SMU) 216494A-001/002 Triaxial cable 1.5m or 3.0m 8B1500A-A04 Basic flash memory cell packageItem Description QtyB1511A MPSMU (Medium Power SMU) 2B1517A HRSMU (High Resolution SMU) 2B1525A HVSPGU (Pulse Generator Unit) 116493P-001 / 002 SPGU CABLE (SMA-TO-2COAXIAL) 1.5m or 3.0m16440A SMU/PGU Pulse Selector 116440A-003 Control Cable 40cm (2nd1Selector)16445A Selector Connection Unit 116445A-001 Control Cable For B1500A To 116440A 1.5m16494A-001 Tri-axial cable 1.5m 216494A-001/002 Triaxial cable 1.5m or 3.0m 8Add-on packagesB1500A-A10 HPSMU Add-on packageItem Description QtyB1510A HPSMU (High Power SMU) 116494A-001/002 Triaxial cable 1.5m or 3.0m 2B1500A-A11 MPSMU Add-on packageItem Description QtyB1511A MPSMU (Medium Power SMU) 116494A-001/002 Triaxial cable 1.5m or 3.0m 2B1500A-A17 HRSMU Add-on packageItem Description QtyB1517A HRSMU (High Resolution SMU) 116494A-001/002 Triaxial cable 1.5m or 3.0m 2B1500A-A20 MFCMU Add-on packageItem Description QtyB1520A MFCMU 1N1300A-001/002 CMU cable for B1500A 1.5m or 3.0m 1B1500A-A25 HVSPGU Add-on packageItem Description QtyB1525A HVSPGU 116493P-001/002 SPGU cable (SMA to Coaxial)1.5m or 3.0m2B1500A-A28 ASU Add-on packageItem Description QtyE5288A ASU 1E5288A-001/002 Triaxial and Dsub cable for ASU1.5m or 3.0m1B1500A-A30 WGFMU Add-on package 2Item Description QtyB1530A One WGFMU and two RSUs 1B1530A-005/002 Two WGFMU cables (1.5mor 3.0m) to connect betweenWGFMU and RSU1B1500A-A31 WGFMU Add-on package withconnection adapter 2Item Description QtyB1530A One WGFMU and two RSUs 1B1530A-001 Two set of WGFMU cables(0.6m + 2.4m)116493R-801 WGFMU connector adapter 2B1500A-A3P WGFMU Probe cable kitItem Description Qty16493R-101 SSMC-SSMC cable (50mm) for 2current return path16493R-102 SSMC-SSMC cable (70mm) forcurrent return path216493R-202 SMA-SSMC cable (200mm)between RSU and DC probe216493R-302 SMA-SMA cable (200mm)between RSU and RF probe2B1500A-A5F Test fixture for packaged device measurementItem Description Qty16442BTest fixture1Test fixture adapterUniversal socket module28 pin DIP socket moduleBlank Teflon boardCables used in test121139fixture adapterCarrying case11. Cable length is set by B1500A-015 or B1500A-030 option2. Order 16493R-802 if magnet stand is necessary for RSU21

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