Macquarie Electronics USA Inc. DNS SS-3000 Wafer Scrubber
Macquarie Electronics USA Inc. DNS SS-3000 Wafer Scrubber
Macquarie Electronics USA Inc. DNS SS-3000 Wafer Scrubber
You also want an ePaper? Increase the reach of your titles
YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.
<strong>Macquarie</strong> <strong>Electronics</strong> <strong>USA</strong> <strong>Inc</strong>.• Process Module 1/2/3/4:o Mechanical Chuck (Magnetic), <strong>3000</strong>RPM limito Nozzles: TMAH, DIWo Front-Side:• Rinse: Cold DIW• Position: Center of <strong>Wafer</strong>• Max Flow: 1000mL/Mino Back-Side:• Rinse: Cold DIW• Max Flow: 500mL/Mino Nano Spray:• N2 Rate: 10-100LPM (MFC Controlled)• N2 Filter: Mykrolis WGMX-MBX-S3• Rinse: Cold DIW• DIW Max Flow: 20-200mLPM (needle valve controlled)o Scanning: Reciprocating in range of wafer diametero Working Distance: 10mm from <strong>Wafer</strong> Surfaceo Lower Cup Material: PPo Back-Side Rinse VAT Material: PVCo Material Body: PTFEo Wetted Surface: PTFE, PFAo Brush:• Scrubbing System <strong>Inc</strong>luded• PVA Brush <strong>Inc</strong>luded• Scan Range: <strong>Wafer</strong> to Edge• Note: PM-1&2 have Bevel Brush• Scan Speed: 5-150mm/s• Pressure Control: 10-80grams• Rotation Control: 0-267RPM• Cleaning System: Max 1LPMo E-Flow CO2 Systemo Alkali Drain Line: BWW / 1W (Air/Water separation)o Alkali Exhaust Lineo Exhaust Control: Manual• Reverser Unit:o <strong>Wafer</strong> Flipping assembly includedo Drive Type: Pneumatico <strong>Wafer</strong> Sensor: Optical Photo Sensor• Facilities:o Move-In Restrictions: W-2600, D=1350, H=2680o Adjuster Plate: <strong>SS</strong> (304) (#6, 100mmx100mm & #6, 200mmx200mmo Seismic Supporto Mylar Floor System Templateo Pneumatic Chemical Supply Interfaceo Exhaust Interface: Bottomo Chemical Line Connections: Bottom (C.S.S.)This data sheet is provided to you on a strictly confidential basis and contains commercially sensitive and valuable information. No part of its content may be providedto any person without our prior written consent. This data sheet is not an offer capable of acceptance. The information contained in this data sheet is, to our knowledgeand information, accurate, but it may contain typographical errors and we do not warrant the completeness or accuracy of the information contained herein. Any offerby you to purchase of the equipment described in this data sheet shall be subject to our standard terms and conditions of sale.Interested parties may contact Matt Hayes at <strong>Macquarie</strong> <strong>Electronics</strong> for additional information at (408) 965-3863 ormatt.hayes@macquarie.com.Visit our web site at www.macquarie.com/electronicsImportant Information www.macquarie.com/uk/important_information.htm© 2012 <strong>Macquarie</strong> Group
Change language