05.12.2012 Views

Diplomarbeit Diplom-Ingenieur - Institut für Halbleiter

Diplomarbeit Diplom-Ingenieur - Institut für Halbleiter

Diplomarbeit Diplom-Ingenieur - Institut für Halbleiter

SHOW MORE
SHOW LESS

You also want an ePaper? Increase the reach of your titles

YUMPU automatically turns print PDFs into web optimized ePapers that Google loves.

20<br />

To derive the change of the beam amplitude the two-beam approximation is<br />

applied. This means that only one diffracted beam is strong. This condition can also<br />

be reached in a real TEM by tilting the sample until only one beam besides the (000)<br />

reflex is strong. The other spots can then be neglected. If one writes now this equation<br />

in terms of the change of the amplitudes when the beam passes through the specimen<br />

along the z direction, one obtains the Howlie - Wehlan equations (eqn. 3.11, eqn.<br />

3.12,) [32].<br />

dφ g πi<br />

−2<br />

πisz<br />

= φ 0e<br />

dz ξ g<br />

πi<br />

+ φ<br />

ξ<br />

dφ0 πi<br />

πi<br />

2πisz<br />

= φ0<br />

+ φge<br />

dz ξ0<br />

ξg<br />

This pair of coupled differential equations can be used to derive the amplitude of the<br />

scattered beam. This gives the intensity of a diffracted beam<br />

Whereas seff is the effective excitation error and is given by<br />

φ<br />

g<br />

2<br />

⎛ t ⎞<br />

⎜<br />

π<br />

= ⎟<br />

⎜ ⎟<br />

⎝ ξg<br />

⎠<br />

s is the excitation error and expresses the deviation from the exact Laue condition and<br />

is also a vector in reciprocal space. Many diffraction spots can be seen even if the<br />

Laue condition is not exactly fulfilled, which is then expressed as K=kD-kI+s. The<br />

intensity of the scattered electron beam is a periodic function of the specimen<br />

thickness t. The period of the oscillations is πseff. seff differs for different diffraction<br />

spots (hkl) and approaches s for very large values of s and becomes ξg -2 if s equals<br />

zero. The periodic behaviour of the electron beams plays an important role in the<br />

interpretability of the lattice fringes in HRTEM images (see section 3.4).<br />

s<br />

eff<br />

2<br />

=<br />

0<br />

g<br />

( )<br />

( ) 2<br />

2<br />

πts<br />

eff<br />

πts<br />

sin<br />

s<br />

2<br />

eff<br />

+<br />

1<br />

ξg<br />

2<br />

(3.11)<br />

(3.12)<br />

(3.13)<br />

(3.14)

Hooray! Your file is uploaded and ready to be published.

Saved successfully!

Ooh no, something went wrong!