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Diplomarbeit Diplom-Ingenieur - Institut für Halbleiter

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26<br />

• Stability of the acceleration and lens currents<br />

• On-axis alignment of the electron beam and the voltage centre of lens<br />

current<br />

• Low spherical aberration coefficient of the objective lens<br />

• Parallel beam for good spatial coherence<br />

• Low energy spread and low chromatic aberration coefficient<br />

• Well aligned stigmators of the intermediate and objective lens to avoid<br />

lens astigmatism<br />

Figure 3.8: (a) Diffraction pattern of a CdTe specimen, recorded along the (110) zone<br />

axis. The most important spots that cause the phase contrast of the lattice planes in the<br />

real image, are indicated. The circle indicates the size of the aperture that was used for<br />

real image recording. (b) Real image that shows phase contrast. The {002} and {220}<br />

diffraction spots are strong for the PbTe rs structure, the {111} are strong for the CdTe<br />

zb structure. The two materials can be distinguished by the corresponding lattice planes<br />

in the real image. The lattice planes are indicated.<br />

3.4.2 Origin of Lattice Fringes<br />

The origin of the lattice fringes are the different phase factor of the scattered beams.<br />

This can be easily shown by the solution of the Howlie - Wehlan equations. The<br />

intensity of the solution is given for the two-beam approximation by [32]<br />

2<br />

2 2<br />

I = ψT<br />

= A + B + 2AB<br />

sin( 2πg′<br />

x − πst)<br />

(3.16)

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