Wet Isotropic and Anisotropic Etching - ECE
Wet Isotropic and Anisotropic Etching - ECE
Wet Isotropic and Anisotropic Etching - ECE
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Iso-Etch Curves<br />
� 3 parts acetic acid<br />
� 3 parts ~70%<br />
HNO 3<br />
� 4 parts ~49% HF<br />
� Etch rate of<br />
solution the curve<br />
corresponding<br />
with intersection<br />
point (56 µm/min)
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