Wet Isotropic and Anisotropic Etching - ECE
Wet Isotropic and Anisotropic Etching - ECE
Wet Isotropic and Anisotropic Etching - ECE
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Why Not <strong>Wet</strong> <strong>Anisotropic</strong> <strong>Etching</strong>?<br />
� Contamination<br />
� Orientation Dependent<br />
� Must choose wafers carefully<br />
� Etch rates varied by temperature <strong>and</strong><br />
concentration<br />
� Must closely control these variables<br />
� Undercutting still an issue
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