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Wet Isotropic and Anisotropic Etching - ECE

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Applications of <strong>Isotropic</strong> <strong>Etching</strong><br />

� When high etch rates needed<br />

� Non-critical tasks<br />

� Large geometries<br />

� Removal of work-damaged surfaces<br />

� Rounding of sharp anisotropically etched<br />

corners<br />

� Structures <strong>and</strong> planes on single-crystal<br />

lattices

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