GBS_smartWLI Cylinderinspector 3D
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Recommendation for the correct field of view<br />
Check list to select the correct system configuration:<br />
• min. 10x higher resolution in xyz than the feature which should be measured<br />
• min. 10 evaluation features inside the scanning area<br />
• min. 10 measuring positions for statistical analysis<br />
feature parameter reality* required system parameter<br />
seize depth density xy res. z res. area<br />
cavities area 500 µm² > 1 µm 10 / mm² 1 / mm
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