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GBS_smartWLI Cylinderinspector 3D

Sample: local variation

Sample: local variation of cavities, multiple scans necessary mm 2.0 1.5 1.0 FOV: 7,2 x 4,5 mm² time:

Recommendation for the correct field of view Check list to select the correct system configuration: • min. 10x higher resolution in xyz than the feature which should be measured • min. 10 evaluation features inside the scanning area • min. 10 measuring positions for statistical analysis feature parameter reality* required system parameter seize depth density xy res. z res. area cavities area 500 µm² > 1 µm 10 / mm² 1 / mm

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