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GBS_smartWLI Cylinderinspector 3D

Honing Structure FFT

Honing Structure FFT Analysis mm 1.0 0.8 0.6 µm 1 0 mm 1.0 0.8 0.6 µm 1 0 -1 -2 0.4 0.2 0.0 0.0 0.5 1.0 mm -1 -2 -3 0.4 0.2 0.0 0.0 0.5 1.0 mm -3 -4 -5 -6 Parameters Value Unit Honing Angle - Honing Structure FFT Analysis 18.20 ° Rising Grooves - Honing Structure FFT Analysis 16.20 ° Falling Grooves - Honing Structure FFT Analysis 20.20 ° Rising Structures - Honing Structure FFT Analysis 26.11 % Falling Structures - Honing Structure FFT Analysis 34.52 % Cross Structures - Honing Structure FFT Analysis 2.00 % Closed Structures - Honing Structure FFT Analysis 37.37 % Parameters Value Unit Honing Angle - Honing Structure FFT Analysis 18.05 ° Rising Grooves - Honing Structure FFT Analysis 17.20 ° Falling Grooves - Honing Structure FFT Analysis 18.90 ° Rising Structures - Honing Structure FFT Analysis 8.86 % Falling Structures - Honing Structure FFT Analysis 14.05 % Cross Structures - Honing Structure FFT Analysis 4.52 % Closed Structures - Honing Structure FFT Analysis 72.57 % Comment: The GBS programmed Honing Structure FFT Analysis allowed a separate analysis of rising and falling structures. The sample on the right site shows a higher percentage of closed structures because of the cavities (positive) but also more cross structures. The scan on the left side shows a more falling structures and on the right side more rising structures. 16

Key cavities 1.00 µm Number of islands 44 Threshold 1.00 µm Parameters Unit Grain #1 Grain #2 Grain #3 Grain #4 Grain #5 Grain #6 Grain #7 Grain #8 Grain #9 Grain #10 Grain #11 Grain #12 Grain #13 Area mm² 0.0056 0.00515 0.00307 0.00291 0.00235 0.0017 0.00169 0.00159 0.00158 0.0013 0.00113 0.000941 0.000933 Aspect ratio 1.53 1.58 3.41 2.92 2.73 3.83 2.02 2.19 4.03 2.42 2.98 2.67 1.91 Volume µm³ 13995 20813 6088 8015 2807 2576 4531 3282 2414 2432 1116 2045 3372 Max height µm 4.74 9.98 4.00 6.73 2.70 4.67 4.54 3.31 2.89 4.36 2.67 4.29 9.11 Height/Surface ratio µm/mm² 847 1937 1304 2310 1148 2740 2688 2086 1831 3358 2365 4557 9767 Status 0 0 0 0 0 0 0 0 0 0 0 0 0 Separated cavities could be counted and statistically evaluated. Many classificatory operator – as depth, volume, form factors ... can be used to analyze many partial aspects from the cavities. 17

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