epdf.pub_nanotechnology-and-nanoelectronics-materials-devic

4 Nanolayers
4.1 Production of Nanolayers
4.1.1 Physical Vapor Deposition (PVD)
In general, physical vapor deposition (PVD) from the gas phase is subdivided into
four groups, namely (i) evaporation, (ii) sputtering, (iii) ion plating, and (iv) laser
ablation. The first three methods occur at low pressures. A rough overview is seen
in Fig. 4.1.
(i) Evaporation. This procedure is carried out in a bell jar as depicted in Fig.
4.2. A crucible is heated up by a resistance or an electron gun until a sufficient
Fig. 4.1 Three fundamental PVD methods: evaporation (a), sputtering (b), and
ion plating (c) [53]