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VIII

Contents

4.1.4 Ion Implantation........................................................................52

4.1.5 Formation of Silicon Oxide ......................................................59

4.2 Characterization of Nanolayers.......................................................63

4.2.1 Thickness, Surface Roughness .................................................63

4.2.2 Crystallinity ..............................................................................76

4.2.3 Chemical Composition .............................................................82

4.2.4 Doping Properties .....................................................................86

4.2.5 Optical Properties .....................................................................97

4.3 Applications of Nanolayers...........................................................103

4.4 Evaluation and Future Prospects...................................................103

5 Nanoparticles (W. R. FAHRNER).............................................................107

5.1 Fabrication of Nanoparticles.........................................................107

5.1.1 Grinding with Iron Balls.........................................................107

5.1.2 Gas Condensation ...................................................................107

5.1.3 Laser Ablation ........................................................................107

5.1.4 Thermal and Ultrasonic Decomposition .................................108

5.1.5 Reduction Methods.................................................................109

5.1.6 Self-Assembly ........................................................................109

5.1.7 Low-Pressure, Low-Temperature Plasma...............................109

5.1.8 Thermal High-Speed Spraying of Oxygen/Powder/Fuel ........110

5.1.9 Atom Optics............................................................................111

5.1.10 Sol gels ...................................................................................112

5.1.11 Precipitation of Quantum Dots ...............................................113

5.1.12 Other Procedures ....................................................................114

5.2 Characterization of Nanoparticles.................................................114

5.2.1 Optical Measurements ............................................................114

5.2.2 Magnetic Measurements.........................................................115

5.2.3 Electrical Measurements.........................................................115

5.3 Applications of Nanoparticles.......................................................117

5.4 Evaluation and Future Prospects...................................................118

6 Selected Solid States with Nanocrystalline Structures .....121

6.1 Nanocrystalline Silicon (W. R. FAHRNER)....................................121

6.1.1 Production of Nanocrystalline Silicon....................................121

6.1.2 Characterization of Nanocrystalline Silicon ...........................122

6.1.3 Applications of Nanocrystalline Silicon .................................126

6.1.4 Evaluation and Future Prospects.............................................126

6.2 Zeolites and Nanoclusters in Zeolite Host Lattices (R. JOB) ........127

6.2.1 Description of Zeolites ...........................................................127

6.2.2 Production and Characterization of Zeolites...........................128

6.2.3 Nanoclusters in Zeolite Host Lattices .....................................135

6.2.4 Applications of Zeolites and Nanoclusters in

Zeolite Host Lattices...............................................................138

6.2.5 Evaluation and Future Prospects.............................................139

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