Vacuum Technology and Vacuum Design Handbook for Accelerator ...

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Vacuum Technology and Vacuum Design Handbook for Accelerator Technicians This handbook is a compilation of information gathered from over 50 years of direct hands-on experience to applicable information widely available from the vacuum technology industry. It seeks to address common and specific vacuum technology problems whilst clarifying the design standards and philosophies adopted for use in the ANSTO accelerator facilities. The author wishes to thank the reviewers and the many technicians from ANSTO that have contributed directly and indirectly to this booklet. Revision 0 Author: David Garton, 18-11-11 Reviewer: Michael Mann, 9-12-11 Reviewer: David Button, 19-12-11 ANSTO/E-775 ISBN number: 192126814X ISSN number: 10307745 - 2 -
Contents Page Chapter 1 - Vacuum design standards for the Accelerator Area 6 1. Basic design ………………………………………………………………………6 2. Welds …………………………………………………………………………….. 7 3. Surface finishes …………………………………………………………………... 8 4. Flanges …………………………………………………………………………… 8 5. Seals ……………………………………………………………………………… 9 6. Screws ……………………………………………………………………………. 9 7. Feedthroughs …………………………………………………………………….. 9 8. Lubricants, vacuum greases and epoxies ………………………………………... 10 9. Mounting ………………………………………………………………………… 10 10. Access ………………………………………………………………………….....10 11. Testing …………………………………………………………………………… 10 12. Operation and Continued Monitoring …………………………………………… 11 Chapter 2 - Design Criteria, Information and Philosophies for Vacuum 12 1. Terminology ……………………………………………………………………... 12 2. Standard Units …………………………………………………………………… 13 2.1 General 2.2 Threads 2.3 Pressure 3. General Design Philosophies …………………………………………………….. 14 3.1 The Shape 3.2 The size 3.3 Location 3.4 Mounting 3.5 Flexible design 3.6 Can it be made? 3.7 Safe design 3.8 Cost effective design 3.9 Design by numbers 3.10 Australian Standards 3.11 Environmental impact 3.12 Manufacture 3.13 Testing 3.14 Inspection 3.15 Certification 3.16 Documentation 3.17 Maintaining 4. Performance and Operations …………………………………………………….. 18 4.1 Ultimate Vacuum 4.2 Working Vacuum 4.3 Sustainable operation 4.4 Operational Protocols 4.5 Pump down 4.6 Venting 5. Safety ……………………………………………………………………………. 23 5.1 General 5.2 Interlocks - 3 -
Page 1: Vacuum Technology and Vacuum Design
Page 5 and 6: 3.5 Reynolds Number (Re) 3.6 Viscou
Page 7 and 8: • Top and bottom flanges to have
Page 9 and 10: • STAR utilises many of the major
Page 11 and 12: • For all other vacuum equipment
Page 13 and 14: 1. Terminology ANTARES - Australian
Page 15 and 16: Non-cylindrical chambers must be ca
Page 17 and 18: 3.9 Design by numbers This is a mat
Page 19 and 20: The ultimate vacuum is improved by
Page 21 and 22: pump. Slowly open the pump out valv
Page 23 and 24: Precautions • Before venting a va
Page 25 and 26: • Changing faulty seals - cleanin
Page 27 and 28: can be used on stainless steel with
Page 29 and 30: • Some steps for inner rings have
Page 31 and 32: Most Conflat flanges have imperial
Page 33 and 34: on the location of the valve. See t
Page 35 and 36: The third type is magnetically coup
Page 37 and 38: 13. Pumping 13.1 General It is not
Page 39 and 40: • On ANTARES the Pfeiffer brand i
Page 41 and 42: The pressure exerted from a vacuum
Page 43 and 44: as Avogadro's number. The mass of t
Page 45 and 46: pumped at the highest flow rate ach
Page 47 and 48: Gas Formula Molecular weight - 47 -
Page 49 and 50: It is normally specified in Pa.l.s
Page 51 and 52: 4. Limitations The most fundamental
Page 53 and 54:
connection. Even some metals (Cd, Z
Page 55 and 56:
adequately tight if the equilibrium
Page 57 and 58:
Appendix 1 - Structural Calculation
Page 59 and 60:
Factor tables for thickness calcula
Page 61 and 62:
Factor A table for Stainless Steels
Page 63 and 64:
PCTFE exhibits high chemical resist
Page 65 and 66:
ass has good corrosion resistance t
Page 67 and 68:
Glass is similar to ceramics in thi
Page 69 and 70:
Appendix 4 - Surface finishing In m
Page 71 and 72:
Appendix 5 - Vapour Pressures conti
Page 73 and 74:
Aluminium 6061-T4 Aluminium 6061-T4
Page 75 and 76:
SS H2 glow discharge - 150°C SS Ar
Page 77 and 78:
Araldite (moulded) Araldite D Arald
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fittings and equipment protruding f
Page 81 and 82:
References • Berman, Vacuum Engin
Page 83 and 84:
Vacuum Technology and Vacuum Design
Page 85 and 86:
5.3 Fumes form exhausts 5.4 Earthin
Page 87 and 88:
Chapter 1 Vacuum design standards a
Page 89 and 90:
• Electric arc with rods is not r
Page 91 and 92:
8. Lubricants, vacuum greases and e
Page 93 and 94:
Chapter 2 Design Criteria, Informat
Page 95 and 96:
mostly imperial. Typically, UNC and
Page 97 and 98:
3.5 Flexible design It is prudent t
Page 99 and 100:
option. This is where add on vacuum
Page 101 and 102:
The accelerator beam lines are divi
Page 103 and 104:
Water vapour and residual solvents
Page 105 and 106:
• Cryopumps must not be operated
Page 107 and 108:
Final clean. It is recommended that
Page 109 and 110:
8.3 Edwards This is no longer a pre
Page 111 and 112:
ISO-F flanges are more of a traditi
Page 113 and 114:
join sections of beam line or equip
Page 115 and 116:
• Feedthroughs can be purchased i
Page 117 and 118:
12. Internal Devices There are many
Page 119 and 120:
services, can be regenerated withou
Page 121 and 122:
Chapter 3 Overview of Basic Vacuum
Page 123 and 124:
2. Pressure Fundamentals 2.1 Genera
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Pressure (Pa) Molecules / cm 3 Mole
Page 127 and 128:
By evaluating the Knudsen (Kn) and
Page 129 and 130:
table in “Conductivities” below
Page 131 and 132:
Where: qpV = Throughput flow rate p
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Diffusion Permeation Desorption Lea
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4.4 Diffusion with desorption At op
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4.7 Bake-out The following prerequi
Page 139 and 140:
For Hemispherical End (h2): R ≤ 8
Page 141 and 142:
Example 3: For comparison, calculat
Page 143 and 144:
Appendix 2 - Low Outgassing Special
Page 145 and 146:
Appendix 3 - Materials for use in V
Page 147 and 148:
• Polyvinyl Chloride (PVC) is acc
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o Apiezon Sealing Compound Q • Va
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- 70 - Appendix 5 - Critical Vapour
Page 153 and 154:
Appendix 6 - Outgassing tables for
Page 155 and 156:
Stainless steel Stainless steel 304
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PVC 24h @ 95% relative humidity PTF
Page 159 and 160:
Appendix 7 - Local Plant and Safety
Page 161 and 162:
Regular maintenance applied via Acc
Page 163 and 164:
Page 165 and 166:
Contents Page Chapter 1 - Vacuum de
Page 167 and 168:
3.5 Reynolds Number (Re) 3.6 Viscou
Page 169 and 170:
• Top and bottom flanges to have
Page 171 and 172:
• STAR utilises many of the major
Page 173 and 174:
• For all other vacuum equipment
Page 175 and 176:
1. Terminology ANTARES - Australian
Page 177 and 178:
Non-cylindrical chambers must be ca
Page 179 and 180:
3.9 Design by numbers This is a mat
Page 181 and 182:
The ultimate vacuum is improved by
Page 183 and 184:
pump. Slowly open the pump out valv
Page 185 and 186:
Precautions • Before venting a va
Page 187 and 188:
• Changing faulty seals - cleanin
Page 189 and 190:
can be used on stainless steel with
Page 191 and 192:
• Some steps for inner rings have
Page 193 and 194:
Most Conflat flanges have imperial
Page 195 and 196:
on the location of the valve. See t
Page 197 and 198:
The third type is magnetically coup
Page 199 and 200:
13. Pumping 13.1 General It is not
Page 201 and 202:
• On ANTARES the Pfeiffer brand i
Page 203 and 204:
The pressure exerted from a vacuum
Page 205 and 206:
as Avogadro's number. The mass of t
Page 207 and 208:
pumped at the highest flow rate ach
Page 209 and 210:
Gas Formula Molecular weight - 47 -
Page 211 and 212:
It is normally specified in Pa.l.s
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4. Limitations The most fundamental
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The pressure exerted from a vacuum
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as Avogadro's number. The mass of t
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pumped at the highest flow rate ach
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Gas Formula Molecular weight - 47 -
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It is normally specified in Pa.l.s
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4. Limitations The most fundamental
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