- Page 1 and 2: Vacuum Technology and Vacuum Design
- Page 3 and 4: Contents Page Chapter 1 - Vacuum de
- Page 5 and 6: 3.5 Reynolds Number (Re) 3.6 Viscou
- Page 7 and 8: • Top and bottom flanges to have
- Page 9 and 10: • STAR utilises many of the major
- Page 11 and 12: • For all other vacuum equipment
- Page 13 and 14: 1. Terminology ANTARES - Australian
- Page 15 and 16: Non-cylindrical chambers must be ca
- Page 17 and 18: 3.9 Design by numbers This is a mat
- Page 19 and 20: The ultimate vacuum is improved by
- Page 21 and 22: pump. Slowly open the pump out valv
- Page 23 and 24: Precautions • Before venting a va
- Page 25: • Changing faulty seals - cleanin
- Page 29 and 30: • Some steps for inner rings have
- Page 31 and 32: Most Conflat flanges have imperial
- Page 33 and 34: on the location of the valve. See t
- Page 35 and 36: The third type is magnetically coup
- Page 37 and 38: 13. Pumping 13.1 General It is not
- Page 39 and 40: • On ANTARES the Pfeiffer brand i
- Page 41 and 42: The pressure exerted from a vacuum
- Page 43 and 44: as Avogadro's number. The mass of t
- Page 45 and 46: pumped at the highest flow rate ach
- Page 47 and 48: Gas Formula Molecular weight - 47 -
- Page 49 and 50: It is normally specified in Pa.l.s
- Page 51 and 52: 4. Limitations The most fundamental
- Page 53 and 54: connection. Even some metals (Cd, Z
- Page 55 and 56: adequately tight if the equilibrium
- Page 57 and 58: Appendix 1 - Structural Calculation
- Page 59 and 60: Factor tables for thickness calcula
- Page 61 and 62: Factor A table for Stainless Steels
- Page 63 and 64: PCTFE exhibits high chemical resist
- Page 65 and 66: ass has good corrosion resistance t
- Page 67 and 68: Glass is similar to ceramics in thi
- Page 69 and 70: Appendix 4 - Surface finishing In m
- Page 71 and 72: Appendix 5 - Vapour Pressures conti
- Page 73 and 74: Aluminium 6061-T4 Aluminium 6061-T4
- Page 75 and 76: SS H2 glow discharge - 150°C SS Ar
- Page 77 and 78:
Araldite (moulded) Araldite D Arald
- Page 79 and 80:
fittings and equipment protruding f
- Page 81 and 82:
References • Berman, Vacuum Engin
- Page 83 and 84:
Vacuum Technology and Vacuum Design
- Page 85 and 86:
5.3 Fumes form exhausts 5.4 Earthin
- Page 87 and 88:
Chapter 1 Vacuum design standards a
- Page 89 and 90:
• Electric arc with rods is not r
- Page 91 and 92:
8. Lubricants, vacuum greases and e
- Page 93 and 94:
Chapter 2 Design Criteria, Informat
- Page 95 and 96:
mostly imperial. Typically, UNC and
- Page 97 and 98:
3.5 Flexible design It is prudent t
- Page 99 and 100:
option. This is where add on vacuum
- Page 101 and 102:
The accelerator beam lines are divi
- Page 103 and 104:
Water vapour and residual solvents
- Page 105 and 106:
• Cryopumps must not be operated
- Page 107 and 108:
Final clean. It is recommended that
- Page 109 and 110:
8.3 Edwards This is no longer a pre
- Page 111 and 112:
ISO-F flanges are more of a traditi
- Page 113 and 114:
join sections of beam line or equip
- Page 115 and 116:
• Feedthroughs can be purchased i
- Page 117 and 118:
12. Internal Devices There are many
- Page 119 and 120:
services, can be regenerated withou
- Page 121 and 122:
Chapter 3 Overview of Basic Vacuum
- Page 123 and 124:
2. Pressure Fundamentals 2.1 Genera
- Page 125 and 126:
Pressure (Pa) Molecules / cm 3 Mole
- Page 127 and 128:
By evaluating the Knudsen (Kn) and
- Page 129 and 130:
table in “Conductivities” below
- Page 131 and 132:
Where: qpV = Throughput flow rate p
- Page 133 and 134:
Diffusion Permeation Desorption Lea
- Page 135 and 136:
4.4 Diffusion with desorption At op
- Page 137 and 138:
4.7 Bake-out The following prerequi
- Page 139 and 140:
For Hemispherical End (h2): R ≤ 8
- Page 141 and 142:
Example 3: For comparison, calculat
- Page 143 and 144:
Appendix 2 - Low Outgassing Special
- Page 145 and 146:
Appendix 3 - Materials for use in V
- Page 147 and 148:
• Polyvinyl Chloride (PVC) is acc
- Page 149 and 150:
o Apiezon Sealing Compound Q • Va
- Page 151 and 152:
- 70 - Appendix 5 - Critical Vapour
- Page 153 and 154:
Appendix 6 - Outgassing tables for
- Page 155 and 156:
Stainless steel Stainless steel 304
- Page 157 and 158:
PVC 24h @ 95% relative humidity PTF
- Page 159 and 160:
Appendix 7 - Local Plant and Safety
- Page 161 and 162:
Regular maintenance applied via Acc
- Page 163 and 164:
Vacuum Technology and Vacuum Design
- Page 165 and 166:
Contents Page Chapter 1 - Vacuum de
- Page 167 and 168:
3.5 Reynolds Number (Re) 3.6 Viscou
- Page 169 and 170:
• Top and bottom flanges to have
- Page 171 and 172:
• STAR utilises many of the major
- Page 173 and 174:
• For all other vacuum equipment
- Page 175 and 176:
1. Terminology ANTARES - Australian
- Page 177 and 178:
Non-cylindrical chambers must be ca
- Page 179 and 180:
3.9 Design by numbers This is a mat
- Page 181 and 182:
The ultimate vacuum is improved by
- Page 183 and 184:
pump. Slowly open the pump out valv
- Page 185 and 186:
Precautions • Before venting a va
- Page 187 and 188:
• Changing faulty seals - cleanin
- Page 189 and 190:
can be used on stainless steel with
- Page 191 and 192:
• Some steps for inner rings have
- Page 193 and 194:
Most Conflat flanges have imperial
- Page 195 and 196:
on the location of the valve. See t
- Page 197 and 198:
The third type is magnetically coup
- Page 199 and 200:
13. Pumping 13.1 General It is not
- Page 201 and 202:
• On ANTARES the Pfeiffer brand i
- Page 203 and 204:
The pressure exerted from a vacuum
- Page 205 and 206:
as Avogadro's number. The mass of t
- Page 207 and 208:
pumped at the highest flow rate ach
- Page 209 and 210:
Gas Formula Molecular weight - 47 -
- Page 211 and 212:
It is normally specified in Pa.l.s
- Page 213 and 214:
4. Limitations The most fundamental
- Page 215 and 216:
connection. Even some metals (Cd, Z
- Page 217 and 218:
adequately tight if the equilibrium
- Page 219 and 220:
Appendix 1 - Structural Calculation
- Page 221 and 222:
Factor tables for thickness calcula
- Page 223 and 224:
Factor A table for Stainless Steels
- Page 225 and 226:
PCTFE exhibits high chemical resist
- Page 227 and 228:
ass has good corrosion resistance t
- Page 229 and 230:
Glass is similar to ceramics in thi
- Page 231 and 232:
Appendix 4 - Surface finishing In m
- Page 233 and 234:
Appendix 5 - Vapour Pressures conti
- Page 235 and 236:
Aluminium 6061-T4 Aluminium 6061-T4
- Page 237 and 238:
SS H2 glow discharge - 150°C SS Ar
- Page 239 and 240:
Araldite (moulded) Araldite D Arald
- Page 241 and 242:
fittings and equipment protruding f
- Page 243 and 244:
References • Berman, Vacuum Engin
- Page 245 and 246:
Vacuum Technology and Vacuum Design
- Page 247 and 248:
5.3 Fumes form exhausts 5.4 Earthin
- Page 249 and 250:
Chapter 1 Vacuum design standards a
- Page 251 and 252:
• Electric arc with rods is not r
- Page 253 and 254:
8. Lubricants, vacuum greases and e
- Page 255 and 256:
Chapter 2 Design Criteria, Informat
- Page 257 and 258:
mostly imperial. Typically, UNC and
- Page 259 and 260:
3.5 Flexible design It is prudent t
- Page 261 and 262:
option. This is where add on vacuum
- Page 263 and 264:
The accelerator beam lines are divi
- Page 265 and 266:
Water vapour and residual solvents
- Page 267 and 268:
• Cryopumps must not be operated
- Page 269 and 270:
Final clean. It is recommended that
- Page 271 and 272:
8.3 Edwards This is no longer a pre
- Page 273 and 274:
ISO-F flanges are more of a traditi
- Page 275 and 276:
join sections of beam line or equip
- Page 277 and 278:
• Feedthroughs can be purchased i
- Page 279 and 280:
12. Internal Devices There are many
- Page 281 and 282:
services, can be regenerated withou
- Page 283 and 284:
Chapter 3 Overview of Basic Vacuum
- Page 285 and 286:
2. Pressure Fundamentals 2.1 Genera
- Page 287 and 288:
Pressure (Pa) Molecules / cm 3 Mole
- Page 289 and 290:
By evaluating the Knudsen (Kn) and
- Page 291 and 292:
table in “Conductivities” below
- Page 293 and 294:
Where: qpV = Throughput flow rate p
- Page 295 and 296:
Diffusion Permeation Desorption Lea
- Page 297 and 298:
4.4 Diffusion with desorption At op
- Page 299 and 300:
4.7 Bake-out The following prerequi
- Page 301 and 302:
For Hemispherical End (h2): R ≤ 8
- Page 303 and 304:
Example 3: For comparison, calculat
- Page 305 and 306:
Appendix 2 - Low Outgassing Special
- Page 307 and 308:
Appendix 3 - Materials for use in V
- Page 309 and 310:
• Polyvinyl Chloride (PVC) is acc
- Page 311 and 312:
o Apiezon Sealing Compound Q • Va
- Page 313 and 314:
- 70 - Appendix 5 - Critical Vapour
- Page 315 and 316:
Appendix 6 - Outgassing tables for
- Page 317 and 318:
Stainless steel Stainless steel 304
- Page 319 and 320:
PVC 24h @ 95% relative humidity PTF
- Page 321 and 322:
Appendix 7 - Local Plant and Safety
- Page 323 and 324:
Regular maintenance applied via Acc
- Page 325 and 326:
Vacuum Technology and Vacuum Design
- Page 327 and 328:
Contents Page Chapter 1 - Vacuum de
- Page 329 and 330:
3.5 Reynolds Number (Re) 3.6 Viscou
- Page 331 and 332:
• Top and bottom flanges to have
- Page 333 and 334:
• STAR utilises many of the major
- Page 335 and 336:
• For all other vacuum equipment
- Page 337 and 338:
1. Terminology ANTARES - Australian
- Page 339 and 340:
Non-cylindrical chambers must be ca
- Page 341 and 342:
3.9 Design by numbers This is a mat
- Page 343 and 344:
The ultimate vacuum is improved by
- Page 345 and 346:
pump. Slowly open the pump out valv
- Page 347 and 348:
Precautions • Before venting a va
- Page 349 and 350:
• Changing faulty seals - cleanin
- Page 351 and 352:
can be used on stainless steel with
- Page 353 and 354:
• Some steps for inner rings have
- Page 355 and 356:
Most Conflat flanges have imperial
- Page 357 and 358:
on the location of the valve. See t
- Page 359 and 360:
The third type is magnetically coup
- Page 361 and 362:
13. Pumping 13.1 General It is not
- Page 363 and 364:
• On ANTARES the Pfeiffer brand i
- Page 365 and 366:
The pressure exerted from a vacuum
- Page 367 and 368:
as Avogadro's number. The mass of t
- Page 369 and 370:
pumped at the highest flow rate ach
- Page 371 and 372:
Gas Formula Molecular weight - 47 -
- Page 373 and 374:
It is normally specified in Pa.l.s
- Page 375 and 376:
4. Limitations The most fundamental
- Page 377 and 378:
connection. Even some metals (Cd, Z
- Page 379 and 380:
adequately tight if the equilibrium
- Page 381 and 382:
Appendix 1 - Structural Calculation
- Page 383 and 384:
Factor tables for thickness calcula
- Page 385 and 386:
Factor A table for Stainless Steels
- Page 387 and 388:
PCTFE exhibits high chemical resist
- Page 389 and 390:
ass has good corrosion resistance t
- Page 391 and 392:
Glass is similar to ceramics in thi
- Page 393 and 394:
Appendix 4 - Surface finishing In m
- Page 395 and 396:
Appendix 5 - Vapour Pressures conti
- Page 397 and 398:
Aluminium 6061-T4 Aluminium 6061-T4
- Page 399 and 400:
SS H2 glow discharge - 150°C SS Ar
- Page 401 and 402:
Araldite (moulded) Araldite D Arald
- Page 403 and 404:
fittings and equipment protruding f
- Page 405 and 406:
References • Berman, Vacuum Engin
- Page 407 and 408:
Vacuum Technology and Vacuum Design
- Page 409 and 410:
5.3 Fumes form exhausts 5.4 Earthin
- Page 411 and 412:
Chapter 1 Vacuum design standards a
- Page 413 and 414:
• Electric arc with rods is not r
- Page 415 and 416:
8. Lubricants, vacuum greases and e
- Page 417 and 418:
Chapter 2 Design Criteria, Informat
- Page 419 and 420:
mostly imperial. Typically, UNC and
- Page 421 and 422:
3.5 Flexible design It is prudent t
- Page 423 and 424:
option. This is where add on vacuum
- Page 425 and 426:
The accelerator beam lines are divi
- Page 427 and 428:
Water vapour and residual solvents
- Page 429 and 430:
• Cryopumps must not be operated
- Page 431 and 432:
Final clean. It is recommended that
- Page 433 and 434:
8.3 Edwards This is no longer a pre
- Page 435 and 436:
ISO-F flanges are more of a traditi
- Page 437 and 438:
join sections of beam line or equip
- Page 439 and 440:
• Feedthroughs can be purchased i
- Page 441 and 442:
12. Internal Devices There are many
- Page 443 and 444:
services, can be regenerated withou
- Page 445 and 446:
Chapter 3 Overview of Basic Vacuum
- Page 447 and 448:
2. Pressure Fundamentals 2.1 Genera
- Page 449 and 450:
Pressure (Pa) Molecules / cm 3 Mole
- Page 451 and 452:
By evaluating the Knudsen (Kn) and
- Page 453 and 454:
table in “Conductivities” below
- Page 455 and 456:
Where: qpV = Throughput flow rate p
- Page 457 and 458:
Diffusion Permeation Desorption Lea
- Page 459 and 460:
4.4 Diffusion with desorption At op
- Page 461 and 462:
4.7 Bake-out The following prerequi
- Page 463 and 464:
For Hemispherical End (h2): R ≤ 8
- Page 465 and 466:
Example 3: For comparison, calculat
- Page 467 and 468:
Appendix 2 - Low Outgassing Special
- Page 469 and 470:
Appendix 3 - Materials for use in V
- Page 471 and 472:
• Polyvinyl Chloride (PVC) is acc
- Page 473 and 474:
o Apiezon Sealing Compound Q • Va
- Page 475 and 476:
- 70 - Appendix 5 - Critical Vapour
- Page 477 and 478:
Appendix 6 - Outgassing tables for
- Page 479 and 480:
Stainless steel Stainless steel 304
- Page 481 and 482:
PVC 24h @ 95% relative humidity PTF
- Page 483 and 484:
Appendix 7 - Local Plant and Safety
- Page 485 and 486:
Regular maintenance applied via Acc
- Page 487 and 488:
Vacuum Technology and Vacuum Design
- Page 489 and 490:
Contents Page Chapter 1 - Vacuum de
- Page 491 and 492:
3.5 Reynolds Number (Re) 3.6 Viscou
- Page 493 and 494:
• Top and bottom flanges to have
- Page 495 and 496:
• STAR utilises many of the major
- Page 497 and 498:
• For all other vacuum equipment
- Page 499 and 500:
1. Terminology ANTARES - Australian
- Page 501 and 502:
Non-cylindrical chambers must be ca
- Page 503 and 504:
3.9 Design by numbers This is a mat
- Page 505 and 506:
The ultimate vacuum is improved by
- Page 507 and 508:
pump. Slowly open the pump out valv
- Page 509 and 510:
Precautions • Before venting a va
- Page 511 and 512:
• Changing faulty seals - cleanin
- Page 513 and 514:
can be used on stainless steel with
- Page 515 and 516:
• Some steps for inner rings have
- Page 517 and 518:
Most Conflat flanges have imperial
- Page 519 and 520:
on the location of the valve. See t
- Page 521 and 522:
The third type is magnetically coup
- Page 523 and 524:
13. Pumping 13.1 General It is not
- Page 525 and 526:
• On ANTARES the Pfeiffer brand i
- Page 527:
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