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COURS .pdf - IM2NP

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SrTiO 3 /Si(001) : croissance initialement amorphe<br />

360°C<br />

O 2 : 6.10 -8 Torr<br />

0 2 4 6 8 10<br />

Dépôt amorphe<br />

Recristallisation<br />

Épaisseur<br />

(MC)<br />

5 nm<br />

G.Saint-Girons<br />

Ecole « mécanique des<br />

nano-objets »<br />

Autrans 14-19 mars 2010

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