Strains and stresses in GaN heteroepitaxy â sources and ... - Laytec
Strains and stresses in GaN heteroepitaxy â sources and ... - Laytec
Strains and stresses in GaN heteroepitaxy â sources and ... - Laytec
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Homebuilt <strong>in</strong>-situ curvature sensor<br />
on an AIX 200/4 RF-S<br />
Curvature measurements<br />
Intensity (arb. u.)<br />
45<br />
40<br />
35<br />
30<br />
25<br />
20<br />
AlN<br />
heat up<br />
<strong>GaN</strong><br />
AlN<br />
reflected <strong>in</strong>tensity<br />
<strong>GaN</strong><br />
AlN<br />
0 2000 4000 6000 8000 10000<br />
Time (s)<br />
<strong>GaN</strong><br />
In<strong>GaN</strong><br />
<strong>GaN</strong>
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