Integrated Circuit Manufacturing

Nano & Micro Systems
Institute of Physics
Integrated Circuit
Manufacturing
Tutorial 6: Operation Curve Management II
Presentation Institute of Physics
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
1

Nano & Micro Systems
Institute of Physics
- Simulation of material handling of different production and logistic systems for optimisation of production flow
- Improvement of WIP, throughput, capacity withou interrupting production
- Understand implications of changes -> affection on performance
- Design, redisign or extension of tools or plants
- Simulation of ramp up, optimisation of ramp up parameters
- Started by Brookshield, sold to Applied Materials in 2006
- Actual (student) version 12.3, available at
http://www.appliedmaterials.com/services-software/automation-software/automod-academic-program
www.appliedmaterials.com ->Products&Technologies-> Automation Software->Semiconductor->Automod->Academic Program
Ressources for students: Version 12.3 download
- Modular structed for flexible application
- Communication with logistic control computers
- Animated material flow
- Detailled graphics for verhicles, roboters etc
Customers:
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Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
2

Nano & Micro Systems
Institute of Physics
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Installation
Download student version: http://www.appliedmaterials.com/services-software/automation-software/automod-academic-program
System requirements:
• O/S Windows Server 2003 (Service Pack 1 or greater), Windows XP Professional (Service Pack 2 or greater), and Windows XP
Professional x64 Edition (Service Pack 2 or greater). .NET Framework 2.0 and 1.1 must also be installed.
• CPU Intel P4/Centrino or AMD Athlon XP/FX/Mobile, 2.8 GHz or faster (Intel Celeron and AMD Duron/Sempron are not recommended.
Small caches on these processors degrade execution speed.)
• RAM 512 MB minimum, PC2100 or faster
• Disk The AutoMod packages require the following disk space (plus model storage space):
AutoMod 300 MB
AutoMod Runtime License 60 MB
NLS 5 MB
Selecting a directory for installation
• AutoMod cannot be installed in a directory with a space in its name.
• The name of the installation directory cannot contain characters with diacritical marks like the umlaut, grave, acute or
circumflex accent marks, tilde, cedilla, and so on. The directory names (and the names of your AutoMod models) should
include only standard English letters and numbers.
• The pathname for any model, including the file name, must include fewer than 72 characters.
Installation:
• Log in as a user with administrative privileges.
• Open the AutoMod directory and double-click setup.exe.
• Follow the prompts on the screen
• Confirm setting of system variables
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
1) 12.3 Version of AutoMod is not working in Windows7 now!
2) Start amod.exe -> startscreen
-> choose in menu "Model" -> „Open"
-> look for folder ex001.arc file "model.amo" -> open
=> a warning appears, that from 200 possible elements 36 are already used
=> the simulation model with 9 rolling-dice-tools and the control window opens
Presentation Institute of Physics
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
4

Nano & Micro Systems
Institute of Physics
Basic model:
9 tools, each tool rolls a dice
Each tool has a queue, pictured by the box below the tool
Starting conditions: the tools roll the dice every 2 seconds, the results are uniformly distributed numbers from 1 to 6, according to the dice
result wafer from the startig queue are handed to the next tool
Let us see: rightclick white area->Drawstyle-> as is
-> click menu „Run“ -> „run model“ -> build the model ? -> yes -> the model will be compiled from the source code,
the simulation screen is shown
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Cick menu „control“ -> „continue“
-> the simulation starts. Rightclick->Drawstyle-> as is
- The tools start rolling the dices (pips are red numbers below the tools)
- The queues change
- At the left side, values for WIP, CT and throughput are shown
- With the simulated parameters (CT, WIP, TP) we can calculate the parameters for the operation curve (alpha, capa) and draw it
- We change the tool‘s parameters (Waferstarts, time off line, batch sizes, ...) and try to achieve better operation curves
End of first run
- Click menu „control" -> „pause“
- Click menu „file“ -> „exit“
First run of the program
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
Again the initial screen is shown with the "process window" and
control bar "process system"
The "process window" shows the 9 tools and the empty queues.
We ignore that for now.
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Operating the program
In window "process system" the elements necessary to define
a production line and its parameters are listed :
Number and setup of the tools, how the tools do their work if they are not offline,
parameters for time off line, number and setup of the queues, batches,
transport parameters ...
We have already set up the experiment for you and are only looking at some alterations in this tutorial.
(after this tutorial you are free to simulate whatever you want)
The structure of the program code is shown below:
Elements of the production:
Resources our tools
Queues queues
Loads lots
.....
source code
and their characteristics defined in processes:
Processes - process_XY
- process 24
- process roll the dice
- process .....
the processes are assinged to their elements
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
6

Nano & Micro Systems
Institute of Physics
Changing characteristics:
Click process system bar :
ressources -> List of the available processes for defining the tools“ characteristics
Looking closer at R_process:
-> click R_process ->
- The attached process RC_pause
This properties can be changed, when Presentation you try to achieve Institute better of operation Physics curves
Operating the program
-> for our tools we have only 2 processes:
- the left window shows R_process (= Ressource-process),
describing what the tool does
- the right window (resource cycles) process RC-pause,
describing the time offline
-> both processes are needed
–> choose R-process-> -> -> ->
(the window will close on your next command)
- number of resources: you can clone the process, when more than
one tool (resource) should do the same process
-> every tool should do the same, so we clone the
process 9 times
- default capacity: number of lots, that is dealt with simultaneously
-> in the beginning one lot, we will vary it later
- processing time: which statistic is used to deal with the lot
-> start with a constant time of 5 sec
(= time one roll of a dice takes)
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
We will have a closer look at the properties of the tools‘ time off line:
-> click RC_pause ->
process RC_pause has two major properties:
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Operating the program
-How long does the tool work until it fails (take resource down) = MTBF
-> starting condition: exponential distribution with mean µ= 500 sec
(in reality: every person rolling a dice will exponentially distributed in average every 500 sec loose his dice or has to
leave the room (fails) -> the queue in front of his tool grows
-Length of the failure (bring resource up)
--> starting condition: normal distribution with µ=10 sec and standard deviation 1 sec
- (in reality: every person needs in average 10 seconds normally distributed until he picks up his dice again
- Variation is one second
-> in the menu bar closes this window and brings you back to "resources“ window
For better operation curves we can optimize the time off line properties here
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
8

Nano & Micro Systems
Institute of Physics
Click process system bar:
queues -> List of the available processes for definition of the queues
the definition of queues is necessary to locate the wafer in the system
(initial stock, in front of the tool, in the tool and in stock for outgoing wafers )
- "Q-Augen" (initial stock)(on double click you see): 1 queue, infinite capacity
- "Q_process_wait" (queue in front of tools)
9 Queues (each can be edited separately), infinite capacity
- "Q_process" (queue in the tools, the lots in the machine during the process):
9 queues (each can be edited), infinite capacity
- "Q-end" (outgoing stock): 1 queue, infinite capacity
The default capacity, the maximum number of lots in every queue, is infinite
But it is also possible to assign another capacity to each queue
Hint: if the capacity is restricted, this has not only to be done in front of the tools (Q_process_wait), but also
in the tool (Q_process), otherwise the queue is just shifted into the tool.
For getting better operation curves the queues can be defined here
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Operating the program
opens a window, which is for the graphical presentation of the queues in the simulation. Objects to be graphically represented in the
simulation have to be defined and placed in a similar way
This needs experience, and wasts tutorial time-> just close the window with without changing anything
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
Click process system bar:
Loads -> List of the available processes for the definition of the lots
Do not change anything-> close the windw by clicking in the "process system"-bar
Process -> List of the available processes to control the simulation (what happens when?)
The button Process in the list Process System opens a list of all processes.
Processes are routines defined in the source file. creates new processes, opens a
window to edit the properties of the processes.
is the number of similar processes. So the properties of similar processes
need to be defined only once and then the process can be cloned.
restricts the number of lots, which can be in a process at the same time
and which are allowed to follow the commands of the process.
- arriving procedure -> : this shows the source code for the first time
We do not change anything-> close the source code : , and in the "edit a process"-window
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Operating the program
The button in „Process System“ opens a menu to edit the properties
of the lots. There are 4 lots which differ only in color. This is necessary for
the visualisation of the simulation. The lots L_dummy and L_augen are
Dummy-Lots which perform control tasks in our simulation, but are not
visible. They are nessecary to make the tools able to roll dices.
Lots have attributs, that change during the simulation, eg A_proctime which
measures the cycle time of the lots.
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
Click process system bar:
Source file -> List of the available source files
Lets look at an example how to change parameters.
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Operating the program
The button „Source Files“ opens a window with code that
describes the production of the goods, it contains
the routines (= processes), calls and executes them.
We do not make changes here.
But there are additional commands and definitions
in this routines (e.g. batch-size), that you can
change for your simulation.
The source file describing our production process
is named „logic.m“.
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
11

Nano & Micro Systems
Institute of Physics
Change of the batch size:
Execution of the changes:
- Got to line 6, replace "V_batch = 1" with "v_batch = 10" or another number
- Quit the editor: ,
Execute the simulation:
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The „lot size" corresponds to the batch size. With
„ batch = 1" every number (= number of wafers) will be dealt
with and the thrown number of wafers will be given to the next
tool. Similar to a semiconductor fab it is possible to restrict the
number of wafers which are processed (lot size) to batches, so
that wafers are only given to the next tool if a batch is full.
Please slow down the speed of the simulation and see how the batch size (e.g. batch = 3) is dealt with in the program:
-Is the dice rolled 3 times and the sum (z.B. 2 + 6 + 3 = 11) given to the next tool as a batch, OR
-does the tool roll the dice, until it has produced 3 or more wafers and gives a batch of 3 to the next tool?
-What does the tool do, if there are more than 3 wafer in production?
Operating the program
- select the simulation window "ex001/proc" and there -> -> the model will be compiled -> the simulation
window will appear -> -> continue>
- For an operation curve you have to simulate 2 operation points!
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
Change of operating time:
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The operating time (the time a throw takes) is not always constant.
Assume this time is normally distributed with a mean of 2 sec and
standard deviation 0,05 sec. The code has to be
use R_process(1) for n 2, 0.05 sec
For an exponential distribution:
use R_process(1) for e 2 sec
Think about the impact if you change this only for one, more than one or all of the tools
Execution of the changes:
- Go to line 49, here the routine for tools 1 starts (it ends in line 63)
- Replace in line 56 the "use R-process“ command
- If desired go to the next tool -> line 65 ...
- If desired replace it for every tool
- Quit the editor: ,
Execution of the simulation:
- Select the simulation window "ex001/proc“ and -> -> compiling
-> simulation window appears -> ->
- Again you need two operating points!
Operating the program
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
13

Nano & Micro Systems
Institute of Physics
Change of the probability of the thrown numbers:
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The definiton of the thrown numbers is ( 1:1, 1:2, ...).
The first number is the frequency, the second number the event
(number of pips on the dice). Starting condition: Every number has the
same frequency (uniform distribution)
You can change the frequencies by changing the first number, eg to
zero: this number will never be thrown.
Here is the possibility for changing the incoming wafers (to get another operating point for your operation curve)
Think about the impact if you change this only for one, more than one or all of the tools
Execution of the change:
- Go to line 49, here the routine for tools 1 starts (it ends in line 63)
- Go to line 53, replace the "set v_wurf“ command in line 53
- If desired go to the next tool -> line 65 ...
- If desired replace it for every tool
- Quit the editor: ,
Execution of the simulation:
- Select the simulation window "ex001/proc“ and -> -> compiling
-> simulation window appears -> ->
- Again you need two operating points!
Operating the program
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
14

Nano & Micro Systems
Institute of Physics
Now start the model example:
-> -> blue block
Now select "control“ -> display step and adjust the simulation speed. Experience shows that 1-0.1s for the
simulation run, 0,005 for extracting the RCT and 0,001 for looking at the batches are good values
->
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Operating the program
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
Graphical presentation:
->
Choose the right values for scaling for your actual
simulation:
Time in minutes/hours
Max. Time as X Maximum
Fit Y Maximum for the value you want to present
Increment has a minimum of Max/30 !
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Parameters to present
scaling of the axes
Operating the program
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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Nano & Micro Systems
Institute of Physics
Attention !
- Within the limited time of the tutorial (3 hours) you can not simulate many parameters. It will take some time to get into the program and to
think through what to change and to understand and write down the results. For every operation curve you will need two operating points
and to simulate these two points and calculate the necessary parameters.
For thinking about your simulations at home, copy the program and the example to an USB stick.
- Before you change anything think through if the changes have to be applied to only one or all elements
Carefully write down the changes you made, otherwise you will have problems to understand your results
- Do not change more than one parameter at the same time, otherwise you can not tell what change had what effect. After some trials you
can change more than one parameter to get the optimal operation curve
- Always take care that your operation curves are comparable. If you change capacity for example you get a NEW operation curve, as capa
and alpha will change. Keep in mind if you are simulation another operating point of the same operation curve or a different operation
curve.
Possibilities:
1) "resources" -> R_process -> edit : - Change of the statistics of the process time, which is "constant“ in the beginning
e.g. To exponential or normal distribution
(what about theory ? Can you reproduce the Kingman equation ?)
-> Attention: Does the change has to be applied to all of the tools or only one?
- Number of lots in the machine at the same time
(does it make sense ? What result do you expect and which information can you find?)
2) "resources" -> RC_pause -> edit : - change of the offline characteristics
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Which changes make sense?
3) "Queues" -> "Q_process_wait" and "Q_process" -> edit: - restriction of the stock/queues
(What do you think how the operation curve will change ?
Which restriction makes sense compared to the restriction of the
production capacity = number on the dice or lot size = batch ?)
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
17