Integrated Circuit Manufacturing

Nano & Micro Systems
Institute of Physics
Click process system bar:
Loads -> List of the available processes for the definition of the lots
Do not change anything-> close the windw by clicking in the "process system"-bar
Process -> List of the available processes to control the simulation (what happens when?)
The button Process in the list Process System opens a list of all processes.
Processes are routines defined in the source file. creates new processes, opens a
window to edit the properties of the processes.
is the number of similar processes. So the properties of similar processes
need to be defined only once and then the process can be cloned.
restricts the number of lots, which can be in a process at the same time
and which are allowed to follow the commands of the process.
- arriving procedure -> : this shows the source code for the first time
We do not change anything-> close the source code : , and in the "edit a process"-window
Presentation Institute of Physics
Operating the program
The button in „Process System“ opens a menu to edit the properties
of the lots. There are 4 lots which differ only in color. This is necessary for
the visualisation of the simulation. The lots L_dummy and L_augen are
Dummy-Lots which perform control tasks in our simulation, but are not
visible. They are nessecary to make the tools able to roll dices.
Lots have attributs, that change during the simulation, eg A_proctime which
measures the cycle time of the lots.
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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