Integrated Circuit Manufacturing

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Nano & Micro Systems Institute of Physics Click process system bar: Loads -> List of the available processes for the definition of the lots Do not change anything-> close the windw by clicking in the "process system"-bar Process -> List of the available processes to control the simulation (what happens when?) The button Process in the list Process System opens a list of all processes. Processes are routines defined in the source file. creates new processes, opens a window to edit the properties of the processes. is the number of similar processes. So the properties of similar processes need to be defined only once and then the process can be cloned. restricts the number of lots, which can be in a process at the same time and which are allowed to follow the commands of the process. - arriving procedure -> : this shows the source code for the first time We do not change anything-> close the source code : , and in the "edit a process"-window Presentation Institute of Physics Operating the program The button in „Process System“ opens a menu to edit the properties of the lots. There are 4 lots which differ only in color. This is necessary for the visualisation of the simulation. The lots L_dummy and L_augen are Dummy-Lots which perform control tasks in our simulation, but are not visible. They are nessecary to make the tools able to roll dices. Lots have attributs, that change during the simulation, eg A_proctime which measures the cycle time of the lots. Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 10
Nano & Micro Systems Institute of Physics Click process system bar: Source file -> List of the available source files Lets look at an example how to change parameters. Presentation Institute of Physics Operating the program The button „Source Files“ opens a window with code that describes the production of the goods, it contains the routines (= processes), calls and executes them. We do not make changes here. But there are additional commands and definitions in this routines (e.g. batch-size), that you can change for your simulation. The source file describing our production process is named „logic.m“. Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 11
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Integrated Circuit Manufacturing

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