Integrated Circuit Manufacturing
Integrated Circuit Manufacturing
Integrated Circuit Manufacturing
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Nano & Micro Systems<br />
Institute of Physics<br />
Basic model:<br />
9 tools, each tool rolls a dice<br />
Each tool has a queue, pictured by the box below the tool<br />
Starting conditions: the tools roll the dice every 2 seconds, the results are uniformly distributed numbers from 1 to 6, according to the dice<br />
result wafer from the startig queue are handed to the next tool<br />
Let us see: rightclick white area->Drawstyle-> as is<br />
-> click menu „Run“ -> „run model“ -> build the model ? -> yes -> the model will be compiled from the source code,<br />
the simulation screen is shown<br />
Presentation Institute of Physics<br />
Cick menu „control“ -> „continue“<br />
-> the simulation starts. Rightclick->Drawstyle-> as is<br />
- The tools start rolling the dices (pips are red numbers below the tools)<br />
- The queues change<br />
- At the left side, values for WIP, CT and throughput are shown<br />
- With the simulated parameters (CT, WIP, TP) we can calculate the parameters for the operation curve (alpha, capa) and draw it<br />
- We change the tool‘s parameters (Waferstarts, time off line, batch sizes, ...) and try to achieve better operation curves<br />
End of first run<br />
- Click menu „control" -> „pause“<br />
- Click menu „file“ -> „exit“<br />
First run of the program<br />
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot<br />
5
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