Integrated Circuit Manufacturing

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Nano & Micro Systems Institute of Physics Change of the batch size: Execution of the changes: - Got to line 6, replace "V_batch = 1" with "v_batch = 10" or another number - Quit the editor: , Execute the simulation: Presentation Institute of Physics The „lot size" corresponds to the batch size. With „ batch = 1" every number (= number of wafers) will be dealt with and the thrown number of wafers will be given to the next tool. Similar to a semiconductor fab it is possible to restrict the number of wafers which are processed (lot size) to batches, so that wafers are only given to the next tool if a batch is full. Please slow down the speed of the simulation and see how the batch size (e.g. batch = 3) is dealt with in the program: -Is the dice rolled 3 times and the sum (z.B. 2 + 6 + 3 = 11) given to the next tool as a batch, OR -does the tool roll the dice, until it has produced 3 or more wafers and gives a batch of 3 to the next tool? -What does the tool do, if there are more than 3 wafer in production? Operating the program - select the simulation window "ex001/proc" and there -> -> the model will be compiled -> the simulation window will appear -> -> continue> - For an operation curve you have to simulate 2 operation points! Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 12
Nano & Micro Systems Institute of Physics Change of operating time: Presentation Institute of Physics The operating time (the time a throw takes) is not always constant. Assume this time is normally distributed with a mean of 2 sec and standard deviation 0,05 sec. The code has to be use R_process(1) for n 2, 0.05 sec For an exponential distribution: use R_process(1) for e 2 sec Think about the impact if you change this only for one, more than one or all of the tools Execution of the changes: - Go to line 49, here the routine for tools 1 starts (it ends in line 63) - Replace in line 56 the "use R-process“ command - If desired go to the next tool -> line 65 ... - If desired replace it for every tool - Quit the editor: , Execution of the simulation: - Select the simulation window "ex001/proc“ and -> -> compiling -> simulation window appears -> -> - Again you need two operating points! Operating the program Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 13
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Integrated Circuit Manufacturing

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