Integrated Circuit Manufacturing

Nano & Micro Systems
Institute of Physics
Click process system bar:
queues -> List of the available processes for definition of the queues
the definition of queues is necessary to locate the wafer in the system
(initial stock, in front of the tool, in the tool and in stock for outgoing wafers )
- "Q-Augen" (initial stock)(on double click you see): 1 queue, infinite capacity
- "Q_process_wait" (queue in front of tools)
9 Queues (each can be edited separately), infinite capacity
- "Q_process" (queue in the tools, the lots in the machine during the process):
9 queues (each can be edited), infinite capacity
- "Q-end" (outgoing stock): 1 queue, infinite capacity
The default capacity, the maximum number of lots in every queue, is infinite
But it is also possible to assign another capacity to each queue
Hint: if the capacity is restricted, this has not only to be done in front of the tools (Q_process_wait), but also
in the tool (Q_process), otherwise the queue is just shifted into the tool.
For getting better operation curves the queues can be defined here
Presentation Institute of Physics
Operating the program
opens a window, which is for the graphical presentation of the queues in the simulation. Objects to be graphically represented in the
simulation have to be defined and placed in a similar way
This needs experience, and wasts tutorial time-> just close the window with without changing anything
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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