Integrated Circuit Manufacturing
Integrated Circuit Manufacturing
Integrated Circuit Manufacturing
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Nano & Micro Systems<br />
Institute of Physics<br />
Again the initial screen is shown with the "process window" and<br />
control bar "process system"<br />
The "process window" shows the 9 tools and the empty queues.<br />
We ignore that for now.<br />
Presentation Institute of Physics<br />
Operating the program<br />
In window "process system" the elements necessary to define<br />
a production line and its parameters are listed :<br />
Number and setup of the tools, how the tools do their work if they are not offline,<br />
parameters for time off line, number and setup of the queues, batches,<br />
transport parameters ...<br />
We have already set up the experiment for you and are only looking at some alterations in this tutorial.<br />
(after this tutorial you are free to simulate whatever you want)<br />
The structure of the program code is shown below:<br />
Elements of the production:<br />
Resources our tools<br />
Queues queues<br />
Loads lots<br />
.....<br />
source code<br />
and their characteristics defined in processes:<br />
Processes - process_XY<br />
- process 24<br />
- process roll the dice<br />
- process .....<br />
the processes are assinged to their elements<br />
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot<br />
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