Integrated Circuit Manufacturing

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Nano & Micro Systems Institute of Physics Change of the probability of the thrown numbers: Presentation Institute of Physics The definiton of the thrown numbers is ( 1:1, 1:2, ...). The first number is the frequency, the second number the event (number of pips on the dice). Starting condition: Every number has the same frequency (uniform distribution) You can change the frequencies by changing the first number, eg to zero: this number will never be thrown. Here is the possibility for changing the incoming wafers (to get another operating point for your operation curve) Think about the impact if you change this only for one, more than one or all of the tools Execution of the change: - Go to line 49, here the routine for tools 1 starts (it ends in line 63) - Go to line 53, replace the "set v_wurf“ command in line 53 - If desired go to the next tool -> line 65 ... - If desired replace it for every tool - Quit the editor: , Execution of the simulation: - Select the simulation window "ex001/proc“ and -> -> compiling -> simulation window appears -> -> - Again you need two operating points! Operating the program Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 14
Nano & Micro Systems Institute of Physics Now start the model example: -> -> blue block Now select "control“ -> display step and adjust the simulation speed. Experience shows that 1-0.1s for the simulation run, 0,005 for extracting the RCT and 0,001 for looking at the batches are good values -> Presentation Institute of Physics Operating the program Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 15
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Integrated Circuit Manufacturing

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