Integrated Circuit Manufacturing

Nano & Micro Systems
Institute of Physics
Attention !
- Within the limited time of the tutorial (3 hours) you can not simulate many parameters. It will take some time to get into the program and to
think through what to change and to understand and write down the results. For every operation curve you will need two operating points
and to simulate these two points and calculate the necessary parameters.
For thinking about your simulations at home, copy the program and the example to an USB stick.
- Before you change anything think through if the changes have to be applied to only one or all elements
Carefully write down the changes you made, otherwise you will have problems to understand your results
- Do not change more than one parameter at the same time, otherwise you can not tell what change had what effect. After some trials you
can change more than one parameter to get the optimal operation curve
- Always take care that your operation curves are comparable. If you change capacity for example you get a NEW operation curve, as capa
and alpha will change. Keep in mind if you are simulation another operating point of the same operation curve or a different operation
curve.
Possibilities:
1) "resources" -> R_process -> edit : - Change of the statistics of the process time, which is "constant“ in the beginning
e.g. To exponential or normal distribution
(what about theory ? Can you reproduce the Kingman equation ?)
-> Attention: Does the change has to be applied to all of the tools or only one?
- Number of lots in the machine at the same time
(does it make sense ? What result do you expect and which information can you find?)
2) "resources" -> RC_pause -> edit : - change of the offline characteristics
Presentation Institute of Physics
Which changes make sense?
3) "Queues" -> "Q_process_wait" and "Q_process" -> edit: - restriction of the stock/queues
(What do you think how the operation curve will change ?
Which restriction makes sense compared to the restriction of the
production capacity = number on the dice or lot size = batch ?)
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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