Integrated Circuit Manufacturing

Nano & Micro Systems
Institute of Physics
Presentation Institute of Physics
Installation
Download student version: http://www.appliedmaterials.com/services-software/automation-software/automod-academic-program
System requirements:
• O/S Windows Server 2003 (Service Pack 1 or greater), Windows XP Professional (Service Pack 2 or greater), and Windows XP
Professional x64 Edition (Service Pack 2 or greater). .NET Framework 2.0 and 1.1 must also be installed.
• CPU Intel P4/Centrino or AMD Athlon XP/FX/Mobile, 2.8 GHz or faster (Intel Celeron and AMD Duron/Sempron are not recommended.
Small caches on these processors degrade execution speed.)
• RAM 512 MB minimum, PC2100 or faster
• Disk The AutoMod packages require the following disk space (plus model storage space):
AutoMod 300 MB
AutoMod Runtime License 60 MB
NLS 5 MB
Selecting a directory for installation
• AutoMod cannot be installed in a directory with a space in its name.
• The name of the installation directory cannot contain characters with diacritical marks like the umlaut, grave, acute or
circumflex accent marks, tilde, cedilla, and so on. The directory names (and the names of your AutoMod models) should
include only standard English letters and numbers.
• The pathname for any model, including the file name, must include fewer than 72 characters.
Installation:
• Log in as a user with administrative privileges.
• Open the AutoMod directory and double-click setup.exe.
• Follow the prompts on the screen
• Confirm setting of system variables
Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot
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