Integrated Circuit Manufacturing

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Nano & Micro Systems Institute of Physics Again the initial screen is shown with the "process window" and control bar "process system" The "process window" shows the 9 tools and the empty queues. We ignore that for now. Presentation Institute of Physics Operating the program In window "process system" the elements necessary to define a production line and its parameters are listed : Number and setup of the tools, how the tools do their work if they are not offline, parameters for time off line, number and setup of the queues, batches, transport parameters ... We have already set up the experiment for you and are only looking at some alterations in this tutorial. (after this tutorial you are free to simulate whatever you want) The structure of the program code is shown below: Elements of the production: Resources our tools Queues queues Loads lots ..... source code and their characteristics defined in processes: Processes - process_XY - process 24 - process roll the dice - process ..... the processes are assinged to their elements Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 6
Nano & Micro Systems Institute of Physics Changing characteristics: Click process system bar : ressources -> List of the available processes for defining the tools“ characteristics Looking closer at R_process: -> click R_process -> - The attached process RC_pause This properties can be changed, when Presentation you try to achieve Institute better of operation Physics curves Operating the program -> for our tools we have only 2 processes: - the left window shows R_process (= Ressource-process), describing what the tool does - the right window (resource cycles) process RC-pause, describing the time offline -> both processes are needed –> choose R-process-> -> -> -> (the window will close on your next command) - number of resources: you can clone the process, when more than one tool (resource) should do the same process -> every tool should do the same, so we clone the process 9 times - default capacity: number of lots, that is dealt with simultaneously -> in the beginning one lot, we will vary it later - processing time: which statistic is used to deal with the lot -> start with a constant time of 5 sec (= time one roll of a dice takes) Prof.Dr. W. Hansch, Dipl.-Ing. Tina Kubot 7
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Integrated Circuit Manufacturing

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